ES2632778T3 - Matrices alineadas verticalmente de nanotubos de carbono formados sobre sustratos multicapa - Google Patents

Matrices alineadas verticalmente de nanotubos de carbono formados sobre sustratos multicapa Download PDF

Info

Publication number
ES2632778T3
ES2632778T3 ES13744869.2T ES13744869T ES2632778T3 ES 2632778 T3 ES2632778 T3 ES 2632778T3 ES 13744869 T ES13744869 T ES 13744869T ES 2632778 T3 ES2632778 T3 ES 2632778T3
Authority
ES
Spain
Prior art keywords
layer
metal
cnt
matrix
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
ES13744869.2T
Other languages
English (en)
Spanish (es)
Inventor
Baratunde A. Cola
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carbice Corp
Original Assignee
Carbice Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carbice Corp filed Critical Carbice Corp
Application granted granted Critical
Publication of ES2632778T3 publication Critical patent/ES2632778T3/es
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/70Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
    • B01J23/74Iron group metals
    • B01J23/745Iron
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/15Nano-sized carbon materials
    • C01B32/158Carbon nanotubes
    • C01B32/16Preparation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J21/00Catalysts comprising the elements, oxides, or hydroxides of magnesium, boron, aluminium, carbon, silicon, titanium, zirconium, or hafnium
    • B01J21/02Boron or aluminium; Oxides or hydroxides thereof
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/38Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of noble metals
    • B01J23/40Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of noble metals of the platinum group metals
    • B01J23/42Platinum
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/38Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of noble metals
    • B01J23/40Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of noble metals of the platinum group metals
    • B01J23/44Palladium
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/38Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of noble metals
    • B01J23/40Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of noble metals of the platinum group metals
    • B01J23/46Ruthenium, rhodium, osmium or iridium
    • B01J23/464Rhodium
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/38Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of noble metals
    • B01J23/40Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of noble metals of the platinum group metals
    • B01J23/46Ruthenium, rhodium, osmium or iridium
    • B01J23/466Osmium
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/38Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of noble metals
    • B01J23/40Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of noble metals of the platinum group metals
    • B01J23/46Ruthenium, rhodium, osmium or iridium
    • B01J23/468Iridium
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/70Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
    • B01J23/72Copper
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/70Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
    • B01J23/74Iron group metals
    • B01J23/75Cobalt
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/70Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
    • B01J23/74Iron group metals
    • B01J23/755Nickel
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J35/00Catalysts, in general, characterised by their form or physical properties
    • B01J35/19Catalysts containing parts with different compositions
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J35/00Catalysts, in general, characterised by their form or physical properties
    • B01J35/30Catalysts, in general, characterised by their form or physical properties characterised by their physical properties
    • B01J35/391Physical properties of the active metal ingredient
    • B01J35/395Thickness of the active catalytic layer
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/15Nano-sized carbon materials
    • C01B32/158Carbon nanotubes
    • C01B32/16Preparation
    • C01B32/162Preparation characterised by catalysts
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K5/00Heat-transfer, heat-exchange or heat-storage materials, e.g. refrigerants; Materials for the production of heat or cold by chemical reactions other than by combustion
    • C09K5/08Materials not undergoing a change of physical state when used
    • C09K5/14Solid materials, e.g. powdery or granular
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26Deposition of carbon only
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2202/00Structure or properties of carbon nanotubes
    • C01B2202/08Aligned nanotubes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00Nanotechnology
    • Y10S977/70Nanostructure
    • Y10S977/734Fullerenes, i.e. graphene-based structures, such as nanohorns, nanococoons, nanoscrolls or fullerene-like structures, e.g. WS2 or MoS2 chalcogenide nanotubes, planar C3N4, etc.
    • Y10S977/742Carbon nanotubes, CNTs
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00Nanotechnology
    • Y10S977/70Nanostructure
    • Y10S977/81Of specified metal or metal alloy composition
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12431Foil or filament smaller than 6 mils
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12493Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12493Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12576Boride, carbide or nitride component
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12493Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12611Oxide-containing component
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495Thickness [relative or absolute]
    • Y10T428/24967Absolute thicknesses specified
    • Y10T428/24975No layer or component greater than 5 mils thick
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/25Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/26Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264Up to 3 mils
    • Y10T428/2651 mil or less
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/30Self-sustaining carbon mass or layer with impregnant or other layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Inorganic Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Manufacturing & Machinery (AREA)
  • Composite Materials (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Catalysts (AREA)
  • Laminated Bodies (AREA)
ES13744869.2T 2012-07-11 2013-07-10 Matrices alineadas verticalmente de nanotubos de carbono formados sobre sustratos multicapa Active ES2632778T3 (es)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201213546827 2012-07-11
US13/546,827 US9656246B2 (en) 2012-07-11 2012-07-11 Vertically aligned arrays of carbon nanotubes formed on multilayer substrates
PCT/US2013/049900 WO2014011755A1 (en) 2012-07-11 2013-07-10 Vertically aligned arrays of carbon nanotubes formed on multilayer substrates

Publications (1)

Publication Number Publication Date
ES2632778T3 true ES2632778T3 (es) 2017-09-15

Family

ID=48914416

Family Applications (1)

Application Number Title Priority Date Filing Date
ES13744869.2T Active ES2632778T3 (es) 2012-07-11 2013-07-10 Matrices alineadas verticalmente de nanotubos de carbono formados sobre sustratos multicapa

Country Status (8)

Country Link
US (2) US9656246B2 (https=)
EP (1) EP2872442B1 (https=)
JP (1) JP6254158B2 (https=)
KR (1) KR102163272B1 (https=)
CN (1) CN104520232B (https=)
CA (1) CA2878600C (https=)
ES (1) ES2632778T3 (https=)
WO (1) WO2014011755A1 (https=)

Families Citing this family (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102050424B (zh) * 2009-11-06 2013-11-06 清华大学 一种制备碳纳米管薄膜及薄膜晶体管的方法
US10618810B2 (en) * 2013-09-25 2020-04-14 Odysseus Technologies, Inc. Free atom nanotube growth
SG2013083258A (en) * 2013-11-06 2015-06-29 Thales Solutions Asia Pte Ltd A guard structure for signal isolation
US9960140B2 (en) * 2013-11-11 2018-05-01 Nippon Steel & Sumitomo Metal Corporation Metal joining structure using metal nanoparticles and metal joining method and metal joining material
GB201410214D0 (en) * 2014-06-09 2014-07-23 Univ Surrey A method for graphene and carbon nanotube growth
WO2016019303A1 (en) * 2014-07-31 2016-02-04 Carrier Corporation Coated heat exchanger
US9425331B2 (en) * 2014-08-06 2016-08-23 The Boeing Company Solar cell wafer connecting system
CN104787748B (zh) * 2015-04-28 2016-11-02 南京工业大学 一种垂直生长的开口碳纳米管薄膜的制备方法
CN105057001B (zh) * 2015-07-22 2017-07-18 上海应用技术学院 一种改性的多壁碳纳米管负载的铁系催化剂及制备方法及应用
US20190010376A1 (en) * 2015-12-28 2019-01-10 Hitachi Zosen Corporation Carbon nanotube bonded sheet and method for producing carbon nanotube bonded sheet
JP6802808B2 (ja) 2015-12-28 2020-12-23 日立造船株式会社 カーボンナノチューブ複合材およびカーボンナノチューブ複合材の製造方法
EP3426747A1 (en) * 2016-03-07 2019-01-16 Carbice Corporation Phase change material-carbon nanotube-metal substrate composites for thermal storage and control of heat generating devices
US10791651B2 (en) 2016-05-31 2020-09-29 Carbice Corporation Carbon nanotube-based thermal interface materials and methods of making and using thereof
TWI640470B (zh) 2016-06-10 2018-11-11 美國琳得科股份有限公司 奈米纖維片
DE102016211036A1 (de) 2016-06-21 2017-12-21 Robert Bosch Gmbh Verfahren zur Herstellung einer Kathode und Batteriezelle
US11186732B2 (en) 2016-06-27 2021-11-30 Ironwood 12 Llc Vertically-aligned carbon nanotube substrate having increased surface area
US10876201B2 (en) * 2016-06-27 2020-12-29 Ironwood 12 Llc Broadband fluorescence amplification assembly
US20180093696A1 (en) * 2016-09-30 2018-04-05 Ford Global Technologies, Llc Steering wheel assembly and heated steering wheel system
US11004680B2 (en) 2016-11-26 2021-05-11 Texas Instruments Incorporated Semiconductor device package thermal conduit
US10811334B2 (en) 2016-11-26 2020-10-20 Texas Instruments Incorporated Integrated circuit nanoparticle thermal routing structure in interconnect region
US10529641B2 (en) 2016-11-26 2020-01-07 Texas Instruments Incorporated Integrated circuit nanoparticle thermal routing structure over interconnect region
US11676880B2 (en) * 2016-11-26 2023-06-13 Texas Instruments Incorporated High thermal conductivity vias by additive processing
US10861763B2 (en) * 2016-11-26 2020-12-08 Texas Instruments Incorporated Thermal routing trench by additive processing
WO2018156878A1 (en) * 2017-02-24 2018-08-30 Lintec Of America, Inc. Nanofiber thermal interface material
TWI755492B (zh) 2017-03-06 2022-02-21 美商卡爾拜斯有限公司 基於碳納米管的熱界面材料及其製造和使用方法
JP6972627B2 (ja) 2017-04-05 2021-11-24 株式会社アイシン カーボンナノチューブ複合体の製造方法及び積層体
JP6950939B2 (ja) * 2017-09-12 2021-10-13 国立研究開発法人産業技術総合研究所 カーボンナノチューブ集合体合成用触媒担持体及びカーボンナノチューブ集合体合成用部材
CN109599270B (zh) * 2017-09-30 2020-08-11 清华大学 一种光电自储能器件的制备方法
CN110031104A (zh) * 2018-01-11 2019-07-19 清华大学 面源黑体
CN110031108A (zh) * 2018-01-11 2019-07-19 清华大学 黑体辐射源及黑体辐射源的制备方法
CN110031106B (zh) * 2018-01-11 2021-04-02 清华大学 黑体辐射源
CN110031107B (zh) * 2018-01-11 2022-08-16 清华大学 黑体辐射源及黑体辐射源的制备方法
CN110065936B (zh) * 2018-01-24 2024-04-02 清华大学 胶带装置
US10707596B2 (en) 2018-09-21 2020-07-07 Carbice Corporation Coated electrical connectors and methods of making and using thereof
US20200118906A1 (en) * 2018-10-16 2020-04-16 Carbice Corporation Gap fillers with independently tunable mechanical and thermal properties
WO2020124018A1 (en) 2018-12-14 2020-06-18 Massachusetts Institute Of Technology Formation and/or growth of carbon-based nanostructures on copper-containing substrates, and related systems and methods
US12479728B2 (en) 2018-12-14 2025-11-25 Massachusetts Institute Of Technology Fabrication of carbon-based nanostructures on metallic substrates, including aluminum-containing substrates
CN109949973B (zh) * 2019-03-15 2021-09-28 广州国显科技有限公司 CNTs/金属纳米线复合导电膜及其制备方法、电子装置
CN109941991B (zh) * 2019-04-23 2020-12-22 北京大学 一种直接在绝缘衬底表面制备石墨烯的方法
US11473978B2 (en) 2019-05-28 2022-10-18 Applied Materials, Inc. Enhanced substrate temperature measurement apparatus, system and method
USD906269S1 (en) 2019-08-28 2020-12-29 Carbice Corporation Flexible heat sink
USD904322S1 (en) 2019-08-28 2020-12-08 Carbice Corporation Flexible heat sink
USD903610S1 (en) 2019-08-28 2020-12-01 Carbice Corporation Flexible heat sink
US20210063099A1 (en) 2019-08-28 2021-03-04 Carbice Corporation Flexible and conformable polymer-based heat sinks and methods of making and using thereof
KR102306356B1 (ko) * 2019-10-22 2021-09-30 한국과학기술연구원 정렬된 탄소나노튜브를 포함하는 채널 소자
WO2021176290A1 (en) 2020-03-03 2021-09-10 3M Innovative Properties Company Thermally conductive articles including entangled or aligned fibers, methods of making same, and battery modules
CN112233702B (zh) * 2020-10-26 2021-10-01 东北师范大学 一种水凝胶修饰的高稳定碳基全息光盘的制备方法及应用
CN115725179B (zh) * 2021-08-25 2025-01-14 天津大学 一种兼具弹性和高导热的多层碳纳米管阵列/聚二甲基硅氧烷复合材料
US20230106026A1 (en) 2021-10-01 2023-04-06 Carbice Corporation Stepped gaskets for thermal interfaces and methods of making and using thereof
CN114644337B (zh) * 2022-03-11 2023-06-02 电子科技大学 一种等离子体诱导高效催化碳纳米管阵列的方法
CN114899315A (zh) * 2022-05-05 2022-08-12 北京大学 去除碳纳米管材料的表面聚合物的方法及cmos器件
CN116374999B (zh) * 2023-03-21 2024-09-20 华中科技大学 一种通过二次碳纳米管互联的热界面材料及其制备方法
TW202541290A (zh) 2023-10-27 2025-10-16 美商卡爾拜斯有限公司 用於冷卻之基於碳奈米結構的裝置及其製造與使用方法
US20260016043A1 (en) 2024-07-15 2026-01-15 Carbice Corporation Coated connector devices and methods of making and using thereof
WO2026022841A1 (en) 2024-07-24 2026-01-29 Secretary, Department Of Atomic Energy Method and system for enhancing carbon conversion and selective synthesis of semiconducting single-walled carbon-nanotube fibers

Family Cites Families (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2243979A (en) * 1935-12-17 1941-06-03 Reynolds Metals Co Production of aluminum-coated iron or steel
US6250127B1 (en) * 1999-10-11 2001-06-26 Polese Company, Inc. Heat-dissipating aluminum silicon carbide composite manufacturing method
JP4447762B2 (ja) * 2000-10-18 2010-04-07 東洋鋼鈑株式会社 多層金属積層板及びその製造方法
JP2002141633A (ja) * 2000-10-25 2002-05-17 Lucent Technol Inc 垂直にナノ相互接続された回路デバイスからなる製品及びその製造方法
US6965199B2 (en) * 2001-03-27 2005-11-15 The University Of North Carolina At Chapel Hill Coated electrode with enhanced electron emission and ignition characteristics
US6921462B2 (en) 2001-12-17 2005-07-26 Intel Corporation Method and apparatus for producing aligned carbon nanotube thermal interface structure
US6965513B2 (en) 2001-12-20 2005-11-15 Intel Corporation Carbon nanotube thermal interface structures
US7311889B2 (en) * 2002-06-19 2007-12-25 Fujitsu Limited Carbon nanotubes, process for their production, and catalyst for production of carbon nanotubes
JP3782373B2 (ja) * 2002-06-19 2006-06-07 富士通株式会社 カーボンナノチューブ及びその製造方法並びにカーボンナノチューブ製造用触媒
CN1290763C (zh) 2002-11-29 2006-12-20 清华大学 一种生产碳纳米管的方法
CN1286716C (zh) * 2003-03-19 2006-11-29 清华大学 一种生长碳纳米管的方法
JP3837392B2 (ja) * 2003-03-25 2006-10-25 憲治郎 尾浦 カーボンナノチューブの製造方法、カーボンナノチューブデバイスおよび電気二重層キャパシタ
JP2004284919A (ja) * 2003-03-25 2004-10-14 Mitsubishi Electric Corp カーボンナノチューブ形成用基板の製造方法およびこの基板を用いたカーボンナノチューブの製造方法
US7168484B2 (en) * 2003-06-30 2007-01-30 Intel Corporation Thermal interface apparatus, systems, and methods
US20050214197A1 (en) * 2003-09-17 2005-09-29 Molecular Nanosystems, Inc. Methods for producing and using catalytic substrates for carbon nanotube growth
TW200517042A (en) 2003-11-04 2005-05-16 Hon Hai Prec Ind Co Ltd Heat sink
US7473411B2 (en) * 2003-12-12 2009-01-06 Rensselaer Polytechnic Institute Carbon nanotube foam and method of making and using thereof
US20050228097A1 (en) * 2004-03-30 2005-10-13 General Electric Company Thermally conductive compositions and methods of making thereof
US8093715B2 (en) 2005-08-05 2012-01-10 Purdue Research Foundation Enhancement of thermal interface conductivities with carbon nanotube arrays
WO2007047949A2 (en) * 2005-10-20 2007-04-26 The Trustees Of Boston College Methods for growing carbon nanotubes on single crystal substrates
US7465605B2 (en) 2005-12-14 2008-12-16 Intel Corporation In-situ functionalization of carbon nanotubes
US8329135B2 (en) * 2006-01-06 2012-12-11 National Institute Of Advanced Industrial Science And Technology Aligned carbon nanotube bulk structure having portions different in density
JP4701431B2 (ja) * 2006-01-06 2011-06-15 独立行政法人産業技術総合研究所 異なる密度部分を有する配向カーボンナノチューブ・バルク構造体ならびにその製造方法および用途
CN101110308B (zh) * 2006-07-19 2011-05-04 清华大学 场发射阴极的制造方法
US8207658B2 (en) 2006-08-25 2012-06-26 Rensselaer Polytechnic Institute Carbon nanotube growth on metallic substrate using vapor phase catalyst delivery
EP2086872A2 (en) * 2006-10-17 2009-08-12 Purdue Research Foundation Electrothermal interface material enhancer
US8753602B2 (en) * 2006-10-19 2014-06-17 University Of Cincinnati Composite catalyst and method for manufacturing carbon nanostructured materials
US20080149166A1 (en) * 2006-12-21 2008-06-26 Goldeneye, Inc. Compact light conversion device and light source with high thermal conductivity wavelength conversion material
US7557291B2 (en) 2006-12-22 2009-07-07 Lumeta, Inc. Photovoltaic module for roofs
US9487877B2 (en) * 2007-02-01 2016-11-08 Purdue Research Foundation Contact metallization of carbon nanotubes
JP2009021400A (ja) * 2007-07-12 2009-01-29 Panasonic Corp 構造体
KR20090041765A (ko) * 2007-10-24 2009-04-29 삼성모바일디스플레이주식회사 탄소나노튜브 및 그 형성 방법, 하이브리드 구조 및 그형성 방법 및 발광 디바이스
US20090246507A1 (en) 2008-01-15 2009-10-01 Georgia Tech Research Corporation Systems and methods for fabrication and transfer of carbon nanotubes
MX2010009801A (es) 2008-03-06 2010-09-28 Teijin Aramid Bv Articulos resistentes a las balas que comprenden cuerpos alargados.
JP5176925B2 (ja) * 2008-12-11 2013-04-03 株式会社デンソー Cnt合成用基板、その製造方法、及びcntの製造方法
KR101603774B1 (ko) * 2009-05-14 2016-03-15 삼성전자주식회사 탄소나노튜브 소자 어레이의 제조방법
TW201122564A (en) * 2009-06-25 2011-07-01 Nikon Corp Optical element, illumination apparatus, exposure apparatus, and method for manufacturing device
JP5574257B2 (ja) * 2009-09-24 2014-08-20 日本ゼオン株式会社 カーボンナノチューブ生成用再利用基材及びカーボンナノチューブ生成用基材並びにその製造方法
US8409768B2 (en) * 2009-10-12 2013-04-02 Board Of Regents, The University Of Texas Systems Tuning of Fe catalysts for growth of spin-capable carbon nanotubes
JP5858266B2 (ja) * 2010-03-26 2016-02-10 アイシン精機株式会社 カーボンナノチューブ複合体の製造方法
DE102011051705A1 (de) * 2011-07-08 2013-01-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Schichtsystem mit einer Schicht aus parallel zueinander angeordneten Kohlenstoffröhren und einer elektrisch leitenden Deckschicht, Verfahren zur Herstellung des Schichtsystems und dessen Verwendung in der Mikrosystemtechnik

Also Published As

Publication number Publication date
CA2878600C (en) 2018-05-22
JP6254158B2 (ja) 2017-12-27
EP2872442B1 (en) 2017-05-24
US20140015158A1 (en) 2014-01-16
US9656246B2 (en) 2017-05-23
CN104520232A (zh) 2015-04-15
US20150209761A1 (en) 2015-07-30
CA2878600A1 (en) 2014-01-16
CN104520232B (zh) 2017-11-10
JP2015530961A (ja) 2015-10-29
WO2014011755A1 (en) 2014-01-16
KR20150036551A (ko) 2015-04-07
EP2872442A1 (en) 2015-05-20
KR102163272B1 (ko) 2020-10-08
US9833772B2 (en) 2017-12-05

Similar Documents

Publication Publication Date Title
ES2632778T3 (es) Matrices alineadas verticalmente de nanotubos de carbono formados sobre sustratos multicapa
TWI755492B (zh) 基於碳納米管的熱界面材料及其製造和使用方法
CN101054467B (zh) 碳纳米管复合材料及其制备方法
Lee et al. Layer-by-layer carbon nanotube coatings for enhanced pool boiling heat transfer on metal surfaces
CN101274757B (zh) 表面修饰的碳纳米管材料及其制造方法和电子部件与电子器件
TW200934833A (en) Lithography of nanoparticle based inks
KR20170135750A (ko) 카본 나노튜브 기반 열 인터페이스 재료 및 그 제조방법 및 그 사용방법
US20170257974A1 (en) Phase change material-carbon nanotube-metal substrate composites for thermal storage and control of heat generating devices
Ding et al. Graphene—vertically aligned carbon nanotube hybrid on PDMS as stretchable electrodes
Li et al. Rapid fabrication of high-resolution flexible electronics via nanoparticle self-assembly and transfer printing
CN107004607B (zh) 安置于具有一个或者多个腔体的金属衬底上的碳纳米管
Hashimoto et al. Nano-structured two-phase heat spreader for cooling ultra-high heat flux sources
JP5583752B2 (ja) ナノ粒子を用いた構造製造
Xu et al. Synergistic Boiling Enhancement on Hierarchical Micro-Pit/Carbon Nanotube Surfaces
US11141890B2 (en) Substrate including nano/micro structure, method for manufacturing the same, method for refining nano/micro structure, method for manufacturing nano/micro structure network, and manufacturing apparatus therefor
US8808857B1 (en) Carbon nanotube array interface material and methods
US20110305838A1 (en) Method of production of a deposit of nanoparticles with increased adhesion and device for implementation of such a method
Powell Controlled synthesis of CNT-based nanostructures for enhanced boiling and wicking
Ujereh Jr et al. EFFECTS OF CARBON NANOTUBE ARRAY PATTERNING ON NUCLEATE POOL BOILING
Cross Processing of vertically aligned carbon nanotubes for heat transfer applications
KR20160079196A (ko) 그래핀 트랜지스터를 웨이퍼 결합 프로세스로 구비하는 트랜지스터
Kim et al. Organized Carbon Nanotube Networks
Celesin Application and Characterization of Self-Assembled Monolayers In Hybrid Electronic Systems
KR20160083769A (ko) 그래핀 트랜지스터를 웨이퍼 결합 프로세스로 구비하는 트랜지스터
KR20160044769A (ko) 그래핀 트랜지스터 및 그의 제조방법