JP2015504568A - エッチングされたシリコン構造、エッチングされたシリコン構造を形成する方法及びそれらの使用 - Google Patents

エッチングされたシリコン構造、エッチングされたシリコン構造を形成する方法及びそれらの使用 Download PDF

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JP2015504568A
JP2015504568A JP2014533992A JP2014533992A JP2015504568A JP 2015504568 A JP2015504568 A JP 2015504568A JP 2014533992 A JP2014533992 A JP 2014533992A JP 2014533992 A JP2014533992 A JP 2014533992A JP 2015504568 A JP2015504568 A JP 2015504568A
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silicon
etched
copper
aqueous
etching
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JP2015504568A5 (enExample
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リウ，フェン−ミン
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Nexeon Ltd
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Nexeon Ltd
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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H01M4/0402—Methods of deposition of the material
    • H01M4/0404—Methods of deposition of the material by coating on electrode collectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/134—Electrodes based on metals, Si or alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/139—Processes of manufacture
    • H01M4/1395—Processes of manufacture of electrodes based on metals, Si or alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/36—Selection of substances as active materials, active masses, active liquids
    • H01M4/38—Selection of substances as active materials, active masses, active liquids of elements or alloys
    • H01M4/386—Silicon or alloys based on silicon
    • H10P50/642—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/052—Li-accumulators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M2220/00—Batteries for particular applications
    • H01M2220/30—Batteries in portable systems, e.g. mobile phone, laptop
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Weting (AREA)
  • Silicon Compounds (AREA)
  • ing And Chemical Polishing (AREA)
  • Secondary Cells (AREA)
  • Battery Electrode And Active Subsutance (AREA)
JP2014533992A 2011-10-06 2012-10-05 エッチングされたシリコン構造、エッチングされたシリコン構造を形成する方法及びそれらの使用 Pending JP2015504568A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1117279.8 2011-10-06
GBGB1117279.8A GB201117279D0 (en) 2011-10-06 2011-10-06 Etched silicon structures, method of forming etched silicon structures and uses thereof
PCT/GB2012/052483 WO2013050785A1 (en) 2011-10-06 2012-10-05 Etched silicon structures, method of forming etched silicon structures and uses thereof

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JP2015504568A true JP2015504568A (ja) 2015-02-12
JP2015504568A5 JP2015504568A5 (enExample) 2015-11-26

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JP2014533992A Pending JP2015504568A (ja) 2011-10-06 2012-10-05 エッチングされたシリコン構造、エッチングされたシリコン構造を形成する方法及びそれらの使用

Country Status (7)

Country Link
US (1) US20140248539A1 (enExample)
EP (1) EP2764563B1 (enExample)
JP (1) JP2015504568A (enExample)
KR (1) KR20140083006A (enExample)
CN (1) CN103988342A (enExample)
GB (2) GB201117279D0 (enExample)
WO (1) WO2013050785A1 (enExample)

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JP2015513912A (ja) * 2012-04-02 2015-05-18 モデルナ セラピューティクス インコーポレイテッドＭｏｄｅｒｎａ Ｔｈｅｒａｐｅｕｔｉｃｓ，Ｉｎｃ． タンパク質の産生のための修飾ポリヌクレオチド
JP2015518705A (ja) * 2012-04-02 2015-07-06 モデルナ セラピューティクス インコーポレイテッドＭｏｄｅｒｎａ Ｔｈｅｒａｐｅｕｔｉｃｓ，Ｉｎｃ． ヒト疾患に関連する生物製剤およびタンパク質の産生のための修飾ポリヌクレオチド
JP2020026965A (ja) * 2018-08-09 2020-02-20 株式会社東芝 処理システム、貴金属の触媒層に関する判断方法、及び、物品の製造方法
WO2021167434A1 (ko) * 2020-02-20 2021-08-26 한양대학교 에리카산학협력단 금속 음극 전극, 이를 포함하는 이차 전지, 및 그 제조 방법
JPWO2022065450A1 (enExample) * 2020-09-25 2022-03-31
US12444764B2 (en) 2020-02-20 2025-10-14 Flexolyte Complex fiber, solid state electrolyte comprising same, and metal-air battery comprising same

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GB201122315D0 (en) * 2011-12-23 2012-02-01 Nexeon Ltd Etched silicon structures, method of forming etched silicon structures and uses thereof
WO2014193124A1 (ko) * 2013-05-30 2014-12-04 주식회사 엘지화학 다공성 실리콘계 음극 활물질, 이의 제조 방법, 및 이를 포함하는 리튬 이차전지
EP3033788A1 (en) * 2013-08-14 2016-06-22 Board of Regents, The University of Texas System Methods of fabricating silicon nanowires and devices containing silicon nanowires
WO2015065394A1 (en) 2013-10-30 2015-05-07 Hewlett-Packard Development Company, L.P. Island etched filter passages
CN105682780B (zh) * 2013-10-30 2018-03-13 惠普发展公司，有限责任合伙企业 不平行岛蚀刻
CN105103346B (zh) * 2013-12-03 2018-11-06 株式会社Lg 化学 多孔性硅类负极活性物质及其制备方法、以及包含它的锂二次电池
CN104803342B (zh) * 2014-01-23 2016-08-17 清华大学 碗状金属纳米结构的制备方法
JP6121959B2 (ja) * 2014-09-11 2017-04-26 株式会社東芝 エッチング方法、物品及び半導体装置の製造方法、並びにエッチング液
KR101677023B1 (ko) * 2014-10-17 2016-11-17 한양대학교 에리카산학협력단 실리콘 표면 에칭방법 및 시드층 형성방법
DE102015212202A1 (de) * 2015-06-30 2017-01-05 Robert Bosch Gmbh Siliciummonolith-Graphit-Anode für eine Lithium-Zelle
KR101801789B1 (ko) 2015-11-05 2017-11-28 한국과학기술연구원 다공성 탄소 재료 및 이의 제조 방법
KR101859811B1 (ko) * 2016-03-07 2018-06-28 한국과학기술원 금속 나노입자와 금속 초박막이 코팅된 전도성 단결정 실리콘 입자, 이를 포함하는 고용량 이차전지용 음극활물질 및 그 제조방법
US11289700B2 (en) 2016-06-28 2022-03-29 The Research Foundation For The State University Of New York KVOPO4 cathode for sodium ion batteries
CN108075164A (zh) * 2016-11-09 2018-05-25 林逸樵 二次电池及其制作方法
CN108232204A (zh) * 2016-12-10 2018-06-29 中国科学院大连化学物理研究所 一种硅基有序化电极及其制备方法和应用
WO2018119679A1 (en) * 2016-12-27 2018-07-05 China Triumph International Engineering Co., Ltd. Method for activation of cdte layer of cdte thin-film solar cells with calcium hypochlorite
CN109597250B (zh) * 2018-12-26 2021-06-01 Tcl华星光电技术有限公司 蓝相液晶面板的制作方法及其立体电极的制作方法
CN110803706B (zh) * 2019-12-04 2023-03-28 宝鸡文理学院 一种快速高效脱除介孔氧化硅材料模板剂的方法
US12315736B2 (en) * 2022-09-14 2025-05-27 Applied Materials, Inc. Methods of highly selective silicon oxide removal
WO2024249394A1 (en) * 2023-05-27 2024-12-05 University Of Louisville Research Foundation, Inc. Materials and methods for high energy density silicon lithium ion batteries
KR102861629B1 (ko) * 2024-06-03 2025-09-17 한화모멘텀 주식회사 음극재 및 이의 제조방법, 이를 포함하는 리튬이온 이차전지
CN119419233B (zh) * 2024-10-09 2025-12-19 浙江锂威能源科技有限公司 一种金属镀层包覆硅基材料及二次电池

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JP2011046603A (ja) * 2007-07-17 2011-03-10 Nexeon Ltd シリコン又はシリコンベースの材料で構成される構造化粒子の製造方法及びリチウム蓄電池におけるそれらの使用

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Publication number Priority date Publication date Assignee Title
JP2015513912A (ja) * 2012-04-02 2015-05-18 モデルナ セラピューティクス インコーポレイテッドＭｏｄｅｒｎａ Ｔｈｅｒａｐｅｕｔｉｃｓ，Ｉｎｃ． タンパク質の産生のための修飾ポリヌクレオチド
JP2015513913A (ja) * 2012-04-02 2015-05-18 モデルナ セラピューティクス インコーポレイテッドＭｏｄｅｒｎａ Ｔｈｅｒａｐｅｕｔｉｃｓ，Ｉｎｃ． 修飾ポリヌクレオチド
JP2015516143A (ja) * 2012-04-02 2015-06-08 モデルナ セラピューティクス インコーポレイテッドＭｏｄｅｒｎａ Ｔｈｅｒａｐｅｕｔｉｃｓ，Ｉｎｃ． ヒト疾患に関連するタンパク質の産生のための修飾ポリヌクレオチド
JP2015518705A (ja) * 2012-04-02 2015-07-06 モデルナ セラピューティクス インコーポレイテッドＭｏｄｅｒｎａ Ｔｈｅｒａｐｅｕｔｉｃｓ，Ｉｎｃ． ヒト疾患に関連する生物製剤およびタンパク質の産生のための修飾ポリヌクレオチド
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JP2020026965A (ja) * 2018-08-09 2020-02-20 株式会社東芝 処理システム、貴金属の触媒層に関する判断方法、及び、物品の製造方法
JP7134778B2 (ja) 2018-08-09 2022-09-12 株式会社東芝 処理システム
WO2021167434A1 (ko) * 2020-02-20 2021-08-26 한양대학교 에리카산학협력단 금속 음극 전극, 이를 포함하는 이차 전지, 및 그 제조 방법
US12444764B2 (en) 2020-02-20 2025-10-14 Flexolyte Complex fiber, solid state electrolyte comprising same, and metal-air battery comprising same
JPWO2022065450A1 (enExample) * 2020-09-25 2022-03-31
WO2022065450A1 (ja) * 2020-09-25 2022-03-31 国立大学法人東北大学 リチウムイオン二次電池用の負極合剤、およびリチウムイオン二次電池
JP7766349B2 (ja) 2020-09-25 2025-11-10 国立大学法人東北大学 リチウムイオン二次電池用の負極合剤、およびリチウムイオン二次電池

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Publication number Publication date
GB201117279D0 (en) 2011-11-16
CN103988342A (zh) 2014-08-13
GB2495405B (en) 2014-11-12
GB201217909D0 (en) 2012-11-21
US20140248539A1 (en) 2014-09-04
EP2764563A1 (en) 2014-08-13
WO2013050785A1 (en) 2013-04-11
GB2495405A (en) 2013-04-10
EP2764563B1 (en) 2016-09-21
KR20140083006A (ko) 2014-07-03

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