JP2015502023A5 - - Google Patents

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Publication number
JP2015502023A5
JP2015502023A5 JP2014546498A JP2014546498A JP2015502023A5 JP 2015502023 A5 JP2015502023 A5 JP 2015502023A5 JP 2014546498 A JP2014546498 A JP 2014546498A JP 2014546498 A JP2014546498 A JP 2014546498A JP 2015502023 A5 JP2015502023 A5 JP 2015502023A5
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JP
Japan
Prior art keywords
skimmer
getter
skimmer device
plasma
disposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014546498A
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English (en)
Japanese (ja)
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JP2015502023A (ja
JP6030662B2 (ja
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Publication date
Priority claimed from GB1121291.7A external-priority patent/GB2498174B/en
Application filed filed Critical
Publication of JP2015502023A publication Critical patent/JP2015502023A/ja
Publication of JP2015502023A5 publication Critical patent/JP2015502023A5/ja
Application granted granted Critical
Publication of JP6030662B2 publication Critical patent/JP6030662B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2014546498A 2011-12-12 2012-12-12 質量分光計の真空インターフェース方法および真空インターフェース装置 Expired - Fee Related JP6030662B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1121291.7 2011-12-12
GB1121291.7A GB2498174B (en) 2011-12-12 2011-12-12 Mass spectrometer vacuum interface method and apparatus
PCT/EP2012/075302 WO2013087732A1 (en) 2011-12-12 2012-12-12 Mass spectrometer vacuum interface method and apparatus

Publications (3)

Publication Number Publication Date
JP2015502023A JP2015502023A (ja) 2015-01-19
JP2015502023A5 true JP2015502023A5 (enExample) 2015-02-26
JP6030662B2 JP6030662B2 (ja) 2016-11-24

Family

ID=45560286

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014546498A Expired - Fee Related JP6030662B2 (ja) 2011-12-12 2012-12-12 質量分光計の真空インターフェース方法および真空インターフェース装置

Country Status (8)

Country Link
US (1) US9697999B2 (enExample)
JP (1) JP6030662B2 (enExample)
CN (1) CN103988279A (enExample)
AU (1) AU2012351701B2 (enExample)
CA (1) CA2858459C (enExample)
DE (1) DE112012005182B4 (enExample)
GB (1) GB2498174B (enExample)
WO (1) WO2013087732A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2498173C (en) * 2011-12-12 2018-06-27 Thermo Fisher Scient Bremen Gmbh Mass spectrometer vacuum interface method and apparatus
US10446378B2 (en) * 2013-09-20 2019-10-15 Micromass Uk Limited Ion inlet assembly
EP3138117B1 (en) 2014-05-01 2019-11-13 PerkinElmer Health Sciences, Inc. Methods for detection and quantification of selenium and silicon in samples
CN104637773B (zh) * 2015-02-16 2017-03-01 江苏天瑞仪器股份有限公司 质谱仪一级真空结构
US10692692B2 (en) * 2015-05-27 2020-06-23 Kla-Tencor Corporation System and method for providing a clean environment in an electron-optical system
JP6048552B1 (ja) * 2015-08-21 2016-12-21 株式会社 イアス オンライン移送した分析試料の分析システム
DE102015122155B4 (de) 2015-12-17 2018-03-08 Jan-Christoph Wolf Verwendung einer Ionisierungsvorrichtung
EP3639289A2 (de) 2017-06-16 2020-04-22 Plasmion Gmbh Vorrichtung und verfahren zur ionisation eines analyten sowie vorrichtung und verfahren zur analyse eines ionisierten analyten
EP3474311A1 (en) 2017-10-20 2019-04-24 Tofwerk AG Ion molecule reactor
KR102133334B1 (ko) * 2020-02-25 2020-07-14 영인에이스 주식회사 질량분석기
KR102728997B1 (ko) * 2021-12-02 2024-11-13 영인에이스 주식회사 질량 분석기
CN114536480B (zh) * 2022-03-02 2023-05-23 重庆天荣日盛家居科技有限公司 多工位木质家居板材切割设备

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4341662A (en) 1980-04-11 1982-07-27 Pfefferle William C Method of catalytically coating low porosity ceramic surfaces
JPS6420669A (en) 1987-07-16 1989-01-24 Fujitsu Ltd Field-effect semiconductor device
JPH0542611Y2 (enExample) * 1987-07-29 1993-10-27
JPS6445049A (en) * 1987-08-14 1989-02-17 Nippon Telegraph & Telephone Mass spectrograph for secondary ion
DE4433807A1 (de) * 1994-09-22 1996-03-28 Finnigan Mat Gmbh Massenspektrometer, insbesondere ICP-MS
GB9525507D0 (en) * 1995-12-14 1996-02-14 Fisons Plc Electrospray and atmospheric pressure chemical ionization mass spectrometer and ion source
JP3521218B2 (ja) * 1997-07-04 2004-04-19 独立行政法人産業技術総合研究所 金属−絶縁性セラミック複合サンプラー及びスキマー
GB9820210D0 (en) 1998-09-16 1998-11-11 Vg Elemental Limited Means for removing unwanted ions from an ion transport system and mass spectrometer
US6703610B2 (en) * 2002-02-01 2004-03-09 Agilent Technologies, Inc. Skimmer for mass spectrometry
WO2003077280A1 (en) 2002-03-08 2003-09-18 Varian Australia Pty Ltd A plasma mass spectrometer
US7009176B2 (en) * 2004-03-08 2006-03-07 Thermo Finnigan Llc Titanium ion transfer components for use in mass spectrometry
US7741600B2 (en) 2006-11-17 2010-06-22 Thermo Finnigan Llc Apparatus and method for providing ions to a mass analyzer
JP5308641B2 (ja) * 2007-08-09 2013-10-09 アジレント・テクノロジーズ・インク プラズマ質量分析装置
US7915580B2 (en) * 2008-10-15 2011-03-29 Thermo Finnigan Llc Electro-dynamic or electro-static lens coupled to a stacked ring ion guide
GB0908252D0 (en) * 2009-05-13 2009-06-24 Micromass Ltd Surface coating on sampling cone of mass spectrometer

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