DE112012005182B4 - Massenspektrometervakuumschnittstellen-Verfahren und -Vorrichtung - Google Patents
Massenspektrometervakuumschnittstellen-Verfahren und -Vorrichtung Download PDFInfo
- Publication number
- DE112012005182B4 DE112012005182B4 DE112012005182.3T DE112012005182T DE112012005182B4 DE 112012005182 B4 DE112012005182 B4 DE 112012005182B4 DE 112012005182 T DE112012005182 T DE 112012005182T DE 112012005182 B4 DE112012005182 B4 DE 112012005182B4
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- DE
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- Prior art keywords
- plasma
- skimmer
- getter
- downstream
- cone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000000151 deposition Methods 0.000 claims description 31
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 14
- 238000010884 ion-beam technique Methods 0.000 claims description 13
- 238000004458 analytical method Methods 0.000 claims description 11
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 8
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
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- 238000000859 sublimation Methods 0.000 claims description 3
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- 229910010293 ceramic material Inorganic materials 0.000 claims 2
- 238000000918 plasma mass spectrometry Methods 0.000 claims 1
- 241000238634 Libellulidae Species 0.000 description 171
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- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 10
- 230000005465 channeling Effects 0.000 description 10
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- 239000008186 active pharmaceutical agent Substances 0.000 description 1
- 239000000443 aerosol Substances 0.000 description 1
- 238000000065 atmospheric pressure chemical ionisation Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
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- 150000001793 charged compounds Chemical class 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
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- 229910002804 graphite Inorganic materials 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
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- 238000005040 ion trap Methods 0.000 description 1
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- 239000006193 liquid solution Substances 0.000 description 1
- 239000006194 liquid suspension Substances 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910000000 metal hydroxide Inorganic materials 0.000 description 1
- 150000004692 metal hydroxides Chemical class 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 239000006199 nebulizer Substances 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 230000003716 rejuvenation Effects 0.000 description 1
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- 238000005245 sintering Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
- H01J49/0495—Vacuum locks; Valves
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/06—Electron- or ion-optical arrangements
- H01J49/067—Ion lenses, apertures, skimmers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1121291.7 | 2011-12-12 | ||
| GB1121291.7A GB2498174B (en) | 2011-12-12 | 2011-12-12 | Mass spectrometer vacuum interface method and apparatus |
| PCT/EP2012/075302 WO2013087732A1 (en) | 2011-12-12 | 2012-12-12 | Mass spectrometer vacuum interface method and apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE112012005182T5 DE112012005182T5 (de) | 2014-08-28 |
| DE112012005182B4 true DE112012005182B4 (de) | 2021-01-21 |
Family
ID=45560286
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE112012005182.3T Active DE112012005182B4 (de) | 2011-12-12 | 2012-12-12 | Massenspektrometervakuumschnittstellen-Verfahren und -Vorrichtung |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US9697999B2 (enExample) |
| JP (1) | JP6030662B2 (enExample) |
| CN (1) | CN103988279A (enExample) |
| AU (1) | AU2012351701B2 (enExample) |
| CA (1) | CA2858459C (enExample) |
| DE (1) | DE112012005182B4 (enExample) |
| GB (1) | GB2498174B (enExample) |
| WO (1) | WO2013087732A1 (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2498173C (en) * | 2011-12-12 | 2018-06-27 | Thermo Fisher Scient Bremen Gmbh | Mass spectrometer vacuum interface method and apparatus |
| US10446378B2 (en) * | 2013-09-20 | 2019-10-15 | Micromass Uk Limited | Ion inlet assembly |
| EP3138117B1 (en) | 2014-05-01 | 2019-11-13 | PerkinElmer Health Sciences, Inc. | Methods for detection and quantification of selenium and silicon in samples |
| CN104637773B (zh) * | 2015-02-16 | 2017-03-01 | 江苏天瑞仪器股份有限公司 | 质谱仪一级真空结构 |
| US10692692B2 (en) * | 2015-05-27 | 2020-06-23 | Kla-Tencor Corporation | System and method for providing a clean environment in an electron-optical system |
| JP6048552B1 (ja) * | 2015-08-21 | 2016-12-21 | 株式会社 イアス | オンライン移送した分析試料の分析システム |
| DE102015122155B4 (de) | 2015-12-17 | 2018-03-08 | Jan-Christoph Wolf | Verwendung einer Ionisierungsvorrichtung |
| EP3639289A2 (de) | 2017-06-16 | 2020-04-22 | Plasmion Gmbh | Vorrichtung und verfahren zur ionisation eines analyten sowie vorrichtung und verfahren zur analyse eines ionisierten analyten |
| EP3474311A1 (en) | 2017-10-20 | 2019-04-24 | Tofwerk AG | Ion molecule reactor |
| KR102133334B1 (ko) * | 2020-02-25 | 2020-07-14 | 영인에이스 주식회사 | 질량분석기 |
| KR102728997B1 (ko) * | 2021-12-02 | 2024-11-13 | 영인에이스 주식회사 | 질량 분석기 |
| CN114536480B (zh) * | 2022-03-02 | 2023-05-23 | 重庆天荣日盛家居科技有限公司 | 多工位木质家居板材切割设备 |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2293482A (en) * | 1994-09-22 | 1996-03-27 | Finnigan Mat Gmbh | Ion-optical components, eg for mass spectrometers |
| US5756994A (en) * | 1995-12-14 | 1998-05-26 | Micromass Limited | Electrospray and atmospheric pressure chemical ionization mass spectrometer and ion source |
| JPH1125903A (ja) * | 1997-07-04 | 1999-01-29 | Agency Of Ind Science & Technol | 金属−セラミック複合サンプラー及びスキマー |
| US20050194530A1 (en) * | 2004-03-08 | 2005-09-08 | Rohan Thakur | Titanium ion transfer components for use in mass spectrometry |
| US7119330B2 (en) * | 2002-03-08 | 2006-10-10 | Varian Australia Pty Ltd | Plasma mass spectrometer |
| US7230232B2 (en) * | 1998-09-16 | 2007-06-12 | Thermo Fisher Scientific (Bremen) Gmbh | Means for removing unwanted ions from an ion transport system and mass spectrometer |
| US7872227B2 (en) * | 2007-08-09 | 2011-01-18 | Agilent Technologies, Inc. | Mass spectrometer |
| US7915580B2 (en) * | 2008-10-15 | 2011-03-29 | Thermo Finnigan Llc | Electro-dynamic or electro-static lens coupled to a stacked ring ion guide |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4341662A (en) | 1980-04-11 | 1982-07-27 | Pfefferle William C | Method of catalytically coating low porosity ceramic surfaces |
| JPS6420669A (en) | 1987-07-16 | 1989-01-24 | Fujitsu Ltd | Field-effect semiconductor device |
| JPH0542611Y2 (enExample) * | 1987-07-29 | 1993-10-27 | ||
| JPS6445049A (en) * | 1987-08-14 | 1989-02-17 | Nippon Telegraph & Telephone | Mass spectrograph for secondary ion |
| US6703610B2 (en) * | 2002-02-01 | 2004-03-09 | Agilent Technologies, Inc. | Skimmer for mass spectrometry |
| US7741600B2 (en) | 2006-11-17 | 2010-06-22 | Thermo Finnigan Llc | Apparatus and method for providing ions to a mass analyzer |
| GB0908252D0 (en) * | 2009-05-13 | 2009-06-24 | Micromass Ltd | Surface coating on sampling cone of mass spectrometer |
-
2011
- 2011-12-12 GB GB1121291.7A patent/GB2498174B/en active Active
-
2012
- 2012-12-12 US US14/364,639 patent/US9697999B2/en active Active
- 2012-12-12 WO PCT/EP2012/075302 patent/WO2013087732A1/en not_active Ceased
- 2012-12-12 CA CA2858459A patent/CA2858459C/en not_active Expired - Fee Related
- 2012-12-12 JP JP2014546498A patent/JP6030662B2/ja not_active Expired - Fee Related
- 2012-12-12 DE DE112012005182.3T patent/DE112012005182B4/de active Active
- 2012-12-12 CN CN201280061127.3A patent/CN103988279A/zh active Pending
- 2012-12-12 AU AU2012351701A patent/AU2012351701B2/en not_active Ceased
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2293482A (en) * | 1994-09-22 | 1996-03-27 | Finnigan Mat Gmbh | Ion-optical components, eg for mass spectrometers |
| US5756994A (en) * | 1995-12-14 | 1998-05-26 | Micromass Limited | Electrospray and atmospheric pressure chemical ionization mass spectrometer and ion source |
| JPH1125903A (ja) * | 1997-07-04 | 1999-01-29 | Agency Of Ind Science & Technol | 金属−セラミック複合サンプラー及びスキマー |
| US7230232B2 (en) * | 1998-09-16 | 2007-06-12 | Thermo Fisher Scientific (Bremen) Gmbh | Means for removing unwanted ions from an ion transport system and mass spectrometer |
| US7119330B2 (en) * | 2002-03-08 | 2006-10-10 | Varian Australia Pty Ltd | Plasma mass spectrometer |
| US20050194530A1 (en) * | 2004-03-08 | 2005-09-08 | Rohan Thakur | Titanium ion transfer components for use in mass spectrometry |
| US7872227B2 (en) * | 2007-08-09 | 2011-01-18 | Agilent Technologies, Inc. | Mass spectrometer |
| US7915580B2 (en) * | 2008-10-15 | 2011-03-29 | Thermo Finnigan Llc | Electro-dynamic or electro-static lens coupled to a stacked ring ion guide |
Non-Patent Citations (1)
| Title |
|---|
| JP H11-25903 A (Maschinenübersetzung), AIPN [online] JPO [abgerufen am 27.04.2016] * |
Also Published As
| Publication number | Publication date |
|---|---|
| AU2012351701A1 (en) | 2014-07-03 |
| US20140331861A1 (en) | 2014-11-13 |
| AU2012351701B2 (en) | 2015-10-29 |
| DE112012005182T5 (de) | 2014-08-28 |
| GB2498174A (en) | 2013-07-10 |
| GB2498174B (en) | 2016-06-29 |
| CN103988279A (zh) | 2014-08-13 |
| CA2858459C (en) | 2020-03-31 |
| GB201121291D0 (en) | 2012-01-25 |
| JP2015502023A (ja) | 2015-01-19 |
| JP6030662B2 (ja) | 2016-11-24 |
| US9697999B2 (en) | 2017-07-04 |
| CA2858459A1 (en) | 2013-06-20 |
| WO2013087732A1 (en) | 2013-06-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R012 | Request for examination validly filed | ||
| R012 | Request for examination validly filed |
Effective date: 20141030 |
|
| R016 | Response to examination communication | ||
| R016 | Response to examination communication | ||
| R082 | Change of representative |
Representative=s name: STELLBRINK & PARTNER PATENTANWAELTE MBB, DE |
|
| R016 | Response to examination communication | ||
| R018 | Grant decision by examination section/examining division | ||
| R020 | Patent grant now final |