JPS6445049A - Mass spectrograph for secondary ion - Google Patents

Mass spectrograph for secondary ion

Info

Publication number
JPS6445049A
JPS6445049A JP62201935A JP20193587A JPS6445049A JP S6445049 A JPS6445049 A JP S6445049A JP 62201935 A JP62201935 A JP 62201935A JP 20193587 A JP20193587 A JP 20193587A JP S6445049 A JPS6445049 A JP S6445049A
Authority
JP
Japan
Prior art keywords
vacuum evaporation
metallic thin
vacuum
impurities
enable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62201935A
Other languages
Japanese (ja)
Inventor
Yoshikazu Honma
Yoshiichi Ishii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP62201935A priority Critical patent/JPS6445049A/en
Publication of JPS6445049A publication Critical patent/JPS6445049A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To enable very small amounts of impurities to be detected in materials with high purity by installing a vacuum evaporation source inside a sample chamber vacuum tank, coating the contaminated surface of the constituents of a device by means of metallic thin films so as to reduce the effect on memory due to contaminated layer and/or influence of contamination caused by remaining gases. CONSTITUTION:Prior to the spectroanalysis of a sample 6, a material stage 7 is moved from the position of a analysis to give no hindrance to the process of vacuum evaporation, for the purpose of coating a contaminated layer on the surface of a lead-out electrode 9 etc., with a metallic thin film. Then, a vacuum evaporation source 15 is actuated, to generate metallic vapor 16 which is guided to adhere to the lead-out electrode 9 or the surface of a cover in a primary ion optical system to form a vacuum evaporated metallic thin film. Owing to the abovementioned constitution, a memory effect or contamination by remaining gas used to hinder a microanalysis can be alleviated to enable very small amounts of impurities to be detected in materials with high purity.
JP62201935A 1987-08-14 1987-08-14 Mass spectrograph for secondary ion Pending JPS6445049A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62201935A JPS6445049A (en) 1987-08-14 1987-08-14 Mass spectrograph for secondary ion

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62201935A JPS6445049A (en) 1987-08-14 1987-08-14 Mass spectrograph for secondary ion

Publications (1)

Publication Number Publication Date
JPS6445049A true JPS6445049A (en) 1989-02-17

Family

ID=16449224

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62201935A Pending JPS6445049A (en) 1987-08-14 1987-08-14 Mass spectrograph for secondary ion

Country Status (1)

Country Link
JP (1) JPS6445049A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015502023A (en) * 2011-12-12 2015-01-19 サーモ フィッシャー サイエンティフィック （ブレーメン） ゲーエムベーハー Vacuum interface method and vacuum interface device for mass spectrometer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015502023A (en) * 2011-12-12 2015-01-19 サーモ フィッシャー サイエンティフィック （ブレーメン） ゲーエムベーハー Vacuum interface method and vacuum interface device for mass spectrometer
US9697999B2 (en) 2011-12-12 2017-07-04 Thermo Fisher Scientific (Bremen) Gmbh Mass spectrometer vacuum interface method and apparatus

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