JPS5612541A - Removing device of contaminant - Google Patents

Removing device of contaminant

Info

Publication number
JPS5612541A
JPS5612541A JP8864379A JP8864379A JPS5612541A JP S5612541 A JPS5612541 A JP S5612541A JP 8864379 A JP8864379 A JP 8864379A JP 8864379 A JP8864379 A JP 8864379A JP S5612541 A JPS5612541 A JP S5612541A
Authority
JP
Japan
Prior art keywords
specimen
exhausting chamber
bottom electrode
specimen holder
contaminant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8864379A
Other languages
Japanese (ja)
Inventor
Hiroshi Koyama
Hiroyasu Toyoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI, CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP8864379A priority Critical patent/JPS5612541A/en
Publication of JPS5612541A publication Critical patent/JPS5612541A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/2202—Preparing specimens therefor

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

PURPOSE:To effectively remove the contaminant from surfaces of analysis specimen and specimen holder, by installing a plasma reacting device in a pre-exhausting chamber. CONSTITUTION:A top electrode 10 and a bottom electrode 11, which also serves the purpose of a specimen holder guide, are arranged in a pre-exhausting chamber 5. After attaching an analysis specimen 1 and a specimen holder 2 onto tip of a specimen inserting bar 3 and setting thus prepared bar on the bottom electrode 11, the pre-exhausting chamber 5 is tightly closed by a pre-exhausting chamber cover 4, air exhaustion is executed by a vacuum pump 6, and then, a gas-leak-valve 8 is gradually opened to introduce a gas, such as O2 or CF4, etc. so as to adjust inside of the pre-exhausting chamber 5 to a prescribed vacuity. And then, high frequency power is impressed onto the bottom electrode 11 from a high frequency power source 12 so as to generate plasma and remove contaminant layer from surface of a specimen. It is possible, by doing so, to remove contaminant layer not only from surface of the specimen 1 but also from surface of the specimen holder 2 at the same time in a short period of time.
JP8864379A 1979-07-11 1979-07-11 Removing device of contaminant Pending JPS5612541A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8864379A JPS5612541A (en) 1979-07-11 1979-07-11 Removing device of contaminant

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8864379A JPS5612541A (en) 1979-07-11 1979-07-11 Removing device of contaminant

Publications (1)

Publication Number Publication Date
JPS5612541A true JPS5612541A (en) 1981-02-06

Family

ID=13948492

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8864379A Pending JPS5612541A (en) 1979-07-11 1979-07-11 Removing device of contaminant

Country Status (1)

Country Link
JP (1) JPS5612541A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS619800U (en) * 1984-06-25 1986-01-21 日本電子株式会社 Condense mechanism of ultra-high pressure accelerator tube
JPS6123663A (en) * 1984-07-11 1986-02-01 Nippon Paint Co Ltd Weather-resistant paint
JPH0257049U (en) * 1988-10-17 1990-04-25
JP2002328125A (en) * 2001-05-02 2002-11-15 Stec Kk Method and device for adjusting analytical sample for anlalyzing component in metal

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51110962A (en) * 1975-03-25 1976-09-30 Shimadzu Corp

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51110962A (en) * 1975-03-25 1976-09-30 Shimadzu Corp

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS619800U (en) * 1984-06-25 1986-01-21 日本電子株式会社 Condense mechanism of ultra-high pressure accelerator tube
JPS6123663A (en) * 1984-07-11 1986-02-01 Nippon Paint Co Ltd Weather-resistant paint
JPH024628B2 (en) * 1984-07-11 1990-01-29 Nippon Paint Co Ltd
JPH0257049U (en) * 1988-10-17 1990-04-25
JP2002328125A (en) * 2001-05-02 2002-11-15 Stec Kk Method and device for adjusting analytical sample for anlalyzing component in metal

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