JPS5719034A - Vapor growth apparatus - Google Patents
Vapor growth apparatusInfo
- Publication number
- JPS5719034A JPS5719034A JP9361480A JP9361480A JPS5719034A JP S5719034 A JPS5719034 A JP S5719034A JP 9361480 A JP9361480 A JP 9361480A JP 9361480 A JP9361480 A JP 9361480A JP S5719034 A JPS5719034 A JP S5719034A
- Authority
- JP
- Japan
- Prior art keywords
- area
- excited
- reaction
- growth apparatus
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
PURPOSE: To form a thin film of a good quality by providing a plasma generating area to be excited by a frequency different from that in a reacting tube on the side of a reaction gas introducing inlet in a reaction area of a vapor growth apparatus.
CONSTITUTION: In a vapor growth apparatus in which a plasma generator section 5 to be excited by a given frequency is provided as a reaction area 7 in a reacting tube 1 decompressing, a plasma generation area 9 is provided on the side of a reaction gas introducing inlet 2 in the reaction area 7 in such a manner as to be excited by a frequency different from that excited in the reaction area 7. Then, a plasma is generated in the plasma generation area 9 beforehand to excite a reaction gas, which flows into the reaction area 7. This enables the growing of a thin film of a good quality on the surface of a wafer 8.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9361480A JPS5941773B2 (en) | 1980-07-09 | 1980-07-09 | Vapor phase growth method and apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9361480A JPS5941773B2 (en) | 1980-07-09 | 1980-07-09 | Vapor phase growth method and apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5719034A true JPS5719034A (en) | 1982-02-01 |
JPS5941773B2 JPS5941773B2 (en) | 1984-10-09 |
Family
ID=14087199
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9361480A Expired JPS5941773B2 (en) | 1980-07-09 | 1980-07-09 | Vapor phase growth method and apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5941773B2 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58193361A (en) * | 1982-04-30 | 1983-11-11 | Shimadzu Corp | Plasma chemical vapor deposition apparatus |
JPS59191324A (en) * | 1983-04-14 | 1984-10-30 | Victor Co Of Japan Ltd | Plasma reaction apparatus |
JPS60143625A (en) * | 1983-12-30 | 1985-07-29 | Fujitsu Ltd | Manufacture of semiconductor device |
JPH01111871A (en) * | 1987-10-23 | 1989-04-28 | Nec Corp | Plasma vapor phase growing device |
WO2020240915A1 (en) * | 2019-05-24 | 2020-12-03 | 三菱重工業株式会社 | Test piece holder, cleansing system, method for measuring amount of corrosion, and device for measuring amount of corrosion |
-
1980
- 1980-07-09 JP JP9361480A patent/JPS5941773B2/en not_active Expired
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58193361A (en) * | 1982-04-30 | 1983-11-11 | Shimadzu Corp | Plasma chemical vapor deposition apparatus |
JPS59191324A (en) * | 1983-04-14 | 1984-10-30 | Victor Co Of Japan Ltd | Plasma reaction apparatus |
JPS60143625A (en) * | 1983-12-30 | 1985-07-29 | Fujitsu Ltd | Manufacture of semiconductor device |
JPH0475650B2 (en) * | 1983-12-30 | 1992-12-01 | Fujitsu Ltd | |
JPH01111871A (en) * | 1987-10-23 | 1989-04-28 | Nec Corp | Plasma vapor phase growing device |
WO2020240915A1 (en) * | 2019-05-24 | 2020-12-03 | 三菱重工業株式会社 | Test piece holder, cleansing system, method for measuring amount of corrosion, and device for measuring amount of corrosion |
Also Published As
Publication number | Publication date |
---|---|
JPS5941773B2 (en) | 1984-10-09 |
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