JPS539993A - Ion producing device - Google Patents

Ion producing device

Info

Publication number
JPS539993A
JPS539993A JP8344576A JP8344576A JPS539993A JP S539993 A JPS539993 A JP S539993A JP 8344576 A JP8344576 A JP 8344576A JP 8344576 A JP8344576 A JP 8344576A JP S539993 A JPS539993 A JP S539993A
Authority
JP
Japan
Prior art keywords
producing device
ion producing
plasma
dispersing chamber
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8344576A
Other languages
Japanese (ja)
Inventor
Osamu Morimiya
Yoshiro Shintani
Shigeki Kadoma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP8344576A priority Critical patent/JPS539993A/en
Publication of JPS539993A publication Critical patent/JPS539993A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE: To unify the density of plasma by means of being stabilized the plsma which is fallen into a plasma dispersing chamber from a generating part by magnetic lines along with the wall of the dispersing chamber.
COPYRIGHT: (C)1978,JPO&Japio
JP8344576A 1976-07-15 1976-07-15 Ion producing device Pending JPS539993A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8344576A JPS539993A (en) 1976-07-15 1976-07-15 Ion producing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8344576A JPS539993A (en) 1976-07-15 1976-07-15 Ion producing device

Publications (1)

Publication Number Publication Date
JPS539993A true JPS539993A (en) 1978-01-28

Family

ID=13802625

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8344576A Pending JPS539993A (en) 1976-07-15 1976-07-15 Ion producing device

Country Status (1)

Country Link
JP (1) JPS539993A (en)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5679900A (en) * 1979-12-05 1981-06-30 Hitachi Ltd Ion source
JPS56160743A (en) * 1980-05-16 1981-12-10 Mitsuharu Uo Ion source
JPS57120400A (en) * 1981-01-19 1982-07-27 Mitsubishi Electric Corp Shield
JPS57185653A (en) * 1981-05-11 1982-11-15 Toshiba Corp Ion-source device
JPS6064559U (en) * 1983-10-11 1985-05-08 日電アネルバ株式会社 discharge trigger
JPS6064560U (en) * 1983-10-11 1985-05-08 日電アネルバ株式会社 discharge trigger
JPS6064558U (en) * 1983-10-11 1985-05-08 日電アネルバ株式会社 discharge trigger
JPS6064561U (en) * 1983-10-11 1985-05-08 日電アネルバ株式会社 discharge trigger
JPS61250926A (en) * 1985-04-30 1986-11-08 Ulvac Corp Multiple stranded filament for ion acceleration device
JPS6280950A (en) * 1985-10-04 1987-04-14 Hitachi Ltd Ion source
JPS62163653A (en) * 1986-01-10 1987-07-20 堀江　肇 Apparatus for treating fish body
RU2620442C2 (en) * 2015-05-29 2017-05-25 Открытое акционерное общество "ОКБ-Планета" ОАО "ОКБ-Планета" Source of ions

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6250941B2 (en) * 1979-12-05 1987-10-27 Hitachi Ltd
JPS5679900A (en) * 1979-12-05 1981-06-30 Hitachi Ltd Ion source
JPS56160743A (en) * 1980-05-16 1981-12-10 Mitsuharu Uo Ion source
JPS6311741B2 (en) * 1980-05-16 1988-03-15 Mitsuharu Uo
JPS57120400A (en) * 1981-01-19 1982-07-27 Mitsubishi Electric Corp Shield
JPH0226325B2 (en) * 1981-01-19 1990-06-08 Mitsubishi Electric Corp
JPS57185653A (en) * 1981-05-11 1982-11-15 Toshiba Corp Ion-source device
JPS6064559U (en) * 1983-10-11 1985-05-08 日電アネルバ株式会社 discharge trigger
JPS6064561U (en) * 1983-10-11 1985-05-08 日電アネルバ株式会社 discharge trigger
JPS6064558U (en) * 1983-10-11 1985-05-08 日電アネルバ株式会社 discharge trigger
JPS6064560U (en) * 1983-10-11 1985-05-08 日電アネルバ株式会社 discharge trigger
JPH035081Y2 (en) * 1983-10-11 1991-02-08
JPS61250926A (en) * 1985-04-30 1986-11-08 Ulvac Corp Multiple stranded filament for ion acceleration device
JPS6280950A (en) * 1985-10-04 1987-04-14 Hitachi Ltd Ion source
JPS62163653A (en) * 1986-01-10 1987-07-20 堀江　肇 Apparatus for treating fish body
RU2620442C2 (en) * 2015-05-29 2017-05-25 Открытое акционерное общество "ОКБ-Планета" ОАО "ОКБ-Планета" Source of ions

Similar Documents

Publication Publication Date Title
JPS539993A (en) Ion producing device
JPS5296425A (en) Gas combustion apparatus
JPS539992A (en) Ion producing device
JPS5326674A (en) Plasma etching
JPS54192A (en) Shielding wall of reactor container
JPS5341982A (en) Wafer holder for ion implantation processing
JPS5338263A (en) Plasma treating apparatus of semiconductors
JPS5337228A (en) Reed valve device
JPS537124A (en) Aural trap unit
JPS5358769A (en) Ion injector
JPS521749A (en) Method of manufacturing of wall material
JPS52153803A (en) Sintering machine of exhaust gas circulating type
JPS5298474A (en) Vapor phase growth under reduced pressure
JPS51138884A (en) Junction device consisted of magnet on electrical junction part
JPS53120494A (en) C magnetic field generator for atomic beam tube
JPS5430773A (en) Electron-beam device having vacuum isolation film inside sample chamber
JPS5381007A (en) Signal control system
JPS53131893A (en) Ion source
JPS5247756A (en) Masking screen
JPS5292790A (en) Ion chamber of smoke detector of ionization type
JPS52131088A (en) Control rod
JPS529962A (en) Device for humidifying supersonic wave
JPS5357740A (en) Manufacture of magnetron
JPS52102999A (en) Ion source device
JPS5415671A (en) Manufacture of semiconductor device