JPS6064559U - discharge trigger - Google Patents

discharge trigger

Info

Publication number
JPS6064559U
JPS6064559U JP15708283U JP15708283U JPS6064559U JP S6064559 U JPS6064559 U JP S6064559U JP 15708283 U JP15708283 U JP 15708283U JP 15708283 U JP15708283 U JP 15708283U JP S6064559 U JPS6064559 U JP S6064559U
Authority
JP
Japan
Prior art keywords
rod
shaped electrode
vacuum container
discharge trigger
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15708283U
Other languages
Japanese (ja)
Other versions
JPH035081Y2 (en
Inventor
信行 高橋
杉本　▲りゅう▼二
細川　直吉
Original Assignee
日電アネルバ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日電アネルバ株式会社 filed Critical 日電アネルバ株式会社
Priority to JP15708283U priority Critical patent/JPS6064559U/en
Publication of JPS6064559U publication Critical patent/JPS6064559U/en
Application granted granted Critical
Publication of JPH035081Y2 publication Critical patent/JPH035081Y2/ja
Granted legal-status Critical Current

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  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

゛第１図は放電トリガーが使用されるスパッタエツチン
グ装置の構成例を示す。第２図ｉマ放電トリ　”ガニキ
し７．て使われている従来の補助電極の断面図、第３図
は本考案による放電トリガーの断面図。図において１０
は真空容器、２０は主電極、。1 shows an example of the configuration of a sputter etching apparatus in which a discharge trigger is used. Figure 2 is a sectional view of a conventional auxiliary electrode used in a discharge trigger, and Figure 3 is a sectional view of a discharge trigger according to the present invention.
is a vacuum vessel, and 20 is a main electrode.

Claims (1)

【実用新案登録請求の範囲】 スパッタリングその他の真空容器の主電蝋近傍。 に組込まれた、外部のイグニッションコイルその他の禽
圧電−に連る棒状電極セ、該真空容器外にあって該棒状
電極の中心軸に対して垂直な磁力線を磁極面カーら発す
るように配置され−た永久磁石と、該棒状電極の近傍の
空間を経由して真空容器内へガス導入をする該棒状電極
の近傍に設けられたガス導入管、とから成ることを特徴
とする放電トリガー。[Scope of claim for utility model registration] Near the main electrolytic wax of a vacuum container for sputtering and other purposes. A rod-shaped electrode set connected to an external ignition coil or other piezoelectric device incorporated in the vacuum chamber is arranged so that lines of magnetic force perpendicular to the central axis of the rod-shaped electrode are emitted from the magnetic pole surface outside the vacuum container. - A discharge trigger comprising: a permanent magnet; and a gas introduction tube provided near the rod-shaped electrode for introducing gas into a vacuum container via a space near the rod-shaped electrode.
JP15708283U 1983-10-11 1983-10-11 discharge trigger Granted JPS6064559U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15708283U JPS6064559U (en) 1983-10-11 1983-10-11 discharge trigger

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15708283U JPS6064559U (en) 1983-10-11 1983-10-11 discharge trigger

Publications (2)

Publication Number Publication Date
JPS6064559U true JPS6064559U (en) 1985-05-08
JPH035081Y2 JPH035081Y2 (en) 1991-02-08

Family

ID=30346430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15708283U Granted JPS6064559U (en) 1983-10-11 1983-10-11 discharge trigger

Country Status (1)

Country Link
JP (1) JPS6064559U (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS539993A (en) * 1976-07-15 1978-01-28 Toshiba Corp Ion producing device
JPS58157084A (en) * 1982-03-15 1983-09-19 松下電工株式会社 Dimming control circuit
JPS58157083A (en) * 1982-03-15 1983-09-19 松下電工株式会社 Emergency lamp circuit

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS539993A (en) * 1976-07-15 1978-01-28 Toshiba Corp Ion producing device
JPS58157084A (en) * 1982-03-15 1983-09-19 松下電工株式会社 Dimming control circuit
JPS58157083A (en) * 1982-03-15 1983-09-19 松下電工株式会社 Emergency lamp circuit

Also Published As

Publication number Publication date
JPH035081Y2 (en) 1991-02-08

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