JPS5679900A - Ion source - Google Patents

Ion source

Info

Publication number
JPS5679900A
JPS5679900A JP15676879A JP15676879A JPS5679900A JP S5679900 A JPS5679900 A JP S5679900A JP 15676879 A JP15676879 A JP 15676879A JP 15676879 A JP15676879 A JP 15676879A JP S5679900 A JPS5679900 A JP S5679900A
Authority
JP
Japan
Prior art keywords
ion source
ion
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15676879A
Other languages
Japanese (ja)
Other versions
JPS6250941B2 (en
Inventor
Yasuo Kamiide
Yasushi Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15676879A priority Critical patent/JPS5679900A/en
Publication of JPS5679900A publication Critical patent/JPS5679900A/en
Publication of JPS6250941B2 publication Critical patent/JPS6250941B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
JP15676879A 1979-12-05 1979-12-05 Ion source Granted JPS5679900A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15676879A JPS5679900A (en) 1979-12-05 1979-12-05 Ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15676879A JPS5679900A (en) 1979-12-05 1979-12-05 Ion source

Publications (2)

Publication Number Publication Date
JPS5679900A true JPS5679900A (en) 1981-06-30
JPS6250941B2 JPS6250941B2 (en) 1987-10-27

Family

ID=15634881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15676879A Granted JPS5679900A (en) 1979-12-05 1979-12-05 Ion source

Country Status (1)

Country Link
JP (1) JPS5679900A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58194300A (en) * 1981-12-24 1983-11-12 株式会社日立製作所 Ion source for neutral particle incident device
JPS6166869A (en) * 1984-09-11 1986-04-05 Toshiba Corp Rf type ion engine
JPS63228549A (en) * 1987-03-18 1988-09-22 Hitachi Ltd Microwave polyvalent ion source
JPS6424338A (en) * 1987-07-17 1989-01-26 Nissin Electric Co Ltd Ion source
US4847476A (en) * 1986-06-16 1989-07-11 Hitachi, Ltd. Ion source device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS539993A (en) * 1976-07-15 1978-01-28 Toshiba Corp Ion producing device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS539993A (en) * 1976-07-15 1978-01-28 Toshiba Corp Ion producing device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58194300A (en) * 1981-12-24 1983-11-12 株式会社日立製作所 Ion source for neutral particle incident device
JPS6166869A (en) * 1984-09-11 1986-04-05 Toshiba Corp Rf type ion engine
US4847476A (en) * 1986-06-16 1989-07-11 Hitachi, Ltd. Ion source device
JPS63228549A (en) * 1987-03-18 1988-09-22 Hitachi Ltd Microwave polyvalent ion source
JPS6424338A (en) * 1987-07-17 1989-01-26 Nissin Electric Co Ltd Ion source

Also Published As

Publication number Publication date
JPS6250941B2 (en) 1987-10-27

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