JPS6424338A - Ion source - Google Patents

Ion source

Info

Publication number
JPS6424338A
JPS6424338A JP17958387A JP17958387A JPS6424338A JP S6424338 A JPS6424338 A JP S6424338A JP 17958387 A JP17958387 A JP 17958387A JP 17958387 A JP17958387 A JP 17958387A JP S6424338 A JPS6424338 A JP S6424338A
Authority
JP
Japan
Prior art keywords
ion source
tubes
source room
metallic vapor
magnets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17958387A
Other languages
Japanese (ja)
Inventor
Yoshiaki Takeda
Koji Matsunaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP17958387A priority Critical patent/JPS6424338A/en
Publication of JPS6424338A publication Critical patent/JPS6424338A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To make it possible to send metallic vapor in an ion source room from an oven envelope through metallic vapor introducing tubes by providing the said tubes in spaces between magnets arranged on the outer wall of the ion source room so that the tubes are led to the inside of the said room. CONSTITUTION:Magnets 8 are arranged on the whole periphery of an ion source room 1 orderly in the longitudinal direction so that the polarity of the said magnets is reversed alternately. On the bottom of the ion source room 1 bar magnet 8' are arranged to be parallel to each other, and in the spaces between the magnets 8' metallic vapor introducing tubes 2 are provided so that the respective ends of the said tubes 2 are led to the bottom of the ion source room 1. Thereby a regular multicusped magnetic field can be produced even in the area in which the metallic vapor introducing tubes are connected to the ion source room, so that metallic vapor from an oven envelope 4 can be sent in the ion source room through the introducing tubes 2.
JP17958387A 1987-07-17 1987-07-17 Ion source Pending JPS6424338A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17958387A JPS6424338A (en) 1987-07-17 1987-07-17 Ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17958387A JPS6424338A (en) 1987-07-17 1987-07-17 Ion source

Publications (1)

Publication Number Publication Date
JPS6424338A true JPS6424338A (en) 1989-01-26

Family

ID=16068263

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17958387A Pending JPS6424338A (en) 1987-07-17 1987-07-17 Ion source

Country Status (1)

Country Link
JP (1) JPS6424338A (en)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5494282A (en) * 1977-12-30 1979-07-25 Ibm Negative ion extractor
JPS5615535A (en) * 1979-07-18 1981-02-14 Nec Kyushu Ltd Ion source chamber
JPS5663799A (en) * 1979-10-26 1981-05-30 Hitachi Ltd Ion source
JPS5679900A (en) * 1979-12-05 1981-06-30 Hitachi Ltd Ion source
JPS6193534A (en) * 1984-07-26 1986-05-12 ユナイテッド　キングドム　アトミック　エナ↓−ヂイ　オ↓−ソリテイ Ion source
JPS62179583A (en) * 1986-01-31 1987-08-06 Japan Synthetic Rubber Co Ltd Adhesive composition
JPS62281236A (en) * 1986-05-29 1987-12-07 Hitachi Ltd Ion source

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5494282A (en) * 1977-12-30 1979-07-25 Ibm Negative ion extractor
JPS5615535A (en) * 1979-07-18 1981-02-14 Nec Kyushu Ltd Ion source chamber
JPS5663799A (en) * 1979-10-26 1981-05-30 Hitachi Ltd Ion source
JPS5679900A (en) * 1979-12-05 1981-06-30 Hitachi Ltd Ion source
JPS6193534A (en) * 1984-07-26 1986-05-12 ユナイテッド　キングドム　アトミック　エナ↓−ヂイ　オ↓−ソリテイ Ion source
JPS62179583A (en) * 1986-01-31 1987-08-06 Japan Synthetic Rubber Co Ltd Adhesive composition
JPS62281236A (en) * 1986-05-29 1987-12-07 Hitachi Ltd Ion source

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