JPS5617340A - Rotary shutter for separate exposure - Google Patents

Rotary shutter for separate exposure

Info

Publication number
JPS5617340A
JPS5617340A JP9262479A JP9262479A JPS5617340A JP S5617340 A JPS5617340 A JP S5617340A JP 9262479 A JP9262479 A JP 9262479A JP 9262479 A JP9262479 A JP 9262479A JP S5617340 A JPS5617340 A JP S5617340A
Authority
JP
Japan
Prior art keywords
rotary
circumference
rotary cylinder
separate exposure
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9262479A
Other languages
Japanese (ja)
Other versions
JPS6049890B2 (en
Inventor
Tadao Saito
Kazuo Minowa
Munenori Kanai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP54092624A priority Critical patent/JPS6049890B2/en
Publication of JPS5617340A publication Critical patent/JPS5617340A/en
Publication of JPS6049890B2 publication Critical patent/JPS6049890B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Shutters For Cameras (AREA)

Abstract

PURPOSE: To miniaturize a rotary shutter for separate exposure and to use X-rays with high efficiency by driving a shutter plate, arranged in an airtight container, externally by use of electromagnetic force.
CONSTITUTION: Rotary cyclinder 8 provided at one end surface with shutter plate 1 having notch window 3 is sequentially rotated for separate exposure. Permanent magnets 4a and 4b provided on the outer circumference of rotary cylinder 8 have magnetic poles opposing to each other along the circumference and rotary cylinder 8 is supported in vacuum contaniner 2 by steel balls 9 being horizontally rotatable. Cohering to the outer circumference of vacuum container 2, four electromagnets consisting of yoke 5 and coil 6 are arranged at quartered points of the circumference and each yoke 5 is coupled by magnetic-substance ring 7. Then while the polarity of each electromagnet is controlled in accordance with the direction of electric current flowed through coil 6, rotary cylinder 8 is intermittently turned in vaccum container 2 by external driving through magnetic force action between permanent magnets 4a and 4b and those electromagnets.
COPYRIGHT: (C)1981,JPO&Japio
JP54092624A 1979-07-23 1979-07-23 Rotating shutter for split exposure Expired JPS6049890B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54092624A JPS6049890B2 (en) 1979-07-23 1979-07-23 Rotating shutter for split exposure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54092624A JPS6049890B2 (en) 1979-07-23 1979-07-23 Rotating shutter for split exposure

Publications (2)

Publication Number Publication Date
JPS5617340A true JPS5617340A (en) 1981-02-19
JPS6049890B2 JPS6049890B2 (en) 1985-11-05

Family

ID=14059591

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54092624A Expired JPS6049890B2 (en) 1979-07-23 1979-07-23 Rotating shutter for split exposure

Country Status (1)

Country Link
JP (1) JPS6049890B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0488652U (en) * 1990-12-14 1992-07-31

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63170293U (en) * 1987-04-24 1988-11-07
JPH0428631Y2 (en) * 1987-06-10 1992-07-10
JPH01150994U (en) * 1988-04-06 1989-10-18

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS495250U (en) * 1972-04-12 1974-01-17

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS495250U (en) * 1972-04-12 1974-01-17

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0488652U (en) * 1990-12-14 1992-07-31

Also Published As

Publication number Publication date
JPS6049890B2 (en) 1985-11-05

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