JPS5663799A - Ion source - Google Patents
Ion sourceInfo
- Publication number
- JPS5663799A JPS5663799A JP13767679A JP13767679A JPS5663799A JP S5663799 A JPS5663799 A JP S5663799A JP 13767679 A JP13767679 A JP 13767679A JP 13767679 A JP13767679 A JP 13767679A JP S5663799 A JPS5663799 A JP S5663799A
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- ion
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
- Plasma Technology (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13767679A JPS5663799A (en) | 1979-10-26 | 1979-10-26 | Ion source |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13767679A JPS5663799A (en) | 1979-10-26 | 1979-10-26 | Ion source |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5663799A true JPS5663799A (en) | 1981-05-30 |
Family
ID=15204206
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13767679A Pending JPS5663799A (en) | 1979-10-26 | 1979-10-26 | Ion source |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5663799A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57113539A (en) * | 1980-12-24 | 1982-07-15 | Ibm | High temperature multipole plasma ion beam source |
JPS57185653A (en) * | 1981-05-11 | 1982-11-15 | Toshiba Corp | Ion-source device |
JPS60258839A (en) * | 1984-06-06 | 1985-12-20 | Hitachi Ltd | Ion beam apparatus |
US4767931A (en) * | 1986-12-17 | 1988-08-30 | Hitachi, Ltd. | Ion beam apparatus |
JPS6424338A (en) * | 1987-07-17 | 1989-01-26 | Nissin Electric Co Ltd | Ion source |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5494282A (en) * | 1977-12-30 | 1979-07-25 | Ibm | Negative ion extractor |
-
1979
- 1979-10-26 JP JP13767679A patent/JPS5663799A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5494282A (en) * | 1977-12-30 | 1979-07-25 | Ibm | Negative ion extractor |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57113539A (en) * | 1980-12-24 | 1982-07-15 | Ibm | High temperature multipole plasma ion beam source |
JPS57185653A (en) * | 1981-05-11 | 1982-11-15 | Toshiba Corp | Ion-source device |
JPS60258839A (en) * | 1984-06-06 | 1985-12-20 | Hitachi Ltd | Ion beam apparatus |
US4767931A (en) * | 1986-12-17 | 1988-08-30 | Hitachi, Ltd. | Ion beam apparatus |
JPS6424338A (en) * | 1987-07-17 | 1989-01-26 | Nissin Electric Co Ltd | Ion source |
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