GB2061608B - Ion sources - Google Patents

Ion sources

Info

Publication number
GB2061608B
GB2061608B GB8025089A GB8025089A GB2061608B GB 2061608 B GB2061608 B GB 2061608B GB 8025089 A GB8025089 A GB 8025089A GB 8025089 A GB8025089 A GB 8025089A GB 2061608 B GB2061608 B GB 2061608B
Authority
GB
United Kingdom
Prior art keywords
ion sources
sources
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8025089A
Other versions
GB2061608A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Atomic Energy Authority
Original Assignee
UK Atomic Energy Authority
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Atomic Energy Authority filed Critical UK Atomic Energy Authority
Priority to GB8025089A priority Critical patent/GB2061608B/en
Publication of GB2061608A publication Critical patent/GB2061608A/en
Application granted granted Critical
Publication of GB2061608B publication Critical patent/GB2061608B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/04—Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
GB8025089A 1979-08-08 1980-07-31 Ion sources Expired GB2061608B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB8025089A GB2061608B (en) 1979-08-08 1980-07-31 Ion sources

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB7927678 1979-08-08
GB8025089A GB2061608B (en) 1979-08-08 1980-07-31 Ion sources

Publications (2)

Publication Number Publication Date
GB2061608A GB2061608A (en) 1981-05-13
GB2061608B true GB2061608B (en) 1983-03-02

Family

ID=26272479

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8025089A Expired GB2061608B (en) 1979-08-08 1980-07-31 Ion sources

Country Status (1)

Country Link
GB (1) GB2061608B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107004550A (en) * 2014-10-27 2017-08-01 恩特格里斯公司 Ion implantation technology and equipment

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4950957A (en) * 1988-11-04 1990-08-21 Westinghouse Electric Corp. Extended ion sources and method for using them in an insulation defect detector

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107004550A (en) * 2014-10-27 2017-08-01 恩特格里斯公司 Ion implantation technology and equipment
CN107004550B (en) * 2014-10-27 2019-04-02 恩特格里斯公司 Ion implantation technology and equipment
US10497532B2 (en) 2014-10-27 2019-12-03 Entegris, Inc. Ion implantation processes and apparatus

Also Published As

Publication number Publication date
GB2061608A (en) 1981-05-13

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Legal Events

Date Code Title Description
746 Register noted 'licences of right' (sect. 46/1977)
PCNP Patent ceased through non-payment of renewal fee