JPS619800U - Condense mechanism of ultra-high pressure accelerator tube - Google Patents

Condense mechanism of ultra-high pressure accelerator tube

Info

Publication number
JPS619800U
JPS619800U JP9477384U JP9477384U JPS619800U JP S619800 U JPS619800 U JP S619800U JP 9477384 U JP9477384 U JP 9477384U JP 9477384 U JP9477384 U JP 9477384U JP S619800 U JPS619800 U JP S619800U
Authority
JP
Japan
Prior art keywords
tube
ultra
accelerating
high pressure
accelerator tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9477384U
Other languages
Japanese (ja)
Inventor
正二 加藤
Original Assignee
日本電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電子株式会社 filed Critical 日本電子株式会社
Priority to JP9477384U priority Critical patent/JPS619800U/en
Publication of JPS619800U publication Critical patent/JPS619800U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図、第２図は本考案の一実施例の構成図、第３図及
び第４図は本考案を説明するための図で、第５図は動作
を説明するための図である。 １：加速管、４：フィラメント、５：ウェーネルト電極
、６：スイッチ機構、７：高圧電源、８：鏡筒、９：イ
オンポンプ、１０：ターボ分子ポンプ、１１，１２，１
５，１６，１８：バルブ、１３：油回転ポンプ、１４：
チャンバー、１７：ガス供給源、１９：真空計、２０．
２１，２２，２３，２４，２５，２６：プーリー、
２７：ベルト、２８：ベルト駆動手段、２９：可変交流
電源、３０：昇圧トランス、３１：制御手段、３２：モ
ード指定手段。1 and 2 are block diagrams of an embodiment of the present invention, FIGS. 3 and 4 are diagrams for explaining the present invention, and FIG. 5 is a diagram for explaining the operation. 1: Accelerator tube, 4: Filament, 5: Wehnelt electrode, 6: Switch mechanism, 7: High voltage power supply, 8: Lens barrel, 9: Ion pump, 10: Turbo molecular pump, 11, 12, 1
5, 16, 18: Valve, 13: Oil rotary pump, 14:
Chamber, 17: Gas supply source, 19: Vacuum gauge, 20.
21, 22, 23, 24, 25, 26: Pulley,
27: Belt, 28: Belt driving means, 29: Variable AC power supply, 30: Step-up transformer, 31: Control means, 32: Mode specifying means.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 複数の加速電極を有する加速管と、該加速電極に印加さ
れる電圧を運転、グロー放電、マイクロ放電に応じて切
り換えるための手段と、該加速管を排気するための手段
と、該加速管に接続されたガス容器と、該加速管を運転
モードからグロー放電によるコンデショニングモードに
切り換えた際に、該加速管内の圧力を監視することによ
りグロー放電圧力まで該ガスを該加速管へ供給するため
の手段を具備したことを特徴とする超高圧加速管のフン
デショニング機構。An accelerating tube having a plurality of accelerating electrodes, a means for switching the voltage applied to the accelerating electrode according to operation, glow discharge, and micro discharge, a means for evacuating the accelerating tube, and a means for evacuating the accelerating tube. In order to supply the gas to the acceleration tube up to the glow discharge pressure by monitoring the pressure inside the acceleration tube when the connected gas container and the acceleration tube are switched from the operating mode to the conditioning mode by glow discharge. A foundational mechanism for an ultra-high pressure accelerator tube, characterized in that it is equipped with means.
JP9477384U 1984-06-25 1984-06-25 Condense mechanism of ultra-high pressure accelerator tube Pending JPS619800U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9477384U JPS619800U (en) 1984-06-25 1984-06-25 Condense mechanism of ultra-high pressure accelerator tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9477384U JPS619800U (en) 1984-06-25 1984-06-25 Condense mechanism of ultra-high pressure accelerator tube

Publications (1)

Publication Number Publication Date
JPS619800U true JPS619800U (en) 1986-01-21

Family

ID=30653531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9477384U Pending JPS619800U (en) 1984-06-25 1984-06-25 Condense mechanism of ultra-high pressure accelerator tube

Country Status (1)

Country Link
JP (1) JPS619800U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63117192U (en) * 1987-01-23 1988-07-28

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5612541A (en) * 1979-07-11 1981-02-06 Chiyou Lsi Gijutsu Kenkyu Kumiai Removing device of contaminant
JPS5877712A (en) * 1981-11-04 1983-05-11 昭和アルミニウム株式会社 Manufacture of hollow extruded sections made of aluminum for high vacuum
JPS58103809A (en) * 1981-12-10 1983-06-21 株式会社東芝 Automatic gas treating device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5612541A (en) * 1979-07-11 1981-02-06 Chiyou Lsi Gijutsu Kenkyu Kumiai Removing device of contaminant
JPS5877712A (en) * 1981-11-04 1983-05-11 昭和アルミニウム株式会社 Manufacture of hollow extruded sections made of aluminum for high vacuum
JPS58103809A (en) * 1981-12-10 1983-06-21 株式会社東芝 Automatic gas treating device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63117192U (en) * 1987-01-23 1988-07-28

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