JP6030662B2 - 質量分光計の真空インターフェース方法および真空インターフェース装置 - Google Patents

質量分光計の真空インターフェース方法および真空インターフェース装置 Download PDF

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JP6030662B2
JP6030662B2 JP2014546498A JP2014546498A JP6030662B2 JP 6030662 B2 JP6030662 B2 JP 6030662B2 JP 2014546498 A JP2014546498 A JP 2014546498A JP 2014546498 A JP2014546498 A JP 2014546498A JP 6030662 B2 JP6030662 B2 JP 6030662B2
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Prior art keywords
skimmer
plasma
getter
skimmer device
cone
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Expired - Fee Related
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JP2014546498A
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Japanese (ja)
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JP2015502023A (ja
JP2015502023A5 (enExample
Inventor
アレクサンダー アレクセーエヴィチ マカロフ
アレクサンダー アレクセーエヴィチ マカロフ
ローター ロットマン
ローター ロットマン
Original Assignee
サーモ フィッシャー サイエンティフィック （ブレーメン） ゲーエムベーハー
サーモ フィッシャー サイエンティフィック （ブレーメン） ゲーエムベーハー
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0495—Vacuum locks; Valves
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/067—Ion lenses, apertures, skimmers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP2014546498A 2011-12-12 2012-12-12 質量分光計の真空インターフェース方法および真空インターフェース装置 Expired - Fee Related JP6030662B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1121291.7 2011-12-12
GB1121291.7A GB2498174B (en) 2011-12-12 2011-12-12 Mass spectrometer vacuum interface method and apparatus
PCT/EP2012/075302 WO2013087732A1 (en) 2011-12-12 2012-12-12 Mass spectrometer vacuum interface method and apparatus

Publications (3)

Publication Number Publication Date
JP2015502023A JP2015502023A (ja) 2015-01-19
JP2015502023A5 JP2015502023A5 (enExample) 2015-02-26
JP6030662B2 true JP6030662B2 (ja) 2016-11-24

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JP2014546498A Expired - Fee Related JP6030662B2 (ja) 2011-12-12 2012-12-12 質量分光計の真空インターフェース方法および真空インターフェース装置

Country Status (8)

Country Link
US (1) US9697999B2 (enExample)
JP (1) JP6030662B2 (enExample)
CN (1) CN103988279A (enExample)
AU (1) AU2012351701B2 (enExample)
CA (1) CA2858459C (enExample)
DE (1) DE112012005182B4 (enExample)
GB (1) GB2498174B (enExample)
WO (1) WO2013087732A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2498173C (en) * 2011-12-12 2018-06-27 Thermo Fisher Scient Bremen Gmbh Mass spectrometer vacuum interface method and apparatus
US10446378B2 (en) * 2013-09-20 2019-10-15 Micromass Uk Limited Ion inlet assembly
EP3138117B1 (en) 2014-05-01 2019-11-13 PerkinElmer Health Sciences, Inc. Methods for detection and quantification of selenium and silicon in samples
CN104637773B (zh) * 2015-02-16 2017-03-01 江苏天瑞仪器股份有限公司 质谱仪一级真空结构
US10692692B2 (en) * 2015-05-27 2020-06-23 Kla-Tencor Corporation System and method for providing a clean environment in an electron-optical system
JP6048552B1 (ja) * 2015-08-21 2016-12-21 株式会社 イアス オンライン移送した分析試料の分析システム
DE102015122155B4 (de) 2015-12-17 2018-03-08 Jan-Christoph Wolf Verwendung einer Ionisierungsvorrichtung
EP3639289A2 (de) 2017-06-16 2020-04-22 Plasmion Gmbh Vorrichtung und verfahren zur ionisation eines analyten sowie vorrichtung und verfahren zur analyse eines ionisierten analyten
EP3474311A1 (en) 2017-10-20 2019-04-24 Tofwerk AG Ion molecule reactor
KR102133334B1 (ko) * 2020-02-25 2020-07-14 영인에이스 주식회사 질량분석기
KR102728997B1 (ko) * 2021-12-02 2024-11-13 영인에이스 주식회사 질량 분석기
CN114536480B (zh) * 2022-03-02 2023-05-23 重庆天荣日盛家居科技有限公司 多工位木质家居板材切割设备

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4341662A (en) 1980-04-11 1982-07-27 Pfefferle William C Method of catalytically coating low porosity ceramic surfaces
JPS6420669A (en) 1987-07-16 1989-01-24 Fujitsu Ltd Field-effect semiconductor device
JPH0542611Y2 (enExample) * 1987-07-29 1993-10-27
JPS6445049A (en) * 1987-08-14 1989-02-17 Nippon Telegraph & Telephone Mass spectrograph for secondary ion
DE4433807A1 (de) * 1994-09-22 1996-03-28 Finnigan Mat Gmbh Massenspektrometer, insbesondere ICP-MS
GB9525507D0 (en) * 1995-12-14 1996-02-14 Fisons Plc Electrospray and atmospheric pressure chemical ionization mass spectrometer and ion source
JP3521218B2 (ja) * 1997-07-04 2004-04-19 独立行政法人産業技術総合研究所 金属−絶縁性セラミック複合サンプラー及びスキマー
GB9820210D0 (en) 1998-09-16 1998-11-11 Vg Elemental Limited Means for removing unwanted ions from an ion transport system and mass spectrometer
US6703610B2 (en) * 2002-02-01 2004-03-09 Agilent Technologies, Inc. Skimmer for mass spectrometry
WO2003077280A1 (en) 2002-03-08 2003-09-18 Varian Australia Pty Ltd A plasma mass spectrometer
US7009176B2 (en) * 2004-03-08 2006-03-07 Thermo Finnigan Llc Titanium ion transfer components for use in mass spectrometry
US7741600B2 (en) 2006-11-17 2010-06-22 Thermo Finnigan Llc Apparatus and method for providing ions to a mass analyzer
JP5308641B2 (ja) * 2007-08-09 2013-10-09 アジレント・テクノロジーズ・インク プラズマ質量分析装置
US7915580B2 (en) * 2008-10-15 2011-03-29 Thermo Finnigan Llc Electro-dynamic or electro-static lens coupled to a stacked ring ion guide
GB0908252D0 (en) * 2009-05-13 2009-06-24 Micromass Ltd Surface coating on sampling cone of mass spectrometer

Also Published As

Publication number Publication date
AU2012351701A1 (en) 2014-07-03
US20140331861A1 (en) 2014-11-13
AU2012351701B2 (en) 2015-10-29
DE112012005182T5 (de) 2014-08-28
GB2498174A (en) 2013-07-10
GB2498174B (en) 2016-06-29
CN103988279A (zh) 2014-08-13
CA2858459C (en) 2020-03-31
GB201121291D0 (en) 2012-01-25
JP2015502023A (ja) 2015-01-19
US9697999B2 (en) 2017-07-04
DE112012005182B4 (de) 2021-01-21
CA2858459A1 (en) 2013-06-20
WO2013087732A1 (en) 2013-06-20

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