JP2015088654A - 半導体モジュール - Google Patents
半導体モジュール Download PDFInfo
- Publication number
- JP2015088654A JP2015088654A JP2013226731A JP2013226731A JP2015088654A JP 2015088654 A JP2015088654 A JP 2015088654A JP 2013226731 A JP2013226731 A JP 2013226731A JP 2013226731 A JP2013226731 A JP 2013226731A JP 2015088654 A JP2015088654 A JP 2015088654A
- Authority
- JP
- Japan
- Prior art keywords
- base plate
- insulating substrate
- wire bonding
- semiconductor module
- positioning wire
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 65
- 239000000758 substrate Substances 0.000 claims abstract description 57
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 238000009413 insulation Methods 0.000 abstract 4
- 230000006866 deterioration Effects 0.000 abstract 1
- 238000012986 modification Methods 0.000 description 21
- 230000004048 modification Effects 0.000 description 21
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 238000007789 sealing Methods 0.000 description 5
- 229910000679 solder Inorganic materials 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 238000013459 approach Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000011889 copper foil Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
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- H01L23/043—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having a conductive base as a mounting as well as a lead for the semiconductor body
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Abstract
Description
て同一または相当する部分には同一の参照番号を付しその説明は繰返さない。
はじめに、本発明の一実施の形態である実施の形態1について説明する。まず、本実施の形態に係る半導体モジュールの構造について説明する。図1を参照して、本実施の形態に係る半導体モジュールとしてのパワーモジュール1は、ケース2と、ベース板3と、電力端子4と、信号端子5と、電力配線4aおよび信号配線5a(ボンディングワイヤ)と、絶縁基板8と、半導体チップ10と、シリコンゲル12と、封止樹脂13とを主に備えている。
次に、本実施の形態に係るパワーモジュール1の第1の変形例について説明する。図3は、本変形例における絶縁基板8およびパターン層9の構造を示している。図3を参照して、本変形例では、絶縁基板8の裏面8b上に形成されたパターン層9の端部に切欠部22(22a〜22d)(受け部)が複数形成されている。より具体的には、パターン層9は外周形状が矩形状からなり、当該矩形状における四つの角部に切欠部22a〜22dが各々形成されている。そして、切欠部22a〜22dの各々に位置決め用ワイヤボンディング部20a〜20d(図2)が位置することにより、絶縁基板8がベース板3に対して位置決めされるようになっている。これにより、パターン層9の加工がより容易になるため生産性をより向上させることができる。
次に、本実施の形態に係るパワーモジュール1の第2の変形例について説明する。図4は、本変形例における絶縁基板8およびパターン層9の構造を示している。図4を参照して、本変形例では、パターン層9の外周形状を成す矩形状における対向する二つの角部を切り欠いた部分である切欠部22a,22dが形成されている。そして、切欠部22a,22dの各々に位置決め用ワイヤボンディング部20a,20d(図1)が位置することにより、絶縁基板8がベース板3に対して位置決めされるようになっている。これにより、パターン層9の形状がより簡略化されて生産性がさらに向上する。また上記矩形状において対向する二つの角部(最も離れた二つの角部)に切欠部22a,22dを形成することにより、ベース板3に対する絶縁基板8の位置決め精度をより向上させることができる。
次に、本実施の形態に係るパワーモジュール1の第3の変形例について説明する。図5は、本変形例における絶縁基板8およびパターン層9の構造を示している。図5を参照して、本変形例では、パターン層9の外周形状を成す矩形状における対向する二つの角部を切り欠いた切欠部22a,22dに加えて、上記二つの角部と異なる一つの角部を切り欠いた部分である切欠部22cがさらに形成されている。そして、切欠部22a,22c,22dの各々に位置決め用ワイヤボンディング部20a,20c,20d(図1)が位置することにより、絶縁基板8がベース板3に対して位置決めされるようになっている。これにより、絶縁基板8がベース板3に対して傾くことが抑制され、ベース板3に対する絶縁基板8の位置決め精度がさらに向上する。
次に、本実施の形態に係るパワーモジュール1の第4の変形例について説明する。図6は、本変形例における絶縁基板8およびパターン層9の構造を示している。図6を参照して、本変形例では、パターン層9の外周形状を成す矩形状の辺を切り欠いた部分である切欠部23a〜23dが形成されている。そして、切欠部23a〜23dの各々に位置決め用ワイヤボンディング部20が位置することにより、絶縁基板8がベース板3に対して位置決めされるようになっている。これにより、切欠部23a〜23dの各々に収容される位置決め用ワイヤボンディング部20において二箇所以上のボンディング部分を設けることができる。その結果、ボンディングによりワイヤ形状が変化しない箇所を設けることが可能になり、ベース板3と絶縁基板8との間においてワイヤ径に相当する距離をより確実に確保することが可能になる。
次に、本発明の他の実施の形態である実施の形態2について説明する。本実施の形態に係る半導体モジュールは、上記実施の形態1に係る半導体モジュールと基本的に同様の構成を備え、かつ同様の効果を奏する。しかし、本実施の形態に係る半導体モジュールは半導体チップを駆動させるための制御回路をさらに備える点において上記実施の形態1に係る半導体モジュールとは異なっている。
Claims (9)
- 位置決め用ワイヤボンディング部が表面に設けられたベース板と、
前記ベース板に対向する裏面側において前記位置決め用ワイヤボンディング部を収容する受け部が設けられ、前記受け部が前記位置決め用ワイヤボンディング部を収容することにより前記ベース板に対して位置決めされた状態で前記ベース板に固定される絶縁基板と、
前記絶縁基板において前記裏面と反対の表面側に配置される半導体チップとを備える、半導体モジュール。 - 前記ベース板の前記表面には、複数の前記位置決め用ワイヤボンディング部が設けられ、
前記絶縁基板の前記裏面側には、複数の前記位置決め用ワイヤボンディング部の各々を収容する複数の前記受け部が設けられている、請求項1に記載の半導体モジュール。 - 前記受け部は、前記絶縁基板の前記裏面上に形成されたパターン層に設けられた穴部であり、
前記絶縁基板は、前記穴部に前記位置決め用ワイヤボンディング部が挿入されることにより前記ベース板に対して位置決めされる、請求項1または2に記載の半導体モジュール。 - 前記穴部は、前記パターン層の外周形状を成す矩形状における角部または前記矩形状の辺に隣接する部分に設けられている、請求項3に記載の半導体モジュール。
- 前記受け部は、前記絶縁基板の前記裏面上に形成されたパターン層の端部に設けられた切欠部であり、
前記絶縁基板は、前記切欠部に前記位置決め用ワイヤボンディング部が位置することにより前記ベース板に対して位置決めされる、請求項1または2に記載の半導体モジュール。 - 前記切欠部は、前記パターン層の外周形状を成す矩形状における対向する二つの角部を切り欠いた部分を含む、請求項5に記載の半導体モジュール。
- 前記切欠部は、前記二つの角部と異なる一つの角部を切り欠いた部分をさらに含む、請求項6に記載の半導体モジュール。
- 前記切欠部は、前記パターン層の外周形状を成す矩形状の辺を切り欠いた部分をさらに含む、請求項5〜7のいずれか1項に記載の半導体モジュール。
- 前記半導体チップを駆動させる制御回路をさらに備える、請求項1〜8のいずれか1項に記載の半導体モジュール。
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DE102014218389.8A DE102014218389B4 (de) | 2013-10-31 | 2014-09-12 | Halbleitermodul |
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JPH10321651A (ja) * | 1997-05-19 | 1998-12-04 | Mitsubishi Electric Corp | 半導体装置 |
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JP2000349231A (ja) * | 1999-06-02 | 2000-12-15 | Hitachi Ltd | パワー半導体モジュール |
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