JP2015053474A - 半導体装置およびその製造方法 - Google Patents
半導体装置およびその製造方法 Download PDFInfo
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- JP2015053474A JP2015053474A JP2014149681A JP2014149681A JP2015053474A JP 2015053474 A JP2015053474 A JP 2015053474A JP 2014149681 A JP2014149681 A JP 2014149681A JP 2014149681 A JP2014149681 A JP 2014149681A JP 2015053474 A JP2015053474 A JP 2015053474A
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- Prior art keywords
- film
- insulating film
- semiconductor device
- gate electrode
- silicon
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- 238000000034 method Methods 0.000 title claims description 88
- 238000004519 manufacturing process Methods 0.000 title claims description 56
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- 229910052735 hafnium Inorganic materials 0.000 claims abstract description 235
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims abstract description 228
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 152
- 239000010703 silicon Substances 0.000 claims abstract description 151
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 147
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- 239000001301 oxygen Substances 0.000 claims abstract description 30
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 claims description 172
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 162
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 60
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 46
- 238000010438 heat treatment Methods 0.000 claims description 41
- 102100036826 Aldehyde oxidase Human genes 0.000 abstract description 72
- 101000928314 Homo sapiens Aldehyde oxidase Proteins 0.000 abstract description 72
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- 229910052581 Si3N4 Inorganic materials 0.000 description 22
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- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 21
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- YKTSYUJCYHOUJP-UHFFFAOYSA-N [O--].[Al+3].[Al+3].[O-][Si]([O-])([O-])[O-] Chemical compound [O--].[Al+3].[Al+3].[O-][Si]([O-])([O-])[O-] YKTSYUJCYHOUJP-UHFFFAOYSA-N 0.000 description 15
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- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- 229910004129 HfSiO Inorganic materials 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 4
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- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 2
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 2
- ITWBWJFEJCHKSN-UHFFFAOYSA-N 1,4,7-triazonane Chemical compound C1CNCCNCCN1 ITWBWJFEJCHKSN-UHFFFAOYSA-N 0.000 description 1
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- 239000002253 acid Substances 0.000 description 1
- UQZIWOQVLUASCR-UHFFFAOYSA-N alumane;titanium Chemical compound [AlH3].[Ti] UQZIWOQVLUASCR-UHFFFAOYSA-N 0.000 description 1
- 150000004645 aluminates Chemical class 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- IVHJCRXBQPGLOV-UHFFFAOYSA-N azanylidynetungsten Chemical compound [W]#N IVHJCRXBQPGLOV-UHFFFAOYSA-N 0.000 description 1
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- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
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- OWJUDUZMAXZIOA-UHFFFAOYSA-N dialuminum hafnium(4+) oxygen(2-) Chemical compound [O--].[O--].[O--].[Al+3].[Al+3].[Hf+4] OWJUDUZMAXZIOA-UHFFFAOYSA-N 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
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- 150000003376 silicon Chemical class 0.000 description 1
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- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
Classifications
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- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/792—Field effect transistors with field effect produced by an insulated gate with charge trapping gate insulator, e.g. MNOS-memory transistors
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
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- H01L29/51—Insulating materials associated therewith
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7827—Vertical transistors
- H01L29/7828—Vertical transistors without inversion channel, e.g. vertical ACCUFETs, normally-on vertical MISFETs
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
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- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02142—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing silicon and at least one metal element, e.g. metal silicate based insulators or metal silicon oxynitrides
- H01L21/02148—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing silicon and at least one metal element, e.g. metal silicate based insulators or metal silicon oxynitrides the material containing hafnium, e.g. HfSiOx or HfSiON
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- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
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- H01L21/02178—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal the material containing aluminium, e.g. Al2O3
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- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
- H01L21/02359—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment to change the surface groups of the insulating layer
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28158—Making the insulator
- H01L21/28229—Making the insulator by deposition of a layer, e.g. metal, metal compound or poysilicon, followed by transformation thereof into an insulating layer
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- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
- H01L29/4011—Multistep manufacturing processes for data storage electrodes
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- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
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- H01L29/42312—Gate electrodes for field effect devices
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Abstract
【解決手段】半導体基板SB上にメモリ素子用のゲート絶縁膜である絶縁膜MZが形成され、絶縁膜MZ上にメモリ素子用のゲート電極MGが形成されている。絶縁膜MZは、第1絶縁膜AOX1と、その上の第2絶縁膜HSOと、その上の第3絶縁膜AOX2とを有しており、第2絶縁膜HSOは、電荷蓄積機能を有する高誘電率絶縁膜であり、ハフニウムとシリコンと酸素とを含有している。第1絶縁膜AOX1および第3絶縁膜AOX2のそれぞれのバンドギャップは、第2絶縁膜HSOのバンドギャップよりも大きい。
【選択図】図2
Description
<半導体装置の構造について>
本実施の形態の半導体装置を図面を参照して説明する。図1は、本実施の形態の半導体装置の要部断面図である。図2は、図1の半導体装置の一部を拡大して示した部分拡大断面図である。
次に、本実施の形態の半導体装置の製造方法について説明する。
本実施の形態の半導体装置は、半導体基板SBと、半導体基板SB上に形成された、メモリ素子MC用のゲート絶縁膜(ここでは絶縁膜MZ)と、そのゲート絶縁膜上に形成された、メモリ素子MC用のゲート電極MGとを有している。このメモリ素子MCのゲート絶縁膜(ここでは絶縁膜MZ)は、第1絶縁膜(ここでは酸化アルミニウム膜AOX1)と、その第1絶縁膜上の第2絶縁膜(ここではハフニウムシリケート膜HSO)と、その第2絶縁膜上の第3絶縁膜(ここでは酸化アルミニウム膜AOX2)とを有している。この第2絶縁膜(ここではハフニウムシリケート膜HSO)は、電荷蓄積機能を有する高誘電率絶縁膜(すなわち高誘電率膜からなるトラップ性絶縁膜)であり、ハフニウムとシリコンと酸素とを含有している。第1絶縁膜(ここでは酸化アルミニウム膜AOX1)および第3絶縁膜(ここでは酸化アルミニウム膜AOX2)のそれぞれのバンドギャップは、第2絶縁膜(ここではハフニウムシリケート膜HSO)のバンドギャップよりも大きい。第2絶縁膜(ここではハフニウムシリケート膜HSO)におけるハフニウムとシリコンの原子比(原子数の比)をx:yとしたときに、0.77≦x/(x+y)≦0.91が成り立つ。なお、xとyは、整数であっても、整数でなくてもよい。
上記実施の形態1は、シングルゲート型のメモリ素子に適用した場合について説明した。本実施の形態2は、スプリットゲート型のメモリ素子に適用した場合について説明する。
CG 制御ゲート電極
CT コンタクトホール
EX,EX1,EX2 n−型半導体領域
GI 絶縁膜
HSO ハフニウムシリケート膜
IL1,IL2 絶縁膜
MG ゲート電極
MG1 メモリゲート電極
MZ 絶縁膜
OX1 界面層
OX1a 絶縁膜
PG プラグ
PS,PS1,PS2 シリコン膜
PS2a シリコンスペーサ
PW,PW1 p型ウエル
M1 配線
MC,MC1 メモリ素子
MD 半導体領域
MS 半導体領域
SB 半導体基板
SD,SD1,SD2 n+型半導体領域
SL 金属シリサイド層
SW サイドウォールスペーサ
ZF 絶縁膜
Claims (17)
- 半導体基板と、
前記半導体基板上に形成された、メモリ素子用のゲート絶縁膜と、
前記ゲート絶縁膜上に形成された、前記メモリ素子用のゲート電極と、
を有し、
前記ゲート絶縁膜は、第1絶縁膜と、前記第1絶縁膜上の第2絶縁膜と、前記第2絶縁膜上の第3絶縁膜とを有し、
前記第2絶縁膜は、電荷蓄積機能を有する高誘電率絶縁膜であり、ハフニウムとシリコンと酸素とを含有し、
前記第1絶縁膜および前記第3絶縁膜のそれぞれのバンドギャップは、前記第2絶縁膜のバンドギャップよりも大きい、半導体装置。 - 請求項1記載の半導体装置において、
前記第2絶縁膜におけるハフニウムとシリコンの原子比をx:yとしたときに、0.77≦x/(x+y)≦0.91が成り立つ、半導体装置。 - 請求項2記載の半導体装置において、
前記第1絶縁膜と前記第3絶縁膜とは、それぞれ高誘電率膜である、半導体装置。 - 請求項3記載の半導体装置において、
前記第1絶縁膜と前記第3絶縁膜は、それぞれ酸化アルミニウム膜である、半導体装置。 - 請求項4記載の半導体装置において、
前記ゲート絶縁膜と前記半導体基板との界面に形成された、酸化シリコンまたは酸窒化シリコンからなる界面層を更に有する、半導体装置。 - 請求項2記載の半導体装置において、
前記第2絶縁膜は、ハフニウムシリケート膜である、半導体装置。 - 請求項2記載の半導体装置において、
前記半導体基板に形成された、前記メモリ素子用のソースまたはドレイン用の半導体領域を有する、半導体装置。 - メモリ素子を有する半導体装置の製造方法であって、
(a)半導体基板を用意する工程、
(b)前記半導体基板上に、前記メモリ素子のゲート絶縁膜用の積層膜であって、第1絶縁膜と、前記第1絶縁膜上の第2絶縁膜と、前記第2絶縁膜上の第3絶縁膜との前記積層膜を形成する工程、
(c)前記積層膜上に、前記メモリ素子用のゲート電極を形成する工程、
を有し、
前記第2絶縁膜は、電荷蓄積機能を有する高誘電率絶縁膜であり、ハフニウムとシリコンと酸素とを含有し、
前記第1絶縁膜および前記第3絶縁膜のそれぞれのバンドギャップは、前記第2絶縁膜のバンドギャップよりも大きい、半導体装置の製造方法。 - 請求項8記載の半導体装置の製造方法において、
前記第2絶縁膜におけるハフニウムとシリコンの原子比をx:yとしたときに、0.77≦x/(x+y)≦0.91が成り立つ、半導体装置の製造方法。 - 請求項9記載の半導体装置の製造方法において、
前記第1絶縁膜と前記第3絶縁膜とは、それぞれ高誘電率膜である、半導体装置の製造方法。 - 請求項9記載の半導体装置の製造方法において、
前記第1絶縁膜と前記第3絶縁膜は、それぞれ酸化アルミニウム膜である、半導体装置の製造方法。 - 請求項11記載の半導体装置の製造方法において、
前記(a)工程後で、前記(b)工程前に、
(b1)前記半導体基板上に、酸化シリコンまたは酸窒化シリコンからなる絶縁層を形成する工程、
を更に有し、
前記(b)工程では、前記絶縁層上に前記積層膜が形成される、半導体装置の製造方法。 - 請求項9記載の半導体装置の製造方法において、
前記第2絶縁膜は、ハフニウムシリケート膜である、半導体装置の製造方法。 - 請求項9記載の半導体装置の製造方法において、
前記(b)工程において、
前記第2絶縁膜を形成した後でかつ前記第3絶縁膜を形成する前に、あるいは、前記第3絶縁膜を形成した後に、熱処理を行う、半導体装置の製造方法。 - 請求項14記載の半導体装置の製造方法において、
前記熱処理により、前記第2絶縁膜が結晶化される、半導体装置の製造方法。 - 請求項15記載の半導体装置の製造方法において、
前記熱処理の熱処理温度は、800℃以上である、半導体装置の製造方法。 - 請求項16記載の半導体装置の製造方法において、
前記熱処理の熱処理温度は、1050℃以下である、半導体装置の製造方法。
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JP7026537B2 (ja) | 2018-03-07 | 2022-02-28 | ルネサスエレクトロニクス株式会社 | 半導体装置及び半導体装置の製造方法 |
JP2020013850A (ja) * | 2018-07-17 | 2020-01-23 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
US11094833B2 (en) | 2018-07-17 | 2021-08-17 | Renesas Electronics Corporation | Semiconductor device including memory using hafnium and a method of manufacturing the same |
JP7089967B2 (ja) | 2018-07-17 | 2022-06-23 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
US11545502B2 (en) | 2019-10-17 | 2023-01-03 | Renesas Electronics Corporation | Manufacturing method of semiconductor device |
KR20210122658A (ko) * | 2020-03-31 | 2021-10-12 | 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 | 다층 하이-k 게이트 유전체 구조물 |
KR102522338B1 (ko) * | 2020-03-31 | 2023-04-14 | 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 | 다층 하이-k 게이트 유전체 구조물 |
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US20150060991A1 (en) | 2015-03-05 |
US9685565B2 (en) | 2017-06-20 |
KR20150028189A (ko) | 2015-03-13 |
EP2846348A1 (en) | 2015-03-11 |
JP6393104B2 (ja) | 2018-09-19 |
CN104425576B (zh) | 2019-04-05 |
CN104425576A (zh) | 2015-03-18 |
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