JP2014523649A - モノリシックに集積されたアクティブスナバ - Google Patents
モノリシックに集積されたアクティブスナバ Download PDFInfo
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- JP2014523649A JP2014523649A JP2014519290A JP2014519290A JP2014523649A JP 2014523649 A JP2014523649 A JP 2014523649A JP 2014519290 A JP2014519290 A JP 2014519290A JP 2014519290 A JP2014519290 A JP 2014519290A JP 2014523649 A JP2014523649 A JP 2014523649A
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- Prior art keywords
- snubber
- capacitor
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- 239000004065 semiconductor Substances 0.000 claims abstract description 73
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- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 8
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- 238000009713 electroplating Methods 0.000 description 1
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- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
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- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
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- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
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- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
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- H01L27/0629—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type in combination with diodes, or resistors, or capacitors
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/92—Capacitors having potential barriers
- H01L29/94—Metal-insulator-semiconductors, e.g. MOS
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
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- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/41766—Source or drain electrodes for field effect devices with at least part of the source or drain electrode having contact below the semiconductor surface, e.g. the source or drain electrode formed at least partially in a groove or with inclusions of conductor inside the semiconductor
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Abstract
Description
Claims (10)
- 半導体デバイスであって、
半導体基板、
拡張されたドレイン金属酸化物半導体(MOS)トランジスタ、及び
集積されたスナバ、
を含み、
前記拡張されたドレインMOSトランジスタが、
前記基板に配置され、第1の導電型を有するドレインドリフト領域と、
前記基板の頂部表面において前記ドレインドリフト領域に接するように、前記基板に配置されるボディ領域であって、前記第1の導電型とは反対の第2の導電型を有する、前記ボディ領域と、
前記基板の上に配置されるゲートであって、前記ドレインドリフト領域の一部及び前記ボディ領域の一部に重なる、前記ゲートと、
前記ゲートに隣接し、且つ、前記ドレインドリフト領域とは反対で、前記基板に配置されるソース領域であって、前記第1の導電型を有する、前記ソース領域と、
を含み、
前記集積されたスナバが、
スナバキャパシタであって、前記ドレインドリフト領域、前記ドレインドリフト領域の上に配置されるスナバ誘電体層、及び前記誘電体層の上に配置されるスナバキャパシタプレートを含む、前記スナバキャパシタと、
前記ゲートの上に配置されるスナバレジスタであって、前記ソース領域に電気的に結合され、前記スナバキャパシタプレートに電気的に結合される、前記スナバレジスタと、
を含む、半導体デバイス。 - 請求項1に記載のデバイスであって、
前記スナバ誘電体層が10〜200ナノメートルの厚みであり、
前記スナバレジスタが、
プレメタル誘電体(PMD)層に配置される少なくとも一つのスナバキャパシタコンタクトであって、前記スナバキャパシタプレート上に配置され、且つ、前記スナバキャパシタプレートに電気的に接続される、前記スナバキャパシタコンタクト、
前記PMD層に配置される少なくとも一つのスナバソースコンタクトであって、前記ソース領域上に配置され、且つ、前記ソース領域に電気的に接続される、前記スナバソースコンタクト、及び
前記PMD層の上に配置されるスナバレジスタリンクであって、前記スナバキャパシタコンタクトへの及び前記スナバソースコンタクトへの電気的コンタクトを成す、前記スナバレジスタリンク、
を含む、半導体デバイス。 - 請求項1に記載のデバイスであって、前記スナバレジスタが、前記スナバレジスタを介して配置される少なくとも一つのレジスタアパーチャを含む、半導体デバイス。
- 請求項1に記載のデバイスであって、
前記スナバキャパシタ誘電体層が10〜200ナノメートルの厚みであり、
前記スナバキャパシタ誘電体層が更に前記ゲートの上に配置され、
前記スナバキャパシタプレートが、前記ドレインドリフト領域の上に配置されるスナバレジスタ/キャパシタ層の一部であり、前記スナバレジスタ/キャパシタ層が前記スナバキャパシタ誘電体層の上に配置され、そのため、前記スナバレジスタ/キャパシタ層が、前記ドレインドリフト領域より上で、前記ゲートの上及び前記ソース領域の上に延び、
前記スナバレジスタが、前記ゲート及び前記ソース領域の上に配置される前記スナバレジスタ/キャパシタ層の一部であり、
前記スナバレジスタ/キャパシタ層が、少なくとも1つのトランジスタソースコンタクトを介して前記ソース領域に電気的に結合される、
半導体デバイス。 - 請求項4に記載のデバイスであって、前記スナバレジスタ/キャパシタ層が、前記スナバレジスタ/キャパシタ層を介して配置される少なくとも一つのレジスタアパーチャを含む、半導体デバイス。
- 請求項1に記載のデバイスであって、
前記ドレインドリフト領域が、前記基板の前記頂部表面から前記基板の約5〜100ミクロンの深さまで延び、
前記MOSトランジスタが、前記基板の前記底部表面において配置されるドレインコンタクト領域を含み、前記ドレインコンタクト領域が前記第1の導電型を有するように、前記ドレインコンタクト領域が前記ドレインドリフト領域に接し、
前記スナバキャパシタ誘電体層が10〜200ナノメートルの厚みであり、
前記スナバキャパシタ誘電体層が更に前記ゲートの上に配置され、
前記基板が、前記ソース領域を介して前記ボディ領域内に、及び前記ゲートに隣接して前記ゲートから横方向に分離されて、配置されるソーストレンチを含み、
前記スナバキャパシタプレートが、前記ドレインドリフト領域の上に配置されるスナバレジスタ/キャパシタ層の一部であり、前記スナバレジスタ/キャパシタ層が、前記スナバキャパシタ誘電体層の上に配置され、そのため、前記スナバレジスタ/キャパシタ層が、前記ドレインドリフト領域より上で、前記ゲートの上、前記ソース領域の上、及び前記ソーストレンチに延びて、前記ソース領域及び前記ボディ領域と電気的コンタクトを成すようになっており、
前記スナバレジスタが前記ゲート及び前記ソース領域の上に配置される前記スナバレジスタ/キャパシタ層の一部である、
半導体デバイス。 - 請求項6に記載のデバイスであって、前記スナバレジスタ/キャパシタ層が、前記スナバレジスタ/キャパシタ層を介して配置される少なくとも一つのレジスタアパーチャを含む、半導体デバイス。
- 請求項1に記載のデバイスであって、
前記スナバキャパシタ誘電体層が10〜200ナノメートルの厚みであり、
前記スナバレジスタが、プレメタル誘電体(PMD)層の上に配置され、
前記スナバレジスタが、ポリシリコン、タングステンシリサイド、チタンシリサイド、コバルトシリサイド、ニッケルシリサイド、アルミニウム、タングステン、チタン、タンタル、チタンタングステン、窒化チタン、窒化タンタル、ニッケルクロム、シリコンクロム、及びサーメットから成るグループから選択される少なくとも一つの層を含む材料であり、
前記スナバレジスタが、少なくとも1つスナバキャパシタコンタクトを介して前記スナバキャパシタプレートに電気的に接続され、前記スナバキャパシタコンタクトが前記スナバキャパシタプレート上の前記PMD層に配置され、
前記スナバレジスタが、少なくとも1つのトランジスタソースコンタクトを介して前記ソース領域に電気的に接続され、前記トランジスタソースコンタクトが前記スナバキャパシタプレート上の前記PMD層に配置され、
前記半導体デバイスが、前記スナバレジスタを介して前記トランジスタソースコンタクトと電気的コンタクトを成すように、前記スナバレジスタ上に配置されるソース相互接続を含む、
半導体デバイス。 - 請求項8に記載のデバイスであって、前記スナバレジスタが、前記スナバレジスタを介して配置される少なくとも一つのレジスタアパーチャを含む、半導体デバイス。
- 半導体デバイスを形成する方法であって、
半導体基板を提供する工程、
拡張されたドレイン金属酸化物半導体(MOS)トランジスタを形成する工程、及び
集積されたスナバを形成する工程、
を含み、
拡張されたドレインMOSトランジスタを形成する前記工程が、
第1の導電型を有するドレインドリフト領域を前記基板に形成する工程と、
前記第1の導電型とは反対の第2の導電型を有するボディ領域を前記基板に形成する工程であって、前記基板の頂部表面において前記ボディ領域が前記ドレインドリフト領域に接するようにする、工程と、
前記基板の上にゲートを形成する工程であって、前記ゲートが前記ドレインドリフト領域の一部及び前記ボディ領域の一部に部分的に重なるようにする、工程と、
前記ゲートに隣接し、且つ、前記ドレインドリフト領域とは反対で、前記基板にソース領域を形成する工程であって、前記ソース領域が前記第1の導電型を有する、工程と、
を含むプロセスによるものであり、
集積されたスナバを形成する前記工程が、
スナバキャパシタを形成する工程を含むプロセスによるものであり、
スナバキャパシタを形成する前記工程が、
前記ドレインドリフト領域の上にスナバ誘電体層を形成する工程と、
前記スナバ誘電体層の上にスナバキャパシタプレートを形成する工程と、
前記ゲートの上にスナバレジスタを形成する工程であって、前記スナバレジスタが、前記ソース領域に電気的に結合され、且つ、前記スナバキャパシタプレートに電気的に結合される、工程と、
を含むプロセスによるものである、
方法。
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US13/540,813 US8796745B2 (en) | 2011-07-05 | 2012-07-03 | Monolithically integrated active snubber |
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