JP5616823B2 - 半導体装置およびその製造方法 - Google Patents
半導体装置およびその製造方法 Download PDFInfo
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- JP5616823B2 JP5616823B2 JP2011050242A JP2011050242A JP5616823B2 JP 5616823 B2 JP5616823 B2 JP 5616823B2 JP 2011050242 A JP2011050242 A JP 2011050242A JP 2011050242 A JP2011050242 A JP 2011050242A JP 5616823 B2 JP5616823 B2 JP 5616823B2
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- 239000004065 semiconductor Substances 0.000 title claims description 43
- 238000004519 manufacturing process Methods 0.000 title claims description 21
- 239000003990 capacitor Substances 0.000 claims description 37
- 239000000758 substrate Substances 0.000 claims description 28
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 22
- 239000012535 impurity Substances 0.000 claims description 19
- 238000002955 isolation Methods 0.000 claims description 19
- 239000011229 interlayer Substances 0.000 claims description 10
- 238000000059 patterning Methods 0.000 claims 2
- 238000005530 etching Methods 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 6
- 229910052814 silicon oxide Inorganic materials 0.000 description 6
- 238000002513 implantation Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 125000004429 atom Chemical group 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0611—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region
- H01L27/0617—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type
- H01L27/0629—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type in combination with diodes, or resistors, or capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Description
(a)容量素子の上部電極はコンタクトホールの深さが浅いため、オーバーエッチングされやすく、信頼性劣化や、コンタクトの突き抜けによって容量素子として働かなくなる。
(b)膜厚が薄いと、抵抗が高くなり、寄生抵抗などの電圧依存性が大きくなり、電極としての機能低下の原因となる。
本実施の形態では、CMP法を用いて平坦化しながら表面を削り、膜厚の異なる容量素子の上部電極、及び、抵抗素子を形成したが、BPSGやオゾンTEOSなどの平坦化膜を用いて層間絶縁膜を平坦化して基板全面をエッチバックすることによって、本実施の形態と同様の効果を得ることができる。
2 素子分離領域
3 トランジスタ形成領域
4 ウェル領域
5 ソース領域、及び、ドレイン領域
6 ゲート酸化膜
7 ゲート電極
8 容量素子下部電極
9 容量絶縁膜
10 容量素子上部電極
11 抵抗素子
12 層間絶縁膜
13 コンタクトホール
14 P型半導体基板
15 素子分離領域
16 トランジスタ領域
17 Pウェル領域
18 ゲート酸化膜
19 ゲート電極
20 容量素子下部電極
21 ソース、及び、ドレイン領域
22 容量素子領域
23 容量絶縁膜
24 抵抗素子領域
25 容量素子上部電極
26 抵抗素子
27 層間絶縁膜
Claims (5)
- 同一半導体基板上に、トランジスタ素子、及び、容量素子、及び、抵抗素子を有する半導体装置の製造方法において、
半導体基板上に、アクティブ領域と、前記アクティブ領域の表面の高さよりも高くなっている表面を有する素子分離領域を形成する工程(a)と、
前記アクティブ領域上の前記半導体基板の一主面に沿って形成された第一導電型のウェル領域上に、前記トランジスタ素子のゲート酸化膜を形成する工程(b)と、
前記半導体基板上に、第一の多結晶シリコン膜を形成する工程(c)と、
前記第一の多結晶シリコン膜を、パターニングすることによって前記アクティブ領域に前記トランジスタ素子のゲート電極と前記容量素子の下部電極を形成する工程(d)と、
前記ゲート電極と、下部電極に第二導電型の不純物を導入する工程(e)と、
前記ゲート電極をマスクとして前記第一導電型のウェル領域表面に第二導電型の不純物を導入して前記トランジスタ素子のソース、及び、ドレイン領域形成する工程(f)と、
前記容量素子の下部電極上に、容量絶縁膜を形成する工程(g)と、
前記半導体基板上に、第二の多結晶シリコン膜を形成する工程(h)と、
前記第二の多結晶シリコン膜をパターニングすることによって、前記容量素子の上部電極と、前記抵抗素子の抵抗体を形成する工程(i)と、
前記上部電極に第二導電型の不純物を導入する工程(j)と、
前記抵抗体に第一導電型の不純物を導入する工程(k)と、
前記半導体基板上に、第一の層間絶縁膜を形成する工程(l)と、
少なくとも、前記第一の層間絶縁膜と前記抵抗素子を、前記抵抗素子が所望の膜厚になるまで削る工程(m)と、
前記半導体基板上に、第二の層間絶縁膜を形成する工程(n)と、
前記半導体基板上にコンタクトホールを形成する工程(o)と、
からなることを特徴とする半導体装置の製造方法。 - 前記工程(a)の素子分離領域がLOCOS法を用いて形成されることを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記工程(m)が既存の平坦化技術であるCMP法を用いてなされることを特徴とする請求項1または2に記載の半導体装置の製造方法。
- 前記第一の層間絶縁膜を平坦化膜とし、前記工程(m)にてエッチバックを用いることを特徴とする請求項1または2に記載の半導体装置の製造方法。
- 前記工程(e)および前記工程(f)、または、前記工程(f)および前記工程(j)を同時に行うことを特徴とする、請求項1乃至4のいずれか1項に記載の半導体装置の製造方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011050242A JP5616823B2 (ja) | 2011-03-08 | 2011-03-08 | 半導体装置およびその製造方法 |
TW101105109A TWI539531B (zh) | 2011-03-08 | 2012-02-16 | 半導體裝置及其製造方法 |
US13/409,261 US8581316B2 (en) | 2011-03-08 | 2012-03-01 | Semiconductor device and method of manufacturing the same |
KR1020120023438A KR101899155B1 (ko) | 2011-03-08 | 2012-03-07 | 반도체 장치 및 그 제조 방법 |
CN201210059659.5A CN102683343B (zh) | 2011-03-08 | 2012-03-08 | 半导体装置及其制造方法 |
US14/048,948 US8963224B2 (en) | 2011-03-08 | 2013-10-08 | Semiconductor device and method of manufacturing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011050242A JP5616823B2 (ja) | 2011-03-08 | 2011-03-08 | 半導体装置およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012186426A JP2012186426A (ja) | 2012-09-27 |
JP5616823B2 true JP5616823B2 (ja) | 2014-10-29 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011050242A Expired - Fee Related JP5616823B2 (ja) | 2011-03-08 | 2011-03-08 | 半導体装置およびその製造方法 |
Country Status (5)
Country | Link |
---|---|
US (2) | US8581316B2 (ja) |
JP (1) | JP5616823B2 (ja) |
KR (1) | KR101899155B1 (ja) |
CN (1) | CN102683343B (ja) |
TW (1) | TWI539531B (ja) |
Families Citing this family (7)
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JP5546298B2 (ja) * | 2010-03-15 | 2014-07-09 | セイコーインスツル株式会社 | 半導体回路装置の製造方法 |
CN103855160A (zh) * | 2012-12-03 | 2014-06-11 | 上海华虹宏力半导体制造有限公司 | 新型otp器件结构及其制造方法 |
US9117845B2 (en) | 2013-01-25 | 2015-08-25 | Fairchild Semiconductor Corporation | Production of laterally diffused oxide semiconductor (LDMOS) device and a bipolar junction transistor (BJT) device using a semiconductor process |
US8987107B2 (en) * | 2013-02-19 | 2015-03-24 | Fairchild Semiconductor Corporation | Production of high-performance passive devices using existing operations of a semiconductor process |
CN103646947B (zh) * | 2013-11-29 | 2016-05-04 | 无锡中感微电子股份有限公司 | 平面工艺下的三维集成电路及其制造方法 |
CN105226044B (zh) | 2014-05-29 | 2018-12-18 | 联华电子股份有限公司 | 集成电路及形成集成电路的方法 |
KR20210011214A (ko) * | 2019-07-22 | 2021-02-01 | 삼성전자주식회사 | 도핑 영역을 갖는 저항 소자 및 이를 포함하는 반도체 소자 |
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-
2011
- 2011-03-08 JP JP2011050242A patent/JP5616823B2/ja not_active Expired - Fee Related
-
2012
- 2012-02-16 TW TW101105109A patent/TWI539531B/zh not_active IP Right Cessation
- 2012-03-01 US US13/409,261 patent/US8581316B2/en not_active Expired - Fee Related
- 2012-03-07 KR KR1020120023438A patent/KR101899155B1/ko active IP Right Grant
- 2012-03-08 CN CN201210059659.5A patent/CN102683343B/zh not_active Expired - Fee Related
-
2013
- 2013-10-08 US US14/048,948 patent/US8963224B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US8581316B2 (en) | 2013-11-12 |
KR101899155B1 (ko) | 2018-09-14 |
US8963224B2 (en) | 2015-02-24 |
KR20120102541A (ko) | 2012-09-18 |
US20120228686A1 (en) | 2012-09-13 |
TW201248737A (en) | 2012-12-01 |
TWI539531B (zh) | 2016-06-21 |
CN102683343A (zh) | 2012-09-19 |
JP2012186426A (ja) | 2012-09-27 |
US20140035016A1 (en) | 2014-02-06 |
CN102683343B (zh) | 2016-02-17 |
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