JP2014216319A5 - - Google Patents
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- Publication number
- JP2014216319A5 JP2014216319A5 JP2014086240A JP2014086240A JP2014216319A5 JP 2014216319 A5 JP2014216319 A5 JP 2014216319A5 JP 2014086240 A JP2014086240 A JP 2014086240A JP 2014086240 A JP2014086240 A JP 2014086240A JP 2014216319 A5 JP2014216319 A5 JP 2014216319A5
- Authority
- JP
- Japan
- Prior art keywords
- phase plate
- thin film
- irradiating
- sample
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims 10
- 239000010409 thin film Substances 0.000 claims 8
- 230000005540 biological transmission Effects 0.000 claims 4
- 230000001678 irradiating effect Effects 0.000 claims 4
- 238000010894 electron beam technology Methods 0.000 claims 3
- 238000003384 imaging method Methods 0.000 claims 2
- 239000003550 marker Substances 0.000 claims 2
- 230000010363 phase shift Effects 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910003481 amorphous carbon Inorganic materials 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 238000011109 contamination Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000002360 preparation method Methods 0.000 claims 1
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP13165356.0A EP2797100A1 (en) | 2013-04-25 | 2013-04-25 | Method of using a phase plate in a transmission electron microscope |
| EP13165356.0 | 2013-04-25 | ||
| EP13180361 | 2013-08-14 | ||
| EP13180361.1 | 2013-08-14 | ||
| EP13190405.4 | 2013-10-28 | ||
| EP13190405 | 2013-10-28 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014216319A JP2014216319A (ja) | 2014-11-17 |
| JP2014216319A5 true JP2014216319A5 (enExample) | 2017-05-18 |
| JP6286270B2 JP6286270B2 (ja) | 2018-02-28 |
Family
ID=50489030
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014086240A Active JP6286270B2 (ja) | 2013-04-25 | 2014-04-18 | 透過型電子顕微鏡内で位相版を用いる方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9129774B2 (enExample) |
| EP (1) | EP2797101B1 (enExample) |
| JP (1) | JP6286270B2 (enExample) |
| CN (1) | CN104217910B (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102013019297A1 (de) * | 2013-11-19 | 2015-05-21 | Fei Company | Phasenplatte für ein Transmissionselektronenmikroskop |
| EP2881970A1 (en) | 2013-12-04 | 2015-06-10 | Fei Company | Method of producing a freestanding thin film of nano-crystalline carbon |
| CN106796862B (zh) * | 2014-07-30 | 2018-12-25 | 于利奇研究中心有限公司 | 用于带电粒子成像系统的可调式安培相板 |
| EP3007201B1 (en) * | 2014-10-08 | 2016-09-28 | Fei Company | Aligning a featureless thin film in a TEM |
| US10170274B2 (en) * | 2015-03-18 | 2019-01-01 | Battelle Memorial Institute | TEM phase contrast imaging with image plane phase grating |
| US10224175B2 (en) * | 2015-03-18 | 2019-03-05 | Battelle Memorial Institute | Compressive transmission microscopy |
| EP3104155A1 (en) * | 2015-06-09 | 2016-12-14 | FEI Company | Method of analyzing surface modification of a specimen in a charged-particle microscope |
| WO2017109948A1 (ja) * | 2015-12-25 | 2017-06-29 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置及び位相板 |
| US10580614B2 (en) | 2016-04-29 | 2020-03-03 | Battelle Memorial Institute | Compressive scanning spectroscopy |
| US11448607B2 (en) | 2016-12-19 | 2022-09-20 | Asml Netherlands B.V. | Charged particle beam inspection of ungrounded samples |
| US10295677B2 (en) | 2017-05-08 | 2019-05-21 | Battelle Memorial Institute | Systems and methods for data storage and retrieval |
| EP3474308A1 (en) * | 2017-10-17 | 2019-04-24 | Universiteit Antwerpen | Spatial phase manipulation of charged particle beam |
Family Cites Families (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3908124A (en) | 1974-07-01 | 1975-09-23 | Us Energy | Phase contrast in high resolution electron microscopy |
| JPH067048A (ja) | 1992-06-25 | 1994-01-18 | Masaki Ueno | 養液栽培装置および同養液栽培装置に用いる苗の育苗器 |
| US5814815A (en) | 1995-12-27 | 1998-09-29 | Hitachi, Ltd. | Phase-contrast electron microscope and phase plate therefor |
| JP2000268765A (ja) | 1999-03-16 | 2000-09-29 | Jeol Ltd | 透過型電子顕微鏡 |
| JP2001084938A (ja) | 1999-09-13 | 2001-03-30 | Hitachi Ltd | 透過形電子顕微鏡及び透過電子顕微鏡像観察方法 |
| JP3773389B2 (ja) | 2000-03-27 | 2006-05-10 | 日本電子株式会社 | 位相差電子顕微鏡用薄膜位相板並びに位相差電子顕微鏡及び位相板帯電防止法 |
| JP3942363B2 (ja) | 2001-02-09 | 2007-07-11 | 日本電子株式会社 | 透過電子顕微鏡の位相板用レンズシステム、および透過電子顕微鏡 |
| US6548810B2 (en) | 2001-08-01 | 2003-04-15 | The University Of Chicago | Scanning confocal electron microscope |
| JP4328044B2 (ja) | 2001-09-25 | 2009-09-09 | 日本電子株式会社 | 差分コントラスト電子顕微鏡および電子顕微鏡像のデータ処理方法 |
| DE10200645A1 (de) | 2002-01-10 | 2003-07-24 | Leo Elektronenmikroskopie Gmbh | Elektronenmikroskop mit ringförmiger Beleuchtungsapertur |
| DE10206703A1 (de) | 2002-02-18 | 2003-08-28 | Max Planck Gesellschaft | Phasenplatte für die Elektronenmikroskopie und elektronenmikroskopische Bildgebung |
| JP4254469B2 (ja) * | 2003-05-23 | 2009-04-15 | 日本ビクター株式会社 | 光ピックアップ装置及び光記録媒体駆動装置 |
| JP2005116365A (ja) | 2003-10-08 | 2005-04-28 | Jeol Ltd | 位相板と位相板用レンズ系を備えた透過電子顕微鏡 |
| US7737412B2 (en) | 2004-07-12 | 2010-06-15 | The Regents Of The University Of California | Electron microscope phase enhancement |
| JP4625317B2 (ja) | 2004-12-03 | 2011-02-02 | ナガヤマ アイピー ホールディングス リミテッド ライアビリティ カンパニー | 位相差電子顕微鏡用位相板及びその製造方法並びに位相差電子顕微鏡 |
| DE102005040267B4 (de) | 2005-08-24 | 2007-12-27 | Universität Karlsruhe | Verfahren zum Herstellen einer mehrschichtigen elektrostatischen Linsenanordnung, insbesondere einer Phasenplatte und derartige Phasenplatte |
| EP1950789A4 (en) | 2005-11-04 | 2011-05-11 | Nagayama Ip Holdings Llc | PHASE PLATE FOR ELECTRONIC MICROSCOPE AND METHOD FOR MANUFACTURING THE SAME |
| WO2007058182A1 (ja) | 2005-11-15 | 2007-05-24 | Inter-University Research Institute Corporation National Institutes Of Natural Sciences | 位相差電子顕微鏡装置 |
| DE102006011615A1 (de) | 2006-03-14 | 2007-09-20 | Carl Zeiss Nts Gmbh | Phasenkontrast-Elektronenmikroskop |
| DE102006055510B4 (de) | 2006-11-24 | 2009-05-07 | Ceos Corrected Electron Optical Systems Gmbh | Phasenplatte, Bilderzeugungsverfahren und Elektronenmikroskop |
| DE102007007923A1 (de) | 2007-02-14 | 2008-08-21 | Carl Zeiss Nts Gmbh | Phasenschiebendes Element und Teilchenstrahlgerät mit phasenschiebenden Element |
| EP2091062A1 (en) | 2008-02-13 | 2009-08-19 | FEI Company | TEM with aberration corrector and phase plate |
| GB0805819D0 (en) | 2008-03-31 | 2008-04-30 | Edgecombe Christopher | Phase plate for electron microscope |
| EP2131385A1 (en) | 2008-06-05 | 2009-12-09 | FEI Company | Hybrid phase plate |
| US7977633B2 (en) | 2008-08-27 | 2011-07-12 | Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E. V. | Phase plate, in particular for an electron microscope |
| JP4896106B2 (ja) * | 2008-09-30 | 2012-03-14 | 株式会社日立ハイテクノロジーズ | 電子顕微鏡 |
| WO2011071819A1 (en) | 2009-12-07 | 2011-06-16 | Regents Of The University Of California | Optical-cavity phase plate for transmission electron microscopy |
| US8785850B2 (en) * | 2010-01-19 | 2014-07-22 | National Research Counsel Of Canada | Charging of a hole-free thin film phase plate |
| EP2400522A1 (en) | 2010-06-24 | 2011-12-28 | Fei Company | Blocking member for use in the diffraction plane of a TEM |
| EP2485239A1 (en) | 2011-02-07 | 2012-08-08 | FEI Company | Method for centering an optical element in a TEM comprising a contrast enhancing element |
| EP2667399A1 (en) | 2012-05-23 | 2013-11-27 | FEI Company | Improved phase plate for a TEM |
| EP2704178B1 (en) | 2012-08-30 | 2014-08-20 | Fei Company | Imaging a sample in a TEM equipped with a phase plate |
-
2014
- 2014-04-18 JP JP2014086240A patent/JP6286270B2/ja active Active
- 2014-04-23 EP EP14165529.0A patent/EP2797101B1/en active Active
- 2014-04-25 CN CN201410170093.2A patent/CN104217910B/zh active Active
- 2014-04-25 US US14/262,340 patent/US9129774B2/en active Active
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