JP2015107913A5 - - Google Patents
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- Publication number
- JP2015107913A5 JP2015107913A5 JP2014244984A JP2014244984A JP2015107913A5 JP 2015107913 A5 JP2015107913 A5 JP 2015107913A5 JP 2014244984 A JP2014244984 A JP 2014244984A JP 2014244984 A JP2014244984 A JP 2014244984A JP 2015107913 A5 JP2015107913 A5 JP 2015107913A5
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- free
- standing
- standing thin
- locally
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims 13
- 238000000034 method Methods 0.000 claims 11
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 4
- 229910002804 graphite Inorganic materials 0.000 claims 4
- 239000010439 graphite Substances 0.000 claims 4
- 230000005540 biological transmission Effects 0.000 claims 3
- 239000010408 film Substances 0.000 claims 3
- 238000010438 heat treatment Methods 0.000 claims 3
- 238000010894 electron beam technology Methods 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 229910003481 amorphous carbon Inorganic materials 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP13195596.5 | 2013-12-04 | ||
| EP13195596.5A EP2881970A1 (en) | 2013-12-04 | 2013-12-04 | Method of producing a freestanding thin film of nano-crystalline carbon |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015107913A JP2015107913A (ja) | 2015-06-11 |
| JP2015107913A5 true JP2015107913A5 (enExample) | 2017-03-02 |
| JP6224573B2 JP6224573B2 (ja) | 2017-11-01 |
Family
ID=49752992
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014244984A Active JP6224573B2 (ja) | 2013-12-04 | 2014-12-03 | ナノ結晶カーボン自立薄膜の製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9908778B2 (enExample) |
| EP (2) | EP2881970A1 (enExample) |
| JP (1) | JP6224573B2 (enExample) |
| CN (1) | CN104701122A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3754689B1 (en) * | 2014-01-21 | 2024-10-23 | Ramot at Tel-Aviv University Ltd. | Method and device for manipulating particle beam |
| CN108780672B (zh) * | 2016-04-21 | 2022-03-01 | 株式会社钟化 | 放射性同位素制造用支撑基板、放射性同位素制造用靶板、以及支撑基板的制造方法 |
| CN107481913B (zh) * | 2016-06-08 | 2019-04-02 | 清华大学 | 一种电子束加工系统 |
| US20210087403A1 (en) * | 2019-09-20 | 2021-03-25 | Merck Patent Gmbh | Pigments |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2248645A1 (en) * | 1999-04-07 | 2010-11-10 | GrafTech International Holdings Inc. | Flexible graphite article and method of manufacture |
| JP2005015325A (ja) * | 2003-05-30 | 2005-01-20 | Japan Science & Technology Agency | レーザーアブレーション法による極平坦微結晶ダイヤモンド薄膜の作製方法 |
| EP2091062A1 (en) | 2008-02-13 | 2009-08-19 | FEI Company | TEM with aberration corrector and phase plate |
| EP2131385A1 (en) | 2008-06-05 | 2009-12-09 | FEI Company | Hybrid phase plate |
| US7977633B2 (en) | 2008-08-27 | 2011-07-12 | Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E. V. | Phase plate, in particular for an electron microscope |
| JPWO2010090343A1 (ja) * | 2009-02-05 | 2012-08-09 | 帝人株式会社 | 黒鉛化炭素片分散液およびその製造方法 |
| CN101964291B (zh) * | 2009-07-24 | 2012-03-28 | 清华大学 | 透射电镜微栅及其制备方法 |
| US20110200787A1 (en) * | 2010-01-26 | 2011-08-18 | The Regents Of The University Of California | Suspended Thin Film Structures |
| KR101456905B1 (ko) * | 2010-02-19 | 2014-10-31 | 가부시키가이샤 인큐베이션 얼라이언스 | 탄소 재료 및 그 제조 방법 |
| TWI417934B (zh) * | 2010-03-26 | 2013-12-01 | Hon Hai Prec Ind Co Ltd | 透射電鏡微柵的製備方法 |
| US20130277573A1 (en) * | 2011-01-07 | 2013-10-24 | Dune Sciences, Inc. | Functionalized carbon membranes |
| EP2485239A1 (en) | 2011-02-07 | 2012-08-08 | FEI Company | Method for centering an optical element in a TEM comprising a contrast enhancing element |
| DE102011014399B4 (de) * | 2011-03-18 | 2017-08-03 | Stiftung Caesar Center Of Advanced European Studies And Research | Phasenplatte, Verfahren zum Herstellen einer Phasenplatte sowie Elektronenmikroskop |
| CN102737935B (zh) * | 2011-04-14 | 2015-08-26 | 清华大学 | 透射电镜微栅 |
| JP5812342B2 (ja) * | 2011-12-12 | 2015-11-11 | 東海カーボン株式会社 | グラファイトフィルムの製造方法 |
| WO2013096036A1 (en) * | 2011-12-22 | 2013-06-27 | 3M Innovative Properties Company | Electrically conductive article with high optical transmission |
| EP2626885A1 (en) * | 2012-02-13 | 2013-08-14 | FEI Company | Forming a vitrified sample for an electron microscopy |
| EP2667399A1 (en) * | 2012-05-23 | 2013-11-27 | FEI Company | Improved phase plate for a TEM |
| EP2704178B1 (en) | 2012-08-30 | 2014-08-20 | Fei Company | Imaging a sample in a TEM equipped with a phase plate |
| JP6286270B2 (ja) | 2013-04-25 | 2018-02-28 | エフ イー アイ カンパニＦｅｉ Ｃｏｍｐａｎｙ | 透過型電子顕微鏡内で位相版を用いる方法 |
| DE102013019297A1 (de) | 2013-11-19 | 2015-05-21 | Fei Company | Phasenplatte für ein Transmissionselektronenmikroskop |
-
2013
- 2013-12-04 EP EP13195596.5A patent/EP2881970A1/en not_active Withdrawn
-
2014
- 2014-11-28 EP EP14195297.8A patent/EP2881971B1/en active Active
- 2014-12-03 JP JP2014244984A patent/JP6224573B2/ja active Active
- 2014-12-04 CN CN201410726248.6A patent/CN104701122A/zh active Pending
- 2014-12-04 US US14/560,919 patent/US9908778B2/en active Active
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