JP2016525276A5 - - Google Patents
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- Publication number
- JP2016525276A5 JP2016525276A5 JP2016522294A JP2016522294A JP2016525276A5 JP 2016525276 A5 JP2016525276 A5 JP 2016525276A5 JP 2016522294 A JP2016522294 A JP 2016522294A JP 2016522294 A JP2016522294 A JP 2016522294A JP 2016525276 A5 JP2016525276 A5 JP 2016525276A5
- Authority
- JP
- Japan
- Prior art keywords
- silicon substrate
- temperature
- hydrogen
- cooling
- containing layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 22
- 229910052710 silicon Inorganic materials 0.000 claims 22
- 239000010703 silicon Substances 0.000 claims 22
- 239000000758 substrate Substances 0.000 claims 22
- 238000000034 method Methods 0.000 claims 18
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 12
- 239000001257 hydrogen Substances 0.000 claims 12
- 229910052739 hydrogen Inorganic materials 0.000 claims 12
- 238000001816 cooling Methods 0.000 claims 9
- 239000002800 charge carrier Substances 0.000 claims 5
- 238000005286 illumination Methods 0.000 claims 4
- 230000006641 stabilisation Effects 0.000 claims 3
- 238000011105 stabilization Methods 0.000 claims 3
- 238000012423 maintenance Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000007664 blowing Methods 0.000 claims 1
- 239000000112 cooling gas Substances 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical group N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102013010575 | 2013-06-26 | ||
| DE102013010575.7 | 2013-06-26 | ||
| PCT/EP2013/070104 WO2014206504A1 (de) | 2013-06-26 | 2013-09-26 | Verfahren und vorrichtung zum herstellen eines photovoltaikelements mit stabilisiertem wirkungsgrad |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016525276A JP2016525276A (ja) | 2016-08-22 |
| JP2016525276A5 true JP2016525276A5 (enExample) | 2016-10-13 |
| JP6266768B2 JP6266768B2 (ja) | 2018-01-24 |
Family
ID=49274634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016522294A Active JP6266768B2 (ja) | 2013-06-26 | 2013-09-26 | 効率が安定した光起電力素子の製造方法および製造装置 |
Country Status (10)
| Country | Link |
|---|---|
| US (2) | US10892376B2 (enExample) |
| EP (1) | EP3014663B1 (enExample) |
| JP (1) | JP6266768B2 (enExample) |
| KR (1) | KR101807381B1 (enExample) |
| CN (1) | CN105340085B (enExample) |
| DE (2) | DE112013005591C5 (enExample) |
| ES (1) | ES2830766T3 (enExample) |
| MY (1) | MY182430A (enExample) |
| SG (1) | SG11201510423YA (enExample) |
| WO (1) | WO2014206504A1 (enExample) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102013113123B4 (de) | 2013-11-27 | 2021-11-18 | Hanwha Q Cells Gmbh | Solarzellenherstellungsverfahren |
| DE102013113108B4 (de) | 2013-11-27 | 2024-08-29 | Hanwha Q Cells Gmbh | Solarzellenherstellungsverfahren |
| US20160005915A1 (en) * | 2014-07-03 | 2016-01-07 | Sino-American Silicon Products Inc. | Method and apparatus for inhibiting light-induced degradation of photovoltaic device |
| WO2016067516A1 (ja) * | 2014-10-27 | 2016-05-06 | パナソニックＩｐマネジメント株式会社 | 太陽電池モジュールの製造方法、及び太陽電池モジュールの製造装置 |
| CN107408497B (zh) * | 2015-03-13 | 2021-05-18 | 新南创新私人有限公司 | 加速掺杂硅中缺陷形成、稳定电池性能、制造电池的方法和电池 |
| US10443941B2 (en) * | 2015-05-20 | 2019-10-15 | Illinois Tool Works Inc. | Light annealing in a cooling chamber of a firing furnace |
| DE102015114298A1 (de) | 2015-08-27 | 2017-03-02 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und Vorrichtung zum Stabilisieren einer photovoltaischen Silizium-Solarzelle |
| DE102015114240B4 (de) * | 2015-08-27 | 2026-02-05 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung und Verfahren zur Bearbeitung eines Halbleitersubstrats mittels Laserstrahlung |
| DE102015219087A1 (de) * | 2015-10-02 | 2017-04-06 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Stabilisierung der Konversionseffizienz von Siliziumsolarzellen |
| CN108604619A (zh) * | 2016-02-22 | 2018-09-28 | 应用材料意大利有限公司 | 用于处理太阳能电池基板的设备、用于处理太阳能电池基板的系统和用于处理太阳能电池基板的方法 |
| FR3051074B1 (fr) * | 2016-05-03 | 2018-05-18 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Procede de fabrication d'une cellule photovoltaique a heterojonction |
| TW201818560A (zh) * | 2016-06-06 | 2018-05-16 | 新南革新股份有限公司 | 矽材料之加工方法 |
| EP3485518A4 (en) * | 2016-07-12 | 2019-11-06 | Newsouth Innovations Pty Limited | METHOD FOR PRODUCING A PHOTOVOLTAIC DEVICE |
| JP6655791B2 (ja) * | 2016-08-25 | 2020-02-26 | パナソニックＩｐマネジメント株式会社 | 太陽電池セル及びその製造方法 |
| TWI585988B (zh) * | 2016-10-21 | 2017-06-01 | 茂迪股份有限公司 | 太陽能電池 |
| KR102750219B1 (ko) * | 2016-11-22 | 2025-01-07 | 뉴사우스 이노베이션즈 피티와이 리미티드 | Pv 장치 내 수소 유도 재결합(hir) 및 표면 패시베이션(passivation) 열화를 완화시키는 개선된 수소 패시베이션 |
| KR101912772B1 (ko) * | 2016-12-26 | 2019-01-14 | 주식회사 한화 | 광기전력 소자 제조 장치 및 제조 방법 |
| US20220262973A1 (en) * | 2018-07-30 | 2022-08-18 | mPower Technology, Inc. | In-situ rapid annealing and operation of solar cells for extreme environment applications |
| DE102019102227A1 (de) | 2019-01-29 | 2019-11-14 | Universität Konstanz | Vorrichtung zum Messen einer Strahlungsintensität insbesondere in einem Durchlaufofen |
| CN112768372B (zh) * | 2019-11-05 | 2026-05-19 | 伊利诺斯工具制品有限公司 | 烧结设备 |
| DE102020002335B4 (de) | 2020-04-17 | 2022-02-24 | Ce Cell Engineering Gmbh | Verfahren zur Verbesserung des ohmschen Kontaktverhaltens zwischen einem Kontaktgitter und einer Emitterschicht einer Silizumsolarzelle |
| CN112599609B (zh) * | 2020-12-15 | 2022-07-08 | 山东力诺阳光电力科技有限公司 | 一种高效晶体硅太阳能电池及其制备方法 |
| GB202216076D0 (en) * | 2022-10-31 | 2022-12-14 | Extraterrestrial Power Pty Ltd | Solar cell |
| FR3170806A1 (fr) * | 2024-12-19 | 2026-06-26 | Commissariat A L' Energie Atomique Et Aux Energies Alternatives | Cellule solaire en si cristallin plus resistante aux irradiations |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2949607A (en) * | 1958-09-05 | 1960-08-16 | Carl W Lamb | Multiple-band gamma matched antenna |
| DE3536299A1 (de) | 1985-10-11 | 1987-04-16 | Nukem Gmbh | Solarzelle aus silizium |
| JP4405161B2 (ja) | 2003-02-04 | 2010-01-27 | シャープ株式会社 | 多結晶シリコン基板の処理方法、その方法により処理された多結晶シリコン基板および太陽電池 |
| JP2006073715A (ja) | 2004-09-01 | 2006-03-16 | Sharp Corp | 太陽電池 |
| DE102006012920B3 (de) * | 2006-03-21 | 2008-01-24 | Universität Konstanz | Verfahren zum Herstellen eines Photovoltaikelements mit stabilisiertem Wirkungsgrad |
| CN101478882B (zh) | 2006-06-26 | 2013-07-10 | Tp太阳能公司 | 具有高强度加热区段的快速热烧结红外线传送带式热处理炉 |
| US7805064B2 (en) * | 2006-06-26 | 2010-09-28 | TP Solar, Inc. (Corporation of CA, USA) | Rapid thermal firing IR conveyor furnace having high intensity heating section |
| US7993700B2 (en) | 2007-03-01 | 2011-08-09 | Applied Materials, Inc. | Silicon nitride passivation for a solar cell |
| JP5127273B2 (ja) | 2007-03-27 | 2013-01-23 | 京セラ株式会社 | 太陽電池素子の製造方法 |
| WO2009052141A1 (en) * | 2007-10-18 | 2009-04-23 | E. I. Du Pont De Nemours And Company | Conductive compositions and processes for use in the manufacture of semiconductor devices |
| FR2929755B1 (fr) * | 2008-04-03 | 2011-04-22 | Commissariat Energie Atomique | Procede de traitement d'un substrat semi-conducteur par activation thermique d'elements legers |
| JP5058184B2 (ja) | 2009-01-23 | 2012-10-24 | 三菱電機株式会社 | 光起電力装置の製造方法 |
| US8828776B2 (en) * | 2009-04-16 | 2014-09-09 | Tp Solar, Inc. | Diffusion furnaces employing ultra low mass transport systems and methods of wafer rapid diffusion processing |
| CN102356458B (zh) | 2009-04-16 | 2014-10-15 | Tp太阳能公司 | 利用极低质量运送系统的扩散炉及晶圆快速扩散加工处理的方法 |
| FR2949607B1 (fr) | 2009-09-03 | 2011-10-21 | Commissariat Energie Atomique | Procede de traitement de cellules photovoltaiques contre la diminution du rendement lors de l'eclairement |
| CN104952975A (zh) * | 2009-10-26 | 2015-09-30 | 新南创新私人有限公司 | 用于硅太阳能电池的改善的金属化方法 |
| FR2966980B1 (fr) | 2010-11-02 | 2013-07-12 | Commissariat Energie Atomique | Procédé de fabrication de cellules solaires, atténuant les phénomènes de lid |
| US20120060758A1 (en) * | 2011-03-24 | 2012-03-15 | Primestar Solar, Inc. | Dynamic system for variable heating or cooling of linearly conveyed substrates |
| JP6113152B2 (ja) * | 2011-06-03 | 2017-04-12 | エムイーエムシー・シンガポール・プライベイト・リミテッドＭｅｍｃ Ｓｉｎｇａｐｏｒｅ Ｐｔｅ． Ｌｔｄ． | シリコンウェハにおいて少数キャリア寿命劣化を抑制する方法 |
| FR2977079B1 (fr) | 2011-06-27 | 2013-07-26 | Commissariat Energie Atomique | Procede de traitement de cellules photovoltaiques a heterojonction pour ameliorer et stabiliser leur rendement |
| SG11201407270XA (en) * | 2012-05-21 | 2014-12-30 | Newsouth Innovations Pty Ltd | Advanced hydrogenation of silicon solar cells |
| US9780252B2 (en) * | 2014-10-17 | 2017-10-03 | Tp Solar, Inc. | Method and apparatus for reduction of solar cell LID |
| US11538956B2 (en) * | 2018-04-27 | 2022-12-27 | Illinois Tool Works Inc. | Methods and apparatus to control zone temperatures of a solar cell production system |
-
2013
- 2013-09-26 DE DE112013005591.0T patent/DE112013005591C5/de active Active
- 2013-09-26 CN CN201380077813.4A patent/CN105340085B/zh active Active
- 2013-09-26 DE DE202013012849.6U patent/DE202013012849U1/de not_active Expired - Lifetime
- 2013-09-26 KR KR1020157035754A patent/KR101807381B1/ko active Active
- 2013-09-26 SG SG11201510423YA patent/SG11201510423YA/en unknown
- 2013-09-26 EP EP13770893.9A patent/EP3014663B1/de active Active
- 2013-09-26 MY MYPI2015704636A patent/MY182430A/en unknown
- 2013-09-26 US US14/900,004 patent/US10892376B2/en active Active
- 2013-09-26 WO PCT/EP2013/070104 patent/WO2014206504A1/de not_active Ceased
- 2013-09-26 ES ES13770893T patent/ES2830766T3/es active Active
- 2013-09-26 JP JP2016522294A patent/JP6266768B2/ja active Active
-
2020
- 2020-10-22 US US17/077,995 patent/US11784279B2/en active Active
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