SG11201510423YA - Method and device for producing a photovoltaic element with stabilized efficiency - Google Patents

Method and device for producing a photovoltaic element with stabilized efficiency

Info

Publication number
SG11201510423YA
SG11201510423YA SG11201510423YA SG11201510423YA SG11201510423YA SG 11201510423Y A SG11201510423Y A SG 11201510423YA SG 11201510423Y A SG11201510423Y A SG 11201510423YA SG 11201510423Y A SG11201510423Y A SG 11201510423YA SG 11201510423Y A SG11201510423Y A SG 11201510423YA
Authority
SG
Singapore
Prior art keywords
producing
photovoltaic element
stabilized efficiency
stabilized
efficiency
Prior art date
Application number
SG11201510423YA
Inventor
Axel Herguth
Svenja Wilking
Original Assignee
Universität Konstanz
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=49274634&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=SG11201510423Y(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Universität Konstanz filed Critical Universität Konstanz
Publication of SG11201510423YA publication Critical patent/SG11201510423YA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
    • H01L31/1864—Annealing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/06—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated
    • F27B9/062—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated electrically heated
    • F27B9/066—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated electrically heated heated by lamps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
    • F27B9/40—Arrangements of controlling or monitoring devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67109—Apparatus for thermal treatment mainly by convection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67115—Apparatus for thermal treatment mainly by radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67248—Temperature monitoring
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
    • H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic System
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
    • H01L31/1868—Passivation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
SG11201510423YA 2013-06-26 2013-09-26 Method and device for producing a photovoltaic element with stabilized efficiency SG11201510423YA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013010575 2013-06-26
PCT/EP2013/070104 WO2014206504A1 (en) 2013-06-26 2013-09-26 Method and device for producing a photovoltaic element with stabilized efficiency

Publications (1)

Publication Number Publication Date
SG11201510423YA true SG11201510423YA (en) 2016-01-28

Family

ID=49274634

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201510423YA SG11201510423YA (en) 2013-06-26 2013-09-26 Method and device for producing a photovoltaic element with stabilized efficiency

Country Status (10)

Country Link
US (2) US10892376B2 (en)
EP (1) EP3014663B1 (en)
JP (1) JP6266768B2 (en)
KR (1) KR101807381B1 (en)
CN (1) CN105340085B (en)
DE (2) DE112013005591C5 (en)
ES (1) ES2830766T3 (en)
MY (1) MY182430A (en)
SG (1) SG11201510423YA (en)
WO (1) WO2014206504A1 (en)

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US20160005915A1 (en) * 2014-07-03 2016-01-07 Sino-American Silicon Products Inc. Method and apparatus for inhibiting light-induced degradation of photovoltaic device
JPWO2016067516A1 (en) * 2014-10-27 2017-08-10 パナソニックＩｐマネジメント株式会社 Solar cell module manufacturing method and solar cell module manufacturing apparatus
WO2016145482A1 (en) * 2015-03-13 2016-09-22 Newsouth Innovations Pty Limited A method for processing silicon material
US10443941B2 (en) 2015-05-20 2019-10-15 Illinois Tool Works Inc. Light annealing in a cooling chamber of a firing furnace
DE102015114298A1 (en) 2015-08-27 2017-03-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method and device for stabilizing a photovoltaic silicon solar cell
DE102015114240A1 (en) * 2015-08-27 2017-03-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Apparatus and method for processing a semiconductor substrate by means of laser radiation
DE102015219087A1 (en) * 2015-10-02 2017-04-06 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Process for stabilizing the conversion efficiency of silicon solar cells
KR20180099844A (en) * 2016-02-22 2018-09-05 어플라이드 머티어리얼스 이탈리아 에스.알.엘. Apparatus for processing solar cell substrates, systems for processing solar cell substrates, and methods for processing solar cell substrates
FR3051074B1 (en) * 2016-05-03 2018-05-18 Commissariat A L'energie Atomique Et Aux Energies Alternatives PROCESS FOR PRODUCING A HETEROJUNCTION PHOTOVOLTAIC CELL
WO2017210731A1 (en) * 2016-06-06 2017-12-14 Newsouth Innovations Pty Limited A method for processing silicon material
SG11201811451XA (en) * 2016-07-12 2019-01-30 Newsouth Innovations Pty Ltd A method for manufacturing a photovoltaic device
JP6655791B2 (en) * 2016-08-25 2020-02-26 パナソニックＩｐマネジメント株式会社 Solar cell and method of manufacturing the same
TWI585988B (en) * 2016-10-21 2017-06-01 茂迪股份有限公司 Solar cell
SG11201903183QA (en) * 2016-11-22 2019-05-30 Newsouth Innovations Pty Ltd Advanced hydrogen passivation that mitigates hydrogen-induced recombination (hir) and surface passivation deterioration in pv devices
KR101912772B1 (en) * 2016-12-26 2019-01-14 주식회사 한화 Apparatus and method for producing photovoltaic element
DE102019102227A1 (en) 2019-01-29 2019-11-14 Universität Konstanz Apparatus for measuring a radiation intensity, in particular in a continuous furnace
CN112768372A (en) * 2019-11-05 2021-05-07 伊利诺斯工具制品有限公司 Sintering equipment
DE102020002335B4 (en) 2020-04-17 2022-02-24 Ce Cell Engineering Gmbh Process to improve the ohmic contact behavior between a contact grid and an emitter layer of a silicon solar cell
CN112599609B (en) * 2020-12-15 2022-07-08 山东力诺阳光电力科技有限公司 Efficient crystalline silicon solar cell and preparation method thereof

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Also Published As

Publication number Publication date
DE112013005591B4 (en) 2016-08-04
DE202013012849U1 (en) 2020-07-03
MY182430A (en) 2021-01-25
CN105340085A (en) 2016-02-17
KR20160023687A (en) 2016-03-03
US10892376B2 (en) 2021-01-12
US20160141445A1 (en) 2016-05-19
KR101807381B1 (en) 2018-01-10
EP3014663A1 (en) 2016-05-04
US11784279B2 (en) 2023-10-10
DE112013005591A5 (en) 2015-10-22
DE112013005591C5 (en) 2018-10-04
EP3014663B1 (en) 2020-09-02
WO2014206504A1 (en) 2014-12-31
ES2830766T3 (en) 2021-06-04
JP6266768B2 (en) 2018-01-24
US20210057600A1 (en) 2021-02-25
JP2016525276A (en) 2016-08-22
CN105340085B (en) 2018-07-06

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