JP6286270B2 - 透過型電子顕微鏡内で位相版を用いる方法 - Google Patents

透過型電子顕微鏡内で位相版を用いる方法 Download PDF

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JP6286270B2
JP6286270B2 JP2014086240A JP2014086240A JP6286270B2 JP 6286270 B2 JP6286270 B2 JP 6286270B2 JP 2014086240 A JP2014086240 A JP 2014086240A JP 2014086240 A JP2014086240 A JP 2014086240A JP 6286270 B2 JP6286270 B2 JP 6286270B2
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phase plate
thin film
phase
sample
potential
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JP2014216319A5 (enExample
JP2014216319A (ja
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ブイス バート
ブイス バート
ストヤノヴ ダネヴ ラドスティン
ストヤノヴ ダネヴ ラドスティン
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FEI Co
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Priority claimed from EP13165356.0A external-priority patent/EP2797100A1/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/263—Contrast, resolution or power of penetration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/285—Emission microscopes, e.g. field-emission microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2614—Holography or phase contrast, phase related imaging in general, e.g. phase plates

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
JP2014086240A 2013-04-25 2014-04-18 透過型電子顕微鏡内で位相版を用いる方法 Active JP6286270B2 (ja)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
EP13165356.0A EP2797100A1 (en) 2013-04-25 2013-04-25 Method of using a phase plate in a transmission electron microscope
EP13165356.0 2013-04-25
EP13180361 2013-08-14
EP13180361.1 2013-08-14
EP13190405.4 2013-10-28
EP13190405 2013-10-28

Publications (3)

Publication Number Publication Date
JP2014216319A JP2014216319A (ja) 2014-11-17
JP2014216319A5 JP2014216319A5 (enExample) 2017-05-18
JP6286270B2 true JP6286270B2 (ja) 2018-02-28

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JP2014086240A Active JP6286270B2 (ja) 2013-04-25 2014-04-18 透過型電子顕微鏡内で位相版を用いる方法

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US (1) US9129774B2 (enExample)
EP (1) EP2797101B1 (enExample)
JP (1) JP6286270B2 (enExample)
CN (1) CN104217910B (enExample)

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EP2881970A1 (en) 2013-12-04 2015-06-10 Fei Company Method of producing a freestanding thin film of nano-crystalline carbon
CN106796862B (zh) * 2014-07-30 2018-12-25 于利奇研究中心有限公司 用于带电粒子成像系统的可调式安培相板
EP3007201B1 (en) * 2014-10-08 2016-09-28 Fei Company Aligning a featureless thin film in a TEM
US10170274B2 (en) * 2015-03-18 2019-01-01 Battelle Memorial Institute TEM phase contrast imaging with image plane phase grating
US10224175B2 (en) * 2015-03-18 2019-03-05 Battelle Memorial Institute Compressive transmission microscopy
EP3104155A1 (en) * 2015-06-09 2016-12-14 FEI Company Method of analyzing surface modification of a specimen in a charged-particle microscope
WO2017109948A1 (ja) * 2015-12-25 2017-06-29 株式会社日立ハイテクノロジーズ 荷電粒子線装置及び位相板
US10580614B2 (en) 2016-04-29 2020-03-03 Battelle Memorial Institute Compressive scanning spectroscopy
US11448607B2 (en) 2016-12-19 2022-09-20 Asml Netherlands B.V. Charged particle beam inspection of ungrounded samples
US10295677B2 (en) 2017-05-08 2019-05-21 Battelle Memorial Institute Systems and methods for data storage and retrieval
EP3474308A1 (en) * 2017-10-17 2019-04-24 Universiteit Antwerpen Spatial phase manipulation of charged particle beam

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JPH067048A (ja) 1992-06-25 1994-01-18 Masaki Ueno 養液栽培装置および同養液栽培装置に用いる苗の育苗器
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JP4625317B2 (ja) 2004-12-03 2011-02-02 ナガヤマ アイピー ホールディングス リミテッド ライアビリティ カンパニー 位相差電子顕微鏡用位相板及びその製造方法並びに位相差電子顕微鏡
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JP4896106B2 (ja) * 2008-09-30 2012-03-14 株式会社日立ハイテクノロジーズ 電子顕微鏡
WO2011071819A1 (en) 2009-12-07 2011-06-16 Regents Of The University Of California Optical-cavity phase plate for transmission electron microscopy
US8785850B2 (en) * 2010-01-19 2014-07-22 National Research Counsel Of Canada Charging of a hole-free thin film phase plate
EP2400522A1 (en) 2010-06-24 2011-12-28 Fei Company Blocking member for use in the diffraction plane of a TEM
EP2485239A1 (en) 2011-02-07 2012-08-08 FEI Company Method for centering an optical element in a TEM comprising a contrast enhancing element
EP2667399A1 (en) 2012-05-23 2013-11-27 FEI Company Improved phase plate for a TEM
EP2704178B1 (en) 2012-08-30 2014-08-20 Fei Company Imaging a sample in a TEM equipped with a phase plate

Also Published As

Publication number Publication date
EP2797101B1 (en) 2017-05-31
CN104217910B (zh) 2017-09-12
CN104217910A (zh) 2014-12-17
US9129774B2 (en) 2015-09-08
US20140326876A1 (en) 2014-11-06
EP2797101A1 (en) 2014-10-29
JP2014216319A (ja) 2014-11-17

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