JP2014123752A - タイトピッチのフリップチップ集積回路のパッケージを作る方法 - Google Patents
タイトピッチのフリップチップ集積回路のパッケージを作る方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 58
- 238000004519 manufacturing process Methods 0.000 title abstract description 4
- 239000000758 substrate Substances 0.000 claims abstract description 87
- 229910000679 solder Inorganic materials 0.000 claims abstract description 68
- 238000005476 soldering Methods 0.000 claims abstract description 9
- 230000004907 flux Effects 0.000 claims description 25
- 229920005989 resin Polymers 0.000 claims description 22
- 239000011347 resin Substances 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 2
- 238000007654 immersion Methods 0.000 claims 8
- 238000005507 spraying Methods 0.000 claims 1
- 238000007598 dipping method Methods 0.000 abstract description 6
- 238000004806 packaging method and process Methods 0.000 abstract description 3
- 239000011295 pitch Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000002372 labelling Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
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Abstract
【解決手段】パッケージ基板にダイを取り付けるためのフリップチップパッケージング方法であって、その方法が、ダイをはんだペーストに浸すステップ;パッケージ基板上にダイを配置するステップ;及びパッケージ基板にダイを取り付けるためにはんだペーストをリフローするステップ;を含む。前記ダイが導電バンプを有し、前記ダイを前記はんだペーストに浸すステップが、前記導電バンプを前記はんだペーストに浸すステップを含む。前記パッケージ基板がパッドを有し、前記パッケージ基板に前記ダイを取り付けるために前記はんだペーストをリフローするステップが、前記導電バンプを前記パッドにはんだ付けするステップを含む。他の実施形態が記載され、且つ請求される。
【選択図】図2
Description
104、202、302、402 ツール
106、204 フラックス樹脂
108、114、208、212、306、308、310、406 矢印
110 導電バンプ
112 はんだで湿潤した導電バンプ
116 パッケージ基板
118 波線
206 はんだペースト
304、404 ニードル
405 パッド
Claims (15)
- パッケージ基板にダイを取り付ける方法であって、
浸漬ダイを形成するために、前記ダイの少なくとも一部をはんだペーストに浸すステップと、
前記パッケージ基板にフラックス樹脂を適用するステップと、
前記パッケージ基板上に前記ダイを配置するステップと、
前記パッケージ基板に前記ダイを取り付けるために前記はんだペーストをリフローするステップと、
を含み、
前記フラックス樹脂の厚さは5〜15μmである、パッケージ基板にダイを取り付ける方法。 - 前記フラックス樹脂が単一の連続層として適用され、パッドが前記パッケージ基板上に配置され、前記ダイが導電バンプを有し、前記フラックス樹脂が前記パッケージ基板上の前記パッドを覆う、請求項1に記載の方法。
- 前記はんだペーストをリフローするステップの後に、前記ダイと前記パッケージ基板との間にアンダーフィルを適用するステップをさらに含み、前記パッケージ基板上に前記ダイを配置するステップは、前記フラックス樹脂を適用するステップの後に実施され、前記ダイの少なくとも一部が前記フラックス樹脂上に直接配置され、前記はんだペーストをリフローするステップは、前記パッケージ基板上に前記ダイを配置するステップの後に実施される、請求項2に記載の方法。
- 前記パッケージ基板に前記ダイを取り付けるために前記はんだペーストをリフローするステップは、
前記浸漬ダイに熱を加えるステップであって、前記熱は、前記パッケージ基板上に前記浸漬ダイを配置するステップの後に、前記浸漬ダイに初めに加えられる、ステップと、
前記導電バンプを前記パッドにはんだ付けするステップと、
を含む、請求項2に記載の方法。 - 前記パッケージ基板に前記ダイを取り付けるために前記はんだペーストをリフローするステップは、前記浸漬ダイに熱を加えるステップを含み、前記熱は、前記パッケージ基板上に前記浸漬ダイを配置するステップの後に、前記浸漬ダイに初めに加えられる、請求項1に記載の方法。
- 前記パッケージ基板にフラックス樹脂を適用するステップの後に、前記浸漬ダイが前記パッケージ基板上に配置されるまで追加の材料が前記フラックス樹脂上に堆積されない、請求項1に記載の方法。
- パッケージ基板にダイを取り付ける方法であって、
はんだペーストを前記パッケージ基板に適用するステップと、
前記パッケージ基板にフラックス樹脂を適用するステップと、
前記はんだペーストをリフローする前に、前記パッケージ基板上に前記ダイを配置するステップと、
前記パッケージ基板に前記ダイを取り付けるために前記はんだペーストをリフローするステップと、
を含み、
前記フラックス樹脂の厚さは5〜15μmである、パッケージ基板にダイを取り付ける方法。 - 前記パッケージ基板がパッドを有し、前記はんだペーストを前記パッケージ基板に適用するステップが、前記パッド上にはんだペーストの滴を形成するステップを含む、請求項7に記載の方法。
- 前記ダイが導電バンプを有し、前記はんだペーストをリフローする前に、前記パッケージ基板上に前記ダイを配置するステップが、前記導電バンプを前記はんだペーストの滴と接触するように配置するステップを含む、請求項8に記載の方法。
- 前記パッケージ基板にフラックス樹脂を適用するステップが、前記パッケージ基板上に前記フラックス樹脂を噴霧するステップを含む、請求項7に記載の方法。
- 前記パッケージ基板がパッドを有し、前記はんだペーストを前記パッケージ基板に適用するステップが、前記パッド上に前記はんだペーストの滴を形成するために、ツールの開口を通り抜けて前記はんだペーストを分注するステップを含む、請求項7に記載の方法。
- 前記ダイが導電バンプを有し、前記はんだペーストをリフローする前に、前記パッケージ基板上に前記ダイを配置するステップが、前記導電バンプを前記はんだペーストの滴と接触するように配置するステップを含む、請求項11に記載の方法。
- パッケージ基板にダイを取り付ける方法であって、
はんだペーストを前記パッケージ基板上のパッド上に分注するステップと、
前記パッケージ基板にフラックス樹脂を適用するステップと、
前記はんだペーストをリフローする前に、前記パッケージ基板上に前記ダイを配置するステップと、
前記パッケージ基板に前記ダイを取り付けるために前記はんだペーストをリフローするステップと、
を含み、
前記フラックス樹脂の厚さは5〜15μmである、パッケージ基板にダイを取り付ける方法。 - 前記はんだペーストを前記パッケージ基板上のパッド上に分注するステップが、前記パッド上にはんだペーストの滴を形成するためにツールを前記はんだペーストに浸すステップを含み、前記はんだペーストはフラックスと微粒子のはんだとの組み合わせである、請求項13に記載の方法。
- 前記ダイが導電バンプを有し、前記はんだペーストをリフローする前に、前記パッケージ基板上に前記ダイを配置するステップが、前記導電バンプを前記滴と接触するように配置するステップを含む、請求項14に記載の方法。
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CN102804371A (zh) | 2012-11-28 |
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US20100314433A1 (en) | 2010-12-16 |
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