JP2014063966A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP2014063966A JP2014063966A JP2012209656A JP2012209656A JP2014063966A JP 2014063966 A JP2014063966 A JP 2014063966A JP 2012209656 A JP2012209656 A JP 2012209656A JP 2012209656 A JP2012209656 A JP 2012209656A JP 2014063966 A JP2014063966 A JP 2014063966A
- Authority
- JP
- Japan
- Prior art keywords
- die pad
- chip
- semiconductor device
- wire
- semiconductor chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49503—Lead-frames or other flat leads characterised by the die pad
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49575—Assemblies of semiconductor devices on lead frames
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/93—Batch processes
- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0555—Shape
- H01L2224/05552—Shape in top view
- H01L2224/05554—Shape in top view being square
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32135—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/32145—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48095—Kinked
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/48137—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/48145—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48257—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a die pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4911—Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain
- H01L2224/49113—Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain the connectors connecting different bonding areas on the semiconductor or solid-state body to a common bonding area outside the body, e.g. converging wires
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4912—Layout
- H01L2224/49171—Fan-out arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4912—Layout
- H01L2224/49175—Parallel arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
- H01L2224/92—Specific sequence of method steps
- H01L2224/922—Connecting different surfaces of the semiconductor or solid-state body with connectors of different types
- H01L2224/9222—Sequential connecting processes
- H01L2224/92242—Sequential connecting processes the first connecting process involving a layer connector
- H01L2224/92247—Sequential connecting processes the first connecting process involving a layer connector the second connecting process involving a wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/93—Batch processes
- H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L2224/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12042—LASER
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Lead Frames For Integrated Circuits (AREA)
Abstract
【解決手段】ダイパッド4dと、ダイパッド4dの周囲に配置された複数のリード4aと、ダイパッド4d上に搭載されたメモリチップ3および電源ICチップ2と、メモリチップ3上に搭載されたロジックチップ1と、半導体チップとダイパッド4dを接続する複数のダウンボンド用ワイヤ5bと、半導体チップとリード4aを接続する複数のリード用ワイヤ5aと、複数のチップ間ワイヤ5cbとを有する。さらに、ロジックチップ1は平面視でダイパッド4dの中央部に配置され、電源ICチップ2は平面視でダイパッド4dの角部領域に配置され、これにより、QFN9の小型化を図る。
【選択図】図3
Description
図1は実施の形態の半導体装置の表面(マーク形成面)側の構造を示す平面図、図2は図1に示す半導体装置の裏面(実装面)側の構造を示す下面図、図3は図1に示す半導体装置の構造を封止体を透過して示す透過平面図、図4は図3に示すX−X線に沿った断面図である。また、図5は図1に示す半導体装置のダイパッド上における複数の半導体チップのレイアウトに関する実施の形態の上位思想を説明する平面図、図6は図1に示す半導体装置のダイパッド上における複数の半導体チップのレイアウトに関する実施の形態を説明する平面図である。
まず、本実施の形態の半導体装置の構造について説明する。
次に、各半導体チップの詳細な構成について、以下に説明する。
次に、本実施の形態のQFN(半導体装置)9の製造方法について説明する。
まず、図7に示すようなデバイス領域4gが複数形成された薄板状のリードフレーム(基材)4を準備する。デバイス領域4gは、1つのQFN9が形成される領域であり、ここでは、複数のデバイス領域4gが一括して樹脂で封止される、所謂一括モールド方式を採用した組み立てについて説明する。なお、各工程では、便宜上、1つのデバイス領域4gのみを取り上げた図を用いて説明する。
その後、ダイボンディングを行う。ダイボンディング工程では、図12および図13に示すように、ダイボンド材である接着材7を介して各半導体チップをダイパッド4dの上面4daに搭載する。接着材7は、フィルム状の接着材7を採用することが好ましいが、ペースト状の接着材7を使用してもよい。
その後、図14および図15に示すように、ワイヤボンディングを行う。
その後、樹脂モールドを行う。
樹脂モールド終了後、マークを付す。本マーク工程では、図1に示すように封止体6の表面6aに、製品名等のマーク6dを形成する。マーク6dは、例えば、印刷もしくはレーザー等を照射して形成する。
その後、メッキ形成を行う。本メッキ工程では、図33および図34に示すように、封止体6から露出する各リード4aの下面4abおよびダイパッド4dの下面4dbのそれぞれに外装メッキ(メッキ膜、メッキ層)8を形成する。ここで、本実施の形態の外装メッキ8は、鉛(Pb)を実質的に含まない、所謂、鉛フリー半田メッキからなり、例えば錫(Sn)のみ、錫−ビスマス(Sn−Bi)、または錫−インジウム(Sn−In)等である。
その後、個片化を行う。本個片化工程では、図7に示すリードフレーム4のダイシング領域4iと、先の封止(樹脂モールド)工程において形成された図32の封止体(樹脂ブロック)6のうち、このダイシング領域4i上に形成された部分(封止体6の一部)を切断することで、繋がった複数のデバイス領域4gを個々に分割する。
上記実施の形態の半導体装置は、ロジックチップと電源ICチップのチップレイアウト、および樹脂モールド時のロジックチップの下部の隙間のボイド対策(メモリチップのパッド(ボンディングパッド:ワイヤ接続される部分)が形成された辺とは反対の辺側から樹脂を供給する)については、ワイヤ流れによるワイヤショート対策を考慮しなければ、QFN以外の半導体装置であってもよい。
図35は図7のリードフレームのデバイス領域に対するゲートの位置に関する変形例2を説明する平面図、図36は図35に示す基材が配置されたキャビティ内に樹脂が供給される状態を説明する断面図である。なお、図35では、便宜上、図を見易くするために最低限のワイヤ5のみを表示している。
図37は図7のデバイス領域に対するゲートの位置に関する変形例3を説明する平面図である。
[項1]
以下の工程を含む、半導体装置の製造方法:
(a)平面形状が四角形から成るダイパッド、前記ダイパッドを支持する複数の吊りリード、及び前記ダイパッドの周囲に配置され、かつ前記複数の吊りリードのうちの互いに隣り合う吊りリード間に配置された複数のリードを有するリードフレームを準備する工程;
(b)前記(a)工程の後、平面形状が四角形から成る第1主面、前記第1主面に形成された複数の第1ボンディングパッド、および前記第1主面とは反対側の第1裏面を有する第1半導体チップを前記ダイパッド上に搭載する工程;
(c)前記(b)工程の後、平面形状が四角形から成る第2主面、前記第2主面に形成された複数の第2ボンディングパッド、および前記第2主面とは反対側の第2裏面を有する第2半導体チップを前記第1半導体チップの前記第1主面上に搭載する工程;
(d)前記(c)工程の後、前記第1および第2半導体チップを樹脂で封止する工程;
ここで、
前記(c)工程では、前記第1半導体チップの前記複数の第1ボンディングパッドが前記第2半導体チップから露出し、かつ前記第2半導体チップの一部が前記第1半導体チップから迫り出すように、前記第2半導体チップを前記第1半導体チップ上に搭載し、
前記(d)工程では、前記第2半導体チップの前記一部側から前記樹脂を供給する。
1a 表面(主面)
1b 裏面
1c パッド
1d パッド群
1e 第1領域
1f,1g 辺
1h 角部
2 電源ICチップ
2a 表面(主面)
2b 裏面
2c パッド
2d パッド群
2e 第2領域
3 メモリチップ
3a 表面(主面)
3b 裏面
3c パッド
3d パッド群
4 リードフレーム
4a リード
4aa 上面
4ab 下面
4b リード群
4c 吊りリード
4ca 分岐部
4d ダイパッド
4da 上面
4db 下面
4dc,4dd ダウンボンド領域
4de,4df,4dg,4dh 辺
4di ダウンボンド領域
4dj 角部領域
4e 角部
4f 段差部
4g デバイス領域
4h 枠部
4i ダイシング領域
5 ワイヤ
5a,5aa,5ab,5ab1,5ac,5ad,5ad1 リード用ワイヤ
5b,5ba,5bb,5bc ダウンボンド用ワイヤ
5bd ダウンボンドワイヤ群
5be ダウンボンド用ワイヤ
5c,5ca,5cb チップ間ワイヤ
6 封止体
6a 表面
6b 下面
6c 側面
6d マーク
7 接着材
8 外装メッキ
9 QFN(半導体装置)
10 樹脂
11 テープ
11a 基材
11b 接着層
12 上型
12a キャビティ
12b ゲート
12c エアベント
13 下型
14 樹脂流動方向
15 隙間
Claims (8)
- 平面形状が四角形から成る上面、および前記上面とは反対側の下面を有するダイパッドと、
前記ダイパッドの各角部をそれぞれ支持する複数の吊りリードと、
平面視において前記ダイパッドの各辺に沿ってそれぞれ配置された複数のリード群と、
平面形状が四角形から成る第1主面、前記第1主面の各辺に沿ってそれぞれ形成された複数の第1パッド群、および前記第1主面とは反対側の第1裏面を有し、前記第1裏面が前記ダイパッドの前記上面と対向し、かつ、平面視において前記第1主面の各辺が前記ダイパッドの前記上面の各辺とそれぞれ並ぶように、前記ダイパッドの前記上面上に、かつ、平面視において前記ダイパッドの中央部に配置された第1半導体チップと、
平面形状が四角形から成る第2主面、前記第2主面に形成された第2パッド群、および前記第2主面とは反対側の第2裏面を有し、前記ダイパッドの前記上面上に、かつ、平面視において前記第1半導体チップの隣に配置された第2半導体チップと、
前記第1半導体チップの前記複数の第1パッド群と前記ダイパッドの複数のダウンボンド領域を、それぞれ電気的に接続する複数の第1ダウンボンドワイヤ群と、
を含み、
前記第2半導体チップの前記第2主面の辺の長さは、前記ダイパッドの前記複数のダウンボンド領域のうちの第1ダウンボンド領域と、前記ダイパッドの前記上面の複数の辺のうちの前記第1ダウンボンド領域に最も近い第1ダイパッド辺との距離よりも大きく、
前記第2半導体チップは、平面視において、前記ダイパッドの前記第1ダイパッド辺に沿って設けられた前記第1ダウンボンド領域と、前記第1ダイパッド辺と交差する第2ダイパッド辺に沿って設けられた第2ダウンボンド領域との間の角部領域に配置されている、半導体装置。 - 請求項1に記載の半導体装置において、
前記第2半導体チップの一部は、平面視において、前記第1半導体チップと前記ダイパッドの前記上面の辺との間に位置する、半導体装置。 - 請求項2に記載の半導体装置において、
前記第1半導体チップは、前記第1半導体チップの前記第1主面の各辺に沿って形成された複数の第1パッドで囲まれる第1領域が、平面視において、前記複数の吊りリードのそれぞれの延長線が交わる点と重なるように前記ダイパッドの前記上面に搭載されている、半導体装置。 - 請求項3に記載の半導体装置において、
前記第2半導体チップは、前記第2半導体チップの前記第2主面の複数の辺に沿って形成された複数の第2パッドで囲まれる第2領域が、平面視において、前記ダイパッドの前記上面の2つの対角線の何れかの一部と重なるように前記ダイパッドの前記上面に搭載されている、半導体装置。 - 請求項3に記載の半導体装置において、
前記第1半導体チップは、前記ダイパッドの前記上面に搭載された第3半導体チップ上に積層され、
前記第3半導体チップは、前記ダイパッドの前記第2半導体チップが搭載された側と反対側に向けて前記第1半導体チップから迫り出している、半導体装置。 - 請求項3に記載の半導体装置において、
前記ダイパッドに、前記上面が前記下面より突出した段差部が形成されている、半導体装置。 - 請求項6に記載の半導体装置において、
前記段差部は、その突出量が、前記ダイパッドの前記第2半導体チップが搭載された側の方がその反対側より大きく形成されている、半導体装置。 - 請求項7に記載の半導体装置において、
前記第1,2および3半導体チップを封止する封止体が形成され、前記封止体の裏面に前記ダイパッドの前記下面が露出している、半導体装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012209656A JP5865220B2 (ja) | 2012-09-24 | 2012-09-24 | 半導体装置 |
US14/016,429 US8987882B2 (en) | 2012-09-24 | 2013-09-03 | Semiconductor device |
US14/645,899 US9257371B2 (en) | 2012-09-24 | 2015-03-12 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012209656A JP5865220B2 (ja) | 2012-09-24 | 2012-09-24 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014063966A true JP2014063966A (ja) | 2014-04-10 |
JP5865220B2 JP5865220B2 (ja) | 2016-02-17 |
Family
ID=50338059
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012209656A Active JP5865220B2 (ja) | 2012-09-24 | 2012-09-24 | 半導体装置 |
Country Status (2)
Country | Link |
---|---|
US (2) | US8987882B2 (ja) |
JP (1) | JP5865220B2 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018110169A (ja) * | 2016-12-28 | 2018-07-12 | 富士電機株式会社 | 半導体装置および半導体装置製造方法 |
JP2018107416A (ja) * | 2016-12-28 | 2018-07-05 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
US20190221502A1 (en) * | 2018-01-17 | 2019-07-18 | Microchip Technology Incorporated | Down Bond in Semiconductor Devices |
JP7133405B2 (ja) * | 2018-09-12 | 2022-09-08 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05326810A (ja) * | 1992-05-22 | 1993-12-10 | Dainippon Printing Co Ltd | 電子回路素子搭載用リードフレーム |
JPH0637234A (ja) * | 1992-07-14 | 1994-02-10 | Mitsubishi Electric Corp | 半導体装置 |
JPH06302745A (ja) * | 1993-04-15 | 1994-10-28 | Sony Corp | 半導体チップの樹脂封止構造 |
JPH1093003A (ja) * | 1996-06-04 | 1998-04-10 | Ind Technol Res Inst | 取り外し可能かつ互換可能なダイ取付パドルを有するリードフレーム |
JP2000252403A (ja) * | 1999-02-26 | 2000-09-14 | Mitsui High Tec Inc | 半導体装置 |
JP2004296815A (ja) * | 2003-03-27 | 2004-10-21 | Fuji Electric Device Technology Co Ltd | 半導体装置 |
JP2008543059A (ja) * | 2005-05-26 | 2008-11-27 | サンディスク コーポレイション | 積層化集積回路を備えた集積回路パッケージとそのための方法 |
JP2009123910A (ja) * | 2007-11-14 | 2009-06-04 | Sanyo Electric Co Ltd | 半導体モジュールおよび撮像装置 |
JP2010040715A (ja) * | 2008-08-04 | 2010-02-18 | Renesas Technology Corp | 半導体装置 |
JP2010278061A (ja) * | 2009-05-26 | 2010-12-09 | Renesas Electronics Corp | 半導体装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05326817A (ja) | 1992-05-26 | 1993-12-10 | Hitachi Cable Ltd | マルチチップパッケージ |
US6906415B2 (en) * | 2002-06-27 | 2005-06-14 | Micron Technology, Inc. | Semiconductor device assemblies and packages including multiple semiconductor devices and methods |
JP3680839B2 (ja) * | 2003-03-18 | 2005-08-10 | セイコーエプソン株式会社 | 半導体装置および半導体装置の製造方法 |
US20060138631A1 (en) * | 2003-12-31 | 2006-06-29 | Advanced Semiconductor Engineering, Inc. | Multi-chip package structure |
US7253511B2 (en) * | 2004-07-13 | 2007-08-07 | Chippac, Inc. | Semiconductor multipackage module including die and inverted land grid array package stacked over ball grid array package |
-
2012
- 2012-09-24 JP JP2012209656A patent/JP5865220B2/ja active Active
-
2013
- 2013-09-03 US US14/016,429 patent/US8987882B2/en active Active
-
2015
- 2015-03-12 US US14/645,899 patent/US9257371B2/en not_active Expired - Fee Related
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05326810A (ja) * | 1992-05-22 | 1993-12-10 | Dainippon Printing Co Ltd | 電子回路素子搭載用リードフレーム |
JPH0637234A (ja) * | 1992-07-14 | 1994-02-10 | Mitsubishi Electric Corp | 半導体装置 |
JPH06302745A (ja) * | 1993-04-15 | 1994-10-28 | Sony Corp | 半導体チップの樹脂封止構造 |
JPH1093003A (ja) * | 1996-06-04 | 1998-04-10 | Ind Technol Res Inst | 取り外し可能かつ互換可能なダイ取付パドルを有するリードフレーム |
JP2000252403A (ja) * | 1999-02-26 | 2000-09-14 | Mitsui High Tec Inc | 半導体装置 |
JP2004296815A (ja) * | 2003-03-27 | 2004-10-21 | Fuji Electric Device Technology Co Ltd | 半導体装置 |
JP2008543059A (ja) * | 2005-05-26 | 2008-11-27 | サンディスク コーポレイション | 積層化集積回路を備えた集積回路パッケージとそのための方法 |
JP2009123910A (ja) * | 2007-11-14 | 2009-06-04 | Sanyo Electric Co Ltd | 半導体モジュールおよび撮像装置 |
JP2010040715A (ja) * | 2008-08-04 | 2010-02-18 | Renesas Technology Corp | 半導体装置 |
JP2010278061A (ja) * | 2009-05-26 | 2010-12-09 | Renesas Electronics Corp | 半導体装置 |
Also Published As
Publication number | Publication date |
---|---|
US20140084434A1 (en) | 2014-03-27 |
US8987882B2 (en) | 2015-03-24 |
US20150187682A1 (en) | 2015-07-02 |
JP5865220B2 (ja) | 2016-02-17 |
US9257371B2 (en) | 2016-02-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100690247B1 (ko) | 이중 봉합된 반도체 패키지 및 그의 제조 방법 | |
US9385072B2 (en) | Method of manufacturing semiconductor device and semiconductor device | |
KR20060121823A (ko) | 가역 리드리스 패키지, 및 이를 제조 및 사용하기 위한방법 | |
TWI556370B (zh) | 半導體封裝及用於其之方法 | |
CN101764127B (zh) | 无外引脚的半导体封装体及其堆迭构造 | |
JP5865220B2 (ja) | 半導体装置 | |
JP6196092B2 (ja) | 半導体装置 | |
US9972560B2 (en) | Lead frame and semiconductor device | |
US9236331B2 (en) | Multiple die lead frame | |
JP2011159942A (ja) | 電子装置の製造方法及び電子装置 | |
KR20150046117A (ko) | 장치 및 그 제조 방법 | |
TW201508895A (zh) | 具有偏向堆疊元件的封裝模組 | |
JP2017195344A (ja) | 半導体装置の製造方法および半導体装置 | |
JP2010040955A (ja) | 半導体装置及びその製造方法 | |
CN115995440A (zh) | 半导体封装结构及其制造方法 | |
JP2005116687A (ja) | リードフレーム、半導体装置及び半導体装置の製造方法 | |
KR20120136202A (ko) | 반도체 패키지, 적층 반도체 패키지 및 그 제조 방법 | |
JP7148220B2 (ja) | 半導体パッケージ及びその製造方法 | |
KR20080067891A (ko) | 멀티 칩 패키지 | |
CN110634856A (zh) | 一种倒装加打线混合型封装结构及其封装方法 | |
KR20070078593A (ko) | 면 배열형 리드프레임, 그를 이용한 반도체 패키지 및 그제조 방법 | |
JP2019145625A (ja) | 半導体装置 | |
JP5086315B2 (ja) | 半導体装置の製造方法 | |
CN101587884A (zh) | 堆叠式芯片封装结构及其制作方法 | |
JPH08279575A (ja) | 半導体パッケージ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20150204 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20151207 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20151215 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20151225 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5865220 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |