JP2013534370A5 - - Google Patents

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Publication number
JP2013534370A5
JP2013534370A5 JP2013524857A JP2013524857A JP2013534370A5 JP 2013534370 A5 JP2013534370 A5 JP 2013534370A5 JP 2013524857 A JP2013524857 A JP 2013524857A JP 2013524857 A JP2013524857 A JP 2013524857A JP 2013534370 A5 JP2013534370 A5 JP 2013534370A5
Authority
JP
Japan
Prior art keywords
ruthenium
cobalt
liner
alloyed
insulating material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2013524857A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013534370A (ja
Filing date
Publication date
Priority claimed from US12/860,745 external-priority patent/US9177917B2/en
Application filed filed Critical
Publication of JP2013534370A publication Critical patent/JP2013534370A/ja
Publication of JP2013534370A5 publication Critical patent/JP2013534370A5/ja
Pending legal-status Critical Current

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JP2013524857A 2010-08-20 2011-07-22 半導体構造ならびに導電性材料を開口内に提供するための方法 Pending JP2013534370A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/860,745 2010-08-20
US12/860,745 US9177917B2 (en) 2010-08-20 2010-08-20 Semiconductor constructions
PCT/US2011/045067 WO2012024056A2 (en) 2010-08-20 2011-07-22 Semiconductor constructions; and methods for providing electrically conductive material within openings

Publications (2)

Publication Number Publication Date
JP2013534370A JP2013534370A (ja) 2013-09-02
JP2013534370A5 true JP2013534370A5 (enExample) 2014-12-04

Family

ID=45593412

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013524857A Pending JP2013534370A (ja) 2010-08-20 2011-07-22 半導体構造ならびに導電性材料を開口内に提供するための方法

Country Status (7)

Country Link
US (3) US9177917B2 (enExample)
JP (1) JP2013534370A (enExample)
KR (1) KR20130044354A (enExample)
CN (1) CN103081066A (enExample)
SG (1) SG188236A1 (enExample)
TW (1) TWI443775B (enExample)
WO (1) WO2012024056A2 (enExample)

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