JP2013534319A - 位置測定デバイス - Google Patents

位置測定デバイス Download PDF

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Publication number
JP2013534319A
JP2013534319A JP2013524324A JP2013524324A JP2013534319A JP 2013534319 A JP2013534319 A JP 2013534319A JP 2013524324 A JP2013524324 A JP 2013524324A JP 2013524324 A JP2013524324 A JP 2013524324A JP 2013534319 A JP2013534319 A JP 2013534319A
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JP
Japan
Prior art keywords
housing
sensor head
optical receiver
rotary encoder
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2013524324A
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English (en)
Japanese (ja)
Inventor
ヴァグナー，ジャン−ジャック
Original Assignee
エレスタ・リレイズ・ゲーエムベーハー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CH01342/10A external-priority patent/CH703663A1/de
Priority claimed from CH01341/10A external-priority patent/CH703647A1/de
Priority claimed from CH01343/10A external-priority patent/CH703664A1/de
Application filed by エレスタ・リレイズ・ゲーエムベーハー filed Critical エレスタ・リレイズ・ゲーエムベーハー
Publication of JP2013534319A publication Critical patent/JP2013534319A/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/06—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting by means of pushers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24428—Error prevention
    • G01D5/24433—Error prevention by mechanical means
    • G01D5/24442—Error prevention by mechanical means by mounting means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/3473—Circular or rotary encoders
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
    • H10F30/22—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
    • H10F30/223—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier being a PIN barrier
    • H10F30/2235—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier being a PIN barrier the devices comprising Group IV amorphous materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/50—Encapsulations or containers

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microelectronics & Electronic Packaging (AREA)
JP2013524324A 2010-08-19 2011-08-19 位置測定デバイス Pending JP2013534319A (ja)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
CH01342/10A CH703663A1 (de) 2010-08-19 2010-08-19 Positionsmessvorrichtung, insbesondere Encoder.
CH1342/10 2010-08-19
CH01341/10A CH703647A1 (de) 2010-08-19 2010-08-19 Positionsmessvorrichtung und Verfahren zu deren Herstellung.
CH1341/10 2010-08-19
CH1343/10 2010-08-20
CH01343/10A CH703664A1 (de) 2010-08-20 2010-08-20 Positionsmessvorrichtung, insbesondere Encoder, mit Sensorkopfhalter.
PCT/CH2011/000189 WO2012022004A1 (de) 2010-08-19 2011-08-19 Positionsmessvorrichtung

Publications (1)

Publication Number Publication Date
JP2013534319A true JP2013534319A (ja) 2013-09-02

Family

ID=45604666

Family Applications (4)

Application Number Title Priority Date Filing Date
JP2013524324A Pending JP2013534319A (ja) 2010-08-19 2011-08-19 位置測定デバイス
JP2013524323A Pending JP2013534318A (ja) 2010-08-19 2011-08-19 センサヘッドホルダ
JP2013524321A Pending JP2013535695A (ja) 2010-08-19 2011-08-19 絶対位置を決定するための位置測定デバイス及び方法
JP2013524322A Expired - Fee Related JP6071881B2 (ja) 2010-08-19 2011-08-19 位置測定デバイス

Family Applications After (3)

Application Number Title Priority Date Filing Date
JP2013524323A Pending JP2013534318A (ja) 2010-08-19 2011-08-19 センサヘッドホルダ
JP2013524321A Pending JP2013535695A (ja) 2010-08-19 2011-08-19 絶対位置を決定するための位置測定デバイス及び方法
JP2013524322A Expired - Fee Related JP6071881B2 (ja) 2010-08-19 2011-08-19 位置測定デバイス

Country Status (5)

Country Link
US (4) US8982361B2 (enExample)
EP (4) EP2606315B1 (enExample)
JP (4) JP2013534319A (enExample)
CN (4) CN103119402B (enExample)
WO (4) WO2012022003A1 (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101978756B (zh) 2008-03-19 2014-04-23 日本电气株式会社 通信系统、移动台站、基站、应答确定方法、资源配置确定方法以及程序
JP2013534319A (ja) * 2010-08-19 2013-09-02 エレスタ・リレイズ・ゲーエムベーハー 位置測定デバイス
CN104168009B (zh) * 2013-05-17 2018-03-23 光宝电子(广州)有限公司 发光型触控开关装置及发光型触控开关模组
CN103276525B (zh) * 2013-06-08 2015-03-04 福建睿能科技股份有限公司 电脑横机及其码盘组件
US9806884B2 (en) * 2014-01-10 2017-10-31 Robert Bosch Gmbh System and method for cryptographic key identification
US10119842B1 (en) * 2014-08-05 2018-11-06 X Development Llc Encoder design and use
DE102014114066A1 (de) * 2014-09-29 2016-03-31 Pilz Gmbh & Co. Kg Kameraeinheit zum Überwachen eines Raumbereichs
CN104457806B (zh) * 2014-12-02 2017-02-08 佛山轻子精密测控技术有限公司 一种复合型旋转编码器及其测量方法
DE102015216233A1 (de) * 2015-08-25 2017-03-02 Volkswagen Aktiengesellschaft Rotorlagesystem mit in einer Rotorwelle integrierter Geberkontur
JP6200469B2 (ja) * 2015-08-28 2017-09-20 ファナック株式会社 液密構造を有するエンコーダ
JP7241684B2 (ja) * 2016-10-25 2023-03-17 トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング 少なくとも１個の対象物の光学的な検出のための検出器
DE102016122585B4 (de) * 2016-11-23 2018-07-12 Preh Gmbh Drehsteller mit verbesserter, optischer Drehstellungsdetektion
ES2752656T3 (es) * 2017-08-01 2020-04-06 Fagor Automation S Coop Método de comprobación para un dispositivo optoelectrónico de medida, y dispositivo
DE102017009377A1 (de) * 2017-10-10 2019-04-11 Diehl Ako Stiftung & Co. Kg Bedienvorrichtung, insbesondere für ein elektronisches Haushaltsgerät
EP3623769A1 (en) * 2018-09-12 2020-03-18 Renishaw PLC Measurement device
JP7206489B2 (ja) * 2019-03-07 2023-01-18 ミツミ電機株式会社 光学モジュール及び光学式エンコーダ
CN112013768B (zh) * 2019-05-29 2022-09-02 深圳市立林智感科技有限公司 用于位移测量的信号携带体装置、系统及设备
CN112444277A (zh) 2019-09-04 2021-03-05 台达电子工业股份有限公司 光学反射部件及其适用的光学编码器
DE102020000357B4 (de) * 2019-09-20 2023-02-23 Diehl Ako Stiftung & Co. Kg Bedienvorrichtung
CN115014427A (zh) * 2021-03-05 2022-09-06 奥特斯(中国)有限公司 基于设计数据测量部件载体的物理特性
CN113834527B (zh) * 2021-09-18 2024-09-27 重庆大学 一种压接型功率半导体结构及其内部压力在线测量方法
CN119826875B (zh) * 2024-12-23 2025-11-25 传周半导体科技(上海)有限公司 光电编码器窜扰信号实时减除系统

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62143214U (enExample) * 1986-03-04 1987-09-09
JPS63228024A (ja) * 1987-02-27 1988-09-22 Yokogawa Hewlett Packard Ltd 光学式エンコーダ
JPH10122902A (ja) * 1996-10-11 1998-05-15 Ruhlatec Ind Gmbh エンコーダ
JP2005127793A (ja) * 2003-10-22 2005-05-19 Fanuc Ltd ロータリエンコーダ

Family Cites Families (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60143316U (ja) 1984-03-06 1985-09-24 アルプス電気株式会社 ロ−タリエンコ−ダ
KR930011888B1 (ko) 1984-10-08 1993-12-22 악티엔게젤샤프트 퓌어 인두스트리앨레 아게이에 로소네 바이 로카르노 2 부품의 위치 또는 변위를 제어하기 위하여 2부품들간의 상대위치를 결정하는 장치 및 그것의 작동방법
US4780610A (en) 1986-03-04 1988-10-25 Alps Electric Co., Ltd. Optical rotary encoder having superposed metal plate and shield plate
DE3737278A1 (de) * 1986-11-04 1988-05-11 Canon Kk Verfahren und vorrichtung zum optischen erfassen der stellung eines objekts
JPS63137566U (enExample) * 1987-02-20 1988-09-09
DE3939353A1 (de) 1989-11-24 1991-05-29 Schueler Ben Michael Messverfahren und -vorrichtung
DE4216296A1 (de) 1992-05-16 1993-11-18 Miele & Cie Drehwahlschalter zur Anordnung auf einer Leiterplatte eines elektrischen Gerätes
JPH06204566A (ja) * 1992-10-14 1994-07-22 Fujitsu Ltd 光ファイバ・光素子結合用パッケージ及び光ファイバ・光素子モジュール
JP3544573B2 (ja) * 1994-03-15 2004-07-21 オリンパス株式会社 光学式エンコーダ
US5883384A (en) * 1996-04-16 1999-03-16 Canon Kabushiki Kaisha Rotational displacement information detection apparatus
US5781299A (en) * 1996-09-24 1998-07-14 Phase Metrics Determining the complex refractive index phase offset in interferometric flying height testing
JPH10132612A (ja) * 1996-10-28 1998-05-22 Mitsutoyo Corp 光学式変位検出装置
DE19643911A1 (de) 1996-10-30 1998-05-07 Sick Ag Schaltungsanordnung mit auf einem mit Leiterbahnen versehenen Substrat angebrachten optoelektronischen Bauelementen
US20010000157A1 (en) * 1997-10-16 2001-04-05 Rohm Co., Ltd. Semiconductor device and method of making the same
JP4323579B2 (ja) * 1998-03-13 2009-09-02 キヤノン株式会社 変位情報検出装置
DE19859669A1 (de) 1998-12-23 2000-06-29 Heidenhain Gmbh Dr Johannes Integrierter optoelektronischer Sensor und Verfahren zu dessen Herstellung
DE19859670A1 (de) * 1998-12-23 2000-06-29 Heidenhain Gmbh Dr Johannes Abtastkopf und Verfahren zu dessen Herstellung
EP1041628A3 (en) 1999-03-29 2008-05-28 Interuniversitair Microelektronica Centrum Vzw An image sensor ball grid array package and the fabrication thereof
DE19917950A1 (de) * 1999-04-21 2000-10-26 Heidenhain Gmbh Dr Johannes Integrierter optoelektronischer Dünnschichtsensor und Verfahren zu dessen Herstellung
JP4981203B2 (ja) * 2000-08-01 2012-07-18 オリンパス株式会社 光学式エンコーダー
JP2002009328A (ja) 2000-06-21 2002-01-11 Mitsutoyo Corp 受光素子アレイ及びその製造方法
DE10033263A1 (de) * 2000-07-10 2002-02-28 Heidenhain Gmbh Dr Johannes Optische Positionsmesseinrichtung
JP2002168655A (ja) * 2000-11-30 2002-06-14 Mitsutoyo Corp 直線位置絶対値検出器
JP2002243503A (ja) * 2001-02-13 2002-08-28 Nikon Corp 光学式エンコーダ
US6963064B2 (en) 2002-06-14 2005-11-08 Pem Management, Inc. Multi-resolution reflective optical incremental encoder
JP2004028666A (ja) * 2002-06-24 2004-01-29 Mitsutoyo Corp 光電式エンコーダおよび受光アレイの製造方法
JP2004028667A (ja) * 2002-06-24 2004-01-29 Mitsutoyo Corp 光電式エンコーダおよびスケールの製造方法
DE10244234A1 (de) * 2002-09-23 2004-03-25 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP4285966B2 (ja) * 2002-09-27 2009-06-24 三洋電機株式会社 カメラモジュール
DE50313389D1 (de) * 2002-11-15 2011-02-17 Leica Geosystems Ag Verfahren und Vorrichtung zur Kalibrierung eines Messsystems
DE10317736A1 (de) * 2003-04-11 2004-10-28 Dr. Johannes Heidenhain Gmbh Abtasteinheit für eine Positionsmesseinrichtung zum optischen Abtasten einer Maßverkörperung
JP3963885B2 (ja) * 2003-10-27 2007-08-22 オリンパス株式会社 反射型光学式エンコーダーのセンサヘッド
DE10357654A1 (de) 2003-12-10 2005-07-14 Dr. Johannes Heidenhain Gmbh Abtastkopf für optische Positionsmeßsysteme
US20060208682A1 (en) 2004-04-23 2006-09-21 Kyle Bober Internal integrated encoder and method of use
DE102004027226A1 (de) * 2004-06-03 2005-12-29 Methode Electronics Malta Ltd. Träger mit zumindest einer durchleuchteten optischen Positionsmarke
DE102004033602A1 (de) 2004-07-08 2006-02-16 Carl Zeiss Sms Gmbh Abbildungssystem zur Emulation hochaperturiger Scannersysteme
WO2006008883A1 (ja) * 2004-07-22 2006-01-26 Kabushiki Kaisha Yaskawa Denki 反射形光学式検出器
DE102004036903B4 (de) 2004-07-29 2019-07-04 Pwb Encoders Gmbh Encoderbaugruppe und Verfahren zur Montage einer Encoderbaugruppe
DE102006021017A1 (de) * 2006-05-05 2007-11-08 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
GB0621487D0 (en) * 2006-10-28 2006-12-06 Renishaw Plc Opto-electronic read head
DE102007014781B3 (de) 2007-03-28 2008-05-15 Bühler Motor GmbH Encoderanordnung eines Gleichstrommotors
DE102007023300A1 (de) * 2007-05-16 2008-11-20 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Anordnung derselben
US7714334B2 (en) * 2007-08-16 2010-05-11 Lin Peter P W Polarless surface mounting light emitting diode
DE102007053137A1 (de) * 2007-11-08 2009-05-14 Dr. Johannes Heidenhain Gmbh Abtasteinheit einer optischen Positionsmesseinrichtung und Positionsmesseinrichtung mit dieser Abtasteinheit
WO2009133910A1 (ja) * 2008-04-30 2009-11-05 株式会社ニコン エンコーダ装置
JP5212340B2 (ja) * 2009-11-13 2013-06-19 株式会社ニコン アブソリュートエンコーダ
JP2013534319A (ja) * 2010-08-19 2013-09-02 エレスタ・リレイズ・ゲーエムベーハー 位置測定デバイス

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62143214U (enExample) * 1986-03-04 1987-09-09
JPS63228024A (ja) * 1987-02-27 1988-09-22 Yokogawa Hewlett Packard Ltd 光学式エンコーダ
JPH10122902A (ja) * 1996-10-11 1998-05-15 Ruhlatec Ind Gmbh エンコーダ
JP2005127793A (ja) * 2003-10-22 2005-05-19 Fanuc Ltd ロータリエンコーダ

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WO2012022003A1 (de) 2012-02-23
US20130148131A1 (en) 2013-06-13
CN103168212A (zh) 2013-06-19
EP2606317A1 (de) 2013-06-26
WO2012022001A2 (de) 2012-02-23
CN103210283A (zh) 2013-07-17
WO2012022001A3 (de) 2012-07-05
EP2606315A1 (de) 2013-06-26
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US20130155420A1 (en) 2013-06-20
CN103168212B (zh) 2016-03-09
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US20130146755A1 (en) 2013-06-13
US8902434B2 (en) 2014-12-02
CN103080700A (zh) 2013-05-01
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WO2012022002A1 (de) 2012-02-23
JP2013534318A (ja) 2013-09-02

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