CN103119402B - 位置测量装置 - Google Patents

位置测量装置 Download PDF

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Publication number
CN103119402B
CN103119402B CN201180040006.6A CN201180040006A CN103119402B CN 103119402 B CN103119402 B CN 103119402B CN 201180040006 A CN201180040006 A CN 201180040006A CN 103119402 B CN103119402 B CN 103119402B
Authority
CN
China
Prior art keywords
sensor head
light source
light
substrate
light receiver
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201180040006.6A
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English (en)
Chinese (zh)
Other versions
CN103119402A (zh
Inventor
让雅克·瓦格纳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elesta Relays GmbH
Original Assignee
Elesta Relays GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CH01341/10A external-priority patent/CH703647A1/de
Priority claimed from CH01342/10A external-priority patent/CH703663A1/de
Priority claimed from CH01343/10A external-priority patent/CH703664A1/de
Application filed by Elesta Relays GmbH filed Critical Elesta Relays GmbH
Publication of CN103119402A publication Critical patent/CN103119402A/zh
Application granted granted Critical
Publication of CN103119402B publication Critical patent/CN103119402B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/06—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting by means of pushers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24428—Error prevention
    • G01D5/24433—Error prevention by mechanical means
    • G01D5/24442—Error prevention by mechanical means by mounting means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/3473—Circular or rotary encoders
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
    • H10F30/22—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
    • H10F30/223—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier being a PIN barrier
    • H10F30/2235—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier being a PIN barrier the devices comprising Group IV amorphous materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/50—Encapsulations or containers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microelectronics & Electronic Packaging (AREA)
CN201180040006.6A 2010-08-19 2011-08-19 位置测量装置 Expired - Fee Related CN103119402B (zh)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
CH1341/10 2010-08-19
CH01341/10A CH703647A1 (de) 2010-08-19 2010-08-19 Positionsmessvorrichtung und Verfahren zu deren Herstellung.
CH01342/10A CH703663A1 (de) 2010-08-19 2010-08-19 Positionsmessvorrichtung, insbesondere Encoder.
CH1342/10 2010-08-19
CH1343/10 2010-08-20
CH01343/10A CH703664A1 (de) 2010-08-20 2010-08-20 Positionsmessvorrichtung, insbesondere Encoder, mit Sensorkopfhalter.
PCT/CH2011/000187 WO2012022002A1 (de) 2010-08-19 2011-08-19 Positionsmessvorrichtung

Publications (2)

Publication Number Publication Date
CN103119402A CN103119402A (zh) 2013-05-22
CN103119402B true CN103119402B (zh) 2016-08-03

Family

ID=45604666

Family Applications (4)

Application Number Title Priority Date Filing Date
CN201180040006.6A Expired - Fee Related CN103119402B (zh) 2010-08-19 2011-08-19 位置测量装置
CN201180040256XA Pending CN103210283A (zh) 2010-08-19 2011-08-19 传感器头保持件
CN201180040005.1A Expired - Fee Related CN103168212B (zh) 2010-08-19 2011-08-19 位置测量装置和用于确定绝对位置的方法
CN2011800401092A Pending CN103080700A (zh) 2010-08-19 2011-08-19 位置测量装置

Family Applications After (3)

Application Number Title Priority Date Filing Date
CN201180040256XA Pending CN103210283A (zh) 2010-08-19 2011-08-19 传感器头保持件
CN201180040005.1A Expired - Fee Related CN103168212B (zh) 2010-08-19 2011-08-19 位置测量装置和用于确定绝对位置的方法
CN2011800401092A Pending CN103080700A (zh) 2010-08-19 2011-08-19 位置测量装置

Country Status (5)

Country Link
US (4) US8982361B2 (enExample)
EP (4) EP2606316A1 (enExample)
JP (4) JP2013535695A (enExample)
CN (4) CN103119402B (enExample)
WO (4) WO2012022002A1 (enExample)

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CN104168009B (zh) * 2013-05-17 2018-03-23 光宝电子(广州)有限公司 发光型触控开关装置及发光型触控开关模组
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CN104457806B (zh) * 2014-12-02 2017-02-08 佛山轻子精密测控技术有限公司 一种复合型旋转编码器及其测量方法
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DE102017009377A1 (de) * 2017-10-10 2019-04-11 Diehl Ako Stiftung & Co. Kg Bedienvorrichtung, insbesondere für ein elektronisches Haushaltsgerät
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JP7206489B2 (ja) * 2019-03-07 2023-01-18 ミツミ電機株式会社 光学モジュール及び光学式エンコーダ
CN112013768B (zh) * 2019-05-29 2022-09-02 深圳市立林智感科技有限公司 用于位移测量的信号携带体装置、系统及设备
CN112444277A (zh) 2019-09-04 2021-03-05 台达电子工业股份有限公司 光学反射部件及其适用的光学编码器
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CN115014427A (zh) * 2021-03-05 2022-09-06 奥特斯(中国)有限公司 基于设计数据测量部件载体的物理特性
CN113834527B (zh) * 2021-09-18 2024-09-27 重庆大学 一种压接型功率半导体结构及其内部压力在线测量方法
CN119826875B (zh) * 2024-12-23 2025-11-25 传周半导体科技(上海)有限公司 光电编码器窜扰信号实时减除系统

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CN103168212B (zh) 2016-03-09
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WO2012022001A3 (de) 2012-07-05
EP2606314A2 (de) 2013-06-26
WO2012022001A2 (de) 2012-02-23
JP2013534319A (ja) 2013-09-02
US20130146755A1 (en) 2013-06-13
CN103168212A (zh) 2013-06-19
CN103210283A (zh) 2013-07-17
US8982361B2 (en) 2015-03-17
JP2013535695A (ja) 2013-09-12
US20130148131A1 (en) 2013-06-13
WO2012022003A1 (de) 2012-02-23
JP2013539019A (ja) 2013-10-17
EP2606315B1 (de) 2019-01-09
CN103080700A (zh) 2013-05-01
US8902434B2 (en) 2014-12-02
JP6071881B2 (ja) 2017-02-01
US20130155420A1 (en) 2013-06-20
CN103119402A (zh) 2013-05-22
WO2012022002A1 (de) 2012-02-23
EP2606315A1 (de) 2013-06-26
EP2606316A1 (de) 2013-06-26
WO2012022004A1 (de) 2012-02-23
US20130148132A1 (en) 2013-06-13

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