JP2013528704A5 - - Google Patents
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- Publication number
- JP2013528704A5 JP2013528704A5 JP2013508328A JP2013508328A JP2013528704A5 JP 2013528704 A5 JP2013528704 A5 JP 2013528704A5 JP 2013508328 A JP2013508328 A JP 2013508328A JP 2013508328 A JP2013508328 A JP 2013508328A JP 2013528704 A5 JP2013528704 A5 JP 2013528704A5
- Authority
- JP
- Japan
- Prior art keywords
- range
- titanium diboride
- tib
- diboride target
- carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 9
- QYEXBYZXHDUPRC-UHFFFAOYSA-N B#[Ti]#B Chemical compound B#[Ti]#B QYEXBYZXHDUPRC-UHFFFAOYSA-N 0.000 claims 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 7
- 229910033181 TiB2 Inorganic materials 0.000 claims 7
- 239000002245 particle Substances 0.000 claims 6
- 239000000843 powder Substances 0.000 claims 6
- 229910052799 carbon Inorganic materials 0.000 claims 5
- 229910052742 iron Inorganic materials 0.000 claims 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 4
- 239000011651 chromium Substances 0.000 claims 4
- 239000000203 mixture Substances 0.000 claims 4
- 229910052759 nickel Inorganic materials 0.000 claims 3
- 239000011324 bead Substances 0.000 claims 2
- 229910052804 chromium Inorganic materials 0.000 claims 2
- 238000000227 grinding Methods 0.000 claims 2
- 229910052751 metal Inorganic materials 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- 150000002739 metals Chemical class 0.000 claims 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- 229910017052 cobalt Inorganic materials 0.000 claims 1
- 239000010941 cobalt Substances 0.000 claims 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims 1
- 230000006835 compression Effects 0.000 claims 1
- 238000007906 compression Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000005240 physical vapour deposition Methods 0.000 claims 1
- 238000003825 pressing Methods 0.000 claims 1
- 238000010298 pulverizing process Methods 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AT0028810U AT11884U1 (de) | 2010-05-04 | 2010-05-04 | Target |
| ATGM288/2010 | 2010-05-04 | ||
| PCT/AT2011/000209 WO2011137472A1 (de) | 2010-05-04 | 2011-05-02 | Titandiborid-target |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013528704A JP2013528704A (ja) | 2013-07-11 |
| JP2013528704A5 true JP2013528704A5 (enExample) | 2014-04-03 |
| JP5815678B2 JP5815678B2 (ja) | 2015-11-17 |
Family
ID=43825220
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013508328A Active JP5815678B2 (ja) | 2010-05-04 | 2011-05-02 | 二ホウ化チタンターゲット |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US9481925B2 (enExample) |
| EP (1) | EP2567000B1 (enExample) |
| JP (1) | JP5815678B2 (enExample) |
| CN (1) | CN102869807B (enExample) |
| AT (1) | AT11884U1 (enExample) |
| RU (1) | RU2561624C2 (enExample) |
| WO (1) | WO2011137472A1 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9992917B2 (en) | 2014-03-10 | 2018-06-05 | Vulcan GMS | 3-D printing method for producing tungsten-based shielding parts |
| AT14701U1 (de) * | 2015-03-19 | 2016-04-15 | Plansee Composite Mat Gmbh | Beschichtungsquelle zur Herstellung dotierter Kohlenstoffschichten |
| CN105693252B (zh) * | 2016-01-22 | 2018-06-19 | 基迈克材料科技（苏州）有限公司 | 热压工艺制备硼化物溅射靶材 |
| JP7357542B2 (ja) | 2017-04-21 | 2023-10-06 | エーリコン・サーフェス・ソリューションズ・アーゲー・プフェフィコン | 超合金スパッタリングターゲット |
| AT16481U1 (de) * | 2018-04-20 | 2019-10-15 | Plansee Composite Mat Gmbh | Target und Verfahren zur Herstellung eines Targets |
| EP3556901B1 (en) | 2018-04-20 | 2021-03-31 | Plansee Composite Materials Gmbh | Vacuum arc source |
| CN114105649A (zh) * | 2021-12-28 | 2022-03-01 | 北京理工大学重庆创新中心 | 一种二硼化钛基金属复合陶瓷材料及其热压制备方法 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4325806Y1 (enExample) | 1965-12-25 | 1968-10-29 | ||
| US4209375A (en) * | 1979-08-02 | 1980-06-24 | The United States Of America As Represented By The United States Department Of Energy | Sputter target |
| JPS6442575A (en) | 1987-08-10 | 1989-02-14 | Kobe Steel Ltd | Ceramic target having high melting point for vacuum deposition with arc |
| JPS6442575U (enExample) | 1987-09-09 | 1989-03-14 | ||
| US4925346A (en) * | 1987-12-21 | 1990-05-15 | Ford Motor Company | Method of increasing useful life of tool steel cutting tools |
| US5045269A (en) * | 1988-11-17 | 1991-09-03 | Union Carbide Coatings Service Technology Corporation | Method for sintered shapes with controlled grain size |
| DE68909024T2 (de) * | 1988-11-17 | 1994-01-05 | Praxair Technology Inc | Herstellung von feuerfesten Formkörpern. |
| JPH05195199A (ja) * | 1991-10-04 | 1993-08-03 | Toyo Kohan Co Ltd | 耐摩耗性、耐食性に優れた硼化物系超硬質コーティン グ薄膜の製造方法 |
| RU2017846C1 (ru) * | 1992-06-25 | 1994-08-15 | Научно-производственное объединение "Металл" | Способ изготовления изделий из композиционных материалов |
| DE4237423A1 (de) * | 1992-11-05 | 1994-05-11 | Kempten Elektroschmelz Gmbh | Verbundwerkstoffe auf der Basis von Titandiborid und Verfahren zu ihrer Herstellung |
| JPH06248446A (ja) * | 1993-02-26 | 1994-09-06 | Mitsubishi Materials Corp | スパッタリング用ターゲット及びその製造方法 |
| JPH07109173A (ja) * | 1993-10-07 | 1995-04-25 | Toshiba Ceramics Co Ltd | ホウ化チタンセラミックス焼結体並びにそれを用いた製品 |
| JP3560737B2 (ja) | 1996-07-23 | 2004-09-02 | 三菱電機株式会社 | インバータ装置 |
| JP2000226648A (ja) | 1999-02-05 | 2000-08-15 | Nihon Seimitsu Co Ltd | ＴｉＢ２の蒸発方法 |
| RU2305717C2 (ru) * | 2005-11-14 | 2007-09-10 | Государственное образовательное учреждение высшего профессионального образования "Московский государственный институт стали и сплавов" (технологический университет) | Мишень для получения функциональных покрытий и способ ее изготовления |
| DE102006013746A1 (de) * | 2006-03-24 | 2007-09-27 | Esk Ceramics Gmbh & Co. Kg | Gesinterter verschleißbeständiger Werkstoff, sinterfähige Pulvermischung, Verfahren zur Herstellung des Werkstoffs und dessen Verwendung |
-
2010
- 2010-05-04 AT AT0028810U patent/AT11884U1/de not_active IP Right Cessation
-
2011
- 2011-05-02 RU RU2012144268/02A patent/RU2561624C2/ru not_active IP Right Cessation
- 2011-05-02 US US13/696,117 patent/US9481925B2/en active Active
- 2011-05-02 WO PCT/AT2011/000209 patent/WO2011137472A1/de not_active Ceased
- 2011-05-02 JP JP2013508328A patent/JP5815678B2/ja active Active
- 2011-05-02 EP EP11726642.9A patent/EP2567000B1/de active Active
- 2011-05-02 CN CN201180021702.2A patent/CN102869807B/zh active Active
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