CN102869807B - 二硼化钛靶子 - Google Patents

二硼化钛靶子 Download PDF

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Publication number
CN102869807B
CN102869807B CN201180021702.2A CN201180021702A CN102869807B CN 102869807 B CN102869807 B CN 102869807B CN 201180021702 A CN201180021702 A CN 201180021702A CN 102869807 B CN102869807 B CN 102869807B
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China
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range
titanium diboride
carbon
powder
content
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CN201180021702.2A
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Chinese (zh)
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CN102869807A (zh
Inventor
M·欧苏利文
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Plansee Composite Materials GmbH
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Plansee SE
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/067—Borides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/12—Both compacting and sintering
    • B22F3/14—Both compacting and sintering simultaneously
    • B22F3/15—Hot isostatic pressing
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/5805—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on borides
    • C04B35/58064—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on borides based on refractory borides
    • C04B35/58071—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on borides based on refractory borides based on titanium borides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/38—Non-oxide ceramic constituents or additives
    • C04B2235/3804—Borides
    • C04B2235/3813—Refractory metal borides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
    • C04B2235/54—Particle size related information
    • C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
    • C04B2235/5436—Particle size related information expressed by the size of the particles or aggregates thereof micrometer sized, i.e. from 1 to 100 micron

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Structural Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Powder Metallurgy (AREA)
  • Hybrid Cells (AREA)
CN201180021702.2A 2010-05-04 2011-05-02 二硼化钛靶子 Active CN102869807B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
AT0028810U AT11884U1 (de) 2010-05-04 2010-05-04 Target
ATGM288/2010 2010-05-04
PCT/AT2011/000209 WO2011137472A1 (de) 2010-05-04 2011-05-02 Titandiborid-target

Publications (2)

Publication Number Publication Date
CN102869807A CN102869807A (zh) 2013-01-09
CN102869807B true CN102869807B (zh) 2015-12-16

Family

ID=43825220

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201180021702.2A Active CN102869807B (zh) 2010-05-04 2011-05-02 二硼化钛靶子

Country Status (7)

Country Link
US (1) US9481925B2 (enExample)
EP (1) EP2567000B1 (enExample)
JP (1) JP5815678B2 (enExample)
CN (1) CN102869807B (enExample)
AT (1) AT11884U1 (enExample)
RU (1) RU2561624C2 (enExample)
WO (1) WO2011137472A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9992917B2 (en) 2014-03-10 2018-06-05 Vulcan GMS 3-D printing method for producing tungsten-based shielding parts
AT14701U1 (de) * 2015-03-19 2016-04-15 Plansee Composite Mat Gmbh Beschichtungsquelle zur Herstellung dotierter Kohlenstoffschichten
CN105693252B (zh) * 2016-01-22 2018-06-19 基迈克材料科技（苏州）有限公司 热压工艺制备硼化物溅射靶材
JP7357542B2 (ja) 2017-04-21 2023-10-06 エーリコン・サーフェス・ソリューションズ・アーゲー・プフェフィコン 超合金スパッタリングターゲット
AT16481U1 (de) * 2018-04-20 2019-10-15 Plansee Composite Mat Gmbh Target und Verfahren zur Herstellung eines Targets
EP3556901B1 (en) 2018-04-20 2021-03-31 Plansee Composite Materials Gmbh Vacuum arc source
CN114105649A (zh) * 2021-12-28 2022-03-01 北京理工大学重庆创新中心 一种二硼化钛基金属复合陶瓷材料及其热压制备方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101410347A (zh) * 2006-03-24 2009-04-15 Esk陶瓷有限及两合公司 烧结耐磨硼化物材料、制备所述材料的可烧结粉末混合物、所述材料的制备方法及其用途

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JPS4325806Y1 (enExample) 1965-12-25 1968-10-29
US4209375A (en) * 1979-08-02 1980-06-24 The United States Of America As Represented By The United States Department Of Energy Sputter target
JPS6442575A (en) 1987-08-10 1989-02-14 Kobe Steel Ltd Ceramic target having high melting point for vacuum deposition with arc
JPS6442575U (enExample) 1987-09-09 1989-03-14
US4925346A (en) * 1987-12-21 1990-05-15 Ford Motor Company Method of increasing useful life of tool steel cutting tools
US5045269A (en) * 1988-11-17 1991-09-03 Union Carbide Coatings Service Technology Corporation Method for sintered shapes with controlled grain size
DE68909024T2 (de) * 1988-11-17 1994-01-05 Praxair Technology Inc Herstellung von feuerfesten Formkörpern.
JPH05195199A (ja) * 1991-10-04 1993-08-03 Toyo Kohan Co Ltd 耐摩耗性、耐食性に優れた硼化物系超硬質コーティン グ薄膜の製造方法
RU2017846C1 (ru) * 1992-06-25 1994-08-15 Научно-производственное объединение "Металл" Способ изготовления изделий из композиционных материалов
DE4237423A1 (de) * 1992-11-05 1994-05-11 Kempten Elektroschmelz Gmbh Verbundwerkstoffe auf der Basis von Titandiborid und Verfahren zu ihrer Herstellung
JPH06248446A (ja) * 1993-02-26 1994-09-06 Mitsubishi Materials Corp スパッタリング用ターゲット及びその製造方法
JPH07109173A (ja) * 1993-10-07 1995-04-25 Toshiba Ceramics Co Ltd ホウ化チタンセラミックス焼結体並びにそれを用いた製品
JP3560737B2 (ja) 1996-07-23 2004-09-02 三菱電機株式会社 インバータ装置
JP2000226648A (ja) 1999-02-05 2000-08-15 Nihon Seimitsu Co Ltd ＴｉＢ２の蒸発方法
RU2305717C2 (ru) * 2005-11-14 2007-09-10 Государственное образовательное учреждение высшего профессионального образования "Московский государственный институт стали и сплавов" (технологический университет) Мишень для получения функциональных покрытий и способ ее изготовления

Patent Citations (1)

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Publication number Priority date Publication date Assignee Title
CN101410347A (zh) * 2006-03-24 2009-04-15 Esk陶瓷有限及两合公司 烧结耐磨硼化物材料、制备所述材料的可烧结粉末混合物、所述材料的制备方法及其用途

Non-Patent Citations (3)

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Title
Ceramic cathodes for arc-physical vapour deposition: development and application;O.Knotek et.al.;《Surface and Coatings Technology》;19911210;第49卷(第1-3期);第264页第1栏第3段及表1 *
TiB2及其复合材料的研究进展;向新等;《陶瓷学报》;19990630;第20卷(第1期);114页第2栏最后一段、第2栏第3段、第5段、115页第1栏第一段 *
TiB2基金属陶瓷的显微结构与力学性能;苗明清等;《复合材料学报》;20050228;第22卷(第1期);第65页1实验部分 *

Also Published As

Publication number Publication date
JP2013528704A (ja) 2013-07-11
US9481925B2 (en) 2016-11-01
JP5815678B2 (ja) 2015-11-17
RU2012144268A (ru) 2014-06-10
WO2011137472A1 (de) 2011-11-10
CN102869807A (zh) 2013-01-09
RU2561624C2 (ru) 2015-08-27
EP2567000B1 (de) 2014-04-23
EP2567000A1 (de) 2013-03-13
AT11884U1 (de) 2011-06-15
US20130233705A1 (en) 2013-09-12

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Effective date of registration: 20200228

Address after: Leshbruck, lakeside, Germany

Patentee after: PLANSEE COMPOSITE MATERIALS GmbH

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Patentee before: PLANSEE SE

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