JP2013513015A - low−k誘電体含有半導体デバイスのためのアンダーフィルシーラントとして有用な硬化性樹脂組成物 - Google Patents
low−k誘電体含有半導体デバイスのためのアンダーフィルシーラントとして有用な硬化性樹脂組成物 Download PDFInfo
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- JP2013513015A JP2013513015A JP2012543151A JP2012543151A JP2013513015A JP 2013513015 A JP2013513015 A JP 2013513015A JP 2012543151 A JP2012543151 A JP 2012543151A JP 2012543151 A JP2012543151 A JP 2012543151A JP 2013513015 A JP2013513015 A JP 2013513015A
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Abstract
Description
銅の電気的相互接続および少なくとも1層のlow−k ILDを有する半導体チップが使用され、
大きなサイズ、典型的には側面が2.5cmよりも大きいサイズの半導体チップ、
現在の基準厚さの約350ミクロンのものと比較して比較的薄く、例えば100ミクロン未満である半導体チップが使用され、
現在の基準ボンドライン厚さ(「BLT」)の75ミクロンのものと比較して比較的薄く、例えば20ミクロン未満であるアンダーフィル層が使用される
半導体デバイスパッケージング技術において、特に重要である。
銅の電気的相互接続および少なくとも1層のlow−k ILDを含む半導体チップと、
この半導体チップが電気的相互接続される表面に、電気接点パッドを有するキャリア基板
を含む半導体デバイスを準備するステップ;
半導体チップの電気的相互接続された表面とキャリア基板との間に、熱硬化性アンダーフィル組成物を供給して、半導体デバイスアセンブリを形成するステップ;および
半導体デバイスアセンブリを、熱硬化性アンダーフィル組成物を硬化するのに十分な高温条件に曝露するステップ
を含む。上記の熱硬化性アンダーフィル組成物は、エポキシ樹脂成分、シラン変性エポキシ、および硬化剤(シアネートエステルまたは芳香族アミンであってよい)を、任意選択の触媒と共に含む。
銅の電気的相互接続および少なくとも1層のlow−k ILDを含む半導体チップと、
この半導体チップが電気的相互接続される表面に、電気接点パッドを有する回路基板と、
この半導体チップと回路基板との間にアンダーフィル組成物と
を含む。ここでもまた、アンダーフィル組成物は、エポキシ樹脂成分、シラン変性エポキシ、および硬化剤(シアネートエステルまたは芳香族アミンであってよい)を、任意選択の触媒と共に含む。
銅の電気的相互接続および少なくとも1層のlow−k ILDを有する半導体チップを含み、キャリア基板が電気的に接続される半導体デバイスと、
この半導体デバイスが電気的相互接続される表面に、電気接点パッドを有する回路基板と、
この半導体チップと回路基板との間にアンダーフィル組成物と
を含む。ここでもまた、アンダーフィル組成物は、エポキシ樹脂成分、シラン変性エポキシ、および硬化剤(シアネートエステルまたは芳香族アミンであってよい)を、任意選択の触媒と共に含む。
集積回路チップを準備するステップ;
集積回路チップをキャリア基板と接続し、結合したアセンブリを形成するステップ;および
そのようにして形成された結合したアセンブリを、電気接点を与え、熱硬化性アンダーフィル組成物を硬化するのに十分な高温条件に曝露して、それによって集積回路チップをキャリア基板に接合して電気的相互接続を設けるステップ
を含む。
−従来の強化フィラーと比較して、配合物の粘度がより低いこと、
−沈降がないこと、
−破壊靭性、耐衝撃性、および弾性率が向上していること、
−耐引っかき性、および耐摩擦性が向上していること、
−収縮、および熱膨張が低減していること、
−多数の望ましい特性、例えば熱安定性、耐薬品性、ガラス転移温度、耐候性、および誘電特性が向上しているか、少なくともマイナスの効果が無いこと。
Claims (13)
- エポキシ樹脂成分、シラン変性エポキシ、硬化剤、シリカフィラー、および任意選択の触媒を含み、
前記硬化剤が、シアネートエステルまたは芳香族アミンであることを特徴とする熱硬化性樹脂組成物。 - 硬化したときに、6,000〜10,000MPaの範囲の弾性率、および7〜20ppmの範囲のCTE α1を有する、請求項1に記載の組成物。
- 少なくとも1層のlow−k ILDを含む半導体デバイスの信頼性を改善する方法であって、
銅の電気的相互接続および少なくとも1層のlow−k ILDを含み、その表面に金属被覆を含む半導体チップと、
この半導体チップが、導電性材料によって、銅の電気的相互接続に電気的に相互接続される表面に、電気接点パッドを有するキャリア基板
を含む半導体デバイスを準備するステップ;
半導体チップの電気的相互接続された表面とキャリア基板との間に、熱硬化性アンダーフィル組成物を供給して、半導体デバイスアセンブリを形成するステップ;および
半導体デバイスアセンブリを、熱硬化性アンダーフィル組成物を硬化するのに十分な高温条件に曝露するステップ
を含み、
前記熱硬化性アンダーフィル組成物は、エポキシ樹脂成分、シラン変性エポキシ、シアネートエステルまたは芳香族アミンである硬化剤、および任意選択で触媒を含むことを特徴とする方法。 - 半導体チップおよびキャリア基板が結合された後、熱硬化性アンダーフィル組成物がディスペンシングによって供給され、その間の間隙に充填されて、半導体デバイスが形成される、請求項1に記載の方法。
- 熱硬化性アンダーフィル組成物が、半導体チップおよびキャリア基板の一方または両方の、電気的相互接続する表面の少なくとも一部にディスペンシングによって供給され、次に、半導体チップおよびキャリア基板が結合されて、半導体デバイスが形成される、請求項1に記載の方法。
- 前記キャリア基板が回路基板である、請求項3に記載の方法。
- 前記導電性材料が半田である、請求項3に記載の方法。
- 前記半田が、Sn(63):Pb(37)、Pb(95):Sn(5)、Sn:Ag(3.5):Cu(0.5)、およびSn:Ag(3.3):Cu(0.7)、または銅柱および半田相互接続からなる群から選択される、請求項3に記載の方法
- 銅の電気的相互接続およびlow−k ILDを含み、その表面に金属被覆を含む半導体チップと、
この半導体チップが電気的相互接続される表面に、電気接点パッドを有する回路基板と、
この半導体チップと回路基板との間に熱硬化性アンダーフィル組成物と
を含み、
前記熱硬化性アンダーフィル組成物は、エポキシ樹脂成分、シラン変性エポキシ、シアネートエステルまたは芳香族アミンである硬化剤、および任意選択で触媒を含むことを特徴とする半導体デバイス。 - 少なくとも1層のlow−k ILDと接触する銅の電気的相互接続、および、その表面に金属被覆を含む半導体チップを含み、キャリア基板が電気的に接続される半導体デバイスと、
この半導体デバイスが電気的相互接続される表面に、電気接点パッドを有する回路基板と、
この半導体デバイスと回路基板との間に熱硬化性アンダーフィル組成物と
を含み、
前記熱硬化性アンダーフィル組成物は、エポキシ樹脂成分、シラン変性エポキシ、シアネートエステルまたは芳香族アミンである硬化剤、および任意選択で触媒を含むことを特徴とする半導体デバイスアセンブリ。 - 前記シラン変性エポキシが、
成分(A)として、下記の構造で表されるエポキシ成分:
成分(B)として、下記の構造で表されるエポキシ官能化アルコキシシラン:
および
成分(C)として、成分(A)および成分(B)の反応生成物
を含む、請求項1に記載の組成物。 - 成分(C)が、1:100〜100:1の重量比の成分(A)および成分(B)から作製される、請求項10に記載の組成物。
- 成分(C)が、1:10〜10:1の重量比の成分(A)および成分(B)から作製される、請求項10に記載の組成物。
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PCT/US2010/058518 WO2011071726A2 (en) | 2009-12-07 | 2010-12-01 | Curable resin compositions useful as underfill sealants for low-k dielectric-containing semiconductor devices |
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TW201137023A (en) | 2011-11-01 |
KR20120104285A (ko) | 2012-09-20 |
EP2510053A2 (en) | 2012-10-17 |
WO2011071726A3 (en) | 2011-11-10 |
CN102753620A (zh) | 2012-10-24 |
WO2011071726A2 (en) | 2011-06-16 |
US8698320B2 (en) | 2014-04-15 |
KR101553102B1 (ko) | 2015-09-14 |
TWI480326B (zh) | 2015-04-11 |
US20110133344A1 (en) | 2011-06-09 |
JP5911807B2 (ja) | 2016-04-27 |
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