JP2013509736A5 - - Google Patents

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JP2013509736A5
JP2013509736A5 JP2012537908A JP2012537908A JP2013509736A5 JP 2013509736 A5 JP2013509736 A5 JP 2013509736A5 JP 2012537908 A JP2012537908 A JP 2012537908A JP 2012537908 A JP2012537908 A JP 2012537908A JP 2013509736 A5 JP2013509736 A5 JP 2013509736A5
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chamber
precursor
container
assembly
carrier gas
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JP2012537908A
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JP2013509736A (ja
JP5898624B2 (ja
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Priority claimed from PCT/US2010/053557 external-priority patent/WO2011053505A1/en
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JP2012537908A 2009-11-02 2010-10-21 蒸発器 Active JP5898624B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US25737909P 2009-11-02 2009-11-02
US61/257,379 2009-11-02
PCT/US2010/053557 WO2011053505A1 (en) 2009-11-02 2010-10-21 Evaporator

Publications (3)

Publication Number Publication Date
JP2013509736A JP2013509736A (ja) 2013-03-14
JP2013509736A5 true JP2013509736A5 (https=) 2013-11-28
JP5898624B2 JP5898624B2 (ja) 2016-04-06

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JP2012537908A Active JP5898624B2 (ja) 2009-11-02 2010-10-21 蒸発器

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US (1) US9297071B2 (https=)
EP (2) EP2496733B1 (https=)
JP (1) JP5898624B2 (https=)
KR (1) KR101765734B1 (https=)
CN (1) CN102597310B (https=)
IL (1) IL219085A (https=)
TW (1) TWI550127B (https=)
WO (1) WO2011053505A1 (https=)

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