JP2013504509A5 - - Google Patents

Download PDF

Info

Publication number
JP2013504509A5
JP2013504509A5 JP2012528877A JP2012528877A JP2013504509A5 JP 2013504509 A5 JP2013504509 A5 JP 2013504509A5 JP 2012528877 A JP2012528877 A JP 2012528877A JP 2012528877 A JP2012528877 A JP 2012528877A JP 2013504509 A5 JP2013504509 A5 JP 2013504509A5
Authority
JP
Japan
Prior art keywords
carbon nanotube
probe
card assembly
probe card
column
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012528877A
Other languages
English (en)
Japanese (ja)
Other versions
JP5796013B2 (ja
JP2013504509A (ja
Filing date
Publication date
Priority claimed from US12/632,428 external-priority patent/US8354855B2/en
Application filed filed Critical
Publication of JP2013504509A publication Critical patent/JP2013504509A/ja
Publication of JP2013504509A5 publication Critical patent/JP2013504509A5/ja
Application granted granted Critical
Publication of JP5796013B2 publication Critical patent/JP5796013B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2012528877A 2009-09-14 2010-09-08 カーボンナノチューブカラムと、カーボンナノチューブカラムをプローブとして作成及び使用する方法 Expired - Fee Related JP5796013B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US24220609P 2009-09-14 2009-09-14
US61/242,206 2009-09-14
US12/632,428 US8354855B2 (en) 2006-10-16 2009-12-07 Carbon nanotube columns and methods of making and using carbon nanotube columns as probes
US12/632,428 2009-12-07
PCT/US2010/048129 WO2011031759A2 (en) 2009-09-14 2010-09-08 Carbon nanotube columns and methods of making and using carbon nanotube columns as probes

Publications (3)

Publication Number Publication Date
JP2013504509A JP2013504509A (ja) 2013-02-07
JP2013504509A5 true JP2013504509A5 (enExample) 2013-09-26
JP5796013B2 JP5796013B2 (ja) 2015-10-21

Family

ID=43733080

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012528877A Expired - Fee Related JP5796013B2 (ja) 2009-09-14 2010-09-08 カーボンナノチューブカラムと、カーボンナノチューブカラムをプローブとして作成及び使用する方法

Country Status (5)

Country Link
US (1) US8354855B2 (enExample)
JP (1) JP5796013B2 (enExample)
KR (2) KR101889366B1 (enExample)
TW (1) TWI526689B (enExample)
WO (1) WO2011031759A2 (enExample)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7439731B2 (en) 2005-06-24 2008-10-21 Crafts Douglas E Temporary planar electrical contact device and method using vertically-compressible nanotube contact structures
US8045859B2 (en) * 2008-05-02 2011-10-25 The United States Of America As Represented By The Secretary Of The Navy High-speed underwater data transmission system and method
EP2329502B1 (en) 2008-09-29 2014-09-17 Wentworth Laboratories, Inc. Methods of fabricating nanotube probes
US20100252317A1 (en) * 2009-04-03 2010-10-07 Formfactor, Inc. Carbon nanotube contact structures for use with semiconductor dies and other electronic devices
US8272124B2 (en) * 2009-04-03 2012-09-25 Formfactor, Inc. Anchoring carbon nanotube columns
US8872176B2 (en) 2010-10-06 2014-10-28 Formfactor, Inc. Elastic encapsulated carbon nanotube based electrical contacts
EP2649463B1 (en) * 2010-12-09 2019-05-08 Wentworth Laboratories, Inc. Probe card assemblies and probe pins including carbon nanotubes
US9505615B2 (en) 2011-07-27 2016-11-29 California Institute Of Technology Method for controlling microstructural arrangement of nominally-aligned arrays of carbon nanotubes
WO2013052176A2 (en) * 2011-07-27 2013-04-11 California Institute Of Technology Carbon nanotube foams with controllable mechanical properties
EP2763167B1 (en) 2011-09-26 2016-06-29 Fujitsu Limited Heat-dissipating material and method for producing same, and electronic device and method for producing same
JP5863168B2 (ja) * 2011-11-10 2016-02-16 株式会社日本マイクロニクス プローブカード及びその製造方法
US9616635B2 (en) 2012-04-20 2017-04-11 California Institute Of Technology Multilayer foam structures of nominally-aligned carbon nanotubes (CNTS)
US10266402B2 (en) 2012-11-20 2019-04-23 Formfactor, Inc. Contactor devices with carbon nanotube probes embedded in a flexible film and processes of making such
US9523713B2 (en) * 2013-05-28 2016-12-20 Intel Corporation Interconnects including liquid metal
TWI539164B (zh) 2013-11-22 2016-06-21 財團法人工業技術研究院 塗佈探針及其製作方法
US10732201B2 (en) 2014-04-13 2020-08-04 Infineon Technologies Ag Test probe and method of manufacturing a test probe
WO2017156502A1 (en) 2016-03-10 2017-09-14 Carnegie Mellon University Integrated electronic device with flexible and stretchable substrate
CN110446931A (zh) * 2017-03-21 2019-11-12 日本电产理德股份有限公司 探针构造体以及探针构造体的制造方法
US20190011497A1 (en) * 2017-07-09 2019-01-10 Texas Instruments Incorporated Test Fixture with Sintered Connections Between Mother Board and Daughter Board
JP2019035698A (ja) * 2017-08-18 2019-03-07 日本電産リード株式会社 プローブ構造体、及びプローブ構造体の製造方法
KR102221162B1 (ko) * 2019-04-04 2021-02-26 연세대학교 산학협력단 금속 나노입자가 코팅된 탄소나노튜브 네트워크를 포함하는 접촉식 마이크로 소자 및 이의 제조 방법
US11774467B1 (en) 2020-09-01 2023-10-03 Microfabrica Inc. Method of in situ modulation of structural material properties and/or template shape
WO2025029299A1 (en) * 2023-08-03 2025-02-06 Microfabrica Inc. Probe array incorporating probes that have selected mechanical properties manipulated during formation of at least portions of the probes and corresponding fabrication method

Family Cites Families (75)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69728410T2 (de) * 1996-08-08 2005-05-04 William Marsh Rice University, Houston Makroskopisch manipulierbare, aus nanoröhrenanordnungen hergestellte vorrichtungen
JP3740295B2 (ja) * 1997-10-30 2006-02-01 キヤノン株式会社 カーボンナノチューブデバイス、その製造方法及び電子放出素子
US6020747A (en) * 1998-01-26 2000-02-01 Bahns; John T. Electrical contact probe
US6528785B1 (en) * 1998-12-03 2003-03-04 Daiken Chemical Co., Ltd. Fusion-welded nanotube surface signal probe and method of attaching nanotube to probe holder
WO1999065821A1 (en) * 1998-06-19 1999-12-23 The Research Foundation Of State University Of New York Free-standing and aligned carbon nanotubes and synthesis thereof
US6346189B1 (en) * 1998-08-14 2002-02-12 The Board Of Trustees Of The Leland Stanford Junior University Carbon nanotube structures made using catalyst islands
US6597090B1 (en) * 1998-09-28 2003-07-22 Xidex Corporation Method for manufacturing carbon nanotubes as functional elements of MEMS devices
US6232706B1 (en) * 1998-11-12 2001-05-15 The Board Of Trustees Of The Leland Stanford Junior University Self-oriented bundles of carbon nanotubes and method of making same
AUPQ065099A0 (en) 1999-05-28 1999-06-24 Commonwealth Scientific And Industrial Research Organisation Substrate-supported aligned carbon nanotube films
US6401526B1 (en) * 1999-12-10 2002-06-11 The Board Of Trustees Of The Leland Stanford Junior University Carbon nanotubes and methods of fabrication thereof using a liquid phase catalyst precursor
DE10006964C2 (de) * 2000-02-16 2002-01-31 Infineon Technologies Ag Elektronisches Bauelement mit einer leitenden Verbindung zwischen zwei leitenden Schichten und Verfahren zum Herstellen eines elektronischen Bauelements
WO2001087193A1 (en) * 2000-05-16 2001-11-22 Rensselaer Polytechnic Institute Electrically conducting nanocomposite materials for biomedical applications
US6709566B2 (en) * 2000-07-25 2004-03-23 The Regents Of The University Of California Method for shaping a nanotube and a nanotube shaped thereby
US6457350B1 (en) * 2000-09-08 2002-10-01 Fei Company Carbon nanotube probe tip grown on a small probe
US7258901B1 (en) * 2000-09-08 2007-08-21 Fei Company Directed growth of nanotubes on a catalyst
JP2002141633A (ja) * 2000-10-25 2002-05-17 Lucent Technol Inc 垂直にナノ相互接続された回路デバイスからなる製品及びその製造方法
JP2002179418A (ja) * 2000-12-13 2002-06-26 Tohoku Techno Arch Co Ltd カーボン・ナノチューブ作成方法
JP3912583B2 (ja) * 2001-03-14 2007-05-09 三菱瓦斯化学株式会社 配向性カーボンナノチューブ膜の製造方法
US6890506B1 (en) * 2001-04-12 2005-05-10 Penn State Research Foundation Method of forming carbon fibers
US7160531B1 (en) * 2001-05-08 2007-01-09 University Of Kentucky Research Foundation Process for the continuous production of aligned carbon nanotubes
DE10132787A1 (de) 2001-07-06 2003-01-30 Infineon Technologies Ag Katalysatormaterial, Kohlenstoffnanoröhren-Anordnung und Verfahren zum Herstellen einer Kohlenstoffnanoröhren-Anordnung
JP3768937B2 (ja) * 2001-09-10 2006-04-19 キヤノン株式会社 電子放出素子、電子源及び画像表示装置の製造方法
AU2002357037A1 (en) * 2001-11-30 2003-06-17 The Trustees Of Boston College Coated carbon nanotube array electrodes
DE60301582T2 (de) * 2002-02-09 2006-06-22 Samsung Electronics Co., Ltd., Suwon Speicheranordnung mit Kohlenstoffnanoröhre und Verfahren zur Herstellung der Speicheranordnung
US7189430B2 (en) * 2002-02-11 2007-03-13 Rensselaer Polytechnic Institute Directed assembly of highly-organized carbon nanotube architectures
JP3860057B2 (ja) * 2002-03-20 2006-12-20 アンリツ株式会社 電気接点装置及び接触子
US20040208788A1 (en) * 2003-04-15 2004-10-21 Colton Jonathan S. Polymer micro-cantilevers and their methods of manufacture
US6626684B1 (en) * 2002-06-24 2003-09-30 Hewlett-Packard Development Company, L.P. Nanotube socket system and method
WO2004012932A1 (en) * 2002-08-01 2004-02-12 The State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Portland State University Method for synthesizing nanoscale structures in defined locations
WO2004038430A2 (en) * 2002-09-20 2004-05-06 The Trustees Of Boston College Nanotube cantilever probes for nanoscale magnetic microscopy
JP3933035B2 (ja) * 2002-11-06 2007-06-20 富士ゼロックス株式会社 カーボンナノチューブの製造装置および製造方法
US20060252853A1 (en) * 2002-11-18 2006-11-09 Rensselaer Polytechnic Institute Nanotube polymer composite and methods of making same
TWI220162B (en) * 2002-11-29 2004-08-11 Ind Tech Res Inst Integrated compound nano probe card and method of making same
US6933222B2 (en) * 2003-01-02 2005-08-23 Intel Corporation Microcircuit fabrication and interconnection
WO2004102582A1 (en) 2003-03-05 2004-11-25 University Of Florida Carbon nanotube-based probes, related devices and methods of forming the same
TWI220163B (en) * 2003-04-24 2004-08-11 Ind Tech Res Inst Manufacturing method of high-conductivity nanometer thin-film probe card
US7082683B2 (en) * 2003-04-24 2006-08-01 Korea Institute Of Machinery & Materials Method for attaching rod-shaped nano structure to probe holder
US7531267B2 (en) * 2003-06-02 2009-05-12 Kh Chemicals Co., Ltd. Process for preparing carbon nanotube electrode comprising sulfur or metal nanoparticles as a binder
US20050019245A1 (en) * 2003-07-21 2005-01-27 Dmitri Koulikov Continuous production of carbon nanotubes and fullerenes
GB0318987D0 (en) 2003-08-13 2003-09-17 Univ Warwick Probe
JP2005083857A (ja) * 2003-09-08 2005-03-31 Yoshikazu Nakayama ナノチューブプローブ及び製造方法
US7473411B2 (en) * 2003-12-12 2009-01-06 Rensselaer Polytechnic Institute Carbon nanotube foam and method of making and using thereof
US7404338B2 (en) * 2004-03-02 2008-07-29 Eth Zurich Force sensor
US7250188B2 (en) * 2004-03-31 2007-07-31 Her Majesty The Queen In Right Of Canada, As Represented By The Minister Of National Defense Of Her Majesty's Canadian Government Depositing metal particles on carbon nanotubes
US20050233263A1 (en) 2004-04-20 2005-10-20 Applied Materials, Inc. Growth of carbon nanotubes at low temperature
US7251884B2 (en) * 2004-04-26 2007-08-07 Formfactor, Inc. Method to build robust mechanical structures on substrate surfaces
US20050285116A1 (en) * 2004-06-29 2005-12-29 Yongqian Wang Electronic assembly with carbon nanotube contact formations or interconnections
WO2006014635A1 (en) * 2004-07-21 2006-02-09 K & S Interconnect, Inc. Reinforced probes for testing semiconductor devices
JP4167212B2 (ja) * 2004-10-05 2008-10-15 富士通株式会社 カーボンナノチューブ構造体、半導体装置、および半導体パッケージ
US7621044B2 (en) * 2004-10-22 2009-11-24 Formfactor, Inc. Method of manufacturing a resilient contact
JP2006125846A (ja) * 2004-10-26 2006-05-18 Olympus Corp カンチレバー
CN100501413C (zh) * 2005-01-22 2009-06-17 鸿富锦精密工业（深圳）有限公司 集成电路检测装置及其制备方法
US20060188721A1 (en) * 2005-02-22 2006-08-24 Eastman Kodak Company Adhesive transfer method of carbon nanotube layer
US20060198956A1 (en) * 2005-03-04 2006-09-07 Gyula Eres Chemical vapor deposition of long vertically aligned dense carbon nanotube arrays by external control of catalyst composition
US7439731B2 (en) * 2005-06-24 2008-10-21 Crafts Douglas E Temporary planar electrical contact device and method using vertically-compressible nanotube contact structures
US7538040B2 (en) * 2005-06-30 2009-05-26 Nantero, Inc. Techniques for precision pattern transfer of carbon nanotubes from photo mask to wafers
DE102006039651A1 (de) * 2005-08-31 2007-03-22 Hitachi Kenki Finetech Co., Ltd. Cantilever und Prüfvorrichtung
WO2007033188A2 (en) 2005-09-12 2007-03-22 University Of Dayton Substrate-enhanced electroless deposition (seed) of metal nanoparticles on carbon nanotubes
CN1964028B (zh) * 2005-11-11 2010-08-18 鸿富锦精密工业（深圳）有限公司 散热器
US7727624B2 (en) * 2005-11-22 2010-06-01 Rensselaer Polytechnic Institute Super-compressible carbon nanotube films and micro-bundles
US7625817B2 (en) * 2005-12-30 2009-12-01 Intel Corporation Method of fabricating a carbon nanotube interconnect structures
US20070158768A1 (en) * 2006-01-06 2007-07-12 Honeywell International, Inc. Electrical contacts formed of carbon nanotubes
KR101159074B1 (ko) * 2006-01-14 2012-06-25 삼성전자주식회사 도전성 탄소나노튜브 팁, 이를 구비한 스캐닝 프로브마이크로스코프의 탐침 및 상기 도전성 탄소나노튜브 팁의제조 방법
JP4806762B2 (ja) 2006-03-03 2011-11-02 国立大学法人 名古屋工業大学 Ｓｐｍカンチレバー
US20070235713A1 (en) * 2006-04-03 2007-10-11 Motorola, Inc. Semiconductor device having carbon nanotube interconnects and method of fabrication
EP1845124A1 (en) 2006-04-14 2007-10-17 Arkema France Conductive carbon nanotube-polymer composite
WO2007139244A1 (en) 2006-05-30 2007-12-06 Korea Basic Science Institute A carbon nanotube of which surface is modified by transition metal coordination, and a method for modifying the same
US7731503B2 (en) * 2006-08-21 2010-06-08 Formfactor, Inc. Carbon nanotube contact structures
US8130007B2 (en) * 2006-10-16 2012-03-06 Formfactor, Inc. Probe card assembly with carbon nanotube probes having a spring mechanism therein
TWI360182B (en) * 2007-10-05 2012-03-11 Ind Tech Res Inst Method for making a conductive film
US8149007B2 (en) * 2007-10-13 2012-04-03 Formfactor, Inc. Carbon nanotube spring contact structures with mechanical and electrical components
JP5266491B2 (ja) * 2007-12-25 2013-08-21 ニッタ株式会社 カーボンナノチューブの製造方法
US20100252317A1 (en) * 2009-04-03 2010-10-07 Formfactor, Inc. Carbon nanotube contact structures for use with semiconductor dies and other electronic devices
US8272124B2 (en) * 2009-04-03 2012-09-25 Formfactor, Inc. Anchoring carbon nanotube columns
US8872176B2 (en) * 2010-10-06 2014-10-28 Formfactor, Inc. Elastic encapsulated carbon nanotube based electrical contacts

Similar Documents

Publication Publication Date Title
JP2013504509A5 (enExample)
Li et al. Liquid metal-based electrical interconnects and interfaces with excellent stability and reliability for flexible electronics
TW200422624A (en) Manufacturing method of high-conductivity nanometer thin-film probe card
JP2010507098A5 (enExample)
JP2010515010A5 (enExample)
KR101401242B1 (ko) 플렉서블 도전 트레이스 형성 방법, 플렉서블 도전 트레이스 및 이를 이용한 플렉서블 전자장치
JP2009524800A5 (enExample)
CN106663511A (zh) 分流电阻器
JP2012506992A (ja) 検査用治具、検査方法、及び、それに用いる検査用プローブ
JP2020165774A5 (enExample)
CN103200788B (zh) 一种压接头和压接装置
CN104951156A (zh) 电容式触控装置
JP2007533974A5 (enExample)
CN103438910A (zh) 一种新型电磁屏蔽压电夹层
JP2011203087A (ja) コンタクトプローブ
JP2010119846A5 (enExample)
TW200819755A (en) Electronic component inspection probe
TW200916786A (en) Improved vertical probe card
JP2004333459A (ja) コンタクトプローブ、これを用いた半導体及び電気検査装置
CN110088610A (zh) 生物感测装置
CN111829699A (zh) 电阻式压力传感器及其制备方法
TWM348952U (en) Improved circuit board structure of a circuit test device
CN202494456U (zh) 柔性线路板连接传感器桥路
TW201144814A (en) Probing apparatus for integrated circuit testing
CN216900333U (zh) 一种用于材料测试的直角接头