JP2010515010A5 - - Google Patents
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- Publication number
- JP2010515010A5 JP2010515010A5 JP2009525721A JP2009525721A JP2010515010A5 JP 2010515010 A5 JP2010515010 A5 JP 2010515010A5 JP 2009525721 A JP2009525721 A JP 2009525721A JP 2009525721 A JP2009525721 A JP 2009525721A JP 2010515010 A5 JP2010515010 A5 JP 2010515010A5
- Authority
- JP
- Japan
- Prior art keywords
- base
- contact
- substrate
- carbon nanotube
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/466,039 US7731503B2 (en) | 2006-08-21 | 2006-08-21 | Carbon nanotube contact structures |
| US11/466,039 | 2006-08-21 | ||
| PCT/US2007/076345 WO2008024726A2 (en) | 2006-08-21 | 2007-08-21 | Carbon nanotube contact structures |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010515010A JP2010515010A (ja) | 2010-05-06 |
| JP2010515010A5 true JP2010515010A5 (enExample) | 2010-10-07 |
| JP5139432B2 JP5139432B2 (ja) | 2013-02-06 |
Family
ID=39107572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009525721A Expired - Fee Related JP5139432B2 (ja) | 2006-08-21 | 2007-08-21 | カーボンナノチューブ・コンタクト構造 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US7731503B2 (enExample) |
| EP (1) | EP2059977A2 (enExample) |
| JP (1) | JP5139432B2 (enExample) |
| KR (1) | KR20090050082A (enExample) |
| CN (1) | CN101652901A (enExample) |
| SG (1) | SG177999A1 (enExample) |
| TW (1) | TWI429581B (enExample) |
| WO (1) | WO2008024726A2 (enExample) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007002297A2 (en) | 2005-06-24 | 2007-01-04 | Crafts Douglas E | Temporary planar electrical contact device and method using vertically-compressible nanotube contact structures |
| US8130007B2 (en) * | 2006-10-16 | 2012-03-06 | Formfactor, Inc. | Probe card assembly with carbon nanotube probes having a spring mechanism therein |
| US8354855B2 (en) * | 2006-10-16 | 2013-01-15 | Formfactor, Inc. | Carbon nanotube columns and methods of making and using carbon nanotube columns as probes |
| US8149007B2 (en) | 2007-10-13 | 2012-04-03 | Formfactor, Inc. | Carbon nanotube spring contact structures with mechanical and electrical components |
| KR101097217B1 (ko) * | 2008-09-17 | 2011-12-22 | 한국기계연구원 | 카본 나노 튜브가 코팅된 프로브 카드용 미세 접촉 프로브 및 그 제조방법 |
| SG193876A1 (en) | 2008-09-29 | 2013-10-30 | Wentworth Lab Inc | Probe cards including nanotube probes and methods of fabricating |
| US20100252317A1 (en) * | 2009-04-03 | 2010-10-07 | Formfactor, Inc. | Carbon nanotube contact structures for use with semiconductor dies and other electronic devices |
| US8272124B2 (en) * | 2009-04-03 | 2012-09-25 | Formfactor, Inc. | Anchoring carbon nanotube columns |
| JP5465516B2 (ja) * | 2009-12-08 | 2014-04-09 | 日本電子材料株式会社 | プローブ及びプローブの製造方法 |
| US8872176B2 (en) | 2010-10-06 | 2014-10-28 | Formfactor, Inc. | Elastic encapsulated carbon nanotube based electrical contacts |
| CN102073199B (zh) * | 2010-12-07 | 2013-11-06 | 北京富纳特创新科技有限公司 | 垫片 |
| JP5827889B2 (ja) * | 2011-12-27 | 2015-12-02 | 株式会社フジクラ | カーボンナノファイバ構造体、カーボンナノファイバ電極及びカーボンナノファイバ構造体の製造方法 |
| DE102012102210A1 (de) * | 2012-03-15 | 2013-09-19 | Solibro Gmbh | Heizsystem für eine Vakuumabscheidequelle und Vakuumabscheidevorrichtung |
| KR101467390B1 (ko) * | 2013-04-11 | 2014-12-03 | (주)엠프리시젼 | 접촉 패드의 제조 방법 |
| TWI539164B (zh) * | 2013-11-22 | 2016-06-21 | 財團法人工業技術研究院 | 塗佈探針及其製作方法 |
| US20160106004A1 (en) | 2014-10-13 | 2016-04-14 | Ntherma Corporation | Carbon nanotubes disposed on metal substrates with one or more cavities |
| JPWO2018173884A1 (ja) * | 2017-03-21 | 2020-01-30 | 日本電産リード株式会社 | プローブ構造体、及びプローブ構造体の製造方法 |
| KR102148330B1 (ko) * | 2018-11-13 | 2020-08-26 | 주식회사 아이에스시 | 전기접속용 커넥터 |
| US11243231B2 (en) * | 2018-12-18 | 2022-02-08 | Tien-Chien Cheng | Vertical probe card |
| US20230221349A1 (en) * | 2020-06-22 | 2023-07-13 | Yokowo Co., Ltd. | Plunger and method of manufacturing plunger |
Family Cites Families (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0927331B1 (en) * | 1996-08-08 | 2004-03-31 | William Marsh Rice University | Macroscopically manipulable nanoscale devices made from nanotube assemblies |
| JP3740295B2 (ja) * | 1997-10-30 | 2006-02-01 | キヤノン株式会社 | カーボンナノチューブデバイス、その製造方法及び電子放出素子 |
| US6020747A (en) * | 1998-01-26 | 2000-02-01 | Bahns; John T. | Electrical contact probe |
| US7126220B2 (en) * | 2002-03-18 | 2006-10-24 | Nanonexus, Inc. | Miniaturized contact spring |
| JP4260310B2 (ja) * | 1999-10-26 | 2009-04-30 | エスアイアイ・ナノテクノロジー株式会社 | 微小接触式プローバー |
| US6709566B2 (en) * | 2000-07-25 | 2004-03-23 | The Regents Of The University Of California | Method for shaping a nanotube and a nanotube shaped thereby |
| JP5165828B2 (ja) * | 2002-02-09 | 2013-03-21 | 三星電子株式会社 | 炭素ナノチューブを用いるメモリ素子及びその製造方法 |
| US20040208788A1 (en) * | 2003-04-15 | 2004-10-21 | Colton Jonathan S. | Polymer micro-cantilevers and their methods of manufacture |
| US6626684B1 (en) * | 2002-06-24 | 2003-09-30 | Hewlett-Packard Development Company, L.P. | Nanotube socket system and method |
| TWI220162B (en) * | 2002-11-29 | 2004-08-11 | Ind Tech Res Inst | Integrated compound nano probe card and method of making same |
| US6920689B2 (en) * | 2002-12-06 | 2005-07-26 | Formfactor, Inc. | Method for making a socket to perform testing on integrated circuits |
| US6933222B2 (en) * | 2003-01-02 | 2005-08-23 | Intel Corporation | Microcircuit fabrication and interconnection |
| US7082683B2 (en) * | 2003-04-24 | 2006-08-01 | Korea Institute Of Machinery & Materials | Method for attaching rod-shaped nano structure to probe holder |
| TWI220163B (en) * | 2003-04-24 | 2004-08-11 | Ind Tech Res Inst | Manufacturing method of high-conductivity nanometer thin-film probe card |
| US7404338B2 (en) * | 2004-03-02 | 2008-07-29 | Eth Zurich | Force sensor |
| JP4723195B2 (ja) * | 2004-03-05 | 2011-07-13 | 株式会社オクテック | プローブの製造方法 |
| US20060028220A1 (en) * | 2004-07-21 | 2006-02-09 | K&S Interconnect, Inc. | Reinforced probes for testing semiconductor devices |
| JP4167212B2 (ja) * | 2004-10-05 | 2008-10-15 | 富士通株式会社 | カーボンナノチューブ構造体、半導体装置、および半導体パッケージ |
| JP2006125846A (ja) * | 2004-10-26 | 2006-05-18 | Olympus Corp | カンチレバー |
| CN100501413C (zh) * | 2005-01-22 | 2009-06-17 | 鸿富锦精密工业（深圳）有限公司 | 集成电路检测装置及其制备方法 |
| WO2007002297A2 (en) * | 2005-06-24 | 2007-01-04 | Crafts Douglas E | Temporary planar electrical contact device and method using vertically-compressible nanotube contact structures |
| DE102006039651A1 (de) * | 2005-08-31 | 2007-03-22 | Hitachi Kenki Finetech Co., Ltd. | Cantilever und Prüfvorrichtung |
| US7625817B2 (en) * | 2005-12-30 | 2009-12-01 | Intel Corporation | Method of fabricating a carbon nanotube interconnect structures |
| US20070158768A1 (en) * | 2006-01-06 | 2007-07-12 | Honeywell International, Inc. | Electrical contacts formed of carbon nanotubes |
| KR101159074B1 (ko) * | 2006-01-14 | 2012-06-25 | 삼성전자주식회사 | 도전성 탄소나노튜브 팁, 이를 구비한 스캐닝 프로브마이크로스코프의 탐침 및 상기 도전성 탄소나노튜브 팁의제조 방법 |
| US20070235713A1 (en) * | 2006-04-03 | 2007-10-11 | Motorola, Inc. | Semiconductor device having carbon nanotube interconnects and method of fabrication |
| US8130007B2 (en) * | 2006-10-16 | 2012-03-06 | Formfactor, Inc. | Probe card assembly with carbon nanotube probes having a spring mechanism therein |
| TWI360182B (en) * | 2007-10-05 | 2012-03-11 | Ind Tech Res Inst | Method for making a conductive film |
| US8149007B2 (en) * | 2007-10-13 | 2012-04-03 | Formfactor, Inc. | Carbon nanotube spring contact structures with mechanical and electrical components |
-
2006
- 2006-08-21 US US11/466,039 patent/US7731503B2/en not_active Expired - Fee Related
-
2007
- 2007-08-21 CN CN200780031193A patent/CN101652901A/zh active Pending
- 2007-08-21 EP EP07814273A patent/EP2059977A2/en not_active Withdrawn
- 2007-08-21 KR KR1020097005816A patent/KR20090050082A/ko not_active Ceased
- 2007-08-21 JP JP2009525721A patent/JP5139432B2/ja not_active Expired - Fee Related
- 2007-08-21 TW TW096130863A patent/TWI429581B/zh not_active IP Right Cessation
- 2007-08-21 SG SG2012004255A patent/SG177999A1/en unknown
- 2007-08-21 WO PCT/US2007/076345 patent/WO2008024726A2/en not_active Ceased