JP2013254736A5 - - Google Patents
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- Publication number
- JP2013254736A5 JP2013254736A5 JP2013119000A JP2013119000A JP2013254736A5 JP 2013254736 A5 JP2013254736 A5 JP 2013254736A5 JP 2013119000 A JP2013119000 A JP 2013119000A JP 2013119000 A JP2013119000 A JP 2013119000A JP 2013254736 A5 JP2013254736 A5 JP 2013254736A5
- Authority
- JP
- Japan
- Prior art keywords
- condenser lens
- deflector
- magnetic
- emitter
- field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP12171023.0A EP2672502B1 (en) | 2012-06-06 | 2012-06-06 | electron beam optical system comprising high brightness electron gun with moving axis condenser lens |
| EP12171023.0 | 2012-06-06 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013254736A JP2013254736A (ja) | 2013-12-19 |
| JP2013254736A5 true JP2013254736A5 (enExample) | 2015-07-02 |
| JP5779614B2 JP5779614B2 (ja) | 2015-09-16 |
Family
ID=46506137
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013119000A Active JP5779614B2 (ja) | 2012-06-06 | 2013-06-05 | 可動コンデンサーレンズを備えた高輝度電子銃 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8921804B2 (enExample) |
| EP (1) | EP2672502B1 (enExample) |
| JP (1) | JP5779614B2 (enExample) |
| TW (1) | TWI539481B (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE112014006978B4 (de) | 2014-10-20 | 2022-01-27 | Hitachi High-Tech Corporation | Rasterelektronenmikroskop |
| US9799484B2 (en) * | 2014-12-09 | 2017-10-24 | Hermes Microvision, Inc. | Charged particle source |
| JP6987233B2 (ja) * | 2018-05-22 | 2021-12-22 | 株式会社日立ハイテク | 荷電粒子線装置及びその軸調整方法 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0485643A (ja) | 1990-07-30 | 1992-03-18 | Matsushita Electric Ind Co Ltd | 情報処理装置 |
| JPH0485643U (enExample) * | 1990-11-30 | 1992-07-24 | ||
| JPH09223475A (ja) * | 1996-02-19 | 1997-08-26 | Nikon Corp | 電磁偏向器、及び該偏向器を用いた荷電粒子線転写装置 |
| JPH09245703A (ja) * | 1996-03-13 | 1997-09-19 | Jeol Ltd | 荷電粒子ビームの軸合わせ装置 |
| JPH1097979A (ja) * | 1996-09-25 | 1998-04-14 | Nikon Corp | 縮小投影装置 |
| US5708274A (en) * | 1996-12-18 | 1998-01-13 | International Business Machines Corporation | Curvilinear variable axis lens correction with crossed coils |
| US5793048A (en) * | 1996-12-18 | 1998-08-11 | International Business Machines Corporation | Curvilinear variable axis lens correction with shifted dipoles |
| KR20010031926A (ko) * | 1998-09-09 | 2001-04-16 | 요트.게.아. 롤페즈 | 충전 입자를 활용하는 투사형 리소그래피 장치 |
| DE60323909D1 (de) * | 2002-08-13 | 2008-11-20 | Zeiss Carl Nts Gmbh | Teilchenoptischer Apparat und seine Verwendung als elektronenmikroskopisches System |
| EP1777730B1 (en) * | 2005-10-19 | 2018-05-30 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Arrangement and method for compensating emitter tip vibrations |
| US8101911B2 (en) * | 2008-11-04 | 2012-01-24 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Method and device for improved alignment of a high brightness charged particle gun |
| KR101318592B1 (ko) * | 2009-11-26 | 2013-10-15 | 가부시키가이샤 히다치 하이테크놀로지즈 | 주사 전자 현미경 |
| EP2444990B1 (en) * | 2010-10-19 | 2014-06-25 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Simplified particle emitter and method of operating thereof |
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2012
- 2012-06-06 EP EP12171023.0A patent/EP2672502B1/en active Active
- 2012-09-17 US US13/621,720 patent/US8921804B2/en active Active
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2013
- 2013-06-04 TW TW102119802A patent/TWI539481B/zh active
- 2013-06-05 JP JP2013119000A patent/JP5779614B2/ja active Active