JP5779614B2 - 可動コンデンサーレンズを備えた高輝度電子銃 - Google Patents

可動コンデンサーレンズを備えた高輝度電子銃 Download PDF

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Publication number
JP5779614B2
JP5779614B2 JP2013119000A JP2013119000A JP5779614B2 JP 5779614 B2 JP5779614 B2 JP 5779614B2 JP 2013119000 A JP2013119000 A JP 2013119000A JP 2013119000 A JP2013119000 A JP 2013119000A JP 5779614 B2 JP5779614 B2 JP 5779614B2
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JP
Japan
Prior art keywords
condenser lens
deflector
magnetic
emitter
magnetic field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2013119000A
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English (en)
Japanese (ja)
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JP2013254736A5 (enExample
JP2013254736A (ja
Inventor
フロジーン ユールゲン
フロジーン ユールゲン
Original Assignee
アイシーティー インテグレーテッド サーキット テスティング ゲゼルシャフト フィーア ハルプライタープリーフテヒニック エム ベー ハー
アイシーティー インテグレーテッド サーキット テスティング ゲゼルシャフト フィーア ハルプライタープリーフテヒニック エム ベー ハー
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Application filed by アイシーティー インテグレーテッド サーキット テスティング ゲゼルシャフト フィーア ハルプライタープリーフテヒニック エム ベー ハー, アイシーティー インテグレーテッド サーキット テスティング ゲゼルシャフト フィーア ハルプライタープリーフテヒニック エム ベー ハー filed Critical アイシーティー インテグレーテッド サーキット テスティング ゲゼルシャフト フィーア ハルプライタープリーフテヒニック エム ベー ハー
Publication of JP2013254736A publication Critical patent/JP2013254736A/ja
Publication of JP2013254736A5 publication Critical patent/JP2013254736A5/ja
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/067—Replacing parts of guns; Mutual adjustment of electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06325—Cold-cathode sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/15—Means for deflecting or directing discharge
    • H01J2237/1501—Beam alignment means or procedures

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
JP2013119000A 2012-06-06 2013-06-05 可動コンデンサーレンズを備えた高輝度電子銃 Active JP5779614B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP12171023.0A EP2672502B1 (en) 2012-06-06 2012-06-06 electron beam optical system comprising high brightness electron gun with moving axis condenser lens
EP12171023.0 2012-06-06

Publications (3)

Publication Number Publication Date
JP2013254736A JP2013254736A (ja) 2013-12-19
JP2013254736A5 JP2013254736A5 (enExample) 2015-07-02
JP5779614B2 true JP5779614B2 (ja) 2015-09-16

Family

ID=46506137

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013119000A Active JP5779614B2 (ja) 2012-06-06 2013-06-05 可動コンデンサーレンズを備えた高輝度電子銃

Country Status (4)

Country Link
US (1) US8921804B2 (enExample)
EP (1) EP2672502B1 (enExample)
JP (1) JP5779614B2 (enExample)
TW (1) TWI539481B (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112014006978B4 (de) 2014-10-20 2022-01-27 Hitachi High-Tech Corporation Rasterelektronenmikroskop
US9799484B2 (en) * 2014-12-09 2017-10-24 Hermes Microvision, Inc. Charged particle source
JP6987233B2 (ja) * 2018-05-22 2021-12-22 株式会社日立ハイテク 荷電粒子線装置及びその軸調整方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0485643A (ja) 1990-07-30 1992-03-18 Matsushita Electric Ind Co Ltd 情報処理装置
JPH0485643U (enExample) * 1990-11-30 1992-07-24
JPH09223475A (ja) * 1996-02-19 1997-08-26 Nikon Corp 電磁偏向器、及び該偏向器を用いた荷電粒子線転写装置
JPH09245703A (ja) * 1996-03-13 1997-09-19 Jeol Ltd 荷電粒子ビームの軸合わせ装置
JPH1097979A (ja) * 1996-09-25 1998-04-14 Nikon Corp 縮小投影装置
US5708274A (en) * 1996-12-18 1998-01-13 International Business Machines Corporation Curvilinear variable axis lens correction with crossed coils
US5793048A (en) * 1996-12-18 1998-08-11 International Business Machines Corporation Curvilinear variable axis lens correction with shifted dipoles
KR20010031926A (ko) * 1998-09-09 2001-04-16 요트.게.아. 롤페즈 충전 입자를 활용하는 투사형 리소그래피 장치
DE60323909D1 (de) * 2002-08-13 2008-11-20 Zeiss Carl Nts Gmbh Teilchenoptischer Apparat und seine Verwendung als elektronenmikroskopisches System
EP1777730B1 (en) * 2005-10-19 2018-05-30 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Arrangement and method for compensating emitter tip vibrations
US8101911B2 (en) * 2008-11-04 2012-01-24 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Method and device for improved alignment of a high brightness charged particle gun
KR101318592B1 (ko) * 2009-11-26 2013-10-15 가부시키가이샤 히다치 하이테크놀로지즈 주사 전자 현미경
EP2444990B1 (en) * 2010-10-19 2014-06-25 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Simplified particle emitter and method of operating thereof

Also Published As

Publication number Publication date
TWI539481B (zh) 2016-06-21
EP2672502A1 (en) 2013-12-11
US20130327951A1 (en) 2013-12-12
TW201401324A (zh) 2014-01-01
EP2672502B1 (en) 2017-08-09
JP2013254736A (ja) 2013-12-19
US8921804B2 (en) 2014-12-30

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