JP2012178347A5 - - Google Patents

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Publication number
JP2012178347A5
JP2012178347A5 JP2012031773A JP2012031773A JP2012178347A5 JP 2012178347 A5 JP2012178347 A5 JP 2012178347A5 JP 2012031773 A JP2012031773 A JP 2012031773A JP 2012031773 A JP2012031773 A JP 2012031773A JP 2012178347 A5 JP2012178347 A5 JP 2012178347A5
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Japan
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ion
current
ion beam
aperture
onto
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JP2012031773A
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Japanese (ja)
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JP2012178347A (ja
JP6219019B2 (ja
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JP2012031773A 2011-02-25 2012-02-16 荷電粒子ビーム・システムにおいて大電流モードと小電流モードとを高速に切り替える方法 Active JP6219019B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201161446804P 2011-02-25 2011-02-25
US61/446,804 2011-02-25

Publications (3)

Publication Number Publication Date
JP2012178347A JP2012178347A (ja) 2012-09-13
JP2012178347A5 true JP2012178347A5 (enExample) 2015-06-11
JP6219019B2 JP6219019B2 (ja) 2017-10-25

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JP2012031773A Active JP6219019B2 (ja) 2011-02-25 2012-02-16 荷電粒子ビーム・システムにおいて大電流モードと小電流モードとを高速に切り替える方法

Country Status (4)

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US (2) US9257261B2 (enExample)
EP (1) EP2492950B1 (enExample)
JP (1) JP6219019B2 (enExample)
CN (1) CN102651299B (enExample)

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US9105438B2 (en) 2012-05-31 2015-08-11 Fei Company Imaging and processing for plasma ion source
US8502172B1 (en) * 2012-06-26 2013-08-06 Fei Company Three dimensional fiducial
EP2867915B1 (en) 2012-06-29 2016-07-13 FEI Company Multi species ion source
US8859982B2 (en) * 2012-09-14 2014-10-14 Kla-Tencor Corporation Dual-lens-gun electron beam apparatus and methods for high-resolution imaging with both high and low beam currents
US8884247B2 (en) 2012-09-25 2014-11-11 Fei Company System and method for ex situ analysis of a substrate
US10883303B2 (en) 2013-01-07 2021-01-05 WexEnergy LLC Frameless supplemental window for fenestration
US8923650B2 (en) 2013-01-07 2014-12-30 Wexenergy Innovations Llc System and method of measuring distances related to an object
US10196850B2 (en) 2013-01-07 2019-02-05 WexEnergy LLC Frameless supplemental window for fenestration
US9230339B2 (en) 2013-01-07 2016-01-05 Wexenergy Innovations Llc System and method of measuring distances related to an object
US9691163B2 (en) 2013-01-07 2017-06-27 Wexenergy Innovations Llc System and method of measuring distances related to an object utilizing ancillary objects
US9845636B2 (en) 2013-01-07 2017-12-19 WexEnergy LLC Frameless supplemental window for fenestration
KR20150089393A (ko) 2014-01-27 2015-08-05 삼성전자주식회사 배터리 충전 제어 방법 및 그 전자 장치
US9378927B2 (en) * 2014-09-11 2016-06-28 Fei Company AutoSlice and view undercut method
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JP2017020106A (ja) 2015-07-02 2017-01-26 エフ・イ−・アイ・カンパニー 高スループット・パターン形成のための適応ビーム電流
US9679742B2 (en) * 2015-10-30 2017-06-13 Fei Company Method for optimizing charged particle beams formed by shaped apertures
US9881764B2 (en) * 2016-01-09 2018-01-30 Kla-Tencor Corporation Heat-spreading blanking system for high throughput electron beam apparatus
US9899181B1 (en) 2017-01-12 2018-02-20 Fei Company Collision ionization ion source
US9941094B1 (en) 2017-02-01 2018-04-10 Fei Company Innovative source assembly for ion beam production
JP2018152183A (ja) * 2017-03-10 2018-09-27 株式会社日立製作所 微細構造体の製造方法および製造装置
CA3071106A1 (en) 2017-05-30 2018-12-06 WexEnergy LLC Frameless supplemental window for fenestration
US10096447B1 (en) * 2017-08-02 2018-10-09 Kla-Tencor Corporation Electron beam apparatus with high resolutions
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CN120480677B (zh) * 2025-07-21 2025-09-16 胜科纳米(苏州)股份有限公司 一种芯片截面结构研磨中精确定位的无损方法

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