JP2013231460A - 流体制御装置 - Google Patents
流体制御装置 Download PDFInfo
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- JP2013231460A JP2013231460A JP2012102968A JP2012102968A JP2013231460A JP 2013231460 A JP2013231460 A JP 2013231460A JP 2012102968 A JP2012102968 A JP 2012102968A JP 2012102968 A JP2012102968 A JP 2012102968A JP 2013231460 A JP2013231460 A JP 2013231460A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0807—Manifolds
- F15B13/0817—Multiblock manifolds
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/003—Housing formed from a plurality of the same valve elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0807—Manifolds
- F15B13/0814—Monoblock manifolds
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0871—Channels for fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0878—Assembly of modular units
- F15B13/0896—Assembly of modular units using different types or sizes of valves
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/877—With flow control means for branched passages
- Y10T137/87885—Sectional block structure
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Valve Housings (AREA)
- Pipeline Systems (AREA)
Abstract
【解決手段】 下段層の通路ブロックとして、複数の列にわたって配置された複列用(3列用)通路ブロック21を有している。複列用通路ブロック21は、3列にわたって、流量制御器16の入口側張出部16bおよびこれに直列状に配置された2つの入口側開閉弁14,15を支持している。複列用通路ブロック21内には、直列に並ぶ流体制御機器の通路同士を連通するための縦方向通路と、隣り合う列の流体制御機器同士を連通するための横方向通路とが設けられている。
【選択図】 図1
Description
Claims (4)
- 複数配置される流体制御機器からなる上段層と、上段層の複数の流体制御機器を接続するための複数の通路ブロックを有する下段層からなり、上段層と下段層で構成される列が並列状に複数配置される流体制御装置において、
下段層の通路ブロックとして、複数の列にわたって配置された少なくとも1つの複列用通路ブロックを有しており、複列用通路ブロックは、上段層の全ての列のうちの一部の少なくとも2つの列にわたって少なくとも2つの流体制御機器を支持しており、複列用通路ブロック内には、直列状に並ぶ流体制御機器の通路同士を連通するための縦方向通路と、隣り合う列の流体制御機器の通路同士を連通するための横方向通路とが設けられていることを特徴とする流体制御装置。 - 下段層の通路ブロックとして、複列用通路ブロックが支持している少なくとも2つの上段部材を1列分だけ支持する単列用通路ブロックをさらに有しており、少なくとも1つの複数列用通路ブロックおよび少なくとも1つの単列用通路ブロックが併用されていることを特徴とする請求項1の流体制御装置。
- 隣り合う列の通路ブロックの上面に開口する通路同士が逆U字状配管によって接続されていることを特徴とする請求項1または2の流体制御装置。
- 上段層の流体制御機器として、流量制御器本体の入口側および出口側に張出部が設けられた流量を制御するための流量制御器を有しており、複列用通路ブロックが2種類使用されて、第1の複列用通路ブロックが支持している少なくとも2つの流体制御機器は、流量制御器の入口側張出部およびこれに直列状に配置された2つの入口側開閉弁であり、第2の複列用通路ブロックが支持している少なくとも2つの流体制御機器は、流量制御器の出口側張出部およびこれに直列状に配置された1つの出口側開閉弁であることを特徴とする請求項1から3までのいずれかに記載の流体制御装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012102968A JP6012247B2 (ja) | 2012-04-27 | 2012-04-27 | 流体制御装置 |
CN201380021762.3A CN104704283B (zh) | 2012-04-27 | 2013-04-17 | 流体控制装置 |
PCT/JP2013/061369 WO2013161640A1 (ja) | 2012-04-27 | 2013-04-17 | 流体制御装置 |
KR1020147030997A KR101710769B1 (ko) | 2012-04-27 | 2013-04-17 | 유체 제어 장치 |
US14/395,850 US9850920B2 (en) | 2012-04-27 | 2013-04-17 | Fluid control apparatus |
TW102114749A TWI577917B (zh) | 2012-04-27 | 2013-04-25 | 流體控制裝置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012102968A JP6012247B2 (ja) | 2012-04-27 | 2012-04-27 | 流体制御装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013231460A true JP2013231460A (ja) | 2013-11-14 |
JP6012247B2 JP6012247B2 (ja) | 2016-10-25 |
Family
ID=49482963
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012102968A Active JP6012247B2 (ja) | 2012-04-27 | 2012-04-27 | 流体制御装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US9850920B2 (ja) |
JP (1) | JP6012247B2 (ja) |
KR (1) | KR101710769B1 (ja) |
CN (1) | CN104704283B (ja) |
TW (1) | TWI577917B (ja) |
WO (1) | WO2013161640A1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015098333A1 (ja) * | 2013-12-27 | 2015-07-02 | 株式会社フジキン | 流体制御装置 |
JP2016048110A (ja) * | 2014-08-28 | 2016-04-07 | 株式会社フジキン | マニホールドバルブおよび流体制御装置 |
WO2016167154A1 (ja) * | 2015-04-15 | 2016-10-20 | 株式会社フジキン | 遮断開放器 |
WO2023182105A1 (ja) * | 2022-03-22 | 2023-09-28 | 株式会社フジキン | 流量制御装置の排気構造、排気方法及びそれを備えたガス供給システム及びガス供給方法 |
Families Citing this family (15)
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---|---|---|---|---|
US20140020779A1 (en) * | 2009-06-10 | 2014-01-23 | Vistadeltek, Llc | Extreme flow rate and/or high temperature fluid delivery substrates |
KR101599344B1 (ko) * | 2011-09-30 | 2016-03-03 | 가부시키가이샤 후지킨 | 가스 공급 장치 |
BR112017021089A2 (pt) * | 2015-04-01 | 2018-07-03 | Sandvik Intellectual Property | unidade de controle para máquina de mineração |
KR102177916B1 (ko) * | 2016-09-12 | 2020-11-12 | 가부시키가이샤 후지킨 | 유체제어장치, 이것에 사용하는 베이스 블록 및 유체제어장치의 제조 방법 |
KR20190122233A (ko) * | 2017-03-28 | 2019-10-29 | 가부시키가이샤 후지킨 | 이음매 블록 및 이것을 사용한 유체제어장치 |
JP7157461B2 (ja) * | 2017-10-31 | 2022-10-20 | 株式会社フジキン | バルブ装置 |
US10982694B2 (en) | 2017-12-05 | 2021-04-20 | Siw Engineering Pte. Ltd. | Fluid control device and connector for fluid control device |
KR102308335B1 (ko) * | 2017-12-05 | 2021-10-01 | 에스아이더블유 엔지니어링 피티이. 엘티디. | 유체 제어 디바이스 및 유체 제어 디바이스를 위한 커넥터 |
WO2019217315A1 (en) | 2018-05-07 | 2019-11-14 | Lam Research Corporation | Configurable distributed-interlock-system |
JP7303560B2 (ja) * | 2018-10-31 | 2023-07-05 | 株式会社フジキン | 流体供給システム |
JP2022529263A (ja) * | 2019-04-15 | 2022-06-20 | ラム リサーチ コーポレーション | ガス送給用のモジュール式構成要素システム |
JP7425462B2 (ja) * | 2019-10-31 | 2024-01-31 | 株式会社フジキン | 流体制御装置および半導体製造装置 |
US20230213108A1 (en) * | 2020-06-05 | 2023-07-06 | Zhejiang Liankong Technologies Co., Ltd | Integrated multi-port solenoid valve, vehicle thermal management system, and vehicle |
US20230184267A1 (en) * | 2021-12-15 | 2023-06-15 | Ford Global Technologies, Llc | Unitized valve body having connection orifices |
US20230184323A1 (en) * | 2021-12-15 | 2023-06-15 | Ford Global Technologies, Llc | Unitized valve body having connection orifices |
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JPH05172265A (ja) * | 1991-05-31 | 1993-07-09 | Motoyama Seisakusho:Kk | ガス制御装置 |
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JP2003185039A (ja) * | 2001-12-12 | 2003-07-03 | Asahi Organic Chem Ind Co Ltd | マニホールドバルブ |
JP2005069305A (ja) * | 2003-08-22 | 2005-03-17 | Fujikin Inc | 流体制御装置 |
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2012
- 2012-04-27 JP JP2012102968A patent/JP6012247B2/ja active Active
-
2013
- 2013-04-17 US US14/395,850 patent/US9850920B2/en active Active
- 2013-04-17 WO PCT/JP2013/061369 patent/WO2013161640A1/ja active Application Filing
- 2013-04-17 CN CN201380021762.3A patent/CN104704283B/zh not_active Expired - Fee Related
- 2013-04-17 KR KR1020147030997A patent/KR101710769B1/ko active IP Right Grant
- 2013-04-25 TW TW102114749A patent/TWI577917B/zh not_active IP Right Cessation
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JPH05172265A (ja) * | 1991-05-31 | 1993-07-09 | Motoyama Seisakusho:Kk | ガス制御装置 |
JPH10300000A (ja) * | 1997-02-28 | 1998-11-13 | Benkan Corp | 集積化ガス制御装置 |
JPH10311451A (ja) * | 1997-05-13 | 1998-11-24 | Ckd Corp | プロセスガス供給ユニット |
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WO2015098333A1 (ja) * | 2013-12-27 | 2015-07-02 | 株式会社フジキン | 流体制御装置 |
JP2015124851A (ja) * | 2013-12-27 | 2015-07-06 | 株式会社フジキン | 流体制御装置 |
CN105431661A (zh) * | 2013-12-27 | 2016-03-23 | 株式会社富士金 | 流体控制装置 |
CN105431661B (zh) * | 2013-12-27 | 2017-07-28 | 株式会社富士金 | 流体控制装置 |
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JP2016048110A (ja) * | 2014-08-28 | 2016-04-07 | 株式会社フジキン | マニホールドバルブおよび流体制御装置 |
WO2016167154A1 (ja) * | 2015-04-15 | 2016-10-20 | 株式会社フジキン | 遮断開放器 |
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CN107532741B (zh) * | 2015-04-15 | 2019-05-17 | 株式会社富士金 | 通断器 |
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WO2023182105A1 (ja) * | 2022-03-22 | 2023-09-28 | 株式会社フジキン | 流量制御装置の排気構造、排気方法及びそれを備えたガス供給システム及びガス供給方法 |
Also Published As
Publication number | Publication date |
---|---|
CN104704283B (zh) | 2018-04-27 |
KR20150000498A (ko) | 2015-01-02 |
KR101710769B1 (ko) | 2017-02-27 |
TW201407077A (zh) | 2014-02-16 |
TWI577917B (zh) | 2017-04-11 |
CN104704283A (zh) | 2015-06-10 |
US9850920B2 (en) | 2017-12-26 |
WO2013161640A1 (ja) | 2013-10-31 |
JP6012247B2 (ja) | 2016-10-25 |
US20150075660A1 (en) | 2015-03-19 |
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