US10982694B2 - Fluid control device and connector for fluid control device - Google Patents
Fluid control device and connector for fluid control device Download PDFInfo
- Publication number
- US10982694B2 US10982694B2 US16/207,715 US201816207715A US10982694B2 US 10982694 B2 US10982694 B2 US 10982694B2 US 201816207715 A US201816207715 A US 201816207715A US 10982694 B2 US10982694 B2 US 10982694B2
- Authority
- US
- United States
- Prior art keywords
- hole
- fluid
- tongue portion
- unit
- fluid flowing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active, expires
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0807—Manifolds
- F15B13/0817—Multiblock manifolds
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0821—Attachment or sealing of modular units to each other
- F15B13/0825—Attachment or sealing of modular units to each other the modular elements being mounted on a common member, e.g. on a rail
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0878—Assembly of modular units
- F15B13/0896—Assembly of modular units using different types or sizes of valves
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
Definitions
- the present invention relates to a fluid control device and a connector thereof, and more particularly to a fluid control device that can be simply disassembled and assembled and has flexibility with high sealing performance.
- Fluid control devices are commonly applied in the semiconductor industry, and aim to supply gases for semiconductor manufacturing processes, including diffusion, etching, sputtering and the like.
- a fluid control device mainly includes a plurality of apparatuses, such as a pressure reducing valve, a pressure gauge, a mass flow controller, a gas filter, a hand-operated valve, a first shut-off valve, a second shut-off valve and the like, and includes various connectors for connecting the fluid control apparatuses to form a channel allowing a fluid to flow smoothly.
- US patent No. US 2015/0075660 A1 discloses a fluid control apparatus providing a method for solving the assembling problem.
- the apparatus includes an upper stage having a plurality of fluid control devices arranged in series and a lower stage having a plurality of passage blocks that connect the fluid control devices on the upper stage.
- the adjacent passage blocks are connected to one another through inverted U-shaped pipes. Therefore, the apparatus is able to be easily constructed with a plurality of lines of passage blocks in parallel and a single line of passage blocks.
- the apparatus also has a reduced number of components and enables simple alteration such as increasing or decreasing the number of lines.
- fluids flowing through the fluid control device may be corrosive, so the corrosion resistance of the elements of the fluid control device should be improved and the difficulty of cleaning the fluid control device should also be considered.
- the problem of leakage may occur frequently when a fluid flows in the fluid control device, and especially when a flowing gas is dangerous or harmful to human body, the fluid leakage problem needs to be avoided carefully.
- a main objective of the present invention is to solve the problem that a conventional fluid control device is not easy to disassemble or assemble.
- Another objective of the present invention is to overcome the defects that a gas channel is prone to particle remaining therein and not easy to clean in a conventional connector for a fluid control device.
- a further another objective of the present invention is to reduce the risks of leakage of a gas during the process of flowing in a fluid control device.
- an embodiment of the present invention provides a connector for a fluid control device that includes at least two fluid flowing through holes.
- the connector includes: a first unit having an upper surface, a lower surface opposite to the upper surface, a first fluid flowing through hole formed in the upper surface, a second fluid flowing through hole formed in the upper surface, and a first channel that communicates the first fluid flowing through hole with the second fluid flowing through hole and is formed to extend through the first unit; and
- a second unit disposed under the first unit and including a mounting block protruding from a portion of the lower surface of the first unit and a first depression portion adjacent to the other portion of the lower surface and the mounting block.
- an embodiment of the present invention provides a connector for a fluid control device that includes at least three fluid flowing through holes.
- the connector includes a first unit having an upper surface, a lower surface opposite to the upper surface, a first fluid flowing through hole formed in the upper surface, a second fluid flowing through hole formed in the upper surface, and a fourth fluid flowing through hole formed in the upper surface, with a first channel being disposed between the first fluid flowing through hole and the fourth fluid flowing through hole to communicate the first fluid flowing through hole with the fourth fluid flowing through hole; an extension unit that protrudes outwards from a side end of the first unit, the extension unit including a third fluid flowing through hole, and a second channel being disposed between the third fluid flowing through hole and the second fluid flowing through hole to communicate the second fluid flowing through hole with the third fluid flowing through hole; and a second unit disposed under the first unit and including a mounting block protruding from a portion of the lower surface of the first unit and a first depression portion adjacent to the other portion of the lower surface and the mounting block.
- a further another embodiment of the present invention provides a connector including at least four fluid flowing through holes.
- the connector includes: a first unit having an upper surface, a lower surface opposite to the upper surface, a first fluid flowing through hole formed in the upper surface, a second fluid flowing through hole formed in the upper surface, a fourth fluid flowing through hole formed in the upper surface, a fifth fluid flowing through hole formed in the upper surface, and a sixth fluid flowing through hole formed in the upper surface, where a first channel is disposed between the first fluid flowing through hole and the fifth fluid flowing through hole to communicate the first fluid flowing through hole with the fifth fluid flowing through hole, and a second channel is disposed between the second fluid flowing through hole and the sixth fluid flowing through hole to communicate the second fluid flowing through hole with the sixth fluid flowing through hole; an extension unit that protrudes outwards from a side end of the first unit, the extension unit including a third fluid flowing through hole, and a third channel being disposed between the third fluid flowing through hole and the fourth fluid flowing through hole to communicate the third fluid flowing through hole with the fourth fluid
- a further another embodiment of the present invention provides a connector including at least six fluid flowing through holes.
- the connector includes: a first unit having an upper surface, a lower surface opposite to the upper surface, a first fluid flowing through hole formed in the upper surface, a second fluid flowing through hole formed in the upper surface, a fourth fluid flowing through hole formed in the upper surface, a fifth fluid flowing through hole formed in the upper surface, and a sixth fluid flowing through hole formed in the upper surface, where a first channel is disposed between the first fluid flowing through hole and the fifth fluid flowing through hole to communicate the first fluid flowing through hole with the fifth fluid flowing through hole, and a second channel is disposed between the second fluid flowing through hole and the sixth fluid flowing through hole to communicate the second fluid flowing through hole with the sixth fluid flowing through hole; an extension unit that protrudes outwards from a side end of the first unit, the extension unit including a third fluid flowing through hole, and a third channel being disposed between the third fluid flowing through hole and the fourth fluid flowing through hole to communicate the third fluid flowing through hole with the fourth fluid
- the present invention also provides a connector module for the fluid control device.
- the connector module includes a plurality of connecting blocks that are arranged in an axial direction.
- Each of the connecting blocks includes an upper half portion that includes at least one fluid inlet, at least one fluid outlet, and at least one connecting channel communicating the fluid inlet with the fluid outlet and extending in a horizontal direction, and a lower half portion that is provided with a depression portion and a tongue portion extending and protruding from the depression portion along the axial direction, where the connecting channel is above an upper surface of the tongue portion.
- Adjacent connecting blocks are accommodated in the depression portion through the tongue portion to be connected to each other.
- the present invention further provides a connector module for the fluid control device.
- the connector module includes a plurality of connecting blocks that are arranged in an axial direction.
- Each of the connecting blocks includes at least one fluid inlet, at least one fluid outlet, and at least one connecting channel communicating the fluid inlet with the fluid outlet and extending in a horizontal direction to be separated from a bottom surface of the connecting block by a height, where a protruding first tongue portion is formed at one end of the connecting block, and a depression portion is formed at the other end of the connecting block.
- Adjacent connecting blocks are connected to each other by accommodating the first tongue portion in the depression portion.
- the present invention further provides a fluid control device including:
- a connector module disposed on the base and including:
- a first connector including:
- a first unit having a first upper surface, a first lower surface opposite to the first upper surface, a first fluid flowing through hole formed in the first upper surface, a second fluid flowing through hole formed in the first upper surface, and a first channel that communicates the first fluid flowing through hole with the second fluid flowing through hole and extends through the first unit;
- a second unit disposed under the first unit and including a first mounting block protruding from a portion of the first lower surface of the first unit, and a first depression portion adjacent to the other portion of the lower surface and the first mounting block;
- a second connector including:
- a third unit having a second upper surface, a second lower surface opposite to the second upper surface, a third fluid flowing through hole formed in the second upper surface, a fourth fluid flowing through hole formed in the second upper surface, and a second channel that communicates the third fluid flowing through hole with the fourth fluid flowing through hole and extends through the third unit;
- a fourth unit disposed under the third unit and including a second mounting block protruding from a portion of the second lower surface of the third unit, a second depression portion adjacent to the other portion of the second lower surface and the second mounting block, and a tongue portion far away from the second depression portion, where the first connector is abutted against the second connector by accommodating the tongue portion of the fourth unit in the first depression portion of the second unit;
- a fluid control element that is fastened to the base through the connector module and bridged across the first connector and the second connector.
- the present invention further provides a fluid control device including:
- a fluid control element disposed above the base and provided with an outlet and an inlet;
- a connector module disposed between the fluid control element and the base and including:
- each of the plurality of connecting blocks including:
- a fluid channel including a fluid inlet and a fluid outlet that are formed in an upper surface of the connecting block, and a U-shaped connecting channel that communicates the fluid inlet with the fluid outlet;
- an upper tongue portion formed to protrude from one end of the connecting block and provided with a first fixing hole extending through a bottom surface of the upper tongue portion;
- a lower tongue portion formed to protrude from the other end of the connecting block and provided with a second fixing hole extending through a top surface of the lower tongue portion;
- the present invention further provides a fluid control device including:
- a fluid control element disposed above the base and provided with an outlet and an inlet;
- a connector module disposed between the fluid control element and the base and including:
- each of the plurality of connecting blocks including:
- a fluid channel including a fluid inlet and a fluid outlet that are formed in an upper surface of the connecting block, and a U-shaped connecting channel that communicates the fluid inlet with the fluid outlet;
- an upper tongue portion formed to protrude from one end of the connecting block and provided with a first fixing hole extending through a bottom surface of the upper tongue portion;
- a lower tongue portion formed to protrude from the other end of the connecting block and provided with a second fixing hole extending through a top surface of the lower tongue portion and a third fixing hole extending through a bottom surface of the lower tongue portion;
- the present invention compared with the prior art, can achieve the following effects:
- the fluid control device of the invention is connected through a connector in a particular shape.
- the connector can be simply stacked upon an adjacent connector to allow for simple disassembling or assembling, and then the problem that the conventional fluid control device is not easy to disassemble or assemble is solved.
- the embodiment of the fluid control device is allowed to be modularized. Through combination of different connectors, flexible combination with various fluid control elements can be realized.
- the connector design of the present invention allows a fluid to flow through a fluid channel in a single connector rather than a fluid channel composed of a plurality of secondary channels connected to one another when passing from a fluid control element through the connector to an adjacent fluid control element.
- assembling of adjacent connectors does not involve joining of fluid channels, thereby decreasing the interface of the fluid channel, reducing the probability of fluid leakage, and having good sealing performance.
- the fluid flowing through holes of the present invention and/or the channels between such fluid flowing through holes each have a mirror surface, so that the problem of particle remaining when a fluid flowing therethrough can be effectively solved.
- FIG. 1A is a three-dimensional diagram of a first embodiment of a two-port connector of the present invention.
- FIG. 1B is a left view of the first embodiment of the two-port connector of the present invention.
- FIG. 1C is a bottom view of the first embodiment of the two-port connector of the present invention.
- FIG. 1D is a top view of the first embodiment of the two-port connector of the present invention.
- FIG. 1E is an A-A section view of FIG. 1D .
- FIG. 1F is a B-B section view of FIG. 1D .
- FIG. 2 is a three-dimensional diagram of a second embodiment of a two-port connector of the present invention.
- FIG. 3A is a three-dimensional diagram of a third embodiment of a two-port connector of the present invention.
- FIG. 3B is a left view of the third embodiment of the two-port connector of the present invention.
- FIG. 3C is a bottom view of the third embodiment of the two-port connector of the present invention.
- FIG. 3D is a top view of the third embodiment of the two-port connector of the present invention.
- FIG. 3E is a C-C section view of FIG. 3D .
- FIG. 4 is a three-dimensional diagram of a fourth embodiment of a two-port connector of the present invention.
- FIG. 5A is a three-dimensional diagram of a first embodiment of a three-port connector of the present invention.
- FIG. 5B is a three-dimensional diagram in another perspective of the first embodiment of the three-port connector of the present invention.
- FIG. 5C is a left view of the first embodiment of the three-port connector of the present invention.
- FIG. 5D is a bottom view of the first embodiment of the three-port connector of the present invention.
- FIG. 5E is a top view of the first embodiment of the three-port connector of the present invention.
- FIG. 5F is a D-D section view of FIG. 5E .
- FIG. 5G is an E-E section view of FIG. 5E .
- FIG. 6 is a three-dimensional diagram of a second embodiment of a three-port connector of the present invention.
- FIG. 7A is a three-dimensional diagram of a first embodiment of a connector with more than four ports of the present invention.
- FIG. 7B is an F-F section view of FIG. 7A .
- FIG. 7C is a G-G section view of FIG. 7A .
- FIG. 8 is a three-dimensional diagram of a second embodiment of a connector with more than four ports of the present invention.
- FIG. 9A is a three-dimensional diagram of a third embodiment of a connector with more than four ports of the present invention.
- FIG. 9B is a left view of the third embodiment of the connector with more than four ports of the present invention.
- FIG. 9C is a bottom view of the third embodiment of the connector with more than four ports of the present invention.
- FIG. 9D is a top view of the third embodiment of the connector with more than four ports of the present invention.
- FIG. 9E is an H-H section view of FIG. 9D .
- FIG. 9F is an I-I section view of FIG. 9D .
- FIG. 10A is a three-dimensional diagram of a first embodiment of a connecting piece of the present invention.
- FIG. 10B is a J-J section view of FIG. 10A .
- FIG. 10C is a K-K section view of FIG. 10A .
- FIG. 11A is a three-dimensional diagram of a second embodiment of a connecting piece of the present invention.
- FIG. 11B is an L-L section view of FIG. 11A .
- FIG. 12A is a three-dimensional diagram of a fluid control device of an embodiment of the present invention.
- FIG. 12B is a three-dimensional diagram in another perspective of the fluid control device of an embodiment of the present invention.
- FIG. 12C is an exploded view of the fluid control device of an embodiment of the present invention.
- FIG. 13 is a schematic diagram of a fluid control device of another embodiment of the present invention.
- a fluid control device of the present invention includes a plurality of fluid control elements arranged into a single line, and a plurality of connectors corresponding to the plurality of fluid control elements, and each fluid control element is connected to the corresponding connector so that a fluid flows between the connected fluid control element and connector.
- each fluid control element included in the fluid control device of the present invention is not particularly limited and can be chosen arbitrarily as required.
- each fluid control element is selected from a group consisting of a pressure reducing valve, a pressure gauge, a mass flow controller, a filter, a hand-operated valve, a two-port shut-off valve, a three-port shut-off valve, a high-cleanness pressure regulator valve, a pressure sensor and combinations thereof.
- the group may consist of a hand-operated valve, a two-port shut-off valve, a three-port shut-off valve, a high-cleanness pressure regulator valve, a pressure sensor, a filter, a two-port shut-off valve, a mass flow controller, a three-port shut-off valve, and a two-port shut-off valve.
- Connectors for the fluid control device of the present invention may be classified into a two-port connector, a three-port connector, a connector with more than four ports, and a connecting piece according to the number of gas channel ports thereof.
- Such connectors will be illustrated below.
- such connectors each include a plurality of units, each unit including an upper surface, a lower surface, a first side surface, a second side surface, a third side surface, a fourth side surface, etc.
- surfaces in the same orientations will be described with the same name and different reference numerals for the purpose of distinction.
- a two-port connector of the present invention refers to a connector with two fluid flowing through holes, one being a fluid inlet and the other being a fluid outlet.
- FIGS. 1A-F show a first embodiment 1 a of a two-port connector of the present invention.
- the two-port connector 1 a is provided with a first unit 11 and a second unit 12 .
- the first unit 11 is disposed on the second unit 12 .
- the first unit 11 includes a first mounting block 11 a and a first tongue portion 11 c , and the first unit 11 is further provided with an upper surface 111 , a lower surface 112 opposite to the upper surface 111 , and a first side surface 113 , a second side surface 114 , a third side surface 115 and a fourth side surface 116 that are connected to the upper surface 111 and the lower surface 112 , respectively.
- the first side surface 113 is disposed corresponding to the third side surface 115
- the second side surface 114 is disposed corresponding to the fourth side surface 116 .
- the second unit 12 includes a second mounting block 12 a and a second depression portion 12 b .
- the second mounting block 12 a protrudes from a portion of the lower surface 112 of the first unit 11 , and due to the existence of the second mounting block 12 a , the other portion of the lower surface 112 of the first unit 11 is depressed inwards into a second depression portion 12 b that is adjacent between the other portion of the lower surface 112 and the second mounting block 12 a , as shown in FIG. 1E .
- the second unit 12 is provided with a lower surface 122 , and a first side surface 123 , a second side surface 124 , a third side surface 125 and a fourth side surface 126 that are separately connected to the lower surface 122 .
- the first side surface 123 is disposed corresponding to the third side surface 125
- the second side surface 124 is disposed corresponding to the fourth side surface 126 .
- the first unit 11 and the second unit 12 have the same width W.
- the length L 1 of the first unit 11 is greater than the length L 2 of the second unit 12 .
- the first unit 11 and the second unit 12 are of an integrally formed structure.
- the third side surface 115 of the first unit 11 is flush with the third side surface 125 of the second unit 12 to form an integrally formed surface.
- the second side surface 114 of the first unit 11 and the second side surface 124 of the second unit 12 are molded into an integrally formed surface
- the fourth side surface 116 of the first unit 11 and the fourth side surface 126 of the second unit 12 are molded into an integrally formed surface.
- the first unit 11 includes a first locating pin hole 1111 a , a second locating pin hole 1111 b , a first fluid flowing through hole 1112 a , a second fluid flowing through hole 1112 b , a first threaded hole 1113 a , a second threaded hole 1113 b , a third threaded hole 1113 c , a fourth threaded hole 1113 d , a first lower threaded hole 1121 a , a second lower threaded hole 1121 b , a first bolt hole 1114 a , and a second bolt hole 1114 b .
- the first locating pin hole 1111 a and the second locating pin hole 1111 b are disposed at a side of the upper surface 111 that is close to the first side surface 113 , and are through holes extending through the upper surface 111 and the lower surface 112 .
- the first fluid flowing through hole 1112 a and the second fluid flowing through hole 1112 b are disposed at sides of the upper surface 111 that are close to the first side surface 113 and the third side surface 115 , respectively, where the first fluid flowing through hole 1112 a is disposed between the first locating pin hole 1111 a and the second locating pin hole 1111 b , and the second fluid flowing through hole 1112 b is disposed between the third threaded hole 1113 c and the fourth threaded hole 11113 d .
- a first channel 1115 a is disposed between the first fluid flowing through hole 1112 a and the second fluid flowing through hole 1112 b to communicate the first fluid flowing through hole 1112 a with the second fluid flowing through hole 1112 b .
- the first channel 1115 a extends from an end of the first unit 11 that is close to the second mounting block 12 a to an end of the first unit 11 that is close to the second depression portion 12 b , and may also be deemed to extend from an end of the first unit 11 that is close to the third side surface 115 to an end of the first unit 11 that is close to the first side surface 113 .
- the first channel 1115 a may be subjected to a treatment to have a mirror surface.
- the above-mentioned treatment may include firstly forming an opening that communicates with the first channel 1115 a in the first side surface 113 and performing a burnishing treatment on the first channel 1115 a to allow the first channel 1115 a to have a mirror surface, and then plugging the opening by welding.
- the first threaded hole 1113 a , the second threaded hole 1113 b , the third threaded hole 1113 c , the fourth threaded hole 1113 d , the first lower threaded hole 1121 a and the second lower threaded hole 1121 b are all threaded blind holes, i.e., non-penetrating holes, where the first threaded hole 1113 a and the second threaded hole 1113 b are disposed at a side of the upper surface 111 that is close to the first side surface 113 , and the first threaded hole 1113 a is adjacent to the first locating pin hole 1111 a , while the second threaded hole 1113 b is adjacent to the second locating pin hole 1111 b .
- the third threaded hole 1113 c and the fourth threaded hole 1113 d are disposed at a side of the upper surface 111 that is close to the third side surface 115 , and the third threaded hole 1113 c is close to the second side surface 114 , while the fourth threaded hole 1113 d is close to the fourth side surface 116 .
- the first lower threaded hole 1121 a and the second lower threaded hole 1121 b are formed in the lower surface 112 and close to the first bolt hole 1114 a and the second bolt hole 1114 b.
- the second fluid flowing through hole 1112 b includes an enlarged portion 11121 , a step surface 11122 and a channel portion 11123 .
- An inner diameter of the enlarged portion 11121 is greater than that of the channel portion 11123 .
- the step surface 11122 is connected between the enlarged portion 11121 and the channel portion 11123 and is a burnished mirror surface, so that a sealing effect can be achieved when the second fluid flowing through hole 1112 b communicates with other fluid control element.
- Fluid flowing through holes in other embodiments and embodiments may be the same as above and will not be redundantly described below.
- the first bolt hole 1114 a and the second bolt hole 1114 b are disposed at sides of the upper surface 111 that are close to the second side surface 114 and the fourth side surface 116 , respectively. More particularly, the first bolt hole 1114 a is disposed adjacent between the first threaded hole 1113 a and the third threaded hole 1113 c , and the second bolt hole 1114 b is disposed adjacent between the second threaded hole 1113 b and the fourth threaded hole 1113 d .
- the first bolt hole 1114 a and the second bolt hole 1114 b are both through holes extending through the upper surface 111 and the lower surface 112 , and a projection portion is disposed in each of the through holes, i.e., the first bolt hole 1114 a and the second bolt hole 1114 b , so that the through holes, i.e., the first bolt hole 1114 a and the second bolt hole 1114 b , have different diameters R 1 and R 2 , where the diameter close to the upper surface 111 is R 1 , while the diameter close to the lower surface 112 is R 2 , and R 1 is greater than R 2 , as shown in FIG. 1F .
- a two-port connector 1 b of the present invention is the same as the first embodiment 1 a as described above in other arrangements and structures, except that a distance between the third threaded hole 1113 c and the fourth threaded hole 113 d is shorter than that between the third threaded hole 1113 c and the fourth threaded hole 113 d in the first embodiment 1 a.
- FIG. 3A-E show a third embodiment 1 c of a two-port connector of the present invention.
- the two-port connector 1 c has a first unit 11 and a second unit 12 .
- the first unit 11 includes a first mounting block 11 a , a first depression portion 11 b and a first tongue portion 11 c , and the first unit 11 further has an upper surface 111 , a lower surface 112 opposite to the upper surface 111 , and a first side surface 113 , a second side surface 114 , a third side surface 115 and a fourth side surface 116 that are connected to the upper surface 111 and the lower surface 112 , respectively.
- the first side surface 113 is disposed corresponding to the third side surface 115
- the second side surface 114 is disposed corresponding to the fourth side surface 116 .
- the second unit 12 includes a second mounting block 12 a and a second depression portion 12 b .
- the second mounting block 12 a protrudes from a portion of the lower surface 112 of the first unit 11 , and due to the existence of the second mounting block 12 a , the other portion of the lower surface 112 of the first unit 11 is depressed inwards into a second depression portion 12 b that is adjacent between the other portion of the lower surface 112 and the second mounting block 12 a , as shown in FIG. 3E .
- the second tongue portion 12 c extends from the second mounting block 12 a toward a side far away from the second depression portion 12 b and protrudes from the first unit 11 .
- the second unit 12 is provided with an upper surface 121 , a lower surface 122 opposite to the upper surface 121 , and a first side surface 123 , a second side surface 124 , a third side surface 125 and a fourth side surface 126 that are connected to the upper surface 121 and the lower surface 122 , respectively.
- the first side surface 123 is disposed corresponding to the third side surface 125
- the second side surface 124 is disposed corresponding to the fourth side surface 126 .
- the first unit 11 and the second unit 12 are of an integrally formed structure. Specifically, the first unit 11 and the second unit 12 have the same width W.
- the second side surface 114 of the first unit 11 is flush with the second side surface 124 of the second unit 12 to form a Z-shaped plane
- the fourth side surface 116 of the first unit 11 is flush with the fourth side surface 126 of the second unit 12 to form a Z-shaped plane.
- the first unit 11 further includes a first locating pin hole 1111 a , a second locating pin hole 1111 b , a first fluid flowing through hole 1112 a , a second fluid flowing through hole 1112 b , a first threaded hole 1113 a , a second threaded hole 1113 b , a third threaded hole 1113 c , a fourth threaded hole 1113 d , a first lower threaded hole 1121 a , a second lower threaded hole 1121 b , a first bolt hole 1114 a , and a second bolt hole 1114 b.
- the first locating pin hole 1111 a and the second locating pin hole 1111 b are both through holes extending through the upper surface 111 and the lower surface 112 .
- the first locating pin hole 1111 a is located between the first threaded hole 1113 a and the first side surface 113
- the second locating pin hole 1111 b is located between the second threaded hole 1113 b and the first side surface 113 .
- the first fluid flowing through hole 1112 a and the second fluid flowing through hole 1112 b are disposed at sides of the upper surface 111 that are close to the first side surface 113 and the third side surface 115 , respectively.
- a first channel 1115 a is disposed between the first fluid flowing through hole 1112 a and the second fluid flowing through hole 1112 b to communicate the first fluid flowing through hole 1112 a with the second fluid flowing through hole 1112 b .
- the first channel 1115 a extends from an end of the first unit 11 that is close to the second mounting block 12 a to an end of the first unit 11 that is close to the second depression portion 12 b .
- the first channel 1115 a may be subjected to a treatment to have a mirror surface, as described above.
- the first threaded hole 1113 a , the second threaded hole 1113 b , the third threaded hole 1113 c , the fourth threaded hole 1113 d , the first lower threaded hole 1121 a and the second lower threaded hole 1121 b are all threaded blind holes, where the first threaded hole 1113 a and the second threaded hole 1113 b are disposed at a side of the upper surface 111 of the first unit 11 that is close to the first side surface 113 .
- the third threaded hole 1113 c is disposed at a side of the upper surface 111 that is close to the second side surface 114 , while the fourth threaded hole 1113 d is close to the fourth side surface 116 .
- first threaded hole 1113 a , the second threaded hole 1113 b and the second fluid flowing through hole 1112 b are arranged appropriately as vertexes of an isosceles triangle.
- the first lower threaded hole 1121 a and the second lower threaded hole 1121 b are formed in the lower surface 112 and close to the first bolt hole 1114 a and the second bolt hole 1114 b.
- the first bolt hole 1114 a and the second bolt hole 1114 b are both through holes extending through the upper surface 111 and the lower surface 112 , and a projection portion is disposed in each of the through holes, so that the through holes, i.e., the first bolt hole 1114 a and the second bolt hole 1114 b , have different diameters R 1 and R 2 , where the diameter close to the upper surface 111 is R 1 , while the diameter close to the lower surface 112 is R 2 , and R 1 is greater than R 2 (please refer to FIG. 1F for the structure of the bolt holes).
- first bolt hole 1114 a is disposed between the first threaded hole 1113 a and the third threaded hole 1113 c
- second bolt hole 1114 b is disposed between the second threaded hole 1113 b and the fourth threaded hole 1113 d.
- the second unit 12 further includes a first locating pin hole 1211 a , a second locating pin hole 1211 b , a first through hole 1216 a , a second through hole 1216 b , a fifth threaded hole 1213 e , and a sixth threaded hole 1213 f.
- the first locating pin hole 1211 a and the second locating pin hole 1211 b are disposed at a side of the upper surface 121 of the second unit 12 that is close to the first unit 11 and are both through holes extending through the upper surface 121 and the lower surface 122 .
- the fifth threaded hole 1213 e and the sixth threaded hole 1213 f are disposed at a side of the upper surface 121 of the second unit 12 that is far away from the first unit 11 .
- the fifth threaded hole 1213 e and the sixth threaded hole 1213 f are through holes extending through the upper surface 121 and the lower surface 122 .
- the first through hole 1216 a and the second through hole 1216 b are disposed between the first locating pin hole 1211 a and the fifth threaded hole 1213 e , and between the second locating pin hole 1211 b and the sixth threaded hole 1213 f , respectively.
- a fourth embodiment 1 d of a two-port connector of the present invention is as shown in FIG. 4 .
- the two-port connector 1 d and the two-port connector 1 c differ in that the two-port connector 1 d lacks the first locating pin hole 1111 a , the second locating pin hole 1111 b , the first lower threaded hole 1121 a , and the second lower threaded hole 1121 b ; and the first threaded hole 1113 a and the second threaded hole 1113 b are relatively close to each other and symmetrically disposed about the first fluid flowing through hole 1112 a .
- the first threaded hole 1113 a , the second threaded hole 1113 b and the first fluid flowing through hole 1112 a are arranged in a virtual straight line. Other arrangements and structures are the same with the third embodiment 1 c.
- a three-port connector of the present invention is a connector with three flowing through holes that can be used as fluid inlets or fluid outlets.
- FIG. 5A-G show a first embodiment 2 a of a three-port connector of the present invention.
- the three-port connector 2 a has a first unit 11 , a second unit 12 and an extension unit 13 .
- the first unit 11 includes a first mounting block 11 a , a first depression portion 11 b and a first tongue portion 11 c .
- the first unit 11 includes an upper surface 111 , a lower surface 112 opposite to the upper surface 111 , and a first side surface 113 , a second side surface 114 , a third side surface 115 and a fourth side surface 116 that are connected to the upper surface 111 and the lower surface 112 , respectively.
- the first side surface 113 is disposed corresponding to the third side surface 115
- the second side surface 114 is disposed corresponding to the fourth side surface 116 .
- the second unit 12 includes a second mounting block 12 a , a second depression portion 12 b , and a second tongue portion 12 c .
- the second mounting block 12 a protrudes from a portion of the lower surface 112 of the first unit 11 , and due to the existence of the second mounting block 12 a , the other portion of the lower surface 112 of the first unit 11 is depressed inwards into a second depression portion 12 b that is adjacent between the other portion of the lower surface 112 and the second mounting block 12 a , as shown in FIG. 5B .
- the second tongue portion 12 c extends from the second mounting block 12 a toward a side far away from the second depression portion 12 b to protrude from the first unit 11 .
- the second unit 12 also has an upper surface 121 , a lower surface 122 opposite to the upper surface 121 , and a first side surface 123 , a second side surface 124 , a third side surface 125 and a fourth side surface 126 that are connected to the upper surface 121 and the lower surface 122 , respectively.
- the first side surface 123 is disposed corresponding to the third side surface 125
- the second side surface 124 is disposed corresponding to the fourth side surface 126 .
- the extension unit 13 protrudes outwards from one ends of the first unit 11 and the second unit 12 that are close to the second side surfaces 114 , 124 .
- the extension unit 13 includes an upper surface 131 , a lower surface 132 opposite to the upper surface 131 , and a first side surface 133 , a second side surface 134 , a third side surface 135 and a fourth side surface 136 that are connected to the upper surface 131 and the lower surface 132 , respectively.
- the first side surface 133 is disposed corresponding to the third side surface 135 .
- the extension unit 13 further includes a retaining wall 137 extending and protruding in parallel to the second tongue portion 12 c , as shown in FIG. 5A .
- a first arc-like recess portion 21 is formed between the first side surface 133 of the extension unit 13 and the second side surface 114 of the first unit 11 .
- a second arc-like recess portion 22 is formed between the third side surface 135 of the extension unit 13 and the second side surface 124 of the second unit 12 , and a third arc-like recess portion 23 is formed between the retaining wall 137 and the third side surface 115 .
- the first unit 11 , the second unit 12 and the extension unit are of an integrally formed structure, i.e., the first unit 11 and the second unit 12 have the same width W.
- the first unit 11 further includes a first locating pin hole 1111 a , a second locating pin hole 1111 b , a first fluid flowing through hole 1112 a , a second fluid flowing through hole 1112 b , a first threaded hole 1113 a , a second threaded hole 1113 b , a third threaded hole 1113 c , a fourth threaded hole 1113 d , a first lower threaded hole 1121 a , a second lower threaded hole 1121 b , a first bolt hole 1114 a , and a second bolt hole 1114 b .
- the extension unit 13 further includes a third fluid flowing through hole 1312 , a fifth threaded hole 1313 a , and a sixth threaded hole 1313 b.
- the first locating pin hole 1111 a and the second locating pin hole 1111 b are both disposed at a side of the upper surface 111 that is close to the first side surface 113 and are both through holes extending through the upper surface 111 and the lower surface 112 .
- the first fluid flowing through hole 1112 a and the second fluid flowing through hole 1112 b are disposed at sides of the upper surface 111 that are close to the first side surface 113 and the third side surface 115 , respectively, and the third fluid flowing through hole 1312 is disposed at a side of the upper surface 131 that is close to the second side surface 134 .
- a first channel 1115 a is disposed between the first fluid flowing through hole 1112 a and the second fluid flowing through hole 1112 b to communicate the first fluid flowing through hole 1112 a with the second fluid flowing through hole 1112 b
- a second channel 1115 b is also disposed between the second fluid flowing through hole 1112 b and the third fluid flowing through hole 1312 to communicate the second fluid flowing through hole 1112 b with the third fluid flowing through hole 1312
- the first channel 1115 a and the second channel 1115 b are connected and communicate with each other and extend in directions perpendicular to each other.
- the fluid flowing through hole 1112 a communicates with the second fluid flowing through hole 1112 b and the third fluid flowing through hole 1312 through the first channel 1115 a and the second channel 1115 b .
- such channels are both treated to have a mirror surface.
- the first threaded hole 1113 a , the second threaded hole 1113 b , the third threaded hole 1113 c , the fourth threaded hole 1113 d , the fifth threaded hole 1313 a , the sixth threaded hole 1313 b , the first lower threaded hole 1121 a and the second lower threaded hole 1121 b are all threaded blind holes, where the first threaded hole 1113 a and the second threaded hole 1113 b are disposed at a side of the upper surface 111 of the first unit 11 that is close to the first side surface 113 , and the first threaded hole 1113 a and the second threaded hole 1113 b are also disposed at the side of the upper surface 111 that is close to the first side surface 113 .
- the third threaded hole 1113 c is disposed at a side of the upper surface 111 that is close to the second side surface 114
- the fourth threaded hole 1113 d is disposed at a side of the upper surface 111 that is close to the fourth side surface 116
- the fifth threaded hole 1313 a and the sixth threaded hole 1313 b are disposed at a side of the upper surface 131 of the extension unit 13 that is close to the second side surface 134
- the third fluid flowing through hole 1312 is disposed between the fifth threaded hole 1313 a and the sixth threaded hole 1313 b
- the first lower threaded hole 1121 a and the second lower threaded hole 1121 b are formed in the lower surface 112 and close to the first bolt hole 1114 a and the second bolt hole 1114 b.
- the first bolt hole 1114 a and the second bolt hole 1114 b are both through holes extending through the upper surface 111 and the lower surface 112 . Similar to the structure of the bolt holes as described above (please refer to FIG. 1F ), a projection portion is disposed in each of the through holes, so that the through holes, i.e., the first bolt hole 1114 a and the second bolt hole 1114 b , have different diameters R 1 and R 2 , where the diameter close to the upper surface 111 is R 1 , while the diameter close to the lower surface 112 is R 2 , and R 1 is greater than R 2 .
- first bolt hole 1114 a is disposed between the first threaded hole 1113 a and the third threaded hole 1113 c
- second bolt hole 1114 b is disposed between the second threaded hole 1113 b and the fourth threaded hole 1113 d.
- the second unit 12 further includes a third locating pin hole 1211 c , a fourth locating pin hole 1211 d , a first through hole 1216 a , a second through hole 1216 b , a seventh threaded hole 1213 g and an eighth threaded hole 1213 h.
- the third locating pin hole 1211 c and the fourth locating pin hole 1211 d are disposed at a side of the upper surface 121 of the second unit 12 that is close to the first unit 11 and are both through holes extending through the upper surface 121 and the lower surface 122 .
- the seventh threaded hole 1213 g and the eighth threaded hole 1213 h are disposed at a side of the upper surface 121 of the second unit 12 that is far away from the first unit 11 .
- the seventh threaded hole 1213 g and the eighth threaded hole 1213 h are both through holes extending through the upper surface 121 and the lower surface 122 .
- the first through hole 1216 a and the second through hole 1216 b are disposed close to the third locating pin hole 1211 c and the seventh threaded hole 1213 g and close to the fourth locating pin hole 1211 d and the eighth threaded hole 1213 h , respectively.
- a second embodiment 2 b of a three-port connector of the present invention is as shown in FIG. 6 .
- the three-port connector 2 b is the same as the first embodiment 1 a as described above in other arrangements and structures, except for the upper surface 111 of the first unit 11 .
- the upper surface 111 of the first unit 11 does not include the first locating pin hole 1111 a and the second locating pin hole 1111 b , and the positions of the first threaded hole 1113 a and the second threaded hole 1113 b are changed so that the two threaded holes and the first fluid flowing through hole 1112 a are arranged in a virtual straight line.
- a connector with four ports or more than four ports of the present invention is a connector with four or more than four fluid flowing through holes as fluid inlets or fluid outlets without particular directions.
- FIG. 7A-C show a first embodiment of a connector with more than four ports of the present invention. Except that the first unit 11 further includes a fourth fluid flowing through hole 1112 c , other structures are the same with the three-port connector 2 a as described above, so only the structure of the fluid flowing through holes will be described below while other structures may not be redundantly described.
- the first fluid flowing through hole 1112 a and the second fluid flowing through hole 1112 b of the connector 3 a with more than four ports are disposed at sides of the upper surface 111 that are close to the first side surface 113 and the third side surface 115 , respectively, and the fourth fluid flowing through hole 1112 c is disposed between the first fluid flowing through hole 1112 a and the second fluid flowing through hole 1112 b and close to the second fluid flowing through hole 1112 b .
- the first fluid flowing through hole 1112 a , the second fluid flowing through hole 1112 b and the fourth fluid flowing through hole 1112 c are arranged in a virtual straight line in the upper surface 111 .
- the third fluid flowing through hole 1312 is disposed at a side of the upper surface 131 of the extension unit 13 that is close to the second side surface 134 , and the third fluid flowing through hole 1312 is arranged between the fifth threaded hole 1313 a and the sixth threaded hole 1313 b.
- a first channel 1115 a is disposed between the first fluid flowing through hole 1112 a and the fourth fluid flowing through hole 1112 c to communicate the first fluid flowing through hole 1112 a with the fourth fluid flowing through hole 1112 c .
- a second channel 1115 b is also disposed between the second fluid flowing through hole 1112 b and the third fluid flowing through hole 1312 to communicate the second fluid flowing through hole 1112 b with the third fluid flowing through hole 1312 .
- the first channel 1115 a does not communicate with the second channel 1115 b , and therefore, a structure of four ports is formed.
- the first channel 1115 a and the second channel 1115 b extend in directions perpendicular to each other. To avoid that a fluid remains in such channels when flowing therethrough, in this embodiment, such channels are both treated to have a mirror surface.
- a second embodiment 3 b of a connector with more than four ports of the present invention is as shown in FIG. 8 .
- the connector 3 b with more than four ports other arrangements and structures are all the same, except that the upper surface 111 of the first unit 11 is different from that of the first embodiment.
- a third embodiment 3 c of a connector with more than four ports of the present invention is as shown in FIG. 9A-F .
- a first unit 11 , a second unit 12 and an extension unit 13 are included in the connector 3 c with more than four ports.
- the first unit 11 has an upper surface 111 , a lower surface 112 opposite to the upper surface 111 , and a first side surface 113 , a second side surface 114 , a third side surface 115 and a fourth side surface 116 that are connected to the upper surface 111 and the lower surface 112 , respectively.
- the first side surface 113 is disposed corresponding to the third side surface 115
- the second side surface 114 is disposed corresponding to the fourth side surface 116 .
- the second unit 12 includes a second mounting block 12 a and a second depression portion 12 b .
- the second mounting block 12 a protrudes from a portion of the lower surface 112 of the first unit 11 , and due to the existence of the second mounting block 12 a , the other portion of the lower surface 112 of the first unit 11 is depressed inwards into a second depression portion 12 b that is adjacent between the other portion of the lower surface 112 and the second mounting block 12 a , as shown in FIG. 9E .
- the second unit 12 is provided with a lower surface 122 , and a first side surface 123 , a second side surface 124 , a third side surface 125 and a fourth side surface 126 that are separately connected to the lower surface 122 .
- the first side surface 123 is disposed corresponding to the third side surface 125
- the second side surface 124 is disposed corresponding to the fourth side surface 126 .
- the extension unit 13 protrudes outwards from one side ends of the first unit 11 and the second unit 12 that are close to the second side surfaces 114 , 124 .
- the side ends are different from the protruding end of the second mounting block 12 a .
- the extension unit 13 includes an upper surface 131 , a lower surface 132 opposite to the upper surface 131 , and a first side surface 133 , a second side surface 134 and a third side surface 135 that are connected to the upper surface 131 and the lower surface 132 , respectively.
- the first side surface 133 is disposed corresponding to the third side surface 135 .
- a first arc-like recess portion 21 is formed between the first side surface 133 of the extension unit 13 and the second side surface 114 of the first unit 11 .
- a second arc-like recess portion 22 is formed between the third side surface 135 of the extension unit 13 and the second side surface 114 of the first unit 11 , and a third arc-like recess portion 23 is formed between the third side surface 115 and the second side surface 124 of the second unit 12 .
- the first unit 11 , the second unit 12 and the extension unit 13 are of an integrally formed structure.
- the area of the second unit 12 is smaller than that of the first unit 11 , so that the third side surface 115 of the first unit 11 is flush with the third side surface 125 of the second unit 12 to form a flat surface.
- the first unit 11 further includes a first locating pin hole 1111 a , a second locating pin hole 1111 b , a first fluid flowing through hole 1112 a , a second fluid flowing through hole 1112 b , a fourth fluid flowing through hole 1112 c , a fifth fluid flowing through hole 1112 d , a sixth fluid flowing through hole 1112 e , a first threaded hole 1113 a , a second threaded hole 1113 b , a third threaded hole 1113 c , a fourth threaded hole 1113 d , a seventh threaded hole 1113 e , an eighth threaded hole 1113 f , a ninth threaded hole 1113 g , a tenth threaded hole 1113 h , a first lower threaded hole 1121 a , a second lower threaded hole 1121 b , a first bolt hole 1114 a , and a second bolt hole 1114 b .
- the extension unit 13 further includes a third fluid flowing through hole 1312 , a fifth threaded hole 1313 a , and a sixth threaded hole 1313 b .
- the first locating pin hole 1111 a and the second locating pin hole 1111 b are both disposed at a side of the upper surface 111 that is close to the first side surface 113 and are both through holes extending through the upper surface 111 and the lower surface 112 .
- the first fluid flowing through hole 1112 a and the second fluid flowing through hole 1112 b are disposed at sides of the upper surface 111 that are close to the first side surface 113 and the third side surface 115 , respectively.
- the third fluid flowing through hole 1312 is disposed at a side of the upper surface 131 of the extension unit 13 that is close to the second side surface 134 .
- the fourth fluid flowing through hole 1112 c is disposed between the first fluid flowing through hole 1112 a and the second fluid flowing through hole 1112 b .
- the fifth fluid flowing through hole 1112 d is disposed between the first fluid flowing through hole 1112 a and the fourth fluid flowing through hole 1112 c .
- the sixth fluid flowing through hole 1112 e is disposed between the fourth fluid flowing through hole 1112 c and the second fluid flowing through hole 1112 b .
- the first fluid flowing through hole 1112 a , the second fluid flowing through hole 1112 b , the fourth fluid flowing through hole 1112 c , the fifth fluid flowing through hole 1112 d and the sixth fluid flowing through hole 1112 e are arranged in a virtual straight line.
- a first channel 1115 a is disposed between the first fluid flowing through hole 1112 a and the fifth fluid flowing through hole 1112 d to communicate the first fluid flowing through hole 1112 a with the fifth fluid flowing through hole 1112 d
- a second channel 1115 b is also disposed between the second fluid flowing through hole 1112 b and the sixth fluid flowing through hole 1112 e to communicate the second fluid flowing through hole 1112 b with the sixth fluid flowing through hole 1112 e
- a third channel 1115 c is disposed between the third fluid flowing through hole 1312 and the fourth fluid flowing through hole 1112 c to communicate the third fluid flowing through hole 1312 with the fourth fluid flowing through hole 1112 c .
- the first channel 1115 a , the second channel 1115 b and the third channel 1115 c do not communicate with each other, and therefore, a structure of six ports is formed. Additionally, the first channel 1115 a and the second channel 1115 b extend in directions parallel to each other, and the first channel 1115 a and the third channel 1115 c extend in directions perpendicular to each other. Furthermore, to avoid that a fluid remains in such channels when flowing therethrough, in this embodiment, such channels are all treated to have a mirror surface.
- the first threaded hole 1113 a , the second threaded hole 1113 b , the third threaded hole 1113 c , the fourth threaded hole 1113 d , the fifth threaded hole 1313 a , the sixth threaded hole 1313 b , the seventh threaded hole 1113 e , the eighth threaded hole 1113 f , the ninth threaded hole 1113 g , the tenth threaded hole 1113 h , the first lower threaded hole 1121 a and the second lower threaded hole 1121 b are all threaded blind holes.
- the first threaded hole 1113 a and the second threaded hole 1113 b are disposed at a side of the upper surface 111 that is close to the first side surface 113
- the first locating pin hole 1111 a and the second locating pin hole 1111 b are disposed between the first threaded hole 1113 a and the second threaded hole 1113 b and the side of the upper surface 111 that is close to the first side surface 113 , respectively.
- the third threaded hole 1113 c and the ninth threaded hole 1113 g are both disposed at a side of the upper surface 111 that is close to the second side surface 114 , and the fifth threaded hole 1313 a and the sixth threaded hole 1313 b are disposed in the upper surface 131 of the extension unit 13 next to the second side surface 134 . More particularly, the third threaded hole 1113 c is disposed close to the first arc-like recess portion 21 , and the ninth threaded hole 1113 g is disposed close to the second arc-like recess portion 22 . Moreover, the third fluid flowing through hole 1312 is disposed between the fifth threaded hole 1313 a and the sixth threaded hole 1313 b.
- the seventh threaded hole 1113 e and the eighth threaded hole 1113 f are disposed at a side of the first unit 11 that is close to the third side surface 115 , so that the second fluid flowing through hole 1112 b is disposed between the seventh threaded hole 1113 e and the eighth threaded hole 1113 f.
- the fourth threaded hole 1113 d and the tenth threaded hole 1113 h are close to the fourth side surface 116 and disposed between the second threaded hole 1113 b and the eighth threaded hole 1113 f , where the fourth threaded hole 1113 d is disposed close to the second threaded hole 1113 b , and the tenth threaded hole 1113 h is disposed close to the eighth threaded hole 1113 f .
- the first lower threaded hole 1121 a and the second lower threaded hole 1121 b are disposed in the lower surface 112 and close to the first bolt hole 1114 a and the second bolt hole 1114 b.
- the first bolt hole 1114 a and the second bolt hole 1114 b are both through holes extending through the upper surface 111 and the lower surface 112 , and a projection portion is disposed in each of the through holes, so that the through holes, i.e., the first bolt hole 1114 a and the second bolt hole 1114 b , have different diameters R 1 and R 2 , where the diameter close to the upper surface 111 is R 1 , while the diameter close to the lower surface 112 is R 2 , and R 1 is greater than R 2 (please refer to FIG. 1F for the structure of the bolt holes).
- first bolt hole 1114 a is disposed between the first threaded hole 1113 a and the third threaded hole 1113 c
- second bolt hole 1114 b is disposed between the second threaded hole 1113 b and the fourth threaded hole 1113 d.
- a connecting piece is used for connecting the two-port connector, the three-port connector and the connector with more than four ports as described above and a pipe, and in the present invention, two embodiments of the connecting piece will be illustrated as examples.
- the connecting piece 4 a has a first unit and a second unit.
- the first unit has an upper surface 111 , a lower surface (not shown) opposite to the upper surface 111 , and a first side surface 113 , a second side surface 114 , a third side surface 115 and a fourth side surface (not shown) that are connected to the upper surface 111 and the lower surface, respectively.
- the first side surface is disposed corresponding to the third side surface 115
- the second side surface 114 is disposed corresponding to the fourth side surface (not shown).
- the upper surface 111 of the first unit includes a first through hole 1116 a , a second through hole 1116 b , and a first fluid flowing through hole 1112 a , where the first fluid flowing through hole 1112 a is disposed between the first through hole 1116 a and the second through hole 1116 b.
- first through hole 1116 a and the second through hole 1116 b extend through the upper surface 111 and the lower surface (not shown), respectively, and the first fluid flowing through hole 1112 a has an open end 1141 located in the second side surface 114 .
- the second unit is an element with a hollow tubular structure and includes an inner surface 127 and an outer surface 128 , and an end of the second unit communicates with the open end 1141 of the first fluid flowing through hole 1112 a.
- a second embodiment 4 b of a connecting piece of the present invention is as shown in FIG. 11A to FIG. 11B .
- the connecting piece 4 b includes only a first unit that has an upper surface 111 and a lower surface 112 opposite to the upper surface 111 .
- the upper surface 111 of the first unit 11 includes a first through hole 1116 a , a second through hole 1116 b , and a groove 1117 that is disposed between the first through hole 1116 a and the second through hole 1116 b.
- the first through hole 1116 a and the second through hole 1116 b are through holes extending through the upper surface 111 and the lower surface (not shown), respectively, and the groove 1117 has a projection, allowing the groove 1117 to have different diameters, where the diameter close to the upper surface 111 is greater than the diameter close to the lower surface 112 .
- a fluid control device mainly includes a base, a plurality of connecting blocks, and a plurality of fluid control elements.
- the plurality of connecting blocks are at least two selected from the two-port connector, the three-port connector and the connector with more than four ports as described above and thus are adjacent to each other.
- the filter may be connected to two two-port connectors of the same or different embodiments; or alternatively, the filter may be connected to a two-port connector and a three-port connector.
- one of two connectors may be selected as the two-port connector, and the other may be the two-port connector, the three-port connector, the connector with more than four ports, or the connecting piece.
- one of two connectors may be selected as the three-port connector, and the other may be the two-port connector, the three-port connector, the connector with more than four ports, or the connecting piece.
- the fourth embodiment 1 d of the two-port connector is suitable for use at an end of a plurality of connectors, i.e., one side of the fourth embodiment 1 d of the two-port connector is connected to another connector, while there is no connector at the other side.
- a fluid control device of the present invention includes a base 20 , a plurality of connecting blocks and a plurality of fluid control elements.
- the plurality of connecting blocks include a two-port connector 1 d , a two-port connector 1 c , and a connector 3 a with more than four ports.
- the plurality of fluid control elements include a gas inlet element 103 , a hand-operated valve 104 and a first two-port shut-off valve 105 a .
- the plurality of connecting blocks are disposed on the base 20 and are stacked upon one another and assembled transversely, and the plurality of fluid control elements are disposed on the connecting blocks.
- the fluid control device further includes a plurality of sealing plates 30 that are placed between the fluid control elements and the connecting blocks and provided with a plurality of fluid through holes 31 , a plurality of locating holes 32 , and gaskets 33 disposed in the fluid through holes 31 .
- the base 20 may be made be made of a metal and include a plurality of locating grooves 201 . Assembling of the plurality of connecting blocks will be illustrated with the two-port connector 1 c and the two-port connector 1 d by referring to FIG. 12C .
- the second tongue portion 12 c of the second unit 12 of the two-port connector 1 c is disposed in the second depression portion 12 b of the second unit 12 of the two-port connector 1 d , so that the third side surface 125 of the second unit 12 of the two-port connector 1 d is abutted against the first side surface 123 of the second unit 12 of the two-port connector 1 c .
- the first locating pin hole 1211 a , the second locating pin hole 1211 b , the first through hole 1216 a , the second through hole 1216 b , the fifth threaded hole 1213 e and the sixth threaded hole 1213 f of the two-port connector 1 d are aligned to the first locating pin hole 1111 a , the second locating pin hole 1111 b , the first lower threaded hole 1121 a , the second lower threaded hole 1121 b , the first bolt hole 1114 a and the second bolt hole 1114 b of the two-port connector 1 c , respectively.
- Two first fasteners 40 a extend through the first locating pin hole 1211 a and the first locating pin hole 1111 a , and the second locating pin hole 1211 b and the second locating pin hole 1111 b , respectively, so that the two-port connector 1 d and the two-port connector 1 c are positioned to each other.
- Two second fasteners 40 b are put through the first through hole 1216 a and the first lower threaded hole 1121 a , and the second through hole 1216 b and the second lower threaded hole 1121 b from the locating groove 201 of the base 20 , respectively, so that the two-port connector 1 d and the two-port connector 1 c are fixed to the base 20 .
- Two third fasteners 40 c extend through the first bolt hole 1114 a and the fifth threaded hole 1213 e , and the second bolt hole 1114 b and the sixth threaded hole 1213 f , respectively, so that the two-port connector 1 d and the two-port connector 1 c are locked to each other.
- Four fourth fasteners 40 d run through a through hole of the hand-operated valve 104 and the locating holes 32 of the sealing plates 30 to be locked in the third threaded hole 1113 c and the fourth threaded hole 1113 d of the two-port connector 1 c and the third threaded hole 1113 c and the fourth threaded hole 1113 d of the two-port connector 1 d .
- the first fasteners 40 a are plug pins
- the second fasteners 40 b , the third fasteners 40 c and the fourth fasteners 40 d are bolts.
- a plurality of fifth fasteners 40 e run through a through hole of the gas inlet element 103 to be locked in the first threaded hole 1113 a and the second threaded hole 1113 b of the two-port connector 1 d.
- FIG. 13 it is a schematic diagram of a fluid control device of an embodiment of the present invention.
- the fluid control device includes a base 20 , a connector module 1 , and a fluid control element module 100 .
- the fluid control element module 100 includes a plurality of fluid control elements.
- the fluid control elements to be disposed in the fluid control device from a direction where a gas enters toward a direction where the gas exits are sequentially as follows: a gas inlet element 103 , a hand-operated valve 104 , a first two-port shut-off valve 105 a , a first three-port shut-off valve 106 a , a high-cleanness pressure regulator valve 107 , a pressure sensor 108 , a filter 109 , a second two-port shut-off valve, a mass flow controller 110 , a second three-port shut-off valve 106 b , and a third two-port shut-off valve 105 c.
- the connector module 1 includes a plurality of connecting blocks that are arranged in an axial direction.
- Each of the plurality of connecting blocks includes an upper half portion U and a lower half portion L.
- the upper half portion U includes at least one fluid inlet, at least one fluid outlet, and at least one connecting channel C that communicates the fluid inlet with the fluid outlet and extends in a horizontal direction
- the lower half portion L has a depression portion and a tongue portion extending and protruding far away from the depression portion in the axial direction.
- the connecting channel C is above an upper surface P of the tongue portion, and the connecting channel C is separated from a bottom surface of the connecting block by a height.
- Adjacent connecting blocks are connected to each other by accommodating the tongue portion in the depression portion.
- the upper half portion U has a longitudinally penetrating upper fixing hole
- the lower half portion L has a lower fixing hole longitudinally penetrating through the tongue portion and corresponding to the upper fixing hole.
- Adjacent connecting blocks are fixed to each other by putting at least one fastener through the upper fixing hole and the lower fixing hole.
- the third fasteners 40 c run through the first bolt hole 1114 a and the fifth threaded hole 1213 e , respectively.
- the fluid inlet, the fluid outlet and the connecting channel C form a U-shaped channel extending through a single connecting block.
- the connector module 1 includes a plurality of connecting blocks that are arranged in an axial direction.
- Each of the plurality of connecting blocks includes at least one fluid inlet, at least one fluid outlet, and at least one connecting channel C that communicates the fluid inlet with the fluid outlet and extends in a horizontal direction to be separated from a bottom surface of the connecting block by a height, where a protruding first tongue portion is formed at one end of the connecting block, while a depression portion is formed at the other end thereof.
- Adjacent connecting blocks are connected to each other by accommodating the first tongue portion in the depression portion.
- the protruding direction of the tongue portion is parallel to the axial direction.
- the first tongue portion has a longitudinally penetrating first fixing hole.
- a protruding second tongue portion is further formed at the other end of the connecting block, and the second tongue portion has a longitudinally penetrating second fixing hole.
- Adjacent connecting blocks are fixed to each other by putting a fastener through the first fixing hole and the second fixing hole.
- the fluid inlet, the fluid outlet and the connecting channel C form a U-shaped channel extending through a single connecting block.
- the fluid control element is disposed above the base 20 and the connector module 1 , and has an outlet O and an inlet I.
- the outlet O and the inlet I are connected to the fluid inlet of the connecting block and the fluid outlet of the adjacent connecting block.
- the connector module 1 allows the fluid control element to be fastened to the base 20 , and includes a plurality of connectors.
- Connectors used in FIG. 12 from a direction where a gas enters toward a direction where the gas exits are sequentially as follows: the two-port connector 1 d , the two-port connector 1 c , the connector 3 a with more than four ports, the two-port connector 1 d , the two-port connector 1 d , the two-port connector 1 d , the two-port connector 1 d , the two-port connector 1 a , the two-port connector 1 a , the connector 3 a with more than four ports, and the connector 3 b with more than four ports.
- such connectors are stacked upon one another through the first units thereof and the second units of adjacent connectors to achieve the purpose of simple assembling and disassembling.
- a gas can flow between such connectors and the fluid control element, thereby reducing the risks of gas leakage.
Abstract
Description
Claims (7)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16/207,715 US10982694B2 (en) | 2017-12-05 | 2018-12-03 | Fluid control device and connector for fluid control device |
US17/206,956 US11280355B2 (en) | 2017-12-05 | 2021-03-19 | Fluid control device and connector for fluid control device |
US17/207,001 US11286963B2 (en) | 2017-12-05 | 2021-03-19 | Fluid control device and connector for fluid control device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201762594805P | 2017-12-05 | 2017-12-05 | |
US16/207,715 US10982694B2 (en) | 2017-12-05 | 2018-12-03 | Fluid control device and connector for fluid control device |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US17/206,956 Division US11280355B2 (en) | 2017-12-05 | 2021-03-19 | Fluid control device and connector for fluid control device |
US17/207,001 Division US11286963B2 (en) | 2017-12-05 | 2021-03-19 | Fluid control device and connector for fluid control device |
Publications (2)
Publication Number | Publication Date |
---|---|
US20190170164A1 US20190170164A1 (en) | 2019-06-06 |
US10982694B2 true US10982694B2 (en) | 2021-04-20 |
Family
ID=66657922
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US16/207,715 Active 2039-01-21 US10982694B2 (en) | 2017-12-05 | 2018-12-03 | Fluid control device and connector for fluid control device |
US17/206,956 Active US11280355B2 (en) | 2017-12-05 | 2021-03-19 | Fluid control device and connector for fluid control device |
US17/207,001 Active US11286963B2 (en) | 2017-12-05 | 2021-03-19 | Fluid control device and connector for fluid control device |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US17/206,956 Active US11280355B2 (en) | 2017-12-05 | 2021-03-19 | Fluid control device and connector for fluid control device |
US17/207,001 Active US11286963B2 (en) | 2017-12-05 | 2021-03-19 | Fluid control device and connector for fluid control device |
Country Status (3)
Country | Link |
---|---|
US (3) | US10982694B2 (en) |
CN (3) | CN209130253U (en) |
TW (1) | TWI705210B (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20230139688A1 (en) * | 2021-10-29 | 2023-05-04 | Applied Materials, Inc. | Modular multi-directional gas mixing block |
WO2023172558A1 (en) * | 2022-03-10 | 2023-09-14 | Applied Materials, Inc. | Modular multl-directional gas mixing block |
Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3072148A (en) * | 1956-04-09 | 1963-01-08 | Carls William | Valve housing mount and manifold |
US3457943A (en) * | 1966-09-14 | 1969-07-29 | Kuroda Gauge Mfg | Manifold pedestal |
US3504704A (en) * | 1968-04-29 | 1970-04-07 | Beckett Harcum Co | Valve and control assembly |
US3680589A (en) * | 1969-06-19 | 1972-08-01 | Newmark Ltd Louis | Mounting block for fluid control valve |
US3756274A (en) * | 1971-04-21 | 1973-09-04 | Bosch Gmbh Robert | Connection element for construction of a base plate for hydraulic devices |
US3817269A (en) * | 1969-08-22 | 1974-06-18 | Int Basic Economy Corp | Integrated manifold circuits |
US4711268A (en) * | 1986-01-28 | 1987-12-08 | Coleman Edward R | Valve manifold |
US4748897A (en) * | 1986-09-05 | 1988-06-07 | Hoge Ned W | Subbase for a pneumatic control assembly for a pneumatic cylinder |
US5709247A (en) * | 1995-12-15 | 1998-01-20 | Hutton; Peter B. | Multiple valve manifold for use with a pressure processing apparatus |
USD410398S (en) * | 1997-12-04 | 1999-06-01 | Hutton Peter B | Manifold |
US5964481A (en) * | 1998-07-10 | 1999-10-12 | Buch; Dana | Modular mounting apparatus for fluid control components |
US6415822B1 (en) * | 1998-06-12 | 2002-07-09 | J. Gregory Hollingshead | Modular chemical delivery blocks |
USD578549S1 (en) * | 2007-12-18 | 2008-10-14 | Pgi International, Ltd. | 5 Valve port pipe by pipe manifold |
US20150075660A1 (en) | 2012-04-27 | 2015-03-19 | Fujikin Incorporated | Fluid control apparatus |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6394138B1 (en) | 1996-10-30 | 2002-05-28 | Unit Instruments, Inc. | Manifold system of removable components for distribution of fluids |
US7806143B2 (en) * | 2007-06-11 | 2010-10-05 | Lam Research Corporation | Flexible manifold for integrated gas system gas panels |
JP6630496B2 (en) * | 2015-05-29 | 2020-01-15 | 株式会社フジキン | Manifold block and fluid control device |
-
2018
- 2018-12-03 US US16/207,715 patent/US10982694B2/en active Active
- 2018-12-05 TW TW107143713A patent/TWI705210B/en active
- 2018-12-05 CN CN201822033495.4U patent/CN209130253U/en active Active
- 2018-12-05 CN CN201822032666.1U patent/CN209261949U/en active Active
- 2018-12-05 CN CN201822032659.1U patent/CN209129955U/en active Active
-
2021
- 2021-03-19 US US17/206,956 patent/US11280355B2/en active Active
- 2021-03-19 US US17/207,001 patent/US11286963B2/en active Active
Patent Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3072148A (en) * | 1956-04-09 | 1963-01-08 | Carls William | Valve housing mount and manifold |
US3457943A (en) * | 1966-09-14 | 1969-07-29 | Kuroda Gauge Mfg | Manifold pedestal |
US3504704A (en) * | 1968-04-29 | 1970-04-07 | Beckett Harcum Co | Valve and control assembly |
US3680589A (en) * | 1969-06-19 | 1972-08-01 | Newmark Ltd Louis | Mounting block for fluid control valve |
US3817269A (en) * | 1969-08-22 | 1974-06-18 | Int Basic Economy Corp | Integrated manifold circuits |
US3756274A (en) * | 1971-04-21 | 1973-09-04 | Bosch Gmbh Robert | Connection element for construction of a base plate for hydraulic devices |
US4711268A (en) * | 1986-01-28 | 1987-12-08 | Coleman Edward R | Valve manifold |
US4748897A (en) * | 1986-09-05 | 1988-06-07 | Hoge Ned W | Subbase for a pneumatic control assembly for a pneumatic cylinder |
US5709247A (en) * | 1995-12-15 | 1998-01-20 | Hutton; Peter B. | Multiple valve manifold for use with a pressure processing apparatus |
USD410398S (en) * | 1997-12-04 | 1999-06-01 | Hutton Peter B | Manifold |
US6415822B1 (en) * | 1998-06-12 | 2002-07-09 | J. Gregory Hollingshead | Modular chemical delivery blocks |
US5964481A (en) * | 1998-07-10 | 1999-10-12 | Buch; Dana | Modular mounting apparatus for fluid control components |
USD578549S1 (en) * | 2007-12-18 | 2008-10-14 | Pgi International, Ltd. | 5 Valve port pipe by pipe manifold |
US20150075660A1 (en) | 2012-04-27 | 2015-03-19 | Fujikin Incorporated | Fluid control apparatus |
Also Published As
Publication number | Publication date |
---|---|
CN209261949U (en) | 2019-08-16 |
CN209130253U (en) | 2019-07-19 |
CN209129955U (en) | 2019-07-19 |
TW201925659A (en) | 2019-07-01 |
US11280355B2 (en) | 2022-03-22 |
US20190170164A1 (en) | 2019-06-06 |
TWI705210B (en) | 2020-09-21 |
US20210207623A1 (en) | 2021-07-08 |
US20210207624A1 (en) | 2021-07-08 |
US11286963B2 (en) | 2022-03-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US11280355B2 (en) | Fluid control device and connector for fluid control device | |
US9879795B2 (en) | Additively manufactured gas distribution manifold | |
US8281816B2 (en) | Fluid control apparatus | |
US6640835B1 (en) | Micromount™ system | |
JP6560224B2 (en) | Screw connection | |
JP4445918B2 (en) | Gasket for fluid | |
CN106870856B (en) | Cube type quasi-equal flow rate hydraulic pipeline series multi-way connecting block capable of being fixedly connected | |
TW200415116A (en) | Modular surface mount fluid system | |
CN103765062A (en) | Ball valve with offset straight through flow | |
US20100258207A1 (en) | Flow-optimized valve sub-base | |
KR101952797B1 (en) | Gasket retainer for surface mount fluid component | |
JP2003177081A (en) | Modulator surface-mount fluid-flow system | |
JP2003526759A (en) | Modular surface mount manifold assembly | |
KR102308335B1 (en) | Fluid control devices and connectors for fluid control devices | |
US20210125842A1 (en) | Conversion Joint, Integrated Fluid Supply Device Having Said Conversion Joint, and Method for Mounting a Fluid Part | |
JP5437779B2 (en) | Fluid device | |
JP2008298177A (en) | Fluid control device | |
WO1994028367A1 (en) | Heat exchanger | |
JP4971002B2 (en) | Fluid equipment unit | |
JP5009081B2 (en) | Fluid device connection structure and fluid device unit including the connection structure | |
JP4413696B2 (en) | Chemical solution supply unit | |
CN117307837A (en) | Clamp for nut rotation and screw rotation method | |
RU2004125479A (en) | THREE-WAY VALVE WITH INDEPENDENT FOUR-TURN OUTLETS |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
FEPP | Fee payment procedure |
Free format text: ENTITY STATUS SET TO UNDISCOUNTED (ORIGINAL EVENT CODE: BIG.); ENTITY STATUS OF PATENT OWNER: SMALL ENTITY |
|
AS | Assignment |
Owner name: SIW ENGINEERING PTE. LTD., SINGAPORE Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:CHAN, CHEE-WEI;REEL/FRAME:047758/0024 Effective date: 20181107 |
|
FEPP | Fee payment procedure |
Free format text: ENTITY STATUS SET TO SMALL (ORIGINAL EVENT CODE: SMAL); ENTITY STATUS OF PATENT OWNER: SMALL ENTITY |
|
STPP | Information on status: patent application and granting procedure in general |
Free format text: DOCKETED NEW CASE - READY FOR EXAMINATION |
|
STPP | Information on status: patent application and granting procedure in general |
Free format text: NON FINAL ACTION MAILED |
|
STPP | Information on status: patent application and granting procedure in general |
Free format text: NOTICE OF ALLOWANCE MAILED -- APPLICATION RECEIVED IN OFFICE OF PUBLICATIONS |
|
STPP | Information on status: patent application and granting procedure in general |
Free format text: PUBLICATIONS -- ISSUE FEE PAYMENT RECEIVED |
|
STPP | Information on status: patent application and granting procedure in general |
Free format text: PUBLICATIONS -- ISSUE FEE PAYMENT VERIFIED |
|
STCF | Information on status: patent grant |
Free format text: PATENTED CASE |
|
AS | Assignment |
Owner name: BHT SERVICES PTE. LTD., SINGAPORE Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:SIW ENGINEERING PTE. LTD.;REEL/FRAME:064654/0321 Effective date: 20230701 |