JP2013191666A - 半導体装置およびその製造方法 - Google Patents
半導体装置およびその製造方法 Download PDFInfo
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- JP2013191666A JP2013191666A JP2012055693A JP2012055693A JP2013191666A JP 2013191666 A JP2013191666 A JP 2013191666A JP 2012055693 A JP2012055693 A JP 2012055693A JP 2012055693 A JP2012055693 A JP 2012055693A JP 2013191666 A JP2013191666 A JP 2013191666A
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- film
- silicon nitride
- gate electrode
- nitride film
- silicon
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Abstract
【解決手段】半導体基板1の上部に絶縁膜5を介してメモリゲート電極MGが形成されている。絶縁膜5は、内部に電荷蓄積部を有する絶縁膜であり、酸化シリコン膜5aと、酸化シリコン膜5a上の窒化シリコン膜5bと、窒化シリコン膜5b上の酸化シリコン膜5cとを有している。そして、窒化シリコン膜5bと酸化シリコン膜5cとの間、または窒化シリコン膜5b中に、1×1013〜2×1014原子/cm2の面密度で金属元素が存在している。
【選択図】図2
Description
本実施の形態および以下の実施の形態の半導体装置は、不揮発性メモリ(不揮発性記憶素子、フラッシュメモリ、不揮発性半導体記憶装置)を備えた半導体装置である。本実施の形態および以下の実施の形態では、不揮発性メモリは、nチャネル型MISFET(MISFET:Metal Insulator Semiconductor Field Effect Transistor)を基本としたメモリセルをもとに説明を行う。また、本実施の形態および以下の実施の形態での極性(書込・消去・読出時の印加電圧の極性やキャリアの極性)は、nチャネル型MISFETを基本としたメモリセルの場合の動作を説明するためのものであり、pチャネル型MISFETを基本とする場合は、印加電位やキャリアの導電型等の全ての極性を反転させることで、原理的には同じ動作を得ることができる。
図31は、本実施の形態の半導体装置の要部断面図であり、上記実施の形態1の上記図2に対応するものである。
1A メモリセル領域
1B 周辺回路領域
2 素子分離領域
3 絶縁膜
4 シリコン膜
5 絶縁膜
5a,5c 酸化シリコン膜
5b,5b1,5b2 窒化シリコン膜
6 メタルドット
7 シリコン膜
8a,8b,8c n−型半導体領域
9a,9b,9c n+型半導体領域
10 金属膜
11 金属シリサイド層
21 バンドギャップ
22,23 電子捕獲準位
31,31a,31b 絶縁膜
CG 制御ゲート電極
CNT コンタクトホール
IL1 層間絶縁膜
IL2 絶縁膜
M1 配線
MC メモリセル
MD,MS 半導体領域
MG メモリゲート電極
PG プラグ
PW1,PW2 p型ウエル
SP1 シリコンスペーサ
SW サイドウォールスペーサ
Claims (17)
- 半導体基板と、
前記半導体基板の上部に形成された第1ゲート電極と、
前記第1ゲート電極と前記半導体基板との間に形成された第1絶縁膜であって、その内部に電荷蓄積部を有する前記第1絶縁膜と、
を有し、
前記第1絶縁膜は、第1酸化シリコン膜と、前記第1酸化シリコン膜上の窒化シリコン膜と、前記窒化シリコン膜上の第2酸化シリコン膜とを有し、
前記窒化シリコン膜と前記第2酸化シリコン膜との間、または前記窒化シリコン膜中に、1×1013〜2×1014原子/cm2の面密度で金属元素が存在していることを特徴とする半導体装置。 - 請求項1記載の半導体装置において、
前記窒化シリコン膜と前記第2酸化シリコン膜との間、または前記窒化シリコン膜中に、前記金属元素からなる複数のメタルドットが形成されていることを特徴とする半導体装置。 - 請求項2記載の半導体装置において、
前記窒化シリコン膜と前記第2酸化シリコン膜との間に、前記複数のメタルドットが形成されていることを特徴とする半導体装置。 - 請求項3記載の半導体装置において、
前記金属元素は、チタン、ニッケル、タングステン、またはタンタルであることを特徴とする半導体装置。 - 請求項4記載の半導体装置において、
前記金属元素は、チタンであることを特徴とする半導体装置。 - 請求項5記載の半導体装置において、
前記半導体基板の上部に形成され、前記第1ゲート電極と隣合う第2ゲート電極と、
前記第2ゲート電極と前記半導体基板との間に形成された第2絶縁膜と、
を更に有し、
前記第1絶縁膜は、前記第2ゲート電極と前記半導体基板との間および前記第1ゲート電極と前記第2ゲート電極との間に形成されていることを特徴とする半導体装置。 - 請求項2記載の半導体装置において、
前記複数のメタルドットは、前記窒化シリコン膜中に形成されていることを特徴とする半導体装置。 - 請求項7記載の半導体装置において、
前記窒化シリコン膜は、前記第1酸化シリコン膜上に形成された第1窒化シリコン膜と、前記第1窒化シリコン膜上に形成された第2窒化シリコン膜とを有し、
前記複数のメタルドットは、前記第1窒化シリコン膜と前記第2窒化シリコン膜との間に形成されていることを特徴とする半導体装置。 - 半導体基板と、
前記半導体基板の上部に形成され、互いに隣合う第1ゲート電極および第2ゲート電極と、
前記第1ゲート電極と前記半導体基板との間に形成され、内部に電荷蓄積部を有する第1ゲート絶縁膜と、
前記第1ゲート電極と前記半導体基板との間に形成された第2ゲート絶縁膜と、
を有する半導体装置の製造方法であって、
(a)前記半導体基板を用意する工程、
(b)前記半導体基板の主面に前記第2ゲート絶縁膜用の第2絶縁膜を形成する工程、
(c)前記第2絶縁膜上に前記第2ゲート電極用の第2導電体膜を形成する工程、
(d)前記第2導電体膜をパターニングして前記第2ゲート電極を形成する工程、
(e)前記半導体基板の主面と前記第2ゲート電極の表面に、前記第1ゲート絶縁膜用でかつ内部に電荷蓄積部を有する第1絶縁膜を形成する工程、
(f)前記第1絶縁膜上に前記第1ゲート電極用の第1導電体膜を形成する工程、
(g)前記第1導電体膜をエッチバックすることで、前記第2ゲート電極の側壁上に前記第1絶縁膜を介して前記第1導電体膜を残して前記第1ゲート電極を形成する工程、
を有し、
前記第1絶縁膜は、第1酸化シリコン膜と、前記第1酸化シリコン膜上の窒化シリコン膜と、前記窒化シリコン膜上の第2酸化シリコン膜とを有し、
前記窒化シリコン膜と前記第2酸化シリコン膜との間、または前記窒化シリコン膜中に、1×1013〜2×1014原子/cm2の面密度で金属元素が存在していることを特徴とする半導体装置の製造方法。 - 請求項9記載の半導体装置の製造方法において、
前記(e)工程は、
(e1)前記半導体基板の主面と前記第2ゲート電極の表面に、前記第1酸化シリコン膜を形成する工程、
(e2)前記第1酸化シリコン膜上に前記窒化シリコン膜を形成する工程、
(e3)前記(e2)工程後、前記窒化シリコン膜上に、1×1013〜2×1014原子/cm2の面密度で前記金属元素を堆積する工程、
(e4)前記(e3)工程後、前記窒化シリコン膜上に、前記第2酸化シリコン膜を形成する工程、
を有することを特徴とする半導体装置の製造方法。 - 請求項10記載の半導体装置の製造方法において、
前記(e3)工程では、スパッタリング法またはALD法により前記金属元素を堆積することを特徴とする半導体装置の製造方法。 - 請求項11記載の半導体装置の製造方法において、
前記(e3)工程では、スパッタリング法により前記金属元素を堆積することを特徴とする半導体装置の製造方法。 - 請求項12記載の半導体装置の製造方法において、
前記(e3)工程では、前記窒化シリコン膜上に、前記金属元素からなる複数のメタルドットが形成され、
前記(e4)工程では、前記第1窒化シリコン膜上に、前記複数のメタルドットを覆うように、前記第2酸化シリコン膜が形成されることを特徴とする半導体装置の製造方法。 - 請求項13記載の半導体装置の製造方法において、
前記金属元素は、チタン、ニッケル、タングステン、またはタンタルであることを特徴とする半導体装置の製造方法。 - 請求項14記載の半導体装置の製造方法において、
前記金属元素は、チタンであることを特徴とする半導体装置の製造方法。 - 請求項9記載の半導体装置の製造方法において、
前記窒化シリコン膜は、第1窒化シリコン膜および前記第1窒化シリコン膜上の第2窒化シリコン膜を有し、
前記(e)工程は、
(e1)前記半導体基板の主面と前記第2ゲート電極の表面に、前記第1酸化シリコン膜を形成する工程、
(e2)前記第1酸化シリコン膜上に、前記第1窒化シリコン膜を形成する工程、
(e3)前記(e2)工程後、前記第1窒化シリコン膜上に、1×1013〜2×1014原子/cm2の面密度で前記金属元素を堆積する工程、
(e4)前記(e3)工程後、前記第1窒化シリコン膜上に、前記第2窒化シリコン膜を形成する工程、
(e5)前記第2窒化シリコン膜上に前記第2酸化シリコン膜を形成する工程、
を有することを特徴とする半導体装置の製造方法。 - 請求項16記載の半導体装置の製造方法において、
前記(e3)工程では、前記窒化シリコン膜上に、前記金属元素からなる複数のメタルドットが形成され、
前記(e4)工程では、前記第1窒化シリコン膜上に、前記複数のメタルドットを覆うように、前記第2窒化シリコン膜が形成されることを特徴とする半導体装置の製造方法。
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Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11195780A (ja) * | 1997-06-12 | 1999-07-21 | Fujitsu Ltd | 単一電子装置およびその製造方法 |
JP2004134796A (ja) * | 2002-10-14 | 2004-04-30 | Samsung Electronics Co Ltd | 非揮発性sonsnosメモリ |
JP2004349705A (ja) * | 2003-05-20 | 2004-12-09 | Samsung Electronics Co Ltd | Sonosメモリ装置 |
JP2005079186A (ja) * | 2003-08-28 | 2005-03-24 | Sharp Corp | 微粒子含有体およびその製造方法、メモリ機能体、メモリ素子並びに電子機器 |
JP2006066896A (ja) * | 2004-08-24 | 2006-03-09 | Samsung Electronics Co Ltd | ナノクリスタルを有する不揮発性メモリ素子の製造方法 |
JP2008306190A (ja) * | 2007-06-11 | 2008-12-18 | Samsung Electronics Co Ltd | 不揮発性メモリ素子およびその製造方法 |
US20090045447A1 (en) * | 2007-08-17 | 2009-02-19 | Micron Technology, Inc. | Complex oxide nanodots |
JP2011018432A (ja) * | 2009-06-08 | 2011-01-27 | Renesas Electronics Corp | 不揮発性半導体集積回路装置 |
JP2011205046A (ja) * | 2010-03-26 | 2011-10-13 | Toshiba Corp | 半導体記憶装置、及びその製造方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6054349A (en) | 1997-06-12 | 2000-04-25 | Fujitsu Limited | Single-electron device including therein nanocrystals |
JP3204942B2 (ja) | 1998-06-26 | 2001-09-04 | 株式会社東芝 | 半導体装置 |
JP4058219B2 (ja) * | 1999-09-17 | 2008-03-05 | 株式会社ルネサステクノロジ | 半導体集積回路 |
US6444545B1 (en) * | 2000-12-19 | 2002-09-03 | Motorola, Inc. | Device structure for storing charge and method therefore |
JP4647175B2 (ja) | 2002-04-18 | 2011-03-09 | ルネサスエレクトロニクス株式会社 | 半導体集積回路装置 |
JP4056817B2 (ja) * | 2002-07-23 | 2008-03-05 | 光正 小柳 | 不揮発性半導体記憶素子の製造方法 |
US20060131633A1 (en) * | 2004-12-21 | 2006-06-22 | Micron Technology, Inc. | Integrated two device non-volatile memory |
US7402850B2 (en) * | 2005-06-21 | 2008-07-22 | Micron Technology, Inc. | Back-side trapped non-volatile memory device |
KR20070050657A (ko) * | 2005-11-11 | 2007-05-16 | 삼성전자주식회사 | 나노 닷을 트랩 사이트로 이용한 메모리 소자 및 그 제조방법 |
KR100745400B1 (ko) * | 2006-03-08 | 2007-08-02 | 삼성전자주식회사 | 게이트 구조 및 이를 형성하는 방법, 비휘발성 메모리 장치및 이의 제조 방법 |
KR100855993B1 (ko) * | 2007-04-03 | 2008-09-02 | 삼성전자주식회사 | 전하 트랩 플래시 메모리 소자 및 그 제조방법 |
JP5149539B2 (ja) * | 2007-05-21 | 2013-02-20 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
JP2010161154A (ja) | 2009-01-07 | 2010-07-22 | Toshiba Corp | 半導体記憶装置及びその製造方法 |
KR101337101B1 (ko) * | 2009-09-25 | 2013-12-05 | 가부시끼가이샤 도시바 | 불휘발성 반도체 메모리 |
JP5524632B2 (ja) | 2010-01-18 | 2014-06-18 | ルネサスエレクトロニクス株式会社 | 半導体記憶装置 |
CN102339833B (zh) * | 2010-07-21 | 2013-04-24 | 中国科学院微电子研究所 | 具有高速低压操作的高可靠分裂栅非挥发性存储器结构 |
-
2012
- 2012-03-13 JP JP2012055693A patent/JP5878797B2/ja not_active Expired - Fee Related
-
2013
- 2013-03-02 US US13/783,268 patent/US9105739B2/en active Active
- 2013-03-04 EP EP13157686.0A patent/EP2639818A3/en not_active Withdrawn
- 2013-03-11 TW TW102108534A patent/TWI591723B/zh active
- 2013-03-12 KR KR1020130026081A patent/KR20130105443A/ko not_active Application Discontinuation
- 2013-03-13 CN CN2013100803123A patent/CN103311286A/zh active Pending
-
2015
- 2015-07-01 US US14/789,770 patent/US9455264B2/en active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11195780A (ja) * | 1997-06-12 | 1999-07-21 | Fujitsu Ltd | 単一電子装置およびその製造方法 |
JP2004134796A (ja) * | 2002-10-14 | 2004-04-30 | Samsung Electronics Co Ltd | 非揮発性sonsnosメモリ |
JP2004349705A (ja) * | 2003-05-20 | 2004-12-09 | Samsung Electronics Co Ltd | Sonosメモリ装置 |
JP2005079186A (ja) * | 2003-08-28 | 2005-03-24 | Sharp Corp | 微粒子含有体およびその製造方法、メモリ機能体、メモリ素子並びに電子機器 |
JP2006066896A (ja) * | 2004-08-24 | 2006-03-09 | Samsung Electronics Co Ltd | ナノクリスタルを有する不揮発性メモリ素子の製造方法 |
JP2008306190A (ja) * | 2007-06-11 | 2008-12-18 | Samsung Electronics Co Ltd | 不揮発性メモリ素子およびその製造方法 |
US20090045447A1 (en) * | 2007-08-17 | 2009-02-19 | Micron Technology, Inc. | Complex oxide nanodots |
JP2011018432A (ja) * | 2009-06-08 | 2011-01-27 | Renesas Electronics Corp | 不揮発性半導体集積回路装置 |
JP2011205046A (ja) * | 2010-03-26 | 2011-10-13 | Toshiba Corp | 半導体記憶装置、及びその製造方法 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016076655A (ja) * | 2014-10-08 | 2016-05-12 | 国立研究開発法人物質・材料研究機構 | 抵抗変化素子 |
JP2017054985A (ja) * | 2015-09-10 | 2017-03-16 | 株式会社東芝 | 不揮発性半導体記憶装置 |
US9935122B2 (en) | 2015-09-10 | 2018-04-03 | Toshiba Memory Corporation | Nonvolatile semiconductor memory device having electron scattering and electron accumulation capacities in charge accumulation layer |
JP2017163108A (ja) * | 2016-03-11 | 2017-09-14 | 東芝メモリ株式会社 | 不揮発性半導体記憶装置及びその製造方法 |
US9768265B1 (en) | 2016-03-17 | 2017-09-19 | Toshiba Memory Corporation | Semiconductor memory device |
Also Published As
Publication number | Publication date |
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KR20130105443A (ko) | 2013-09-25 |
EP2639818A3 (en) | 2017-01-18 |
US9455264B2 (en) | 2016-09-27 |
US9105739B2 (en) | 2015-08-11 |
CN103311286A (zh) | 2013-09-18 |
TWI591723B (zh) | 2017-07-11 |
US20150303205A1 (en) | 2015-10-22 |
TW201344789A (zh) | 2013-11-01 |
EP2639818A2 (en) | 2013-09-18 |
JP5878797B2 (ja) | 2016-03-08 |
US20130240977A1 (en) | 2013-09-19 |
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