JP2013183064A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 38
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 34
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 149
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 149
- 239000000758 substrate Substances 0.000 claims abstract description 80
- 238000005468 ion implantation Methods 0.000 claims description 66
- 238000000034 method Methods 0.000 claims description 19
- 239000012535 impurity Substances 0.000 claims description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 238000011144 upstream manufacturing Methods 0.000 claims description 6
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 5
- 229910052698 phosphorus Inorganic materials 0.000 claims description 5
- 239000011574 phosphorus Substances 0.000 claims description 5
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 abstract description 8
- 230000006866 deterioration Effects 0.000 abstract description 4
- 239000013078 crystal Substances 0.000 description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 238000001312 dry etching Methods 0.000 description 6
- 230000015556 catabolic process Effects 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 238000000137 annealing Methods 0.000 description 3
- 230000001902 propagating effect Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000007943 implant Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000000644 propagated effect Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
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Abstract
【解決手段】実施の形態の半導体記憶装置の製造方法は、六方晶系の炭化珪素基板を準備し、炭化珪素基板にイオン注入を行い、イオン注入を行った炭化珪素基板上にエピタキシャル成長により炭化珪素膜を形成し、炭化珪素膜中にpn接合領域を形成する。
【選択図】図4
Description
本実施の形態の半導体装置の製造方法は、六方晶系の炭化珪素基板を準備し、炭化珪素基板にイオン注入を行い、イオン注入を行った炭化珪素基板上にエピタキシャル成長により炭化珪素膜を形成し、炭化珪素膜中にpn接合領域を形成する。
炭化珪素基板へのイオン注入が選択的に行われ、かつ、炭化珪素膜の厚さをd、炭化珪素基板の(0001)面からのオフ角をαとする場合に、デバイス動作に用いられるpn接合領域をエピタキシャル成長により成長する炭化珪素膜のステップフロー方向の上流側にd/tanαだけずらした領域が、イオン注入領域に包含されるようイオン注入が行なわれること以外は、第1の実施の形態と同様である。したがって、第1の実施の形態と重複する内容については記述を一部省略する。
そして、アラインメントマーク26を基準にレジスト等によりパターン形成を行い、イオン注入が選択的に、すなわち、炭化珪素基板10の所定の領域のみに行われ、イオン注入領域12を形成する。
12 イオン注入領域
14 炭化珪素膜
14a n型炭化珪素膜
14b p型炭化珪素膜
14c p+型炭化珪素膜
20 p−型層
Claims (9)
- 六方晶系の炭化珪素基板を準備し、
前記炭化珪素基板にイオン注入を行い、
イオン注入を行った前記炭化珪素基板上にエピタキシャル成長により炭化珪素膜を形成し、
前記炭化珪素膜中にpn接合領域を形成することを特徴とする半導体装置の製造方法。 - 前記炭化珪素基板へのイオン注入は、前記炭化珪素基板の基板温度が100℃以下の状態で行われることを特徴とする請求項1記載の半導体装置の製造方法。
- 前記炭化珪素基板へのイオン注入は、前記炭化珪素基板の導電型と同一導電型の不純物をイオン注入することを特徴とする請求項1または請求項2記載の半導体装置の製造方法。
- 前記炭化珪素基板へのイオン注入は、前記炭化珪素基板上に膜を成膜することなく、直接前記炭化珪素基板表面に対して行われることを特徴とする請求項1ないし請求項3いずれか一項記載の半導体装置の製造方法。
- 前記炭化珪素基板へのイオン注入は、選択的に行われることを特徴とする請求項1ないし請求項4いずれか一項記載の半導体装置の製造方法。
- 前記炭化珪素基板がn型であり、前記炭化珪素基板へのイオン注入において、リンまたは窒素をイオン注入することを特徴とする請求項1ないし請求項5いずれか一項記載の半導体装置の製造方法。
- 前記炭化珪素基板へのイオン注入において、ドーズ量が1E15cm−2以上1E17cm−2以下であることを特徴とする請求項1ないし請求項6いずれか一項記載の半導体装置の製造方法。
- 前記炭化珪素基板へのイオン注入が、前記炭化珪素膜の厚さをd、前記炭化珪素基板の(0001)面からのオフ角をαとする場合に、デバイス動作に用いられる前記pn接合領域を、エピタキシャル成長により成長する前記炭化珪素膜のステップフロー方向の上流側にd/tanαだけずらした領域が、イオン注入領域に包含されるように行なわれることを特徴とする請求項5記載の半導体装置の製造方法。
- 前記炭化珪素基板の表面は、(0001)面から<21−30>±5度方向に1度以上8度以下のオフ角を有することを特徴とする請求項1ないし請求項7いずれか一項記載の半導体装置の製造方法。
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JP2012046503A JP5717674B2 (ja) | 2012-03-02 | 2012-03-02 | 半導体装置の製造方法 |
CN2012103762385A CN103295884A (zh) | 2012-03-02 | 2012-08-31 | 半导体装置的制造方法 |
US13/602,517 US8679957B2 (en) | 2012-03-02 | 2012-09-04 | Method of manufacturing semiconductor device |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019140187A (ja) * | 2018-02-07 | 2019-08-22 | 株式会社東芝 | 半導体装置、基板、半導体装置の製造方法、及び、基板の製造方法。 |
WO2019230206A1 (ja) * | 2018-05-30 | 2019-12-05 | 住友電気工業株式会社 | 炭化珪素半導体装置の製造方法 |
JP2020077720A (ja) * | 2018-11-06 | 2020-05-21 | 富士電機株式会社 | 炭化珪素半導体装置および炭化珪素半導体装置の製造方法 |
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RU2710479C1 (ru) * | 2019-04-05 | 2019-12-26 | Федеральное государственное автономное образовательное учреждение высшего образования "Национальный исследовательский Нижегородский государственный университет им. Н.И. Лобачевского" | Способ формирования гексагональной фазы кремния путём имплантации ионов криптона в плёнку оксида кремния на пластине монокристаллического кремния |
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JP5717674B2 (ja) | 2015-05-13 |
CN103295884A (zh) | 2013-09-11 |
US20130237042A1 (en) | 2013-09-12 |
US8679957B2 (en) | 2014-03-25 |
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