JP2013096997A - 物体の光干渉測定装置および光干渉測定方法 - Google Patents

物体の光干渉測定装置および光干渉測定方法 Download PDF

Info

Publication number
JP2013096997A
JP2013096997A JP2012242650A JP2012242650A JP2013096997A JP 2013096997 A JP2013096997 A JP 2013096997A JP 2012242650 A JP2012242650 A JP 2012242650A JP 2012242650 A JP2012242650 A JP 2012242650A JP 2013096997 A JP2013096997 A JP 2013096997A
Authority
JP
Japan
Prior art keywords
measurement
detector
optical interference
reference beam
measuring apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012242650A
Other languages
English (en)
Japanese (ja)
Inventor
Matthias Schuessler
マティアス・シュスラー
Christian Rembe
クリスチアン・レンベ
Alexander Draebenstedt
アレクサンダー・ドレーベンシュテット
Covalsh Robert
ロベルト・コヴァルシュ
Ochs Wanja
ヴァンヤ・オックス
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Polytec GmbH
Original Assignee
Polytec GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Polytec GmbH filed Critical Polytec GmbH
Publication of JP2013096997A publication Critical patent/JP2013096997A/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02022—Interferometers characterised by the beam path configuration contacting one object by grazing incidence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G01B9/02028—Two or more reference or object arms in one interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2012242650A 2011-11-02 2012-11-02 物体の光干渉測定装置および光干渉測定方法 Pending JP2013096997A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102011085599.8 2011-11-02
DE102011085599A DE102011085599B3 (de) 2011-11-02 2011-11-02 Vorrichtung und Verfahren zur interferometrischen Vermessung eines Objekts

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2018090906A Division JP6631978B2 (ja) 2011-11-02 2018-05-09 物体の光干渉測定装置および光干渉測定方法

Publications (1)

Publication Number Publication Date
JP2013096997A true JP2013096997A (ja) 2013-05-20

Family

ID=47137545

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2012242650A Pending JP2013096997A (ja) 2011-11-02 2012-11-02 物体の光干渉測定装置および光干渉測定方法
JP2018090906A Active JP6631978B2 (ja) 2011-11-02 2018-05-09 物体の光干渉測定装置および光干渉測定方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2018090906A Active JP6631978B2 (ja) 2011-11-02 2018-05-09 物体の光干渉測定装置および光干渉測定方法

Country Status (6)

Country Link
US (1) US10018460B2 (enExample)
EP (1) EP2589924B1 (enExample)
JP (2) JP2013096997A (enExample)
CN (1) CN103090786B (enExample)
DE (1) DE102011085599B3 (enExample)
SG (1) SG189672A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022131026A (ja) * 2021-02-26 2022-09-07 セイコーエプソン株式会社 レーザー干渉計

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9829373B1 (en) * 2014-09-19 2017-11-28 The United States Of America As Represented By The Secretary Of The Army Apparatus and method for improving detection precision in laser vibrometric studies
DE102015003019A1 (de) 2015-03-06 2016-09-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zur optischen Detektion einer Bewegung in einer biologischen Probe mit räumlicher Ausdehnung
DE102018111921B4 (de) 2018-05-17 2023-11-23 Technische Universität Clausthal Kontaktloser optischer Dehnungsmesssensor
CN108548506A (zh) * 2018-05-24 2018-09-18 郑州辰维科技股份有限公司 一种利用光学标志对高精度平面进行平面度测量的方法
CN108548489A (zh) * 2018-05-24 2018-09-18 郑州辰维科技股份有限公司 一种利用光学标志对固面天线进行精度测量的方法
CN111307268B (zh) * 2020-03-11 2021-01-01 北京理工大学 激光共焦/差动共焦振动参数测量方法
DE102024131662B3 (de) * 2024-10-30 2025-11-13 Technische Universität Clausthal, Körperschaft des öffentlichen Rechts Vorrichtung und Verfahren zum kontaktlosen Messen einer Dehnungsänderung eines Messobjekts

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01145504A (ja) * 1987-12-01 1989-06-07 Canon Inc 光学測定装置
JPH07297248A (ja) * 1994-04-20 1995-11-10 Hitachi Ltd 結晶欠陥計測装置および半導体装置の製造方法
JPH10227617A (ja) * 1997-02-12 1998-08-25 Nikon Corp 微小線幅測定方法及び微小線幅測定装置
US5883714A (en) * 1996-10-07 1999-03-16 Phase Metrics Method and apparatus for detecting defects on a disk using interferometric analysis on reflected light
JP2001066247A (ja) * 1999-08-26 2001-03-16 Japan Science & Technology Corp 光計測装置
DE102007010389A1 (de) * 2007-03-03 2008-09-04 Polytec Gmbh Vorrichtung zur optischen Vermessung eines Objekts
WO2009079031A1 (en) * 2007-12-18 2009-06-25 Quality Vision International Partial coherence interferometer with measurement ambiguity resolution
JP2009250983A (ja) * 2008-04-02 2009-10-29 Polytec Gmbh 振動計および、物体の光学的測定方法

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1472894A (en) * 1974-03-15 1977-05-11 Nat Res Dev Interferometric methods and apparatus for measuring distance to a surface
US5087121A (en) 1987-12-01 1992-02-11 Canon Kabushiki Kaisha Depth/height measuring device
JPH01282488A (ja) * 1988-05-10 1989-11-14 Asahi Glass Co Ltd 光ファイバセンサ
CA2007190C (en) * 1990-01-04 1998-11-24 National Research Council Of Canada Laser optical ultrasound detection
US5229832A (en) * 1991-07-08 1993-07-20 Industrial Quality, Inc. Optical ultrasonic material characterization apparatus and method
FR2750215B1 (fr) * 1996-06-25 1998-09-11 Sextant Avionique Sonde velocimetrique optique
US6137585A (en) * 1998-05-15 2000-10-24 Laser Diagnostic Technologies, Inc. Method and apparatus for recording three-dimensional distribution of light backscattering potential in transparent and semi-transparent structures
US6320665B1 (en) * 1998-12-29 2001-11-20 Bryan Kok Ann Ngoi Acousto optic scanning laser vibrometer for determining the dynamic properties of an object
JP2001208974A (ja) * 2000-01-24 2001-08-03 Nikon Corp 共焦点型顕微鏡及び一括照明型顕微鏡
US6744520B2 (en) * 2002-03-04 2004-06-01 Industrial Technology Research Institute Method for measuring two-dimensional displacement using conjugate optics
JP4563811B2 (ja) 2002-09-09 2010-10-13 ザイゴ コーポレーション 薄膜構造の特性評価を含む、偏光解析、反射光測定および散乱光測定のための干渉計法および走査式干渉計
US6972846B2 (en) * 2003-03-31 2005-12-06 Metrolaser, Inc. Multi-beam heterodyne laser doppler vibrometer
EP2275868B1 (en) * 2003-09-15 2018-02-28 Zygo Corporation Interferometric analysis of surfaces
JP4093971B2 (ja) * 2004-02-12 2008-06-04 シャープ株式会社 光学式移動情報検出装置および移動情報検出システムおよび電子機器およびエンコーダ
JP4409331B2 (ja) * 2004-03-30 2010-02-03 株式会社トプコン 光画像計測装置
EP1743406B1 (en) * 2004-05-05 2008-11-05 Presstek, INC. Graphic-arts laser imaging with reduced-length laser cavities and improved performance
US7405814B2 (en) * 2006-12-19 2008-07-29 The Boeing Company Frequency multiplexed, multiple channel heterodyne interferometer
JP4264667B2 (ja) * 2007-02-16 2009-05-20 ソニー株式会社 振動検出装置
DE102007010387B4 (de) * 2007-03-03 2013-02-21 Polytec Gmbh Interferometer zur optischen Vermessung eines Objekts
CN100491901C (zh) * 2007-08-08 2009-05-27 北京交通大学 合成波干涉纳米表面三维在线测量系统及方法
CN100567884C (zh) * 2008-05-06 2009-12-09 哈尔滨工业大学 基于移相干涉的二次共焦测量方法与装置
JP2012509464A (ja) * 2008-11-17 2012-04-19 ファロ テクノロジーズ インコーポレーテッド 六自由度計測装置及び方法
DE102012211549B3 (de) * 2012-07-03 2013-07-04 Polytec Gmbh Vorrichtung und Verfahren zur interferometrischen Vermessung eines Objekts

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01145504A (ja) * 1987-12-01 1989-06-07 Canon Inc 光学測定装置
JPH07297248A (ja) * 1994-04-20 1995-11-10 Hitachi Ltd 結晶欠陥計測装置および半導体装置の製造方法
US5883714A (en) * 1996-10-07 1999-03-16 Phase Metrics Method and apparatus for detecting defects on a disk using interferometric analysis on reflected light
JPH10227617A (ja) * 1997-02-12 1998-08-25 Nikon Corp 微小線幅測定方法及び微小線幅測定装置
JP2001066247A (ja) * 1999-08-26 2001-03-16 Japan Science & Technology Corp 光計測装置
DE102007010389A1 (de) * 2007-03-03 2008-09-04 Polytec Gmbh Vorrichtung zur optischen Vermessung eines Objekts
JP2008216251A (ja) * 2007-03-03 2008-09-18 Polytec Gmbh 光学測定装置
WO2009079031A1 (en) * 2007-12-18 2009-06-25 Quality Vision International Partial coherence interferometer with measurement ambiguity resolution
JP2010510529A (ja) * 2007-12-18 2010-04-02 クオリティー ヴィジョン インターナショナル インコーポレイテッド 測定の不明瞭性を解消した部分コヒーレンス干渉計
JP2009250983A (ja) * 2008-04-02 2009-10-29 Polytec Gmbh 振動計および、物体の光学的測定方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022131026A (ja) * 2021-02-26 2022-09-07 セイコーエプソン株式会社 レーザー干渉計
JP7571616B2 (ja) 2021-02-26 2024-10-23 セイコーエプソン株式会社 レーザー干渉計

Also Published As

Publication number Publication date
EP2589924B1 (de) 2016-04-20
JP6631978B2 (ja) 2020-01-15
US20130107276A1 (en) 2013-05-02
US10018460B2 (en) 2018-07-10
CN103090786A (zh) 2013-05-08
CN103090786B (zh) 2017-07-18
SG189672A1 (en) 2013-05-31
EP2589924A1 (de) 2013-05-08
JP2018119991A (ja) 2018-08-02
DE102011085599B3 (de) 2012-12-13

Similar Documents

Publication Publication Date Title
JP6631978B2 (ja) 物体の光干渉測定装置および光干渉測定方法
JP4505807B2 (ja) 多重化スペクトル干渉光コヒーレンストモグラフィー
JP5536983B2 (ja) 光学測定装置
US10429171B2 (en) Laser multibeam differential interferometric sensor and methods for vibration imaging
EP2163906B1 (en) Method of detecting a movement of a measuring probe and measuring instrument
JP2007024827A (ja) 位相シフト干渉計
JPWO2020017017A1 (ja) 光計測装置および試料観察方法
US20060039007A1 (en) Vibration-insensitive interferometer
JP4852651B2 (ja) 多重化スペクトル干渉光コヒーレンストモグラフィー
JP2013152191A (ja) 多波長干渉計
JP6307517B2 (ja) 振動測定方法及び干渉計
JP3843399B2 (ja) サブミクロメートル範囲における３次元構造を判定する方法及び装置
US20110299090A1 (en) Real-time interferometer
JP2002148025A (ja) ３次元形状測定装置
JP2006250849A (ja) 光コヒーレンストモグラフィー装置を用いた光画像計測方法及びその装置
JP5149923B2 (ja) 多重化スペクトル干渉光コヒーレンストモグラフィー
JP2001264036A (ja) 面形状測定装置及び測定方法
JP4536873B2 (ja) 三次元形状計測方法及び装置
JP2020153992A (ja) 白色干渉計による形状測定装置
JP2017026494A (ja) 白色干渉計による形状測定装置
HK1180389A (en) Device and method for interferometric measuring of an object
JP2007292650A (ja) 光学干渉計
JP3410800B2 (ja) 耐振動型干渉計
WO2018007101A1 (en) An interferometric microscopy arrangement with a point-like beam splitting layer
TW202511698A (zh) 經組態以測量小型結構之干涉儀

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20150825

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20160726

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20160802

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20161101

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20161228

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20170202

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20170711

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20171011

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20180109