JP2012519650A5 - - Google Patents
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- Publication number
- JP2012519650A5 JP2012519650A5 JP2011554116A JP2011554116A JP2012519650A5 JP 2012519650 A5 JP2012519650 A5 JP 2012519650A5 JP 2011554116 A JP2011554116 A JP 2011554116A JP 2011554116 A JP2011554116 A JP 2011554116A JP 2012519650 A5 JP2012519650 A5 JP 2012519650A5
- Authority
- JP
- Japan
- Prior art keywords
- forming surface
- semiconductor material
- molten
- providing
- differential pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 5
- 239000000463 material Substances 0.000 claims 4
- 239000012768 molten material Substances 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US20958209P | 2009-03-09 | 2009-03-09 | |
| US61/209,582 | 2009-03-09 | ||
| US22473009P | 2009-07-10 | 2009-07-10 | |
| US61/224,730 | 2009-07-10 | ||
| US23796509P | 2009-08-28 | 2009-08-28 | |
| US61/237,965 | 2009-08-28 | ||
| PCT/US2010/026639 WO2010104838A1 (en) | 2009-03-09 | 2010-03-09 | Methods and apparati for making thin semiconductor bodies from molten material |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015002173A Division JP6030672B2 (ja) | 2009-03-09 | 2015-01-08 | 薄い半導体本体を溶融物質から作成するための方法及び装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012519650A JP2012519650A (ja) | 2012-08-30 |
| JP2012519650A5 true JP2012519650A5 (enExample) | 2014-02-27 |
| JP5715579B2 JP5715579B2 (ja) | 2015-05-07 |
Family
ID=42728704
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011554116A Active JP5715579B2 (ja) | 2009-03-09 | 2010-03-09 | 薄い半導体本体を溶融物質から作成するための方法及び装置 |
| JP2015002173A Expired - Fee Related JP6030672B2 (ja) | 2009-03-09 | 2015-01-08 | 薄い半導体本体を溶融物質から作成するための方法及び装置 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015002173A Expired - Fee Related JP6030672B2 (ja) | 2009-03-09 | 2015-01-08 | 薄い半導体本体を溶融物質から作成するための方法及び装置 |
Country Status (12)
| Country | Link |
|---|---|
| US (4) | US20110247549A1 (enExample) |
| EP (1) | EP2406413B1 (enExample) |
| JP (2) | JP5715579B2 (enExample) |
| KR (1) | KR101805096B1 (enExample) |
| CN (1) | CN102421947B (enExample) |
| CA (3) | CA3031880C (enExample) |
| ES (1) | ES2680648T3 (enExample) |
| MX (1) | MX336781B (enExample) |
| MY (1) | MY160016A (enExample) |
| SG (1) | SG173739A1 (enExample) |
| TW (1) | TWI531691B (enExample) |
| WO (1) | WO2010104838A1 (enExample) |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9050652B2 (en) | 2008-11-14 | 2015-06-09 | Carnegie Mellon University | Methods for casting by a float process and associated apparatuses |
| ES2680648T3 (es) * | 2009-03-09 | 2018-09-10 | 1366 Technologies Inc. | Procedimientos de fabricación de cuerpos semiconductores delgados a partir de material fundido |
| US8685162B2 (en) * | 2010-05-06 | 2014-04-01 | Varian Semiconductor Equipment Associates, Inc. | Removing a sheet from the surface of a melt using gas jets |
| US9267219B2 (en) | 2010-05-06 | 2016-02-23 | Varian Semiconductor Equipment Associates, Inc. | Gas-lift pumps for flowing and purifying molten silicon |
| US20120027996A1 (en) * | 2010-07-27 | 2012-02-02 | Glen Bennett Cook | Mold shape to optimize thickness uniformity of silicon film |
| US20120129293A1 (en) * | 2010-11-24 | 2012-05-24 | Sergey Potapenko | Methods of making an unsupported article of a semiconducting material using thermally active molds |
| US9419167B2 (en) | 2010-12-01 | 2016-08-16 | 1366 Technologies, Inc. | Making semiconductor bodies from molten material using a free-standing interposer sheet |
| CA2825772A1 (en) * | 2011-01-26 | 2012-08-02 | Yamaguchi University | Silicon melt contact member, process for production thereof, and process for production of crystalline silicon |
| FR2978600B1 (fr) * | 2011-07-25 | 2014-02-07 | Soitec Silicon On Insulator | Procede et dispositif de fabrication de couche de materiau semi-conducteur |
| US9859348B2 (en) | 2011-10-14 | 2018-01-02 | Diftek Lasers, Inc. | Electronic device and method of making thereof |
| WO2014001886A1 (en) | 2012-06-27 | 2014-01-03 | Rgs Development B.V. | Film of polycrystalline semiconductor material, method of making same and orienting/undercooling molds therefor, and electronic device |
| WO2014001888A1 (en) | 2012-06-27 | 2014-01-03 | Rgs Development B.V. | Film of polycrystalline semiconductor material, method of making same and undercooling molds therefor, and electronic device |
| US20140097432A1 (en) * | 2012-10-09 | 2014-04-10 | Corning Incorporated | Sheet of semiconducting material, laminate, and system and methods for forming same |
| WO2015017098A1 (en) * | 2013-07-31 | 2015-02-05 | Christoph Sachs | Use of silicon nitride as a substrate and a coating material for the rapid solidification of silicon |
| CN103924291A (zh) * | 2014-04-25 | 2014-07-16 | 南昌欧菲光学技术有限公司 | 一种平板型蓝宝石长晶装置及方法 |
| ES2864962T3 (es) * | 2014-04-30 | 2021-10-14 | 1366 Tech Inc | Procedimientos y aparatos para fabricar obleas semiconductoras delgadas con regiones controladas localmente que son relativamente más gruesas que otras regiones |
| EP2953158A3 (en) | 2014-06-04 | 2016-02-17 | Diftek Lasers, Inc. | Method of fabricating crystalline island on substrate |
| JP6850004B2 (ja) * | 2015-04-29 | 2021-03-31 | 1366 テクノロジーズ インク. | 材料が消費及び補給される溶融材料の含有体積を維持する方法 |
| US10312310B2 (en) | 2016-01-19 | 2019-06-04 | Diftek Lasers, Inc. | OLED display and method of fabrication thereof |
| JP6857517B2 (ja) | 2016-06-16 | 2021-04-14 | ディフテック レーザーズ インコーポレイテッド | 基板上に結晶アイランドを製造する方法 |
| JP6915526B2 (ja) * | 2017-12-27 | 2021-08-04 | 信越半導体株式会社 | 炭化珪素単結晶の製造方法 |
| AR115182A3 (es) * | 2018-10-30 | 2020-12-09 | R Neto S A | Intercambiador aéreo geotérmico vertical |
| US11121125B2 (en) * | 2018-12-12 | 2021-09-14 | Micron Technology, Inc. | Thermal chamber for a thermal control component |
| US11334129B2 (en) | 2019-12-11 | 2022-05-17 | Micron Technology, Inc. | Temperature control component for electronic systems |
| CN113921639A (zh) * | 2020-10-12 | 2022-01-11 | 上海晶澳太阳能科技有限公司 | 硅片及制备方法、电池片、电池切片、电池串及光伏组件 |
| IL309370B2 (en) | 2021-06-16 | 2025-07-01 | Conti Spe Llc | Mechanically stacked solar transmissive cells or modules |
| CN116175930A (zh) * | 2021-09-08 | 2023-05-30 | 僖昴晰(上海)新材料有限公司 | 在模具中制作中空流体管道以及制作带有中空流体管道的模具的方法 |
| CN117987932B (zh) * | 2024-04-03 | 2024-06-11 | 常州臻晶半导体有限公司 | 一种籽晶粘接烧结的冲压装置及其方法 |
| US12414402B1 (en) | 2025-01-03 | 2025-09-09 | Conti Innovation Center, Llc | Optimizing cadmium (CD) alloy solar cells with sputtered copper-dopped zinc telluride (ZNTE:CU) back contacts in the presence of hydrogen |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB801443A (en) | 1956-09-05 | 1958-09-17 | Standard Telephones Cables Ltd | Semi-conductor devices and methods of manufacturing such devices |
| US3903841A (en) * | 1974-08-22 | 1975-09-09 | Gte Laboratories Inc | Vacuum holder in epitaxial growth apparatus |
| DE3419137A1 (de) * | 1984-05-23 | 1985-11-28 | Bayer Ag, 5090 Leverkusen | Verfahren und vorrichtung zur herstellung von halbleiterfolien |
| NL8600216A (nl) | 1986-01-30 | 1987-08-17 | Philips Nv | Werkwijze voor het vervaardigen van een halfgeleiderinrichting. |
| US5111871B1 (en) * | 1989-03-17 | 1993-12-28 | J. Cook Arnold | Method of vacuum casting |
| JP3656821B2 (ja) | 1999-09-14 | 2005-06-08 | シャープ株式会社 | 多結晶シリコンシートの製造装置及び製造方法 |
| JP4111669B2 (ja) | 1999-11-30 | 2008-07-02 | シャープ株式会社 | シート製造方法、シートおよび太陽電池 |
| JP4121697B2 (ja) * | 1999-12-27 | 2008-07-23 | シャープ株式会社 | 結晶シートの製造方法およびその製造装置 |
| JP2003146640A (ja) * | 2001-11-09 | 2003-05-21 | Sharp Corp | 半導体シートの製造方法、半導体シート製造装置および太陽電池 |
| KR20040054811A (ko) | 2001-11-30 | 2004-06-25 | 코닌클리즈케 필립스 일렉트로닉스 엔.브이. | 반도체 디바이스 및 그 제조 방법 |
| JP2003226598A (ja) * | 2002-02-01 | 2003-08-12 | Sharp Corp | 結晶シートの製造装置、製造方法、その方法により製造される結晶シートおよびその結晶シートを用いて得られる太陽電池 |
| AU2003243966A1 (en) * | 2002-06-28 | 2004-01-19 | Sharp Kabushiki Kaisha | Thin sheet production method and thin sheet production device |
| US7407550B2 (en) * | 2002-10-18 | 2008-08-05 | Evergreen Solar, Inc. | Method and apparatus for crystal growth |
| US6814802B2 (en) * | 2002-10-30 | 2004-11-09 | Evergreen Solar, Inc. | Method and apparatus for growing multiple crystalline ribbons from a single crucible |
| JP2004149375A (ja) * | 2002-10-31 | 2004-05-27 | Sharp Corp | 薄板製造方法および薄板製造装置 |
| JP4467392B2 (ja) * | 2004-09-24 | 2010-05-26 | シャープ株式会社 | 結晶シートの製造方法 |
| JP4294576B2 (ja) * | 2004-11-17 | 2009-07-15 | シャープ株式会社 | 薄板生成装置および薄板生成方法 |
| JP5062767B2 (ja) * | 2007-01-25 | 2012-10-31 | 独立行政法人産業技術総合研究所 | シリコン基板の製造装置及び製造方法 |
| CN101790774B (zh) * | 2007-06-26 | 2012-05-02 | 麻省理工学院 | 半导体晶圆在薄膜包衣中的重结晶以及有关工艺 |
| FR2918080B1 (fr) * | 2007-06-29 | 2010-12-17 | Commissariat Energie Atomique | Dispositif et procede d'elaboration de plaquettes en materiau semi-conducteur par moulage et cristallisation dirigee |
| ES2680648T3 (es) * | 2009-03-09 | 2018-09-10 | 1366 Technologies Inc. | Procedimientos de fabricación de cuerpos semiconductores delgados a partir de material fundido |
-
2010
- 2010-03-09 ES ES10751275.8T patent/ES2680648T3/es active Active
- 2010-03-09 CA CA3031880A patent/CA3031880C/en active Active
- 2010-03-09 EP EP10751275.8A patent/EP2406413B1/en active Active
- 2010-03-09 MY MYPI2011003933A patent/MY160016A/en unknown
- 2010-03-09 WO PCT/US2010/026639 patent/WO2010104838A1/en not_active Ceased
- 2010-03-09 SG SG2011059268A patent/SG173739A1/en unknown
- 2010-03-09 MX MX2011009206A patent/MX336781B/es active IP Right Grant
- 2010-03-09 TW TW099106727A patent/TWI531691B/zh not_active IP Right Cessation
- 2010-03-09 CN CN201080021254.1A patent/CN102421947B/zh active Active
- 2010-03-09 US US12/999,206 patent/US20110247549A1/en not_active Abandoned
- 2010-03-09 KR KR1020117021651A patent/KR101805096B1/ko not_active Expired - Fee Related
- 2010-03-09 JP JP2011554116A patent/JP5715579B2/ja active Active
- 2010-03-09 CA CA2754880A patent/CA2754880C/en active Active
- 2010-03-09 CA CA2962682A patent/CA2962682C/en active Active
-
2011
- 2011-11-17 US US13/299,031 patent/US8293009B2/en active Active
-
2012
- 2012-10-18 US US13/654,638 patent/US8696810B2/en active Active
-
2014
- 2014-04-11 US US14/250,581 patent/US9643342B2/en active Active
-
2015
- 2015-01-08 JP JP2015002173A patent/JP6030672B2/ja not_active Expired - Fee Related
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