WO2011025299A3 - 실리콘 카바이드를 포함한 방열판 및 그 제조방법 - Google Patents

실리콘 카바이드를 포함한 방열판 및 그 제조방법 Download PDF

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Publication number
WO2011025299A3
WO2011025299A3 PCT/KR2010/005784 KR2010005784W WO2011025299A3 WO 2011025299 A3 WO2011025299 A3 WO 2011025299A3 KR 2010005784 W KR2010005784 W KR 2010005784W WO 2011025299 A3 WO2011025299 A3 WO 2011025299A3
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WO
WIPO (PCT)
Prior art keywords
manufacturing
silicon carbide
heat sink
sink including
including silicon
Prior art date
Application number
PCT/KR2010/005784
Other languages
English (en)
French (fr)
Other versions
WO2011025299A2 (ko
Inventor
장봉석
조선희
Original Assignee
주식회사 에스에이치이씨
박경호
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 에스에이치이씨, 박경호 filed Critical 주식회사 에스에이치이씨
Publication of WO2011025299A2 publication Critical patent/WO2011025299A2/ko
Publication of WO2011025299A3 publication Critical patent/WO2011025299A3/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/64—Heat extraction or cooling elements
    • H01L33/641—Heat extraction or cooling elements characterized by the materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L24/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/27—Manufacturing methods
    • H01L2224/27011—Involving a permanent auxiliary member, i.e. a member which is left at least partly in the finished device, e.g. coating, dummy feature
    • H01L2224/27013—Involving a permanent auxiliary member, i.e. a member which is left at least partly in the finished device, e.g. coating, dummy feature for holding or confining the layer connector, e.g. solder flow barrier
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3731—Ceramic materials or glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/64—Heat extraction or cooling elements
    • H01L33/642—Heat extraction or cooling elements characterized by the shape

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Products (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

본 발명의 목적은 기계적 강도, 기공률 및 비표면적 특성 등이 모두 양호한 실리콘 카바이드를 포함한 방열판을 제조방법에 관한 것이다. 본 발명에 따른 실리콘 카바이드를 포함한 방열판의 제조방법은 입경이 0.1㎛ ~ 300㎛인 실리콘 카바이드 파우더를 포함하는 조립분을 제조하는 단계와, 제조된 조립분을 프레스(Press), 테이프 캐스팅(Tape Casting) 및 사출 성형 중 어느 하나의 방법으로 성형하는 단계와, 성형된 조립분을 산화분위기에서 소성하는 단계를 포함한다.
PCT/KR2010/005784 2009-08-31 2010-08-27 실리콘 카바이드를 포함한 방열판 및 그 제조방법 WO2011025299A2 (ko)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
KR10-2009-0080911 2009-08-31
KR20090080911 2009-08-31
KR10-2010-0046953 2010-05-19
KR20100046953 2010-05-19
KR10-2010-0060199 2010-06-24
KR20100060199 2010-06-24

Publications (2)

Publication Number Publication Date
WO2011025299A2 WO2011025299A2 (ko) 2011-03-03
WO2011025299A3 true WO2011025299A3 (ko) 2011-07-07

Family

ID=43628625

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2010/005784 WO2011025299A2 (ko) 2009-08-31 2010-08-27 실리콘 카바이드를 포함한 방열판 및 그 제조방법

Country Status (3)

Country Link
KR (1) KR20110023799A (ko)
TW (1) TW201120394A (ko)
WO (1) WO2011025299A2 (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012119671A (ja) * 2010-11-11 2012-06-21 Kitagawa Ind Co Ltd 電子回路及びヒートシンク
TWI491085B (zh) * 2012-06-06 2015-07-01 Pin Siang Wang 複合散熱體及其製造方法
KR101457181B1 (ko) * 2013-01-28 2014-11-03 김정석 열전도율과 방사율이 향상된 세라믹 방열부재 및 그 제조방법
KR101430677B1 (ko) * 2013-02-18 2014-08-18 주식회사 코센테크 히트싱크용 복합재료
KR101524728B1 (ko) * 2013-12-16 2015-06-01 부산대학교 산학협력단 고방열 세라믹 복합체, 이의 제조방법, 및 이의 용도
CN104103741A (zh) * 2014-07-02 2014-10-15 柳钊 一种以碳化硅陶瓷为散热器一体封装的led光源器件及其制备方法
CN111592275A (zh) * 2020-06-29 2020-08-28 广州视源电子科技股份有限公司 散热器及其制备方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1030148A (ja) * 1996-07-17 1998-02-03 Injietsukusu:Kk ヒートシンクおよびその製造方法
JP2004363309A (ja) * 2003-06-04 2004-12-24 Ceramission Kk 放熱性に優れた半導体部品
KR20050029130A (ko) * 2002-06-28 2005-03-24 어드밴스드 에너지 테크놀로지 인코포레이티드 금속 베이스 및 흑연 휜을 구비한 합성 히트 싱크
KR20050120727A (ko) * 2002-06-28 2005-12-23 어드밴스드 에너지 테크놀로지 인코포레이티드 긴 흑연 시트들과 짧은 흑연 시트들로 구성된 히트 싱크
JP2007238906A (ja) * 2006-03-06 2007-09-20 Tomoaki Nakamura 放熱材料並びに放熱材料塗料

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1030148A (ja) * 1996-07-17 1998-02-03 Injietsukusu:Kk ヒートシンクおよびその製造方法
KR20050029130A (ko) * 2002-06-28 2005-03-24 어드밴스드 에너지 테크놀로지 인코포레이티드 금속 베이스 및 흑연 휜을 구비한 합성 히트 싱크
KR20050120727A (ko) * 2002-06-28 2005-12-23 어드밴스드 에너지 테크놀로지 인코포레이티드 긴 흑연 시트들과 짧은 흑연 시트들로 구성된 히트 싱크
JP2004363309A (ja) * 2003-06-04 2004-12-24 Ceramission Kk 放熱性に優れた半導体部品
JP2007238906A (ja) * 2006-03-06 2007-09-20 Tomoaki Nakamura 放熱材料並びに放熱材料塗料

Also Published As

Publication number Publication date
WO2011025299A2 (ko) 2011-03-03
TW201120394A (en) 2011-06-16
KR20110023799A (ko) 2011-03-08

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