JP2014521585A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2014521585A5 JP2014521585A5 JP2014523142A JP2014523142A JP2014521585A5 JP 2014521585 A5 JP2014521585 A5 JP 2014521585A5 JP 2014523142 A JP2014523142 A JP 2014523142A JP 2014523142 A JP2014523142 A JP 2014523142A JP 2014521585 A5 JP2014521585 A5 JP 2014521585A5
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- inner lining
- basic
- single crystal
- sapphire single
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 claims description 13
- 229910052594 sapphire Inorganic materials 0.000 claims description 9
- 239000010980 sapphire Substances 0.000 claims description 9
- 238000000034 method Methods 0.000 claims 5
- 229910052750 molybdenum Inorganic materials 0.000 claims 5
- 239000000956 alloy Substances 0.000 claims 4
- 229910045601 alloy Inorganic materials 0.000 claims 4
- 229910052702 rhenium Inorganic materials 0.000 claims 4
- 229910052721 tungsten Inorganic materials 0.000 claims 4
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 239000000155 melt Substances 0.000 claims 2
- 229910052751 metal Inorganic materials 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- 238000007711 solidification Methods 0.000 claims 2
- 230000008023 solidification Effects 0.000 claims 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 1
- 239000011733 molybdenum Substances 0.000 claims 1
- 238000000465 moulding Methods 0.000 claims 1
- 230000001419 dependent effect Effects 0.000 description 2
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ATGM445/2011 | 2011-08-05 | ||
| ATGM445/2011U AT12783U1 (de) | 2011-08-05 | 2011-08-05 | Tiegel zur kristallzucht |
| PCT/AT2012/000206 WO2013020153A1 (de) | 2011-08-05 | 2012-08-03 | Tiegel zur kristallzucht |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014521585A JP2014521585A (ja) | 2014-08-28 |
| JP2014521585A5 true JP2014521585A5 (enExample) | 2015-07-16 |
| JP5964963B2 JP5964963B2 (ja) | 2016-08-03 |
Family
ID=47221804
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014523142A Expired - Fee Related JP5964963B2 (ja) | 2011-08-05 | 2012-08-03 | 結晶成長用のるつぼ |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20140174341A1 (enExample) |
| JP (1) | JP5964963B2 (enExample) |
| KR (1) | KR20140048231A (enExample) |
| AT (1) | AT12783U1 (enExample) |
| WO (1) | WO2013020153A1 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6357146B2 (ja) * | 2012-04-17 | 2018-07-11 | プランゼー エスエー | 酸化物セラミック単結晶製造のための坩堝 |
| CN103266294A (zh) * | 2013-03-07 | 2013-08-28 | 贵阳嘉瑜光电科技咨询中心 | 一种在hem晶体生长中重复使用钼坩埚的方法 |
| KR101547329B1 (ko) * | 2013-03-21 | 2015-08-25 | 주식회사 사파이어테크놀로지 | 사파이어 단결정 성장장치 및 성장방법 |
| CN105849322B (zh) * | 2013-12-26 | 2018-09-28 | 联合材料公司 | 蓝宝石单晶培养用坩锅、蓝宝石单晶培养方法和蓝宝石单晶培养用坩锅的制造方法 |
| EP2902534A1 (en) | 2014-02-04 | 2015-08-05 | SGL Carbon SE | Metal coated crucible for sapphire single crystal growth |
| AT14854U1 (de) * | 2015-07-03 | 2016-07-15 | Plansee Se | Behälter aus Refraktärmetall |
| CN112281214A (zh) * | 2020-10-29 | 2021-01-29 | 山东大学 | 一种基于双坩埚法生长稀土倍半氧化物晶体的方法和装置 |
| CN115111914B (zh) * | 2022-07-04 | 2023-09-15 | 泰州市万鑫钨钼制品有限公司 | 一种便于清洁的钼坩埚 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60170230A (ja) * | 1984-02-14 | 1985-09-03 | Sharp Corp | 化合物半導体製造装置 |
| JP2528285B2 (ja) * | 1986-05-27 | 1996-08-28 | 東洋炭素株式会社 | 黒鉛ルツボの保護方法 |
| JPS6393855A (ja) * | 1986-10-07 | 1988-04-25 | Mitsubishi Electric Corp | 蒸着装置 |
| JPH0293063A (ja) * | 1988-09-30 | 1990-04-03 | Mitsubishi Heavy Ind Ltd | 真空蒸発装置用るつぼ |
| DE19702465A1 (de) * | 1997-01-24 | 1998-07-30 | Heraeus Gmbh W C | Tiegel zur Einkristall-Züchtung, Verfahren zu seiner Herstellung und seine Verwendung |
| JPH11278992A (ja) * | 1998-03-27 | 1999-10-12 | Komatsu Electronic Metals Co Ltd | 単結晶シリコン引上げ方法、引上げ装置および黒鉛るつぼならびに石英るつぼ |
| CH693746A5 (de) * | 1999-05-04 | 2004-01-15 | Satis Vacuum Ind Vetriebs Ag | Elektronenstrahlverdampfer fuer Vacuum-Beschichtungsanlagen. |
| JP3023788B1 (ja) * | 1999-05-10 | 2000-03-21 | 株式会社藤森技術研究所 | 単結晶半導体の製造装置における内槽ルツボの分離方法及びその分離部材 |
| US6533993B2 (en) * | 2001-05-31 | 2003-03-18 | Fireline, Inc. | Variable height liner system |
| US20030213575A1 (en) * | 2002-05-14 | 2003-11-20 | Todaro Thomas J. | Melting crucible and method |
| DE102008008993A1 (de) * | 2008-02-13 | 2009-08-20 | Ald Vacuum Technologies Gmbh | Vorrichtung zum Schmelzen insbesondere von Metallen |
| CN101323985B (zh) * | 2008-07-25 | 2010-04-21 | 哈尔滨工业大学 | 一种大尺寸高熔点晶体生长用的筒形隔热屏 |
| DE102008060520A1 (de) * | 2008-12-04 | 2010-06-10 | Schott Ag | Ein Tiegel zur Prozessierung hochschmelzender Materialien |
| TWI519685B (zh) * | 2009-07-22 | 2016-02-01 | 國立大學法人信州大學 | 藍寶石單結晶之製造方法以及藍寶石單結晶之製造裝置 |
| JP5359845B2 (ja) * | 2009-12-15 | 2013-12-04 | 富士電機株式会社 | 単結晶成長装置 |
| DE102010048297B4 (de) * | 2010-10-14 | 2016-07-21 | Schott Ag | Vorrichtung zum Läutern einer anorganischen nichtmetallischen Schmelze und Verfahren zur Herstellung eines Glases und/oder einer Glaskeramik |
-
2011
- 2011-08-05 AT ATGM445/2011U patent/AT12783U1/de not_active IP Right Cessation
-
2012
- 2012-08-03 JP JP2014523142A patent/JP5964963B2/ja not_active Expired - Fee Related
- 2012-08-03 US US14/237,267 patent/US20140174341A1/en not_active Abandoned
- 2012-08-03 WO PCT/AT2012/000206 patent/WO2013020153A1/de not_active Ceased
- 2012-08-03 KR KR1020147002892A patent/KR20140048231A/ko not_active Withdrawn
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2014521585A5 (enExample) | ||
| JP2012519650A5 (enExample) | ||
| WO2012134092A3 (en) | Method of manufacturing single crystal ingot, and single crystal ingot and wafer manufactured thereby | |
| JP5964963B2 (ja) | 結晶成長用のるつぼ | |
| JP2013502945A5 (enExample) | ||
| UA110787C2 (uk) | Спосіб виготовлення зливка сплаву, зливок сплаву, спосіб обробки зливка сплаву (варіанти) і отримуваний у вигляді нього продукт гарячого формування | |
| MY152943A (en) | Method for producing a silicon ingot | |
| WO2008090866A1 (ja) | アルミニウム合金鋳造材及びその製造方法、アルミニウム合金材及びその製造方法 | |
| UA111712C2 (uk) | Системи і способи для обробки зливків із сплавів | |
| WO2009035933A3 (en) | Sputtering targets comprising a novel manufacturing design, methods of production and uses thereof | |
| RU2012102620A (ru) | Лист из магниевого сплава | |
| GB201208611D0 (en) | Improved production of crystalline silicon | |
| ES2547684T3 (es) | Crisol y método para la producción de un lingote de material semiconductor (cuasi) monocristalino | |
| WO2015017478A3 (en) | SYNTHESIS OF CdSe/ZnS CORE/SHELL SEMICONDUCTOR NANOWIRES | |
| JP2010184819A5 (enExample) | ||
| JP5299252B2 (ja) | 石英ルツボ製造用モールド | |
| WO2012161460A3 (ko) | 알루미늄 합금 및 그 제조방법 | |
| FR2968001B1 (fr) | Procede de realisation d'une preforme fibreuse tridimensionnelle pour la fabrication d'une piece annulaire en materiau composite carbone-carbone | |
| EP2181970A3 (en) | Mold for producing silica crucible | |
| JP2016513171A5 (enExample) | ||
| JP2009518555A5 (enExample) | ||
| WO2012169828A3 (en) | Apparatus for fabricating ingot | |
| WO2012177012A3 (en) | Apparatus for fabricating ingot | |
| JP2012241230A5 (enExample) | ||
| WO2014121879A9 (de) | Bauelement für die bildung eines boden- oder/und wandbelags und verfahren zur herstellung dafür |