ES2575382T3 - Fabricación de cuerpos semiconductores a partir de material fundido utilizando una chapa de interposición auto-sostenida - Google Patents
Fabricación de cuerpos semiconductores a partir de material fundido utilizando una chapa de interposición auto-sostenida Download PDFInfo
- Publication number
- ES2575382T3 ES2575382T3 ES11845655.7T ES11845655T ES2575382T3 ES 2575382 T3 ES2575382 T3 ES 2575382T3 ES 11845655 T ES11845655 T ES 11845655T ES 2575382 T3 ES2575382 T3 ES 2575382T3
- Authority
- ES
- Spain
- Prior art keywords
- ceramic sheet
- self
- supporting
- molten material
- manufacture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/02—Liquid-phase epitaxial-layer growth using molten solvents, e.g. flux
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/121—The active layers comprising only Group IV materials
- H10F71/1221—The active layers comprising only Group IV materials comprising polycrystalline silicon
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/4505—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application
- C04B41/4535—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application applied as a solution, emulsion, dispersion or suspension
- C04B41/4539—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application applied as a solution, emulsion, dispersion or suspension as a emulsion, dispersion or suspension
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5093—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with elements other than metals or carbon
- C04B41/5096—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/002—Crucibles or containers for supporting the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/121—The active layers comprising only Group IV materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/34—Deposited materials, e.g. layers
- H10P14/3402—Deposited materials, e.g. layers characterised by the chemical composition
- H10P14/3404—Deposited materials, e.g. layers characterised by the chemical composition being Group IVA materials
- H10P14/3411—Silicon, silicon germanium or germanium
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P90/00—Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/007—Pulling on a substrate
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/32—Seed holders, e.g. chucks
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/546—Polycrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Metallurgy (AREA)
- Ceramic Engineering (AREA)
- Structural Engineering (AREA)
- Dispersion Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Photovoltaic Devices (AREA)
- Recrystallisation Techniques (AREA)
- Ceramic Products (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Procedimiento para realizar un cuerpo semiconductor (419) comprendiendo el procedimiento las etapas de: a. proporcionar un material semiconductor fundido (413), que presenta una superficie (415); b. proporcionar un molde poroso (45), que comprende una superficie de conformación (46); c. proporcionar un chapa cerámica auto sostenida (430) entre la superficie de conformación (46) y el material fundido (413); d. poner en contacto la superficie de conformación (46) con la chapa cerámica (430) y la chapa cerámica (430) con la superficie (415) del material fundido (413) durante un cierto período de contacto), de tal modo que un cuerpo (419) de material semiconductor (413) se solidifica en la chapa cerámica (430); y e. retirar el cuerpo solidificado (419) del contacto con el material semiconductor fundido (413) mientras se encuentra todavía en contacto con la chapa cerámica (430), en el que la chapa cerámica (430) es porosa y preferentemente el grado de porosidad se encuentra comprendido entre el 1 por ciento y el 80 %.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US41869910P | 2010-12-01 | 2010-12-01 | |
| US418699P | 2010-12-01 | ||
| PCT/US2011/062914 WO2012075306A2 (en) | 2010-12-01 | 2011-12-01 | Making semiconductor bodies from molten material using a free-standing interposer sheet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ES2575382T3 true ES2575382T3 (es) | 2016-06-28 |
Family
ID=46172577
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES11845655.7T Active ES2575382T3 (es) | 2010-12-01 | 2011-12-01 | Fabricación de cuerpos semiconductores a partir de material fundido utilizando una chapa de interposición auto-sostenida |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US9419167B2 (es) |
| EP (1) | EP2647032B1 (es) |
| JP (1) | JP5970469B2 (es) |
| KR (1) | KR101889858B1 (es) |
| CN (1) | CN103380481B (es) |
| CA (1) | CA2819144C (es) |
| ES (1) | ES2575382T3 (es) |
| MY (1) | MY180243A (es) |
| SG (1) | SG190288A1 (es) |
| TW (1) | TWI667700B (es) |
| WO (1) | WO2012075306A2 (es) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102008041250A1 (de) * | 2008-08-13 | 2010-02-25 | Ers Electronic Gmbh | Verfahren und Vorrichtung zum thermischen Bearbeiten von Kunststoffscheiben, insbesondere Moldwafern |
| US9948539B2 (en) | 2014-08-29 | 2018-04-17 | The Nielsen Company (Us), Llc | Methods and apparatus to predict end of streaming media using a prediction model |
| US11018068B2 (en) | 2018-07-06 | 2021-05-25 | Butterfly Network, Inc. | Methods and apparatuses for packaging an ultrasound-on-a-chip |
| CN111755321A (zh) * | 2020-05-20 | 2020-10-09 | 嘉兴市轩禾园艺技术有限公司 | 多晶硅半导体薄膜衬底的制备方法 |
| KR102813653B1 (ko) * | 2020-12-30 | 2025-05-27 | 엘지디스플레이 주식회사 | 디스플레이 모듈 및 이를 포함한 디스플레이 장치 |
| KR102813181B1 (ko) * | 2020-12-31 | 2025-05-26 | 엘지디스플레이 주식회사 | 디스플레이 모듈 및 이를 포함한 디스플레이 장치 |
| KR102815348B1 (ko) * | 2020-12-31 | 2025-05-29 | 엘지디스플레이 주식회사 | 디스플레이 모듈 및 이를 포함한 디스플레이 장치 |
| IL309370B2 (en) | 2021-06-16 | 2025-07-01 | Conti Spe Llc | Mechanically stacked solar transmissive cells or modules |
| US12414402B1 (en) | 2025-01-03 | 2025-09-09 | Conti Innovation Center, Llc | Optimizing cadmium (CD) alloy solar cells with sputtered copper-dopped zinc telluride (ZNTE:CU) back contacts in the presence of hydrogen |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3903841A (en) | 1974-08-22 | 1975-09-09 | Gte Laboratories Inc | Vacuum holder in epitaxial growth apparatus |
| US4777153A (en) | 1986-05-06 | 1988-10-11 | Washington Research Foundation | Process for the production of porous ceramics using decomposable polymeric microspheres and the resultant product |
| JPS63215506A (ja) * | 1987-02-27 | 1988-09-08 | Sankusu Kk | 多結晶シリコンの製造方法 |
| JPH09506328A (ja) * | 1993-12-08 | 1997-06-24 | マサチューセッツ・インスティテュート・オブ・テクノロジー | 注型工具 |
| CN1387676A (zh) * | 1999-09-09 | 2002-12-25 | 联合讯号公司 | 用于集成电路平面化的改进装置和方法 |
| JP2001121413A (ja) * | 1999-10-21 | 2001-05-08 | Toshiba Mach Co Ltd | 平板状の被加工材の保持方法 |
| FR2807338B1 (fr) | 2000-04-11 | 2002-11-29 | Commissariat Energie Atomique | Paroi poreuse pour former une couche gazeuse de sustentation |
| JP2003054932A (ja) | 2001-08-23 | 2003-02-26 | Sharp Corp | 半導体基板の製造装置、半導体基板およびその製造方法ならびに太陽電池 |
| WO2004012257A1 (en) * | 2002-07-31 | 2004-02-05 | Astropower, Inc. | Method and apparatus for manufacturing net shape semiconductor wafers |
| US7407550B2 (en) * | 2002-10-18 | 2008-08-05 | Evergreen Solar, Inc. | Method and apparatus for crystal growth |
| NO326797B1 (no) * | 2005-06-10 | 2009-02-16 | Elkem As | Fremgangsmate og apparat for raffinering av smeltet materiale |
| US20070295385A1 (en) * | 2006-05-05 | 2007-12-27 | Nanosolar, Inc. | Individually encapsulated solar cells and solar cell strings having a substantially inorganic protective layer |
| US8633483B2 (en) * | 2007-06-26 | 2014-01-21 | Massachusetts Institute Of Technology | Recrystallization of semiconductor wafers in a thin film capsule and related processes |
| US7720321B2 (en) * | 2007-07-20 | 2010-05-18 | General Electric Company | Fiber optic sensor and method for making |
| US8062704B2 (en) * | 2007-08-02 | 2011-11-22 | Motech Americas, Llc | Silicon release coating, method of making same, and method of using same |
| JP5715579B2 (ja) * | 2009-03-09 | 2015-05-07 | 1366 テクノロジーズ インク. | 薄い半導体本体を溶融物質から作成するための方法及び装置 |
-
2011
- 2011-12-01 WO PCT/US2011/062914 patent/WO2012075306A2/en not_active Ceased
- 2011-12-01 CA CA2819144A patent/CA2819144C/en active Active
- 2011-12-01 US US13/990,498 patent/US9419167B2/en active Active
- 2011-12-01 CN CN201180066564.XA patent/CN103380481B/zh not_active Expired - Fee Related
- 2011-12-01 KR KR1020137017104A patent/KR101889858B1/ko not_active Expired - Fee Related
- 2011-12-01 JP JP2013542181A patent/JP5970469B2/ja not_active Expired - Fee Related
- 2011-12-01 SG SG2013037254A patent/SG190288A1/en unknown
- 2011-12-01 EP EP11845655.7A patent/EP2647032B1/en not_active Not-in-force
- 2011-12-01 TW TW100144314A patent/TWI667700B/zh not_active IP Right Cessation
- 2011-12-01 ES ES11845655.7T patent/ES2575382T3/es active Active
- 2011-12-01 MY MYPI2013001956A patent/MY180243A/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| EP2647032B1 (en) | 2016-03-09 |
| KR20130132514A (ko) | 2013-12-04 |
| EP2647032A4 (en) | 2014-07-09 |
| WO2012075306A3 (en) | 2013-07-25 |
| CA2819144C (en) | 2019-06-04 |
| TW201232642A (en) | 2012-08-01 |
| CN103380481B (zh) | 2018-04-06 |
| US20140113156A1 (en) | 2014-04-24 |
| JP2014507360A (ja) | 2014-03-27 |
| KR101889858B1 (ko) | 2018-08-20 |
| CA2819144A1 (en) | 2012-06-07 |
| EP2647032A2 (en) | 2013-10-09 |
| WO2012075306A2 (en) | 2012-06-07 |
| US9419167B2 (en) | 2016-08-16 |
| JP5970469B2 (ja) | 2016-08-17 |
| TWI667700B (zh) | 2019-08-01 |
| MY180243A (en) | 2020-11-25 |
| SG190288A1 (en) | 2013-06-28 |
| CN103380481A (zh) | 2013-10-30 |
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