JP2012516573A - 改良された結晶配向性を有する太陽光発電装置 - Google Patents
改良された結晶配向性を有する太陽光発電装置 Download PDFInfo
- Publication number
- JP2012516573A JP2012516573A JP2011548032A JP2011548032A JP2012516573A JP 2012516573 A JP2012516573 A JP 2012516573A JP 2011548032 A JP2011548032 A JP 2011548032A JP 2011548032 A JP2011548032 A JP 2011548032A JP 2012516573 A JP2012516573 A JP 2012516573A
- Authority
- JP
- Japan
- Prior art keywords
- transparent conductive
- conductive oxide
- layer
- power generation
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010248 power generation Methods 0.000 title claims abstract description 84
- 239000013078 crystal Substances 0.000 title claims description 17
- 239000004065 semiconductor Substances 0.000 claims abstract description 104
- 238000010521 absorption reaction Methods 0.000 claims abstract description 48
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 claims abstract description 19
- 238000004519 manufacturing process Methods 0.000 claims description 67
- 238000000137 annealing Methods 0.000 claims description 55
- 238000000034 method Methods 0.000 claims description 47
- 238000010438 heat treatment Methods 0.000 claims description 40
- 239000000758 substrate Substances 0.000 claims description 36
- 230000004888 barrier function Effects 0.000 claims description 22
- 238000004544 sputter deposition Methods 0.000 claims description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 10
- 229910001887 tin oxide Inorganic materials 0.000 claims description 10
- 229910052793 cadmium Inorganic materials 0.000 claims description 9
- 229940071182 stannate Drugs 0.000 claims description 9
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 claims description 8
- 229910052980 cadmium sulfide Inorganic materials 0.000 claims description 8
- 238000007740 vapor deposition Methods 0.000 claims description 8
- CXKCTMHTOKXKQT-UHFFFAOYSA-N cadmium oxide Inorganic materials [Cd]=O CXKCTMHTOKXKQT-UHFFFAOYSA-N 0.000 claims description 7
- CFEAAQFZALKQPA-UHFFFAOYSA-N cadmium(2+);oxygen(2-) Chemical compound [O-2].[Cd+2] CFEAAQFZALKQPA-UHFFFAOYSA-N 0.000 claims description 7
- 239000011521 glass Substances 0.000 claims description 7
- 229910003437 indium oxide Inorganic materials 0.000 claims description 7
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 7
- BNEMLSQAJOPTGK-UHFFFAOYSA-N zinc;dioxido(oxo)tin Chemical compound [Zn+2].[O-][Sn]([O-])=O BNEMLSQAJOPTGK-UHFFFAOYSA-N 0.000 claims description 7
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 6
- 229910052738 indium Inorganic materials 0.000 claims description 6
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 6
- 235000012239 silicon dioxide Nutrition 0.000 claims description 5
- 239000000377 silicon dioxide Substances 0.000 claims description 5
- 239000005361 soda-lime glass Substances 0.000 claims description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 183
- 239000000463 material Substances 0.000 description 9
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 3
- FJZMJOPKABSQOK-UHFFFAOYSA-N cadmium(2+) disulfide Chemical compound [S--].[S--].[Cd++].[Cd++] FJZMJOPKABSQOK-UHFFFAOYSA-N 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 229910052708 sodium Inorganic materials 0.000 description 3
- 239000011734 sodium Substances 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/138—Manufacture of transparent electrodes, e.g. transparent conductive oxides [TCO] or indium tin oxide [ITO] electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/12—Active materials
- H10F77/123—Active materials comprising only Group II-VI materials, e.g. CdS, ZnS or HgCdTe
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/20—Electrodes
- H10F77/244—Electrodes made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Photovoltaic Devices (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14827609P | 2009-01-29 | 2009-01-29 | |
| US61/148,276 | 2009-01-29 | ||
| PCT/US2010/021052 WO2010088059A1 (en) | 2009-01-29 | 2010-01-14 | Photovoltaic device with improved crystal orientation |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2012516573A true JP2012516573A (ja) | 2012-07-19 |
| JP2012516573A5 JP2012516573A5 (enExample) | 2014-03-27 |
Family
ID=42353175
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011548032A Pending JP2012516573A (ja) | 2009-01-29 | 2010-01-14 | 改良された結晶配向性を有する太陽光発電装置 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20100186815A1 (enExample) |
| EP (1) | EP2392025B1 (enExample) |
| JP (1) | JP2012516573A (enExample) |
| KR (1) | KR20110107402A (enExample) |
| CN (1) | CN102365707B (enExample) |
| AU (1) | AU2010208530A1 (enExample) |
| TW (1) | TW201034207A (enExample) |
| WO (1) | WO2010088059A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018509766A (ja) * | 2015-03-12 | 2018-04-05 | ビトロ、エセ.ア.ベ. デ セ.ウベ. | 光電子素子及びその製造方法 |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011068033A1 (en) | 2009-12-04 | 2011-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
| WO2011126709A2 (en) * | 2010-03-30 | 2011-10-13 | First Solar, Inc. | Doped buffer layer |
| US20120060923A1 (en) * | 2010-03-31 | 2012-03-15 | Zhibo Zhao | Photovoltaic device barrier layer |
| CN103180962B (zh) | 2010-08-13 | 2016-05-11 | 第一太阳能有限公司 | 具有氧化物层的光伏装置 |
| US20120042927A1 (en) * | 2010-08-20 | 2012-02-23 | Chungho Lee | Photovoltaic device front contact |
| CN103283031B (zh) | 2010-09-22 | 2016-08-17 | 第一太阳能有限公司 | 包含n型掺杂剂源的光伏装置 |
| US8354586B2 (en) | 2010-10-01 | 2013-01-15 | Guardian Industries Corp. | Transparent conductor film stack with cadmium stannate, corresponding photovoltaic device, and method of making same |
| SG188760A1 (en) * | 2011-09-20 | 2013-04-30 | Air Prod & Chem | Oxygen containing precursors for photovoltaic passivation |
| US9034686B2 (en) * | 2012-06-29 | 2015-05-19 | First Solar, Inc. | Manufacturing methods for semiconductor devices |
| US20140053895A1 (en) * | 2012-08-24 | 2014-02-27 | Rosestreet Labs, Llc | Intentionally-doped cadmium oxide layer for solar cells |
| US9698285B2 (en) | 2013-02-01 | 2017-07-04 | First Solar, Inc. | Photovoltaic device including a P-N junction and method of manufacturing |
| US11876140B2 (en) * | 2013-05-02 | 2024-01-16 | First Solar, Inc. | Photovoltaic devices and method of making |
| CN104183663B (zh) | 2013-05-21 | 2017-04-12 | 第一太阳能马来西亚有限公司 | 光伏器件及其制备方法 |
| US10062800B2 (en) | 2013-06-07 | 2018-08-28 | First Solar, Inc. | Photovoltaic devices and method of making |
| US10672925B2 (en) * | 2013-06-14 | 2020-06-02 | Taiwan Semiconductor Manufacturing Co., Ltd. | Thin film solar cell and method of forming same |
| US10529883B2 (en) | 2014-11-03 | 2020-01-07 | First Solar, Inc. | Photovoltaic devices and method of manufacturing |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5234391A (en) * | 1975-09-12 | 1977-03-16 | Hitachi Ltd | Production method of transparent electrode film |
| JPS63304520A (ja) * | 1987-06-04 | 1988-12-12 | Sumitomo Electric Ind Ltd | 透明電極の製造方法 |
| JPH03120763A (ja) * | 1989-10-04 | 1991-05-22 | Ricoh Co Ltd | 光電変換素子 |
| JPH10247625A (ja) * | 1997-03-04 | 1998-09-14 | Matsushita Denchi Kogyo Kk | CdTe膜の形成方法とそれを用いた太陽電池 |
| JP2000261013A (ja) * | 1999-03-09 | 2000-09-22 | Nippon Sheet Glass Co Ltd | 透明導電膜付きガラス基板 |
| JP2000357810A (ja) * | 1999-06-16 | 2000-12-26 | Matsushita Battery Industrial Co Ltd | テルル化カドミウム膜の製造方法および太陽電池 |
| JP2001504281A (ja) * | 1996-11-18 | 2001-03-27 | ミッドウエスト リサーチ インスティチュート | 光起電力装置とその製造方法 |
| JP2001118758A (ja) * | 1999-10-14 | 2001-04-27 | Sony Corp | 半導体素子の製造方法 |
| JP2001223376A (ja) * | 2000-02-10 | 2001-08-17 | Midwest Research Inst | 多結晶半導体薄膜太陽電池の製造方法およびその方法で製造された太陽電池 |
| JP2001237441A (ja) * | 2000-02-24 | 2001-08-31 | Matsushita Battery Industrial Co Ltd | 太陽電池の製造方法および太陽電池 |
| JP2002524882A (ja) * | 1998-09-08 | 2002-08-06 | ミッドウエスト リサーチ インスティチュート | 亜鉛スズ酸塩緩衝層を含む光電デバイスおよび製造方法 |
| JP2008277805A (ja) * | 2007-04-06 | 2008-11-13 | Semiconductor Energy Lab Co Ltd | 光起電力装置及びその製造方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4442824C1 (de) * | 1994-12-01 | 1996-01-25 | Siemens Ag | Solarzelle mit Chalkopyrit-Absorberschicht |
| US6137048A (en) * | 1996-11-07 | 2000-10-24 | Midwest Research Institute | Process for fabricating polycrystalline semiconductor thin-film solar cells, and cells produced thereby |
| AU2002248199A1 (en) * | 2001-12-13 | 2003-06-30 | Midwest Research Institute | Semiconductor device with higher oxygen (o2) concentration within window layers and method for making |
| US20070111367A1 (en) * | 2005-10-19 | 2007-05-17 | Basol Bulent M | Method and apparatus for converting precursor layers into photovoltaic absorbers |
| US8389852B2 (en) * | 2006-02-22 | 2013-03-05 | Guardian Industries Corp. | Electrode structure for use in electronic device and method of making same |
| US20090014055A1 (en) * | 2006-03-18 | 2009-01-15 | Solyndra, Inc. | Photovoltaic Modules Having a Filling Material |
| EP2286456A4 (en) * | 2008-05-01 | 2017-02-22 | First Solar, Inc | Transparent conductive materials including cadmium stannate |
-
2009
- 2009-12-28 TW TW098145293A patent/TW201034207A/zh unknown
-
2010
- 2010-01-14 US US12/687,697 patent/US20100186815A1/en not_active Abandoned
- 2010-01-14 AU AU2010208530A patent/AU2010208530A1/en not_active Abandoned
- 2010-01-14 WO PCT/US2010/021052 patent/WO2010088059A1/en not_active Ceased
- 2010-01-14 EP EP10736199.0A patent/EP2392025B1/en active Active
- 2010-01-14 KR KR1020117019848A patent/KR20110107402A/ko not_active Withdrawn
- 2010-01-14 CN CN201080014178.1A patent/CN102365707B/zh active Active
- 2010-01-14 JP JP2011548032A patent/JP2012516573A/ja active Pending
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5234391A (en) * | 1975-09-12 | 1977-03-16 | Hitachi Ltd | Production method of transparent electrode film |
| JPS63304520A (ja) * | 1987-06-04 | 1988-12-12 | Sumitomo Electric Ind Ltd | 透明電極の製造方法 |
| JPH03120763A (ja) * | 1989-10-04 | 1991-05-22 | Ricoh Co Ltd | 光電変換素子 |
| JP2001504281A (ja) * | 1996-11-18 | 2001-03-27 | ミッドウエスト リサーチ インスティチュート | 光起電力装置とその製造方法 |
| JPH10247625A (ja) * | 1997-03-04 | 1998-09-14 | Matsushita Denchi Kogyo Kk | CdTe膜の形成方法とそれを用いた太陽電池 |
| JP2002524882A (ja) * | 1998-09-08 | 2002-08-06 | ミッドウエスト リサーチ インスティチュート | 亜鉛スズ酸塩緩衝層を含む光電デバイスおよび製造方法 |
| JP2000261013A (ja) * | 1999-03-09 | 2000-09-22 | Nippon Sheet Glass Co Ltd | 透明導電膜付きガラス基板 |
| JP2000357810A (ja) * | 1999-06-16 | 2000-12-26 | Matsushita Battery Industrial Co Ltd | テルル化カドミウム膜の製造方法および太陽電池 |
| JP2001118758A (ja) * | 1999-10-14 | 2001-04-27 | Sony Corp | 半導体素子の製造方法 |
| JP2001223376A (ja) * | 2000-02-10 | 2001-08-17 | Midwest Research Inst | 多結晶半導体薄膜太陽電池の製造方法およびその方法で製造された太陽電池 |
| JP2001237441A (ja) * | 2000-02-24 | 2001-08-31 | Matsushita Battery Industrial Co Ltd | 太陽電池の製造方法および太陽電池 |
| JP2008277805A (ja) * | 2007-04-06 | 2008-11-13 | Semiconductor Energy Lab Co Ltd | 光起電力装置及びその製造方法 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018509766A (ja) * | 2015-03-12 | 2018-04-05 | ビトロ、エセ.ア.ベ. デ セ.ウベ. | 光電子素子及びその製造方法 |
| US10672920B2 (en) | 2015-03-12 | 2020-06-02 | Vitro Flat Glass Llc | Article with buffer layer |
| US10672921B2 (en) | 2015-03-12 | 2020-06-02 | Vitro Flat Glass Llc | Article with transparent conductive layer and method of making the same |
| US10680123B2 (en) | 2015-03-12 | 2020-06-09 | Vitro Flat Glass Llc | Article with transparent conductive oxide coating |
Also Published As
| Publication number | Publication date |
|---|---|
| AU2010208530A1 (en) | 2011-08-18 |
| EP2392025A1 (en) | 2011-12-07 |
| EP2392025A4 (en) | 2012-07-11 |
| TW201034207A (en) | 2010-09-16 |
| KR20110107402A (ko) | 2011-09-30 |
| WO2010088059A1 (en) | 2010-08-05 |
| EP2392025B1 (en) | 2013-09-04 |
| CN102365707B (zh) | 2015-02-04 |
| CN102365707A (zh) | 2012-02-29 |
| US20100186815A1 (en) | 2010-07-29 |
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