JP2017526164A - 改良されたフロント接点ヘテロ接合処理 - Google Patents
改良されたフロント接点ヘテロ接合処理 Download PDFInfo
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- JP2017526164A JP2017526164A JP2016571749A JP2016571749A JP2017526164A JP 2017526164 A JP2017526164 A JP 2017526164A JP 2016571749 A JP2016571749 A JP 2016571749A JP 2016571749 A JP2016571749 A JP 2016571749A JP 2017526164 A JP2017526164 A JP 2017526164A
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- Prior art keywords
- silicon layer
- receiving surface
- light receiving
- polycrystalline silicon
- layer
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 129
- 239000000758 substrate Substances 0.000 claims abstract description 64
- 238000000034 method Methods 0.000 claims abstract description 58
- 238000004519 manufacturing process Methods 0.000 claims abstract description 18
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 47
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 23
- 229910052710 silicon Inorganic materials 0.000 claims description 23
- 239000010703 silicon Substances 0.000 claims description 23
- 238000000137 annealing Methods 0.000 claims description 19
- 238000009792 diffusion process Methods 0.000 claims description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 12
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 12
- 238000005229 chemical vapour deposition Methods 0.000 claims description 11
- 239000013078 crystal Substances 0.000 claims description 10
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 10
- 238000000151 deposition Methods 0.000 claims description 9
- 230000003647 oxidation Effects 0.000 claims description 9
- 238000007254 oxidation reaction Methods 0.000 claims description 9
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 8
- 239000000126 substance Substances 0.000 claims description 6
- 229910021419 crystalline silicon Inorganic materials 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 230000008569 process Effects 0.000 abstract description 13
- 230000008901 benefit Effects 0.000 description 6
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- 229920005591 polysilicon Polymers 0.000 description 6
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- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 238000013459 approach Methods 0.000 description 3
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
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- 238000007747 plating Methods 0.000 description 2
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- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000010420 art technique Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
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- 230000008025 crystallization Effects 0.000 description 1
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- 230000001419 dependent effect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
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- 239000002019 doping agent Substances 0.000 description 1
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- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 229910021424 microcrystalline silicon Inorganic materials 0.000 description 1
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- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
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- 229910052698 phosphorus Inorganic materials 0.000 description 1
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
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- 229910052709 silver Inorganic materials 0.000 description 1
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Abstract
Description
本出願は、2014年9月5日に出願された米国仮特許出願第62/046,717号の利益を主張するものであり、同仮特許出願の内容全体が参照により本明細書に組み込まれる。
[項目1]
太陽電池の製造方法であって、
第1の受光面及び第2の受光面を有する基板を用意する工程と、
上記第1の受光面及び上記第2の受光面のうちの一方又は両方をテクスチャ化する工程と、
上記第1の受光面上に及び上記第2の受光面上にトンネル誘電体層を形成する工程と、
上記第1の受光面上の上記トンネル誘電体層の部分上にN型非晶質シリコン層を形成し、上記第2の受光面上の上記トンネル誘電体層の部分上にP型非晶質シリコン層を形成する工程と、
上記N型非晶質シリコン層及び上記P型非晶質シリコン層をアニールして、N型多結晶シリコン層及びP型多結晶シリコン層をそれぞれ形成する工程と、
上記N型多結晶シリコン層上に及び上記P型多結晶シリコン層上に透明導電性酸化物層を形成する工程と、
上記N型多結晶シリコン層上の上記透明導電性酸化物層の上記部分上に第1の組の導電性接点を形成し、上記P型多結晶シリコン層上の上記透明導電性酸化物層の上記部分上に第2の組の導電性接点を形成する工程と
を含む、方法。
[項目2]
上記N型非晶質シリコン層及び上記P型非晶質シリコン層をアニールする工程は、摂氏凡そ900度を超す温度まで上記基板を加熱することを含む、項目1に記載の方法。
[項目3]
上記N型非晶質シリコン層及び上記P型非晶質シリコン層をアニールする工程は、得られた上記N型多結晶シリコン層及び上記P型多結晶シリコン層に結晶粒界を形成することを含む、項目1に記載の方法。
[項目4]
上記トンネル誘電体層を形成する工程は、上記第1の受光面及び上記第2の受光面の湿式化学酸化を行うことを含む、項目1に記載の方法。
[項目5]
上記トンネル誘電体層を形成する工程は、シリコン酸化物層を化学気相成長により堆積させることを含む、項目1に記載の方法。
[項目6]
上記N型非晶質シリコン層及び上記P型非晶質シリコン層をアニールする工程は、得られた上記P型多結晶シリコン層に隣接して上記基板にP型拡散領域を形成することを含み、得られた上記N型多結晶シリコン層に隣接して上記基板にN型拡散領域を形成することを含む、項目1に記載の方法。
[項目7]
上記第1の受光面及び上記第2の受光面のうちの一方又は両方をテクスチャ化する工程は、上記第1の受光面及び上記第2の受光面のうちの一方のみをテクスチャ化することを含む、項目1に記載の方法。
[項目8]
上記第1の受光面及び上記第2の受光面のうちの一方又は両方をテクスチャ化する工程は、上記第1の受光面及び上記第2の受光面の両方をテクスチャ化することを含む、項目1に記載の方法。
[項目9]
上記透明導電性酸化物層を形成する工程は、インジウム錫酸化物(ITO)の層を形成することを含む、項目1に記載の方法。
[項目10]
上記N型非晶質シリコン層を形成する工程は、N型非晶質シリコン層を化学気相成長により形成する工程を含み、上記P型非晶質シリコン層を形成する工程は、P型非晶質シリコン層を化学気相成長により形成することを含む、項目1に記載の方法。
[項目11]
項目1に記載の方法により製造された太陽電池。
[項目12]
第1の受光面及び第2の受光面を有する基板と、
上記第1の受光面上に及び上記第2の受光面上に配置されたトンネル誘電体層と、
上記第1の受光面上に配置された上記トンネル誘電体層の部分上に配置されたN型多結晶シリコン層であって、結晶粒界を含むN型多結晶シリコン層と、
上記第2の受光面上に配置された上記トンネル誘電体層の部分上に配置されたP型多結晶シリコン層であって、結晶粒界を含むP型多結晶シリコン層と、
上記N型多結晶シリコン層上及び上記P型多結晶シリコン層上に配置された透明導電性酸化物層と、
上記N型多結晶シリコン層上に配置された上記透明導電性酸化物層の上記部分上に配置された第1の組の導電性接点と、
上記P型多結晶シリコン層上に配置された上記透明導電性酸化物層の上記部分上に配置された第2の組の導電性接点とを備える太陽電池。
[項目13]
上記第1の受光面及び上記第2の受光面のうちの一方又は両方は、テクスチャ化されている、項目12に記載の太陽電池。
[項目14]
上記透明導電性酸化物層は、インジウム錫酸化物(ITO)の層である、項目12に記載の太陽電池。
[項目15]
上記基板は、単結晶シリコン基板であり、上記トンネル誘電体層は、シリコン酸化物層である、項目12に記載の太陽電池。
[項目16]
第1の受光面及び第2の受光面を有する基板と、
上記第1の受光面上に及び上記第2の受光面上に配置されたトンネル誘電体層と、
上記第1の受光面上に配置された上記トンネル誘電体層の部分上に配置されたN型多結晶シリコン層、及び上記N型多結晶シリコン層に隣接して上記基板に配置された対応するN型拡散領域と、
上記第2の受光面上に配置された上記トンネル誘電体層の上記部分上に配置されたP型多結晶シリコン層、及び上記P型多結晶シリコン層に隣接して上記基板に配置された対応するP型拡散領域と、
上記N型多結晶シリコン層上に及び上記P型多結晶シリコン層上に配置された透明導電性酸化物層と、
上記N型多結晶シリコン層上に配置された上記透明導電性酸化物層の上記部分上に配置された第1の組の導電性接点と、
上記P型多結晶シリコン層上に配置された上記透明導電性酸化物層の上記部分上に配置された第2の組の導電性接点とを備える太陽電池。
[項目17]
上記N型多結晶シリコン層は、結晶粒界を含み、上記P型多結晶シリコン層は、結晶粒界を含む、項目16に記載の太陽電池。
[項目18]
上記第1の受光面及び上記第2の受光面のうちの一方又は両方は、テクスチャ化されている、項目16に記載の太陽電池。
[項目19]
上記透明導電性酸化物層は、インジウム錫酸化物(ITO)の層である、項目16に記載の太陽電池。
[項目20]
上記基板は、単結晶シリコン基板であり、上記トンネル誘電体層は、シリコン酸化物層である、項目16に記載の太陽電池。
Claims (20)
- 太陽電池の製造方法であって、
第1の受光面及び第2の受光面を有する基板を用意する工程と、
前記第1の受光面及び前記第2の受光面のうちの一方又は両方をテクスチャ化する工程と、
前記第1の受光面上に及び前記第2の受光面上にトンネル誘電体層を形成する工程と、
前記第1の受光面上の前記トンネル誘電体層の部分上にN型非晶質シリコン層を形成し、前記第2の受光面上の前記トンネル誘電体層の部分上にP型非晶質シリコン層を形成する工程と、
前記N型非晶質シリコン層及び前記P型非晶質シリコン層をアニールして、N型多結晶シリコン層及びP型多結晶シリコン層をそれぞれ形成する工程と、
前記N型多結晶シリコン層上に及び前記P型多結晶シリコン層上に透明導電性酸化物層を形成する工程と、
前記N型多結晶シリコン層上の前記透明導電性酸化物層の前記部分上に第1の組の導電性接点を形成し、前記P型多結晶シリコン層上の前記透明導電性酸化物層の前記部分上に第2の組の導電性接点を形成する工程と
を含む、方法。 - 前記N型非晶質シリコン層及び前記P型非晶質シリコン層をアニールする工程は、摂氏凡そ900度を超す温度まで前記基板を加熱することを含む、請求項1に記載の方法。
- 前記N型非晶質シリコン層及び前記P型非晶質シリコン層をアニールする工程は、得られた前記N型多結晶シリコン層及び前記P型多結晶シリコン層に結晶粒界を形成することを含む、請求項1に記載の方法。
- 前記トンネル誘電体層を形成する工程は、前記第1の受光面及び前記第2の受光面の湿式化学酸化を行うことを含む、請求項1に記載の方法。
- 前記トンネル誘電体層を形成する工程は、シリコン酸化物層を化学気相成長により堆積させることを含む、請求項1に記載の方法。
- 前記N型非晶質シリコン層及び前記P型非晶質シリコン層をアニールする工程は、得られた前記P型多結晶シリコン層に隣接して前記基板にP型拡散領域を形成することを含み、得られた前記N型多結晶シリコン層に隣接して前記基板にN型拡散領域を形成することを含む、請求項1に記載の方法。
- 前記第1の受光面及び前記第2の受光面のうちの一方又は両方をテクスチャ化する工程は、前記第1の受光面及び前記第2の受光面のうちの一方のみをテクスチャ化することを含む、請求項1に記載の方法。
- 前記第1の受光面及び前記第2の受光面のうちの一方又は両方をテクスチャ化する工程は、前記第1の受光面及び前記第2の受光面の両方をテクスチャ化することを含む、請求項1に記載の方法。
- 前記透明導電性酸化物層を形成する工程は、インジウム錫酸化物(ITO)の層を形成することを含む、請求項1に記載の方法。
- 前記N型非晶質シリコン層を形成する工程は、N型非晶質シリコン層を化学気相成長により形成する工程を含み、前記P型非晶質シリコン層を形成する工程は、P型非晶質シリコン層を化学気相成長により形成することを含む、請求項1に記載の方法。
- 請求項1に記載の方法により製造された太陽電池。
- 第1の受光面及び第2の受光面を有する基板と、
前記第1の受光面上に及び前記第2の受光面上に配置されたトンネル誘電体層と、
前記第1の受光面上に配置された前記トンネル誘電体層の部分上に配置されたN型多結晶シリコン層であって、結晶粒界を含むN型多結晶シリコン層と、
前記第2の受光面上に配置された前記トンネル誘電体層の部分上に配置されたP型多結晶シリコン層であって、結晶粒界を含むP型多結晶シリコン層と、
前記N型多結晶シリコン層上及び前記P型多結晶シリコン層上に配置された透明導電性酸化物層と、
前記N型多結晶シリコン層上に配置された前記透明導電性酸化物層の前記部分上に配置された第1の組の導電性接点と、
前記P型多結晶シリコン層上に配置された前記透明導電性酸化物層の前記部分上に配置された第2の組の導電性接点とを備える太陽電池。 - 前記第1の受光面及び前記第2の受光面のうちの一方又は両方は、テクスチャ化されている、請求項12に記載の太陽電池。
- 前記透明導電性酸化物層は、インジウム錫酸化物(ITO)の層である、請求項12に記載の太陽電池。
- 前記基板は、単結晶シリコン基板であり、前記トンネル誘電体層は、シリコン酸化物層である、請求項12に記載の太陽電池。
- 第1の受光面及び第2の受光面を有する基板と、
前記第1の受光面上に及び前記第2の受光面上に配置されたトンネル誘電体層と、
前記第1の受光面上に配置された前記トンネル誘電体層の部分上に配置されたN型多結晶シリコン層、及び前記N型多結晶シリコン層に隣接して前記基板に配置された対応するN型拡散領域と、
前記第2の受光面上に配置された前記トンネル誘電体層の前記部分上に配置されたP型多結晶シリコン層、及び前記P型多結晶シリコン層に隣接して前記基板に配置された対応するP型拡散領域と、
前記N型多結晶シリコン層上に及び前記P型多結晶シリコン層上に配置された透明導電性酸化物層と、
前記N型多結晶シリコン層上に配置された前記透明導電性酸化物層の前記部分上に配置された第1の組の導電性接点と、
前記P型多結晶シリコン層上に配置された前記透明導電性酸化物層の前記部分上に配置された第2の組の導電性接点とを備える太陽電池。 - 前記N型多結晶シリコン層は、結晶粒界を含み、前記P型多結晶シリコン層は、結晶粒界を含む、請求項16に記載の太陽電池。
- 前記第1の受光面及び前記第2の受光面のうちの一方又は両方は、テクスチャ化されている、請求項16に記載の太陽電池。
- 前記透明導電性酸化物層は、インジウム錫酸化物(ITO)の層である、請求項16に記載の太陽電池。
- 前記基板は、単結晶シリコン基板であり、前記トンネル誘電体層は、シリコン酸化物層である、請求項16に記載の太陽電池。
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Also Published As
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TWI746424B (zh) | 2021-11-21 |
AU2015312128A1 (en) | 2017-01-05 |
CN106575678A (zh) | 2017-04-19 |
DE112015004071T5 (de) | 2017-05-18 |
AU2021202377A1 (en) | 2021-05-13 |
CN112701170A (zh) | 2021-04-23 |
KR20170048515A (ko) | 2017-05-08 |
TW201624742A (zh) | 2016-07-01 |
WO2016036668A1 (en) | 2016-03-10 |
US20160072000A1 (en) | 2016-03-10 |
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